Patents Examined by Fazli Erdem
  • Patent number: 11804545
    Abstract: A semiconductor device includes a semiconductor layer made of SiC. A transistor element having an impurity region is formed in a front surface portion of the semiconductor layer. A first contact wiring is formed on a back surface portion of the semiconductor layer, and defines one electrode electrically connected to the transistor element. The first contact wiring has a first wiring layer forming an ohmic contact with the semiconductor layer without a silicide contact and a second wiring layer formed on the first wiring layer and having a resistivity lower than that of the first wiring layer.
    Type: Grant
    Filed: August 25, 2021
    Date of Patent: October 31, 2023
    Assignee: ROHM CO., LTD.
    Inventors: Yuki Nakano, Ryota Nakamura
  • Patent number: 11798982
    Abstract: Methods may include providing a device structure including a well formed in an epitaxial layer, and forming a plurality of shielding layers in the device structure, wherein at least one shielding layer is formed between a pair of adjacent sacrificial gates of a plurality of sacrificial gates. The method may further include forming a contact over the at least one shielding layer, forming a fill layer over the contact, and forming a plurality of trenches into the device structure, wherein at least one trench of the plurality of trenches is formed between a pair of adjacent shielding layers of the plurality of shielding layers, and wherein the at least one trench of the plurality of trenches is defined in part by a sidewall of the fill layer. The method may further include forming a gate structure within the at least one trench of the plurality of trenches.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: October 24, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Qintao Zhang, Samphy Hong, Jason Appell, David J. Lee
  • Patent number: 11784049
    Abstract: A method for manufacturing an electronic device based on SiC includes forming a structural layer of SiC on a front side of a substrate. The substrate has a back side that is opposite to the front side along a direction. Active regions of the electronic device are formed in the structure layer, and the active regions are configured to generate or conduct electric current during the use of the electronic device. A first electric terminal is formed on the structure layer, and an intermediate layer is formed at the back side of the substrate. The intermediate layer is heated by a LASER beam in order to generate local heating such as to favor the formation of an ohmic contact of Titanium compounds. A second electric terminal of the electronic device is formed on the intermediate layer.
    Type: Grant
    Filed: March 3, 2021
    Date of Patent: October 10, 2023
    Assignee: STMicroelectronics S.r.l.
    Inventors: Simone Rascuna', Paolo Badala', Anna Bassi, Mario Giuseppe Saggio, Giovanni Franco
  • Patent number: 11776994
    Abstract: A silicon carbide MOSFET device and method for making thereof are disclosed. The silicon carbide MOSFET device comprises a substrate heavily doped with a first conductivity type and an epitaxial layer lightly doped with the first conductivity type. A body region of a second conductivity type opposite the first is formed in epitaxial layer and an accumulation mode region of the first conductivity type is formed in the body region and an inversion mode region of the second conductivity type formed in the body region. The accumulation mode region is located between the inversion mode region and a junction field effect transistor (JFET) region of the epitaxial layer.
    Type: Grant
    Filed: February 16, 2021
    Date of Patent: October 3, 2023
    Assignee: Alpha and Omega Semiconductor International LP
    Inventors: David Sheridan, Arash Salemi, Madhur Bobde
  • Patent number: 11777013
    Abstract: Embodiments herein describe techniques for a three dimensional transistor above a substrate. A three dimensional transistor includes a channel structure, where the channel structure includes a channel material and has a source area, a drain area, and a channel area between the source area and the drain area. A source electrode is coupled to the source area, a drain electrode is coupled to the drain area, and a gate electrode is around the channel area. An electrode selected from the source electrode, the drain electrode, or the gate electrode is in contact with the channel material on a sidewall of an opening in an inter-level dielectric layer or a surface of the electrode. The electrode is further in contact with the channel structure including the source area, the drain area, or the channel area. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: October 3, 2023
    Assignee: Intel Corporation
    Inventors: Abhishek Sharma, Willy Rachmady, Van H. Le, Jack T. Kavalieros, Gilbert Dewey, Matthew Metz
  • Patent number: 11756994
    Abstract: A semiconductor device includes a semiconductor base body, and a first main electrode and a second main electrode provided on the semiconductor base body. The semiconductor base body includes a drift region of a first conductivity type through which a main current flows, a column region of a second conductivity type arranged adjacent to the drift region in parallel to a current passage of the main current, a second electrode-connection region of the first conductivity type electrically connected to the second main electrode, and a low-density electric-field relaxation region of the first conductivity type having a lower impurity concentration than the drift region and arranged between the second electrode-connection region and the column region.
