Abstract: A wafer placement table includes: a ceramic substrate having a wafer placement surface at an upper surface, and incorporating an electrode; a cooling substrate which is bonded to a lower surface of the ceramic substrate, and in which a refrigerant flow path is formed; a power supply terminal connected to the electrode; and a power supply terminal hole vertically penetrating the cooling substrate and storing the power supply terminal. The power supply terminal hole intersects with the refrigerant flow path.

Abstract: An athletic performance data acquisition system comprises a sensor system configured to removably attach to an article of clothing worn by an athlete and one or more external devices. The sensor system comprises one or more sensors configured to measure one or more athletic performance parameters for the athlete and a computing unit configured to monitor and transmit the one or more athletic performance parameters. The one or more external devices is remote from the article of clothing and comprises a personal computing device. The sensor system is configured to store the one or more athletic performance parameters for later transmission to the one or more external devices. The personal computing device is configured to transmit the athletic performance parameters to a server system running a web service that enables users to do one or more of share and compare the one or more athletic performance parameters, socialize, and compete.

Abstract: An arc fault detection system senses current flow in a power source branch and in one or more load branches in an electrical system. Over a frequency range divided into a predetermined number of frequency bins, a controller records and tallies the branch having largest magnitude of power spectral density for each frequency bin. The branch having highest total tally is determined to be the branch in which the arc fault occurred and can then safely be isolated from the electrical system.

Abstract: The present invention relates to the technical field of leakage protection, in particular to a leakage current detection circuit and a device thereof. The connected S1 inductive terminal and the S2 inductive terminal can be signal-connected, and the driving module detects whether the S1 inductive terminal and the S2 inductive terminal are connected by a signal. There is a connection signal to judge whether there is leakage, and the drive module turns the switch module on or off to control whether the circuit breaker generates a circuit breaker signal, and then the main switch S can be disconnected when leakage occurs to ensure the safety of electricity use. There is no need to set up a transformer. Reduced volume, simple circuit structure, and easier production.

Abstract: Achieved is a load drive device capable of suppressing local concentration of temperature at the time of absorbing a counter electromotive force of an inductive load while suppressing a size of a power transistor. The load drive device includes a first transistor connected between a first control electrode and an inductive load. Further, the load drive device includes an active clamp circuit that becomes conductive when a terminal voltage of a second control electrode between the first transistor and the inductive load exceeds a threshold. Furthermore, the load drive device includes a second transistor connected to the second control electrode and connected in parallel to the first transistor.

Abstract: A clamp assembly is disclose, the clamp assembly comprising a clamp (50) configurable to clamp a support member (110) to a lower base surface (49) of the clamp by electrostatic adhesion, and an arrangement configurable to direct a gas to the lower base surface (49) of the clamp. The arrangement is configurable to humidify the gas by exposing the gas to a liquid. Also disclosed is a method of discharging a lower base surface of a clamp, The method comprises the steps of humidifying a gas by exposing the gas to a liquid, and directing the humidified gas to a lower base surface of the clamp.

Abstract: In some aspects of the present disclosure, an electrostatic discharge (ESD) protection circuit is disclosed. In some aspects, the ESD protection circuit includes a first transistor coupled to a pad, a second transistor coupled between the first transistor and ground, a stack of transistors coupled to the first transistor, and an ESD clamp coupled between the stack of transistors and the ground.

Abstract: A system suppresses extreme voltage surges induced on electric power lines due to transient electromagnetic energy disturbance from detonation of a nuclear weapon at high altitude generating an electromagnetic pulse (EMP) comprising E1, E2, and E3 pulses, geomagnetic disturbance, and intentional electromagnetic interference. Low voltage (LV) surge protection (SP) assemblies mounted at medium voltage (MV) inputs and LV outputs of the stacked converter cells of a solid-state transformer (SST) form SP of MV and LV electrical power grids interfaced by the SST. The SP assemblies utilize LV components to provide MV grid protection, shunting overcurrent to ground without interfering with the SST MV/LV grid segments isolation. The SP components are selected and coordinated to achieve predefined response at protection threshold voltage levels with current capacity mitigating complex components of HEMP. The hybrid SP communicates with SST control to react to a prolonged overvoltage/overcurrent fault condition.

Abstract: An electrostatic chuck device is provided in which the occurrence of cracking in a ceramic layer, the cracking being caused by a difference in thermal expansion between a substrate and a sleeve due to heat generated during formation of the ceramic layer, is suppressed. The electrostatic chuck device includes a substrate, a laminated body that is laminated on the substrate and that includes at least an internal electrode, and a ceramic layer that is laminated on the upper surface of the laminated body in the thickness direction. The electrostatic chuck device is such that the substrate has a through-hole provided so as to pass through in the thickness direction, a sleeve formed from an insulating material is inserted into the through-hole, and the sleeve is joined to the through-hole via a joining means at an upper portion of the substrate in the thickness direction.

