Abstract: The purpose of the present invention is to provide a charged particle source that exhibits small energy dispersion for charged particle beams emitted under a high angular current density condition and allows stable acquisition of large charged particle currents even for a small light source diameter. The charged particle source according to the present invention has a spherical virtual cathode surface from which charged particles are emitted, and the virtual cathode surface for charged particles emitted from a first position on a tip end surface of an emitter and the virtual cathode surface for charged particles emitted from a second position on the tip end surface of the emitter match each other (see FIG. 4).

Abstract: An extreme ultraviolet radiation source apparatus includes a chamber including at least a droplet generator, a nozzle of the droplet generator, and a dry ice blasting assembly. The droplet generator includes a reservoir for a molten metal, and the nozzle has a first end connected to the reservoir and a second opposing end where molten metal droplets emerge from the nozzle. The dry ice blasting assembly includes a blasting nozzle, a blasting air inlet and a blaster carbon dioxide (CO2) inlet. The blasting nozzle is disposed inside the chamber. The blasting nozzle is arranged to direct a pressurized air stream and dry ice particles at the nozzle of the droplet generator.

Abstract: A device of detecting a current from a sensor is disclosed. The device includes an integrating circuit including a network of capacitors for providing a gain setting and configured to convert the current to a voltage ramp over a length of integration time, the integrating circuit further including a reset switch configured to connect an input and an output of the network of capacitors; an ADC configured to digitize the voltage ramp into a plurality of voltage samples; and a set of modules including an analyzing module configured to analyze the plurality of voltage samples to determine a slope of the voltage ramp; an outputting module configured to determine a magnitude of the current based on the slope of the voltage ramp and the gain setting; and a reconfiguring module that is configured to reconfigure the network of capacitors and reset the voltage ramp via the reset switch.

Abstract: Disclosed is an apparatus and method for analyzing an evolved gas, wherein the precision of detection of a gas component is improved without enlarging the apparatus. The apparatus includes a gas component evolving unit, a detection member for detecting the gas component, and a mixed gas channel for allowing a mixed gas containing the gas component and carrier gas to flow therethrough, and further includes a branch channel branched from the mixed gas channel, an inert gas channel for allowing an inert gas to flow therethrough, a first flow rate regulator for adjusting the flow rate of the carrier gas, a second flow rate regulator for adjusting the flow rate of the inert gas, and a flow rate control unit for controlling the second flow rate regulator such that the flow rate of the mixed gas guided to the detection member is a predetermined value.

Abstract: An analysis apparatus includes a stage on which an analysis sample as an analysis target and a first adjustment sample used for adjusting a focus are provided. A laser generation unit generates a laser beam for vaporizing the analysis sample or the first adjustment sample by irradiating the sample with the laser beam. A detection unit detects a signal intensity of an element of the analysis sample or the first adjustment sample vaporized by irradiation with the laser beam. A controller determines a focus position of the laser beam with respect to a front surface position of the first adjustment sample based on the signal intensity of the first adjustment sample, and performs a control such that the focus position of the laser beam corresponds with a front surface of the analysis sample.

Abstract: A charged particle beam apparatus that includes a magnetic lens having an electromagnetic coil composed of a pair of coils includes: a setting unit that sets a maximum current value that defines a maximum magnetomotive force of the magnetic lens based on an operation of a user; and a current control unit that controls a current to be supplied to each of the pair of coils within a current range corresponding to a set maximum current value so that thermal power consumed by the electromagnetic coil is maintained constant at thermal power corresponding to the set maximum current value.

Abstract: The present invention provides a charged particle beam apparatus capable of efficiently reducing the effect of a residual magnetic field when SEM observation is performed. The charged particle beam apparatus according to the present invention includes a first mode for passing a direct current to a second coil after turning off a first coil, and a second mode for passing an alternating current to the second coil after turning off the first coil.

Abstract: An ion detector that can detect either positive or negative ions comprises: an ion inlet comprising an ion focusing lens; a dynode having a surface configured to intercept, within a zone of interception, a stream of ions passing through the ion focusing lens, wherein a plane that is tangent to the dynode surface at the zone of interception is disposed at an angle to a line that passes through the center of the dynode surface and the center of the focusing lens; a scintillator having a surface that is configured to receive secondary electrons emitted from the zone of interception; a scintillator electrode affixed to the scintillator surface; a photodetector configured to receive photons emitted by the scintillator and to generate an electric signal in response thereto; and one or more power supplies electrically coupled to the focusing lens, the dynode, the scintillator electrode and the photodetector.

Abstract: There is provided a sample holder capable of reducing positional deviation of a cartridge in the heightwise direction of a sample. The sample holder includes the cartridge and a holder base having a mounting portion for the cartridge. The mounting portion includes a placement surface, a first tilted surface, and a rotary drive mechanism for imparting a rotary force to the cartridge. The cartridge includes an opposing first tilted surface opposite to the first tilted surface of the mounting portion. As the rotary drive mechanism imparts the rotary force to the cartridge, the first tilted surface of the cartridge is pressed against the first tilted surface of the mounting portion, whereby the cartridge is pressed against the placement surface.