    Type: Grant
    Filed: September 14, 2022
    Date of Patent: September 12, 2023
    Assignees: NISSAN MOTOR CO., LTD., RENAULT S.A.S.
    Inventors: Toshiharu Marui, Tetsuya Hayashi, Keiichiro Numakura, Wei Ni, Ryota Tanaka, Keisuke Takemoto
  • Patent number: 11749626
    Abstract: An embodiment package comprises an integrated circuit die encapsulated in an encapsulant, a patch antenna over the integrated circuit die, and a dielectric feature disposed between the integrated circuit die and the patch antenna. The patch antenna overlaps the integrated circuit die in a top-down view. The thickness of the dielectric feature is in accordance with an operating bandwidth of the patch antenna.
    Type: Grant
    Filed: April 5, 2021
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hua Yu, Kai-Chiang Wu, Chung-Shi Liu, Shou Zen Chang, Chao-Wen Shih
  • Patent number: 11749784
    Abstract: A light emitting device includes a substrate; a first conductivity type semiconductor layer disposed on the substrate; a mesa; a transparent electrode; a contact electrode; a first insulating reflection layer; a first pad electrode and a second pad electrode; and a second insulating reflection layer. The first insulating reflection layer covers at least a portion of the light emitting structure, the transparent electrode and the contact electrode. The second insulating reflection layer is disposed on an opposite end of the substrate. The first and/or second insulating reflection layer have at least two regions which have different reflectivity properties.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: September 5, 2023
    Assignee: Seoul Viosys Co., Ltd.
    Inventors: Jin Woong Lee, Kyoung Wan Kim, Tae Jun Park, Sang Won Woo
  • Patent number: 11751482
    Abstract: A manufacturing method of a semiconductor device includes the following steps. A first inter-metal dielectric (IMD) layer is formed on a substrate. A cap layer is formed on the first IMD layer. A connection structure is formed on the substrate and penetrates the cap layer and the first IMD layer. A magnetic tunnel junction (MTJ) stack is formed on the connection structure and the cap layer. A patterning process is performed to the MTJ stack for forming a MTJ structure on the connection structure and removing the cap layer. A spacer is formed on a sidewall of the MTJ structure and a sidewall of the connection structure. A second IMD layer is formed on the first IMD layer and surrounds the MTJ structure. The dielectric constant of the first IMD layer is lower than the dielectric constant of the second IMD layer.
    Type: Grant
    Filed: November 3, 2022
    Date of Patent: September 5, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chen-Yi Weng, Jing-Yin Jhang, Hui-Lin Wang, Chin-Yang Hsieh
  • Patent number: 11739899
    Abstract: Provided is a lighting device, comprising: a light source module comprising: at least one light source disposed on a printed circuit board; and a resin layer disposed on the printed circuit board so that the light source is embedded; a light reflection member formed on at least any one of one side surface and another side surface of the resin layer; and a diffusion plate having an upper surface formed on the light source module, and a side wall which is integrally formed with the upper surface and formed to extend in a lower side direction and which is adhered onto the light reflection member, wherein a first separated space is formed between the light source module and the upper surface of the diffusion plate, whereby flexibility of the product itself can be secured, and durability and reliability of the product can be also improved.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: August 29, 2023
    Assignee: LG INNOTEK CO., LTD.