Abstract: The aim of the invention is to detect an arc in an assembly for transmitting a direct voltage. This aim is achieved by a communication transformer having a primary winding and a secondary winding, the secondary winding being connected to a transmitting device, which is designed to impress a communication signal onto the secondary winding of the communication transformer, and the primary winding being connected to one of the direct voltage lines in order to feed a communication signal transformed by the communication transformer to one of the direct voltage lines. In order to detect, in the assembly, the arc signal caused by an arc, the secondary winding is connected to an arc detection unit, which is designed to detect an arc signal transformed by the communication transformer.

Abstract: The present disclosure provides a system, apparatus and method for providing rapid shutdown for photovoltaic power systems and provides a system, apparatus and method for providing arc sensing for photovoltaic power systems. An AC current can be put on the DC bus to control PV panel shutdown. Local mean decomposition can be used to sense arcing on the DC bus.

Abstract: Gate control of power semiconductor devices using reduced gate drivers is disclosed. A circuit breaker may include a multitude of transistors, such as insulated gate bipolar transistors (IGBTs), connected in series with one another. Each transistor may be connected to a respective gate resistor. Diodes may be connected between various gate resistors. One or more resistor-capacitor (RC) snubber circuits may be provided in parallel with one or more of the transistors. Likewise, one or more metal-oxide varistors (MOVs) may be connected in parallel to one or more of the transistors. A gate driver (e.g., a single gate drive) may be connected to the one or more diodes and an emitter of at least one of transistors.

Abstract: An installation fixture for needle is used to install needles of an electrostatic chuck, and includes: a positioning tray, detachably disposed on an outer base of the electrostatic chuck, the positioning tray being provided with installation holes, and the installation holes corresponding to installation positions of the needles of the electrostatic chuck; and an installation fixture, detachably installed in the installation hole to adjust the installation depth of the needle.

Abstract: A semiconductor integrated circuit includes an input terminal, a semiconductor circuit, and a surge protection circuit connected between the input terminal and the semiconductor circuit. The surge protection circuit includes a first clamping circuit, a second clamping circuit, and a first inductor. The first clamping circuit includes first and second diodes connected in series. The second clamping circuit includes third and fourth diodes connected in series. The first inductor is connected between a first node and a second node. The first node is between the first diode and the second diode and connected to the input terminal. The second node is between the third diode and the fourth diode and connected to the semiconductor circuit.

Abstract: A short-circuit protection apparatus includes a first detection branch, a second detection branch, and a controller. The first detection branch includes a first sampling resistor and a first sampling capacitor that is connected in parallel to the first sampling resistor. A difference between an absolute value of a second sampling voltage and an absolute value of a first sampling voltage is a first difference. The controller obtains a comparison result between an absolute value of a first sampling voltage at two terminals of the first sampling resistor and an absolute value of a second sampling voltage at two terminals of the second sampling resistor, and if a difference between the absolute value of the second sampling voltage and the absolute value of the first sampling voltage is a second difference and the second difference is less than the first difference, controls the target circuit to stop working.

Abstract: There is provided a to-be-protection circuit that is high in operation accuracy and that prevents overvoltage on a protected circuit. A protection circuit is configured to protect a to-be-protected circuit from overvoltage. The to-be-protected circuit is connected to an external output terminal. The protection circuit includes: a current path unit connected to the external output terminal and including at least one first element; a reference voltage generation unit which generates and outputs a reference voltage; and an amplifier circuit outputs a target voltage based on a difference between a first input voltage and a second input voltage. The amplifier circuit operates using the reference voltage as the first input voltage and using a feedback voltage based on the target voltage as the second input voltage, and outputs the target voltage to the current path unit.

Abstract: The present invention provides a fuse that can be easily manufactured and has an improved yield. A fuse includes an input terminal portion, a bus bar portion through which a current input from the input terminal portion flows, and a terminal portion connected to the bus bar portion through a fusible portion, where a fusible portion unit including the fusible portion and the terminal portion is provided in plurals, each of the fusible portion units is a separate body from the bus bar portion and is individually attached to the bus bar portion.

Abstract: A system for grounding a mask using a grounding component are provided. Some embodiments of the system include a grounding component comprising a base and an extension protruding from the base and comprising a conductive prong configured to contact a conductive layer of the mask. Some embodiments of the system include a plurality of conductive prongs configured to contact multiple positions of a conductive layer of the mask. Some other embodiments of the system include an extension comprising various shapes.

Abstract: The present disclosure provides a system, apparatus and method for providing rapid shutdown for photovoltaic power systems and provides a system, apparatus and method for providing arc sensing for photovoltaic power systems. An AC current can be put on the DC bus to control PV panel shutdown. Local mean decomposition can be used to sense arcing on the DC bus.

Abstract: Systems and methods are provided for releasing welded-shut contactors of a contactor system. An exemplary contactor system may include a contactor and a controller. The controller may be programmed to command a vibration across portions of the contactor as part of a weld release control strategy when the contactor is welded closed. The vibration may be achieved by repeatedly alternating between energizing and de-energizing a coil of the contactor in order to mechanically shock/vibrate a welded contact of the contactor.