Patents Examined by George Eckert
  • Patent number: 6538290
    Abstract: A static protection device protects an internal circuit of a semiconductor device from surge voltages. An emitter terminal of the PNP transistor is connected to the input/output terminal, a collector terminal of the PNP transistor is connected to the ground terminal, and the base terminal is left open, to realize the static protection device. In this manner the reverse-biased protection can be maintained with respect to the internal circuit.
    Type: Grant
    Filed: January 27, 2000
    Date of Patent: March 25, 2003
    Assignee: Mitsumi Electric Co., Ltd.
    Inventors: Yasuhisa Ishikawa, Yukihiro Terada
  • Patent number: 6534830
    Abstract: A low impedance VDMOS semiconductor component having a planar gate structure is described. The VDMOS semiconductor component contains a semiconductor body of a first conductivity type having two main surfaces, including a first main surface and a second main surface disposed substantially opposite to one another. A highly doped first zone of the first conductivity type is disposed in an area of the first main surface. A second zone of a second conductivity type separates the first zone from the semiconductor body. The first zone and the second zone have a trench with a bottom formed therein reaching down to the semiconductor body. An insulating material fills the trench at least beyond an edge of the second zone facing the semiconductor body. A region of the second conductivity type surrounds an area of the bottom of the trench.
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: March 18, 2003
    Assignee: Infineon Technologies AG
    Inventors: Jenoe Tihanyi, Wolfgang Werner
  • Patent number: 6534864
    Abstract: A semiconductor memory device (SRAM) comprises memory cells, each of which includes two load transistors, two driver transistors and two transfer transistors. The SRAM cell includes a semiconductor substrate in which the transistors are formed, a first interlayer dielectric formed on the semiconductor substrate, first contact portions formed in the first interlayer dielectric and first wiring layers (node wiring layers and pad layers) formed on the first interlayer dielectric. The first contact portions and the first wiring layers include metal layers made of refractory metal and a refractory metal nitride layers. This semiconductor memory device of the present invention is capable of enhancing an integration degree of wiring layers and achieving a microfabrication.
    Type: Grant
    Filed: October 28, 1999
    Date of Patent: March 18, 2003
    Assignee: Seiko Epson Corporation
    Inventors: Kazuo Tanaka, Takashi Kumagai, Junichi Karasawa, Kunio Watanabe
  • Patent number: 6531777
    Abstract: A structure and method for determining barrier layer integrity for multi-level copper metallization structures in integrated circuit manufacturing. Novel testing structures prevent any conducting residues of the copper CMP from diffusing into the dielectric layer. Barrier layer integrity is tested by performing leakage or other electrical measurements between copper features on two different metal levels.
    Type: Grant
    Filed: June 22, 2000
    Date of Patent: March 11, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Christy Mei-Chu Woo, Amit P. Marathe
  • Patent number: 6531728
    Abstract: An etching method includes providing a first insulating material layer on a substrate assembly surface and a second insulating material layer on the first insulating material layer. The first insulating material layer has an etch rate that is greater than the etch rate of the second insulating material layer when exposed to an etch composition. Portions of the first insulating material layer and the second insulating material layer are removed using at least the etch composition. Various types of structures (e.g., contacts, capacitors) are formed with use of the method.
    Type: Grant
    Filed: May 23, 2001
    Date of Patent: March 11, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Scott J. DeBoer, Terry L. Gilton, Ceredig Roberts
  • Patent number: 6531731
    Abstract: Both a non-volatile memory (NVM) and a dynamic nanocrystal memory (DNM) are integrated on a semiconductor substrate. Control gates and control dielectrics with embedded nanocrystals or discrete storage elements are formed over differing thicknesses of tunnel dielectrics to form the two memories. Source and drain regions are formed within the semiconductor substrate adjacent to the tunnel dielectrics. Various methods can be used to form a thin tunnel oxide and a thick tunnel oxide by adding minimum processing steps.
    Type: Grant
    Filed: June 15, 2001
    Date of Patent: March 11, 2003
    Assignee: Motorola, Inc.
    Inventors: Robert E. Jones, Jr., Bruce E. White, Jr.
  • Patent number: 6528856
    Abstract: A method of forming a dielectric layer suitable for use as the gate dielectric layer of a metal-oxide-semiconductor field effect transistor (MOSFET) includes oxidizing the surface of a silicon substrate, forming a metal layer over the oxidized surface, and reacting the metal with the oxidized surface to form a substantially intrinsic layer of silicon superjacent the substrate, wherein at least a portion of the silicon layer may be an epitaxial silicon layer, and a metal oxide layer superjacent the silicon layer. In a further aspect of the present invention, an integrated circuit includes a plurality of MOSFETs, wherein various ones of the plurality of transistors have metal oxide gate dielectric layers and substantially intrinsic silicon layers subjacent the metal oxide dielectric layers.