Abstract: An apparatus and method for irradiating a fluid containing a material to be irradiated, comprising at least one irradiation chamber having at least one inlet port and outlet port, at least one fluid cooling chamber having at least one inlet port and outlet port, one or more UV radiation sources coupled to the irradiation chamber(s); and at least one heat exchange mechanism thermally coupled to the radiation source(s) and the cooling chamber(s). At least a portion of the interior surface of the cooling chamber(s) may comprise at least a portion of the exterior surface of the irradiation chamber(s) so the cooling chamber(s) is in fluid communication with the irradiation chamber(s).

Abstract: Provided is a charged particle beam system capable of reducing the force applied to a sample when a chuck device grips the sample. The charged particle beam system is typified by an electron microscope including a sample chamber, a sample exchange chamber connected to the sample chamber, a sample container capable of being removably attached in the sample exchange chamber, and a transport device for transporting the sample between the sample container and the sample exchange chamber. The transport device includes the chuck device for gripping the sample, a drive mechanism for moving the chuck device in a given direction, a mechanical driver for actuating the chuck device, and a power transmission mechanism for transmitting power of the mechanical driver to the chuck device. The power transmission mechanism includes a shaft and a resilient member that elastically deforms when a force in the given direction is applied to the shaft.

Abstract: A sterilizer may include: a first pipe having an inner wall with a light reflecting property; a second pipe disposed in the first pipe so as to pass fluid therethrough and formed of a light transmitting material; and a plurality of UV LEDs arranged on the inner wall of the first pipe and configured to irradiate sterilization UV light onto the fluid.

Abstract: Synchronized ion modification systems and techniques are described. An ion modifier can be used to modify a portion of ions that enter a drift chamber via a gate that controls entry of the ions to the drift chamber. A controller that is communicatively coupled to the ion modifier is configured to control the ion modifier to select a portion of the ion to be modified. In embodiments, the controller selects the portion based on a detector's previous response to other ions that are formed from a sample from which the ions were formed. The other ions, for example, correspond to ions that are associated with a peak in previous operation of a spectrometer.

Abstract: Provided are methods for determining the amount of lacosamide in a sample using mass spectrometry. The methods generally involve ionizing lacosamide in a sample and detecting and quantifying the amount of the ion to determine the amount of lacosamide in the sample.

Abstract: A radiation shielded vault structure includes a rigid outer structure comprising a plurality of rigid structural components that are interconnected at elongated joints to define an interior space. The structural components include a layer of lower atomic number (Z) material such as aluminum alloy and one or more layers of higher atomic number (Z) material titanium and/or tantalum. The vault structure may include radiation shield members extending along the elongated joints to provide radiation shielding at the elongated joints. The shield members comprise a higher atomic number (Z) material such as titanium or tantalum. The rigid structural components may comprise plate members that are interconnected along side edges thereof. End plates may be attached to the plate members to close off the interior space.

Abstract: The present disclosure relates to a system and method for automatic online monitoring of dimethyl sulfide in environment. The method may realize separation of water vapor and the substance to be detected in accordance with the adsorption phase equilibrium principle of substance, thus eliminating the influence of water vapor on detection. The disturbance of other substances in an environmental sample can be eliminated in accordance with the charge or proton transfer principle of molecule ion reaction. Automatic online sampling, preprocessing and sample injection units are configured using valves, numerically controlled motor-driven injectors, flow controllers and a peristaltic pump, so that continuous online detection of DMS in an environmental water sample (e.g., seawater, or lake water) or a gas sample (e.g., atmosphere) can be realized.

Abstract: This disclosure presents inventions for ionization, for example, for use in mass spectrometer devices and methods. In an embodiment, a device is provided for introduction of pulses of a first carrier gas into an ionization chamber and introduction of a second carrier gas into the ionization chamber. Electrodes in the chamber ionize the carrier gas and direct the ionized gas toward a sample for analysis. The second carrier gas can either assist in washing out the first carrier gas or may become ionized along with the first carrier gas to improve ionization of an analyte. In an embodiment, a method for producing ionized carrier gasses is provided.

Abstract: Apparatus, methods and instructions for disinfecting air. The apparatus may include, and the methods may involve, a fixture. The fixture may include a germicidal light source. The fixture may include a fan. The fan may circulate air through a volume into which the germicidal light source propagates germicidal light. The light source may be configured to emit, upward from a horizontal plane, a beam that, absent reflection off an environmental object, does not cross the horizontal plane. The apparatus may include a shield that prevents light from the light source from crossing the horizontal plane. The sensor may face upward from the horizontal plane. The sensor may face downward from the horizontal plane.

Abstract: A collimated electron beam is illuminated to a grounded metal mask such that patterns on the mask can be transferred to a substrate identically. In a preferred embodiment, a linear electron source can be provided for enhancing lithographic throughput. The metal mask is adjacent to the substrate, but does not contact with substrate.

Abstract: Provided herein are methods and systems for verifying a path in a monitored space, comprising transmitting a device identification (ID) of the mobile wireless device while the mobile wireless device moves through a monitored space, receiving one or more location certificates transmitted, in response to reception of the device ID, by one or more wireless transceivers deployed at a predefined location in the monitored space and having a limited transmission range, each location certificate comprising at least the device ID and a transceiver ID of the respective wireless transceiver, storing the one or more location certificates, and transmitting the one or more location certificates to one or more verification units configured to verify a path of the mobile wireless device in the monitored space estimated according to the predefined location of the one or more wireless transceivers identified by the transceiver ID extracted from the one or more location certificates.