Patents Examined by Jack Berman
  • Patent number: 9786481
    Abstract: A mass spectrometer or ion mobility spectrometer is disclosed comprising means for detecting a blockage in an inlet orifice arranged between an ion source and a vacuum chamber. The blockage is detected as a result of a reduction in pressure within the vacuum chamber. This change in pressure is detected indirectly by monitoring the amount of power that a vacuum pump is using, the amount of current that a vacuum pump is drawing, the temperature of a vacuum pump or a region in proximity to the vacuum pump, or the flow rate of gas out of a vacuum pump.
    Type: Grant
    Filed: September 17, 2014
    Date of Patent: October 10, 2017
    Assignee: Micromass UK Limited
    Inventors: David Gordon, Daniel James Kenny, Richard Barrington Moulds
  • Patent number: 9776017
    Abstract: A spot scanning (SS) ion therapy system configured for dynamic trimming of an ion particle pencil beam to reduce the amount of the radiation dosage outside of a target boundary.
    Type: Grant
    Filed: July 3, 2014
    Date of Patent: October 3, 2017
    Assignee: University of Iowa Research Foundation
    Inventors: Ryan Flynn, Daniel Hyer, Dongxu Wang, Patrick Hill, Yves Claereboudt
  • Patent number: 9772304
    Abstract: A method of mass spectrometry or ion mobility spectrometry is disclosed in which analyte ions of a desired charge state are isolated. The method comprises: separating analytes according to their electrophoretic mobility; ionizing the analytes; and mass filtering the resulting analyte ions, wherein the mass to charge ratios of the ions transmitted by a mass filter are varied as a function of the electrophoretic mobility and according to a predetermined relationship such that substantially only ions having said desired charge state are transmitted by the mass filter.
    Type: Grant
    Filed: December 1, 2014
    Date of Patent: September 26, 2017
    Assignee: Micromass UK Limited
    Inventors: Martin Raymond Green, Keith Richardson, Jason Lee Wildgoose
  • Patent number: 9773636
    Abstract: An apparatus to generate negative hydrogen ions. The apparatus may include an ion source chamber having a gas inlet to receive H2 gas; a light source directing radiation into the ion source chamber to generate excited H2 molecules having an excited vibrational state from at least some of the H2 gas; a low energy electron source directing low energy electrons into the ion source chamber, wherein H? ions are generated from at least some of the excited H2 molecules; and an extraction assembly arranged to extract the H? ions from the ion source chamber.
    Type: Grant
    Filed: August 20, 2015
    Date of Patent: September 26, 2017
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: W. Davis Lee, Neil Bassom, Anthony Renau
  • Patent number: 9764333
    Abstract: A method and apparatus are disclosed for exposing particles in a gas in order to cause the charge on the particles to change, the apparatus comprising a chamber having a conductive wall with a gas inlet and a gas outlet. An electrode with an exposed tip is in the chamber, the electrode being held at a different potential from the ground potential. The electrode is connected to a source of voltage sufficient to cause a corona discharge to occur forming ions in the chamber, and creating a region with a high electric field intensity and another region in which the electric field intensity is lower. The inlet and outlet define a gas flow path from the inlet to the outlet such that the gas flow path passes mainly through the region with the lower electric field intensity.
    Type: Grant
    Filed: October 12, 2010
    Date of Patent: September 19, 2017
    Assignee: MSP CORPORATION
    Inventors: William Dick, Francisco J. Romay, Benjamin Y. H. Liu
  • Patent number: 9768005
    Abstract: A device and method are disclosed to apply ESI-based mass spectroscopy to submicrometer and nanometer scale aerosol particles. Unipolar ionization is utilized to charge the particles in order to collect them electrostatically on the tip of a tungsten rod. Subsequently, the species composing the collected particles are dissolved by making a liquid flow over the tungsten rod. This liquid with dissolved aerosol contents is formed into highly charged droplets, which release unfragmented ions for mass spectroscopy, such as time-of-flight mass spectroscopy. The device is configured to operate in a switching mode, wherein aerosol deposition occurs while solvent delivery is turned off and vice versa.
    Type: Grant
    Filed: April 21, 2016
    Date of Patent: September 19, 2017
    Assignees: MSP Corporation, Regents of the University of Minnesota
    Inventors: Siqin He, Chris Hogan, Lin Li, Benjamin Y. H. Liu, Amir Naqwi, Francisco Romay
  • Patent number: 9741528
    Abstract: Disclosed is a charged particle optical apparatus, which includes a particle optical arrangement, configured to define a particle beam path for inspecting an object. The object is accommodated in a pressure-controlled interior of a specimen chamber during the inspection of the object. The charged particle optical apparatus further includes a differential pressure module having a differential pressure aperture. A positioning arm is arranged in the specimen chamber for selectively position the differential pressure module within the pressure-controlled interior of the specimen chamber into an operating position in which the particle beam path passes through the differential pressure aperture. The selective positioning includes an advancing movement of the differential pressure module toward the primary particle beam path. The advancing movement is transmitted to the differential pressure module by a track-guided movement of the positioning arm.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: August 22, 2017
    Assignee: CARL ZEISS MICROSCOPY GMBH
    Inventors: Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean, Erik Essers
  • Patent number: 9721773
    Abstract: This mass spectrometric device is provided with a sample container (8) for placing a measurement sample (12) therein, a detector (9) analyzing the mass of a sample and detecting a drug, or the like, in the sample, a dielectric container (3) linked to the sample container for running a discharge current into air to provoke ionization, a valve (2) for sending air intermittently to the sample container, the dielectric container and the detector, a barrier discharge high-voltage power source (6) to be discharged by the dielectric container, a current detection unit (5) connected to the barrier discharge high-voltage power source for detecting a discharge current (28), a discharge-start timing detection unit (7) connected to the current detection unit for detecting the discharge-start timing based on the current detection result from the current detection unit to send a discharge-start timing signal (17), and a control unit (11) for controlling each constituent.