    Type: Grant
    Filed: December 15, 1998
    Date of Patent: March 4, 2003
    Assignee: Intel Corporation
    Inventors: Gang Bai, David B. Fraser, Brian S. Doyle, Peng Cheng, Chunlin Liang
  • Patent number: 6528891
    Abstract: A flip chip assembly, and methods of forming the same, including a single or multi-layer substrate having a plurality of via holes which serve as the connection between the semiconductor device and substrate circuitry. The method of manufacturing the flip chip assembly includes the steps of attaching an integrated circuit (IC) chip having a plurality of input/output terminal pads to a rigid or flexible substrate having a plurality of via holes. The via holes are aligned with the terminal pads so that the respective traces on the substrate can be connected to the respective terminal pads through the via holes. After attachment, the pre-deposited solder inside the via holes or on the terminal pads is re-flowed. This re-flow soldering process electrically connects the IC chip to the substrate. The solder can be deposited by plating, wave soldering, meniscus coating, and screen printing techniques.
    Type: Grant
    Filed: May 10, 2001
    Date of Patent: March 4, 2003
    Inventor: Charles Wen Chyang Lin
  • Patent number: 6525389
    Abstract: A termination structure and reduced mask process for its manufacture for either a FRED device or any power semiconductor device comprises at least two concentric diffusion guard rings and two spaced silicon dioxide rings used in the definition of the two guard rings in an implant and drive system. A first metal ring overlies and contacts the outermost diffusion. A second metal ring which acts as a field plate contacts the second diffusion and overlaps the outermost oxide ring. A third metal ring, which acts as a field plate, is a continuous portion of the active area top contact and overlaps the second oxide ring. The termination is useful for high voltage (of the order of 1200 volt) devices. The rings are segments of a common aluminum or palladium contact layer. A thin high resistivity layer of amorphous silicon is deposited over the full upper surface of the wafer and is disposed between the wafer upper surface and all of the metal rings.
    Type: Grant
    Filed: February 22, 2000
    Date of Patent: February 25, 2003
    Assignee: International Rectifier Corporation
    Inventor: Iftikhar Ahmed
  • Patent number: 6521943
    Abstract: Disclosed is a semiconductor device (e.g., nonvolatile semiconductor memory device) and method of forming the device. The device includes a gate electrode (e.g., floating gate electrode) having a first layer of an amorphous silicon film, or a polycrystalline silicon thin film or a film of a combination of amorphous and polycrystalline silicon, on the gate insulating film. Where the film includes polycrystalline silicon, the thickness of the film is less than 10 nm. A thicker polycrystalline silicon film can be provided on or overlying the first layer. The memory device can increase the write/erase current significantly without increasing the low electric field leakage current after application of stresses, which in turn reduces write/erase time substantially.
    Type: Grant
    Filed: March 7, 2000
    Date of Patent: February 18, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Toshiyuki Mine, Jiro Yugami, Takashi Kobayashi, Masahiro Ushiyama
  • Patent number: 6522004
    Abstract: In a semiconductor storage device, a line of lower-side backing wiring is provided on a line of gate wiring via an insulation layer, and a line of upper-side backing wiring is provided further on the top layer thereof via another insulation layer. Contacts between the gate wiring and upper-side backing wiring are distributed and arranged on two or more different lines extending in a vertical direction with respect to a direction to which the gate wiring extends, and any contacts adjacent to each other of the contacts are arranged on different lines. The lower-side backing wiring passes through between the adjacent contacts.
    Type: Grant
    Filed: January 28, 2000
    Date of Patent: February 18, 2003
    Assignee: Fujitsu Limited
    Inventor: Tsuyoshi Higuchi
  • Patent number: 6515345
    Abstract: A semiconductor component includes a semiconductor layer (210) and at least one diode (220) in the semiconductor layer. The semiconductor component also includes an electrically insulative layer (230) over the semiconductor layer and the diode. The semiconductor component further includes at least one more diode (240, 250, 280, 290, 440, 450) over the electrically insulative layer, the semiconductor layer, and the diode in the semiconductor layer.
    Type: Grant
    Filed: February 21, 2001
    Date of Patent: February 4, 2003
    Assignee: Semiconductor Components Industries LLC
    Inventors: Francine Y. Robb, Jeffrey Pearse
  • Patent number: 6515316
    Abstract: A HEMT device comprises a buffer layer disposed over a substrate. A partially-relaxed channel is disposed over the buffer layer and a barrier layer is disposed over the channel. A cap layer is disposed over the barrier layer and a gate is positioned on the barrier layer. A source and a drain are positioned on the barrier layer on opposite sides of the gate.
    Type: Grant
    Filed: July 14, 2000
    Date of Patent: February 4, 2003
    Assignee: TRW Inc.
