Abstract: A method of controlling a droplet illumination module/droplet detection module system of an extreme ultraviolet (EUV) radiation source includes irradiating a target droplet with light from a droplet illumination module and detecting light reflected and/or scattered by the target droplet. The method includes determining whether an intensity of the detected light is within an acceptable range. In response to determining that the intensity of the detected light is not within the acceptable range, a parameter of the droplet illumination module is automatically adjusted to set the intensity of the detected light within the acceptable range.

Abstract: A germicidal lighting apparatus with visible glare includes a first light source, a second light source, a first driver, a second driver, and a controller. The first light source emits a light in a 180˜280 nm wavelength range and the second light source emits a light in a visible wavelength range greater than 400 nm. The second light source is positioned adjacent to the first light source and serves as a visible glare source to deter an occupant from looking at the apparatus directly. The controller can turn on both the first light source and the second light source simultaneously to produce a unified glare rating (UGR) greater than 16. The apparatus dispenses over a prorated 8-hour period an irradiation dosage greater than American Conference of Governmental Industrial Hygienists (ACGIH)-specified Eye Threshold Limit Values (TLV) but less than ACGIH-specified Skin TLV to a substance or surface.

Abstract: A Short-Wave Radiation (SWR) system comprising: (i) a light assembly, comprising at least one light source and being configured to: (a) illuminate a front side of an ionization target with first illumination; and (b) illuminate a back side of the ionization target with second illumination; (ii) a controller, configured to control the light assembly for illuminating the ionization target from the front side of the ionization target using the first illumination and at least partly concurrently illuminating the ionization target from the back side of the ionization target using the second illumination; and (iii) an optical assembly configured to collect SWR emitted from the front side of the ionization target and to direct the collected SWR toward a designated beam direction of the SWR system, wherein the SWR emitted from the front side results from a target illumination scheme that comprises at least the first illumination and the second illumination.

Abstract: An electron beam phase plate is provided where patterned radiation is provided to the phase plate to creates a corresponding electrical pattern, This electrical pattern provides a corresponding patterned modulation of the electron beam. Such modulation can be done in transmission or in reflection. This approach has numerous applications in electron microscopy, such as providing phase and/or amplitude shaping, aberration correction and providing phase contrast.

Abstract: Disclosed are an entangled state preparation method and device based on a superconducting quantum bit and a Rydberg atom. With the help of two strong microwave driving fields, an unconventional geometric quantum gate is achieved, as to complete the preparation of a maximum entangled state. The influence of a laser field and a magnetic field required by the Rydberg atom and a radiation-cooled superconducting coaxial cable on the coherence of the superconducting quantum bit may be reduced.

Abstract: A laser produced plasma light source comprises a vacuum chamber with a rotating target assembly supplying a target into an interaction zone with focused laser beam. The target is layer of a fluid and/or free-flowing target material on a surface of annular groove in the rotating target assembly. An output beam of short-wavelength radiation exits the interaction zone to an optical collector through the means for debris mitigation. A linear velocity of the target is not less than 100 m/s and a vector of the linear velocity of the target in the interaction zone is directed on one side of a plane passing through the interaction zone and the rotation axis while the focused laser beam and the output beam are located on another side of said plane. The optical collector comprises two ellipsoidal mirror units arranged in a tandem.

Abstract: A metal reuse system for an extreme ultra violet (EUV) radiation source apparatus includes a first metal collector for collecting metal from vanes of the EUV radiation source apparatus, a first metal storage coupled to the first metal collector via a first conduit, a metal droplet generator coupled to the first metal storage via a second conduit, and a first metal filtration device disposed on either one of the first conduit and the second conduit.

Abstract: A static water sterilization module is provided according to the present application, which includes a lamp holder, a light-transmitting plate, a lamp plate, a sterilization lamp, a first sealing ring, a clamping member and a waterproof potting adhesive. The light-transmitting plate is mounted on the lamp holder. The lamp plate is mounted in the lamp holder. The sterilization lamp is mounted on the lamp plate. An inner surface of the lamp plate, an inner surface of the light-transmitting plate and an inner wall of the lamp holder form a sealing chamber for mounting the sterilization lamp. The first sealing ring abuts against an outer surface of the lamp plate. The clamping member is configured to press the first sealing ring and the lamp plate. The waterproof potting adhesive is configured to encapsulate a base chamber between the outer surface of the lamp plate and the lamp holder.

Abstract: A compound and a method of detecting CLN3 are provided. The compound includes a heavy isotope labeled CLN3 proteotypic peptide. The method includes i) selecting a CLN3 proteotypic peptide that exhibits linear behavior in the mass spectrometer; ii) generating a stable isotope labeled standard; iii) spiking known amounts of the stable isotope labeled standard into a sample to form a spiked sample; iv) determining retention times and establishing calibration curves using the spiked sample; and v) detecting unlabeled selected CLN3 proteins in the sample.

Abstract: In an embodiment, a method includes: heating a byproduct transport ring of an extreme ultraviolet source, the byproduct transport ring disposed beneath vanes of the extreme ultraviolet source; after heating the byproduct transport ring for a first duration, heating the vanes; after heating the vanes, cooling the vanes; and after cooling the vanes for a second duration, cooling the byproduct transport ring.