    Inventors: Kwang Ho Park, Chui Hong Kim, Hyun Duck Yang, Moo Ryong Park, Jun Chul Hyun
  • Patent number: 11742423
    Abstract: A laterally double-diffused metal oxide semiconductor device is provided, including: a drift region (3) having a first conductivity type; a first body region (10) disposed on the drift region (3) and having a second conductivity type, the first conductivity type and the second conductivity type being opposite conductivity types; a first conductivity type region (13) disposed in the first body region (10); a second body region (12) disposed in the first conductivity type region (13) and having the second conductivity type; a source region (11) disposed in the second body region (12) and having the first conductivity type; and a contact region (9) disposed in the first body region (10) and having the second conductivity type.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: August 29, 2023
    Assignees: SOUTHEAST UNIVERSITY, CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Jing Zhu, Guichuang Zhu, Nailong He, Sen Zhang, Shaohong Li, Weifeng Sun, Longxing Shi
  • Patent number: 11728386
    Abstract: A semiconductor device of embodiments includes a silicon carbide layer including an element region and a termination region around the element region, the termination region having first straight-line portions extending in a first direction, second straight-line portions extending in a second direction, and corner portions between the first straight-line portions and the second straight-line portions, the termination region including a second-conductivity-type second silicon carbide region having a dot-line shape with first dot portions and first space portions surrounding the element region, an occupation ratio of the first dot portions is larger in the corner portions than in the first straight-line portions, and a second-conductivity-type third silicon carbide region having a dot-line shape with second dot portions and second space portions surrounding the second silicon carbide region, an occupation ratio of the second dot portions is lager in the corner portions than in the first straight-line portions.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: August 15, 2023
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventors: Hiroshi Kono, Souzou Kanie, Shigeto Fukatsu, Takuma Suzuki
  • Patent number: 11728423
    Abstract: Transistor device and method of making thereof comprising a substrate heavily doped with a first conductivity type and an epitaxial layer lightly doped with the first conductivity type on top of the substrate. A body region doped with a second conductivity type is formed in the epitaxial layer wherein the second conductivity type is opposite the first conductivity type and a source region doped with the first conductivity type is formed in the body region of the epitaxial layer. An integrated planar-trench gate having a planar gate portion is formed on the surface of the epitaxial layer that is contiguous with a gate trench portion formed in the epitaxial layer.
    Type: Grant
    Filed: April 22, 2021
    Date of Patent: August 15, 2023
    Assignee: ALPHA AND OMEGA SEMICONDUCTOR INTERNATIONAL LP
    Inventors: Wenjun Li, Lingpeng Guan, Jian Wang, Lingbing Chen
  • Patent number: 11715771
    Abstract: Provided is a semiconductor device comprising a semiconductor substrate, wherein the semiconductor substrate includes a hydrogen containing region including hydrogen, and the hydrogen containing region includes a high concentration region with a higher carrier concentration than a virtual carrier concentration determined based on a concentration of hydrogen included and an activation ratio of hydrogen. The semiconductor substrate includes an N type drift region, an N type emitter region that has a higher carrier concentration than that in the drift region, a P type base region, a P type collector region provided to be in contact with a lower surface of the semiconductor substrate, and an N type buffer region that is provided between the collector region and the drift region, and has a higher carrier concentration than that in the drift region, and the hydrogen containing region is included in the buffer region.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: August 1, 2023
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yoshiharu Kato, Toru Ajiki, Tohru Shirakawa, Misaki Takahashi, Kaname Mitsuzuka, Takashi Yoshimura, Yuichi Onozawa, Hiroshi Takishita, Soichi Yoshida
  • Patent number: 11699749
    Abstract: An electronic circuit having a semiconductor device is provided that includes a heterostructure, the heterostructure including a first layer of a compound semiconductor to which a second layer of a compound semiconductor adjoins in order to form a channel for a 2-dimensional electron gas (2DEG), wherein the 2-dimensional electron gas is not present. In aspects, an electronic circuit having a semiconductor device is provided that includes a III-V heterostructure, the III-V heterostructure including a first layer including GaN to which a second layer adjoins in order to form a channel for a 2-dimensional electron gas (2DEG), and having a purity such that the 2-dimensional electron gas is not present. It is therefore advantageous for the present electronic circuit to be enclosed such that, in operation, no light of wavelengths of less than 400 nm may reach the III-V heterostructure and free charge carriers may be generated by these wavelengths.