    Inventors: Michael Wojtowicz, Tsung-Pei Chin, Michael E. Barsky, Ronald W. Grundbacher
  • Patent number: 6515373
    Abstract: In an integrated circuit structure, the improvement comprising a wire bonded Cu-pad with Cu-wire component, wherein the Cu-pad Cu-wire component is characterized by self-passivation, low resistance, high bond strength, and improved resistance to oxidation and corrosion, the Cu-pad Cu-wire component comprising: a metallization-line; a liner separating the metallization line and a Cu-alloy surrounding a Cu-pad; a dielectric surrounding the liner; and a Cu-pad bonded to a Cu-alloy wire; the Cu-wire component being characterized by self-passivation areas on: a) a dopant rich interface in between the Cu-alloy and liner; b) a surface of the Cu-pad; c) a surface of the bond between the Cu-pad and the Cu-alloy wire; and d) a surface of the Cu-alloy wire.
    Type: Grant
    Filed: December 28, 2000
    Date of Patent: February 4, 2003
    Assignee: Infineon Technologies AG
    Inventor: Hans-Joachim Barth
  • Patent number: 6509629
    Abstract: A control substrate is covered by an electromagnetic shielding member connected to a conductive base plate on which a power insulating substrate is placed. A conductive connecting member through which the electromagnetic shielding member and the conductive base plate are electrically connected to each other is inserted into a case. The control substrate and the electromagnetic shielding member are supported by the conductive connecting member.
    Type: Grant
    Filed: January 16, 2001
    Date of Patent: January 21, 2003
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Naoki Yoshimatsu, Takanobu Yoshida
  • Patent number: 6507114
    Abstract: A BOC (board-on-chip) semiconductor package includes a semiconductor die having die contacts, a substrate bonded circuit side down to the die, and an adhesive layer bonding the substrate to the die. The substrate includes a circuit side having a pattern of conductors and wire bonding sites, and a back side having an array of external contacts (e.g., BGA solder balls) in electrical communication with the conductors. The bonding sites on the conductors overhang the peripheral edges of the substrate such that access is provided for bonding wires to the bonding sites and to the die contacts. Because the substrate is bonded circuit side down to the die, a loop height of the wires, and an overall height (profile) of the package are reduced by a thickness of the substrate. In addition, a planarity of molded segments that encapsulate the wires is improved, and mold bleed during molding of the molded segments is reduced.
    Type: Grant
    Filed: January 30, 2001
    Date of Patent: January 14, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Chong Chin Hui, Lee Choon Kuan, Lee Kian Chai
  • Patent number: 6507061
    Abstract: A phase-change memory may be formed with at least two phase-change material layers separated by a barrier layer. The use of more than one phase-change layer enables a reduction in the programming volume while still providing adequate thermal insulation.
    Type: Grant
    Filed: August 31, 2001
    Date of Patent: January 14, 2003
    Assignee: Intel Corporation
    Inventors: Stephen J. Hudgens, Tyler A. Lowrey, Patrick J. Klersy
  • Patent number: 6501109
    Abstract: A structure of a new active pixel sensor cell formed in a semiconductor substrate is disclosed. An n-type region is formed in the substrate extending to the surface. Two p+ regions are formed in the n-type region, both extending to the surface and covering almost all the active area of the new active pixel sensor cell. The p+ region forming the p+ node of the photodiode has a substantially larger surface area than the p+ region forming the p+ node of the output diode. Isolation regions are formed over those portions of the new active pixel cell periphery that will not be adjacent to other new active pixel sensor cells. A polysilicon floating gate is disposed over a dielectric layer formed over the surface. The floating gate overlaps portions of both p+ regions and the floating gate is connected to photodiode p+ region by a conducting region passing through the dielectric layer.
    Type: Grant
    Filed: August 29, 2001
    Date of Patent: December 31, 2002
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventor: Min-Hwa Chi
  • Patent number: 6486524
    Abstract: A FRED device having an ultralow Irr employs a contact layer which contacts spaced P diffusions in an N type silicon substrate and also contacts the silicon surface spanning between the P diffusions. The contact layer is formed of a contact having a lower barrier height than the conventional aluminum, and is palladium silicide with a top contact layer of aluminum.
    Type: Grant
    Filed: February 22, 2000
    Date of Patent: November 26, 2002
    Assignee: International Rectifier Corporation
    Inventor: Iftikhar Ahmed
  • Patent number: 6114721
    Abstract: A DRAM device includes bit lines formed on an interlayer insulation film which covers gate electrodes on an insulation film on a semiconductor substrate. Each bit line is in contact with the corresponding source region formed in the substrate through an opening in the insulation films. Another insulation film is formed so as to cover the bit lines. A storage electrode is formed on the insulation film covering the bit line, and is in contact with a drain region in the substrate through another opening in the insulation films. The bit line has a vertical layer level lower than that of the storage electrode. The storage electrode is covered with a dielectric film, which is covered with an opposed electrode.
    Type: Grant
    Filed: August 30, 1999
    Date of Patent: September 5, 2000
    Assignee: Fujitsu Limited
    Inventor: Taiji Ema