Abstract: A plasma generating device includes: a chamber which is equipped with a dielectric wall structure and into which sample gas to be measured flows; an RF supplying mechanism that generates plasma inside the chamber using an electric field and/or a magnetic field through the dielectric wall structure; and a floating potential supplying mechanism that includes a first electrode disposed along an inner surface of the chamber. The RF supplying mechanism may include an RF field forming unit disposed in a first direction with respect to the chamber and the first electrode may include an electrode disposed in a second direction with respect to the chamber.

Abstract: In one embodiment, a method includes receiving measured linescan information describing a pattern structure of a feature, applying the received measured linescan information to an inverse linescan model that relates measured linescan information to feature geometry information, and identifying, based at least in part on the applying the received measured linescan model to the inverse linescan model, feature geometry information that describes a feature that would produce a linescan corresponding to the received measured linescan information. The method also includes determining, at least in part using the inverse linescan model, feature edge positions of the identified feature, analyzing the feature edge positions to determine errors in the manufacture of the pattern structure, and controlling a lithography tool based on the analysis of the feature edge positions.

Abstract: A quantum register can be read out using under-resolved emissions mapping (e.g., imaging). Regions of the quantum register are illuminated concurrently, one array site per region at a time, typically until all sites of each region have been illuminated. A photodetector system then detects for each region whether or not an EMR emission (e.g., due to fluorescence) has occurred in response to illumination of a respective site in that region. The result of the photo detections is a series of emissions maps, e.g., images. The number of emissions maps in the series corresponds to a number of sites per region, while the number of pixels in each image corresponds to a number of regions. A readout result can be based on a time-multiplexed combination of these emissions maps. The emissions maps are under-resolved since the resolution corresponds to the region size rather than the sizes of individual array sites.

Abstract: An integrated sample processing system including an analyzer and a mass spectrometer is disclosed. The integrated sample processing system can perform multiple different types of detection, thereby providing improved flexibility and better accuracy in processing samples. The detection systems in the sample processing system may include an optical detection system and a mass spectrometer.

Abstract: Molecular structure of a crystal may be solved based on at least two diffraction tilt series acquired from a sample. The two diffraction tilt series include multiple diffraction patterns of at least one crystal of the sample acquired at different electron doses. In some examples, the two diffraction tilt series are acquired at different magnifications.

Abstract: A flexible ion generator device that includes a dielectric layer having a first end, a second end, a first side, a second side, a top side, and a bottom side, at least one trace positioned on the dielectric layer and having a plurality of emitters engaged to the at least one trace. A plurality of lights disposed on the dielectric layer.

Abstract: A method for determining a center of a radiation spot irradiated on a surface by a sensor, the sensor including a radiation source and a detector. The method includes: emitting, with the radiation source, a first emitted radiation beam onto the surface to create the radiation spot on the surface, wherein at least a part of a target arranged at the surface is irradiated by the radiation spot; receiving, with the detector, a first reflected radiation beam at least including radiation from the radiation spot reflected by the target; detecting the presence of the target based on the first reflected radiation beam; determining a first measured position of the target based on the first reflected radiation beam; and determining a center of the radiation spot as projected on the surface in at least a first direction based on the first measured position of the target.

Abstract: Various embodiments provide methods, apparatuses, systems, or computer program products for performing decreased crosstalk atomic object reading/detection. A controller is operatively connected to components of a system comprising a confinement apparatus comprising RF electrodes defining an RF null axis and a plurality of longitudinal electrodes. The components comprise voltage sources and manipulation sources. The controller is configured to cause an atomic object being read and neighboring atomic object(s) to be confined by the confinement apparatus; and cause the voltage sources to provide first control signals to longitudinal electrodes. The first control signals cause the longitudinal electrodes to generate a push field configured to cause one of the atomic object being read or the neighboring atomic object(s) to move off the RF null axis.

Abstract: A shield for a syringe containing biohazardous material includes an elongate body comprising a compartment extending longitudinally therethrough from a body cold end to a body hot end, the compartment dimensioned to receive a syringe barrel; a cold end cover dimensioned to receive and enclose a syringe plunger extending beyond the body cold end, the cold end cover attachable at the body cold end for enclosing the compartment and the syringe plunger at the body cold end thereby to shieldingly contain the biohazardous material in the syringe at the body cold end; and a hot end cover attachable at the body hot end for at least enclosing the compartment at the body hot end thereby to shieldingly contain the biohazardous material in the syringe at the body hot end.

Abstract: A plasma generating device includes: a chamber which is equipped with a dielectric wall structure and into which sample gas to be measured flows; an RF supplying mechanism that generates plasma inside the chamber using an electric field and/or a magnetic field through the dielectric wall structure; and a floating potential supplying mechanism that includes a first electrode disposed along an inner surface of the chamber. The RF supplying mechanism may include an RF field forming unit disposed in a first direction with respect to the chamber and the first electrode may include an electrode disposed in a second direction with respect to the chamber.