    Type: Grant
    Filed: May 30, 2014
    Date of Patent: August 1, 2017
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Akio Yamamoto, Toshimitsu Watanabe, Shigeo Ootsuki, Kazuki Kajima, Toshiaki Yanokura
  • Patent number: 9721774
    Abstract: A mass spectrometer or ion mobility spectrometer is disclosed comprising: an ion block for receiving ions; a heater for heating the ion block; a vacuum housing; and an interface block arranged between the ion block and the vacuum housing; wherein the interface block is formed from a polymer. The polymer interface block inhibits the heat transfer from the ion block to the vacuum housing and also electrically isolates the ion block and vacuum housing. The interface block further comprises at least one conduit through the body of the interface block. This enables gas to be transmitted through the interface block to the ion block, and also enables the interface block to be cooled.
    Type: Grant
    Filed: September 17, 2014
    Date of Patent: August 1, 2017
    Assignee: Micromass UK Limited
    Inventors: Anthony Hess, Steve O'Brien, Ian Trivett
  • Patent number: 9704701
    Abstract: Methods and devices for ion separations or manipulations in gas phase are disclosed. The device includes a single non-planar surface. Arrays of electrodes are coupled to the surface. A combination of RF and DC voltages are applied to the arrays of electrodes to create confining and driving fields that move ions through the device. The DC voltages are static DC voltages or time-dependent DC potentials or waveforms.
    Type: Grant
    Filed: September 11, 2015
    Date of Patent: July 11, 2017
    Assignee: Battelle Memorial Institute
    Inventors: Yehia M. Ibrahim, Sandilya V. B. Garimella, Richard D. Smith
  • Patent number: 9697983
    Abstract: An electron beam device for inspecting a sample with an electron beam is described. The electron beam device includes an electron beam source including a thermal field emitter, which includes an emitter tip having an emission facet configured for electron emission, wherein the emission facet has an emission facet width; and a first side facet and a second side facet, wherein an edge facet is formed between the first side facet and the second side facet, which has an edge facet width. The edge facet width is between 20% and 40% of the emission facet width. The electron beam source further includes an extractor device; and a heating device for heating the thermal field emitter. The electron beam device further includes electron beam optics and a detector device for detecting secondary charged particles generated at an impingement or hitting of the primary electron beam on the sample.
    Type: Grant
    Filed: February 29, 2016
    Date of Patent: July 4, 2017
    Assignee: ICT Integrated Circuit Testing Gesellschaft f├╝r Halbleiterpr├╝ftechnik mbH
    Inventors: Stefan Lanio, Aleksandra Kramer, John Breuer
  • Patent number: 9693750
    Abstract: An evaluation aid is used as a phantom (imitation lesion) when a digital X-ray dynamic image thereof is taken and evaluated for image qualities for X-ray absorption parts having different X-ray absorption ratios. The evaluation aid contains a fixed plate (plate-like body) including a plurality of regions having different X-ray absorption ratios; a rotating disk (movable body) having a plurality of wires (wire rods), the rotating disk capable of rotating (moving) with respect to the fixed plate so that the plurality of wires traverse X-ray with which the fixed plate is irradiated; and a driving motor (driving portion) which rotates (moves) the rotating disk with respect to the fixed plate. It is preferred that thicknesses and/or constituent materials of the plurality of regions of the fixed plate are different from each other, so that these regions have the different X-ray absorption ratios.
    Type: Grant
    Filed: November 9, 2016
    Date of Patent: July 4, 2017
    Assignees: NATIONAL UNIVERSITY CORPORATION, TOHOKU UNIVERSITY, MITAYA MANFACTUING CO., LTD.
    Inventors: Koichi Chida, Yuji Kaga, Goro Yokouchi
  • Patent number: 9694209
    Abstract: A particle beam transport section comprises a horizontal deflection electromagnet which deflects a particle beam to a direction which is parallel to an accelerator median plane of a circular accelerator, a first perpendicular electromagnet which deflects a particle beam whose travelling direction is deflected by the horizontal deflection electromagnet to a direction which is different from a direction which is parallel to the accelerator median and a second perpendicular electromagnet which deflects the particle beam whose travelling direction is deflected by the first perpendicular deflection to a direction which is parallel to the accelerator median plane, wherein the horizontal deflection electromagnet is provided on a floor which is different from a floor where a particle beam irradiation unit is provided.