    Type: Grant
    Filed: July 11, 2019
    Date of Patent: July 11, 2023
    Assignees: NAMLAB GGMBH, TECHNISCHE UNIVERSITÄT DRESDEN
    Inventors: Stefan Schmult, Andre Wachowiak, Alexander Ruf
  • Patent number: 11699727
    Abstract: Provided is a semiconductor device including: a drift region of first conductivity type provided in a semiconductor substrate; a base region of second conductivity type provided in the semiconductor substrate; an emitter region of first conductivity type provided at a front surface of the semiconductor substrate; a contact region of second conductivity type provided on the base region and having a higher doping concentration than the base region; a contact trench portion provided at the front surface of the semiconductor substrate; a first barrier layer provided at a side wall and a bottom surface of the contact trench portion; and a second barrier layer provided in contact with the contact region at the side wall of the contact trench portion.
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: July 11, 2023
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Makoto Shimosawa, Takeyoshi Nishimura
  • Patent number: 11695060
    Abstract: Disclosed herein are methods for forming MOSFETs. In some embodiments, a method may include providing a device structure including a plurality of trenches, and forming a mask over the device structure including within each of the plurality of trenches and over a top surface of the device structure. The method may further include removing the mask from within the trenches, wherein the mask remains along the top surface of the device structure, and implanting the device structure to form a treated layer along a bottom of the trenches. In some embodiments, the method may further include forming a gate oxide layer along a sidewall of each of the trenches and along the bottom of the trenches, wherein a thickness of the oxide along the bottom of the trenches is greater than a thickness of the oxide along the sidewall of each of the trenches.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: July 4, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Qintao Zhang, Samphy Hong, Wei Zou, Lei Zhong, David J. Lee, Felix Levitov
  • Patent number: 11696442
    Abstract: A vertical memory device includes gate electrodes on a substrate, a channel extending through the gate electrodes, and a contact plug extending through the gate electrodes. The gate electrodes are stacked in a first direction substantially vertical to an upper surface of the substrate and arranged to have a staircase shape including steps of which extension lengths in a second direction substantially parallel to the upper surface gradually increase from a lowermost level toward an uppermost level. A pad at an end portion of each of the gate electrodes in the second direction has a thickness greater than those of other portions thereof. The channel extends in the first direction. The contact plug extends in the first direction. The channel contacts the pad of a first gate electrode among the gate electrodes to be electrically connected thereto, and is electrically insulated from second gate electrodes among the gate electrodes.
    Type: Grant
    Filed: August 12, 2020
    Date of Patent: July 4, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young-Hwan Son, Kohji Kanamori, Shin-Hwan Kang, Young Jin Kwon
  • Patent number: 11682694
    Abstract: An embodiment relates to a method and manufacture of robust, high-performance devices. The method comprises preparing a unit cell of a Silicon Carbide (SiC) substrate comprising a first conductivity type substrate and a first conductivity type drift layer; forming a second conductivity type well region; forming a first conductivity type source region within the second conductivity type well region; and forming a second conductivity type shield region surrounding the first conductivity type source region. The second conductivity type shield region formed comprises a portion of the second conductivity type shield region located on a SiC surface.
    Type: Grant
    Filed: February 22, 2022
    Date of Patent: June 20, 2023
    Assignee: GeneSiC Semiconductor Inc.
    Inventors: Siddarth Sundaresan, Ranbir Singh, Jaehoon Park
  • Patent number: 11682722
    Abstract: The present disclosure describes vertical transistor device and methods of making the same. The vertical transistor device includes substrate layer of first conductivity type, drift layer of first conductivity type formed over substrate layer, body region of second conductivity type extending vertically into drift layer from top surface of drift layer, source region of first conductivity type extending vertically from top surface of drift layer into body region, dielectric region including first and second sections formed over top surface, buried channel region of first conductivity type at least partially sandwiched between body region on first side and first and second sections of dielectric region on second side opposite to first side, gate electrode formed over dielectric region, and drain electrode formed below substrate layer. Dielectric region laterally overlaps with portion of body region. Thickness of first section is uniform and thickness of second section is greater than first section.
    Type: Grant
    Filed: November 18, 2021
    Date of Patent: June 20, 2023
    Assignee: Monolithic Power Systems, Inc.
    Inventors: Vipindas Pala, Sudarsan Uppili