    Type: Grant
    Filed: August 29, 2013
    Date of Patent: July 4, 2017
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Toshihiro Otani, Syuhei Odawara
  • Patent number: 9697741
    Abstract: An apparatus used for training purposes contains an external casing, a primary shielding, a secondary shielding, and a control rod. The primary shielding and the secondary shielding are positioned within the external casing. The control rod and the secondary shield are used to adjust the radiation levels emitted from a radiation source placed within a hollow cylindrical portion of the control rod. A first rod receiving hole traverses the primary shielding. Likewise, a second rod receiving hole traverses the secondary shielding. The first rod receiving hole and the second rod receiving hole are concentrically aligned with a central receiving hole of the external casing to form a channel for the control rod to be slidably positioned.
    Type: Grant
    Filed: September 10, 2015
    Date of Patent: July 4, 2017
    Inventor: Travis D Snowder
  • Patent number: 9691594
    Abstract: A thermal analysis step, a molecule ionization step and a molecular structure analysis step are executed in parallel to a temperature increasing step. In the molecule ionization step, component molecules contained in gas evolved from a sample S due to temperature increase are ionized, and in the molecular structure analysis step, any selected ion out of molecular ions obtained in the molecule ionization step is dissociated to generate fragment ions corresponding to the structural factors of the molecule, and the structure of the molecule is analyzed on the basis of the fragment ions.
    Type: Grant
    Filed: June 27, 2014
    Date of Patent: June 27, 2017
    Assignee: RIGAKU CORPORATION
    Inventors: Tadashi Arii, Koichi Matsushima, Satoshi Otake
  • Patent number: 9685301
    Abstract: The present invention provides a charged-particle radiation apparatus with a defect observation device for observing defects on a sample, the apparatus including a control unit and a display unit. The control unit is configured to execute a drift correction process on one or more images acquired with the defect observation device under a plurality of correction conditions, and display the plurality of correction conditions and a plurality of corrected images obtained through execution of the drift correction process in association with each other, as a first screen on the display unit.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: June 20, 2017
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Takehiro Hirai, Ryo Nakagaki, Kenji Obara
  • Patent number: 9678432
    Abstract: An optical system has a light source having an original etendue of less than 0.1 mm2 for an illumination system for projection lithography. An optical assembly serves for simultaneously increasing the etendue of a used emission of the light source. The optical assembly is embodied such that an increase in the etendue by at least a factor of 10 results. A component of the optical assembly that is impinged on is displaced relative to the light source such that an impingement region of the emission of the light source on the optical component of the optical assembly varies temporally.
    Type: Grant
    Filed: August 18, 2015
    Date of Patent: June 13, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ingo Saenger, Christoph Hennerkes
  • Patent number: 9679745
    Abstract: Provided herein are approaches for controlling an ion beam within an accelerator/decelerator. In an exemplary approach, an ion implantation system includes an ion source for generating an ion beam, and a terminal suppression electrode coupled to a terminal, wherein the terminal suppression electrode is configured to conduct the ion beam through an aperture of the terminal suppression electrode and to apply a first potential to the ion beam from a first voltage supply. The system further includes a lens coupled to the terminal and disposed adjacent the terminal suppression electrode, wherein the lens is configured to conduct the ion beam through an aperture of the lens and to apply a second potential to the ion beam from a second voltage supply. In an exemplary approach, the lens is electrically insulated from the terminal suppression electrode and independently driven, thus allowing for an increased beam current operation range.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: June 13, 2017
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Shengwu Chang, Kristen Rounds, William Leavitt, Daniel Brosnan
  • Patent number: 9673034
    Abstract: A mass spectrometer is disclosed comprising a time of flight mass analyzer. The time of flight mass analyzer comprises an ion guide comprising a plurality of electrodes which are interconnected by a series of resistors forming a potential divider. Ions are confined radially within the ion guide by the application of a two-phase RF voltage to the electrodes. A single phase additional RF voltage is applied across the potential divider so that an inhomogeneous pseudo-potential force is maintained along the length of the ion guide.
    Type: Grant
    Filed: February 12, 2016
    Date of Patent: June 6, 2017
    Assignee: Micromass UK Limited
    Inventors: Martin Raymond Green, Jason Lee Wildgoose
  • Patent number: 9666422
    Abstract: There is provided an analyzer including: an ionizer unit that ionizes molecules to be analyzed; a filter unit that selectively passes ions generated by the ionizer unit; and a detection unit that detects ions that have passed the filter unit. The detection unit includes a plurality of detection elements disposed in a matrix, and the analyzer further includes a first reconfiguration unit that switches between detection patterns including detection elements to be enabled for detection out of the plurality of detection elements. The ionizer unit includes a plurality of ion sources, and the analyzer further includes a driving control unit that switches the connections of the plurality of ion sources based on changes in characteristics of the ion sources.
    Type: Grant
    Filed: August 29, 2014
    Date of Patent: May 30, 2017
    Assignee: ATONARP INC.
    Inventor: Prakash Sreedhar Murthy