Abstract: There is provided an analyzer including: an ionizer unit that ionizes molecules to be analyzed; a filter unit that selectively passes ions generated by the ionizer unit; and a detection unit that detects ions that have passed the filter unit. The detection unit includes a plurality of detection elements disposed in a matrix, and the analyzer further includes a first reconfiguration unit that switches between detection patterns including detection elements to be enabled for detection out of the plurality of detection elements. The ionizer unit includes a plurality of ion sources, and the analyzer further includes a driving control unit that switches the connections of the plurality of ion sources based on changes in characteristics of the ion sources.

Abstract: There may be included: a master oscillator configured to output pulsed laser light; two or more power amplifiers disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and an optical isolator provided between adjacent two of the power amplifiers in the optical path of the pulsed laser light, and configured to suppress transmission of light traveling from the power amplifiers to a side where the master oscillator is provided.

Abstract: The present invention pertains to a method and device for quantitatively evaluating the degree and characteristics of wiggling, which is a phenomenon that occurs in electronic device fabrication processes and consists of the deformation in the same shape of the left and right edges of fine line patterns, and takes advantage of the fact that this wiggling is included in measured values for line edge variation but not line width variation by acquiring the differences between these values. Further, the present invention is configured so as to calculate line center positions and use the distribution of the deviation from the average line center position as an indicator. Additionally, the present invention is configured to quantify wiggling characteristics by outputting a coefficient of wiggling correlation between lines or a wiggling component synchronized between lines as an indicator.

Abstract: Certain embodiments described herein are directed to devices that can be used to align the components of a source assembly in a source housing. In some examples, a terminal lens configured to couple to the housing through respective alignment features can be used to retain the source components in a source housing to provide a source assembly.

Abstract: Provided are a head having improved usability by limiting a movement range of a laser spot and an atomic force microscope having the same. A head according to an exemplary embodiment of the present disclosure is a head measuring bending of a cantilever by using a laser beam reflected on the surface of the cantilever in order to acquire information on a sample surface by using a tip of the cantilever. The head includes: a spot moving means configured to move a laser spot so as to position the laser spot on the surface of the cantilever; and a movement limiting means configured to limit a movement range of the laser spot moved by the spot moving means in a predetermined range.

Abstract: A method of mass spectrometry is disclosed having a mode comprising: providing a source of precursor ions and reagent ions for reacting with said precursor ions; providing a reaction region downstream of said source; providing an ion mobility separator between said source and said reaction region; providing a bypass cell between said source and said reaction region for guiding ions from said source to said reaction region without the ions passing through said ion mobility separator; guiding said precursor ions from said source, through said ion mobility separator so that said precursor ions separate according to their ion mobility and into said reaction region; and guiding said reagent ions from said source, through said bypass cell and into said reaction region; wherein the reagent ions react with the precursor ions within the reaction region to produce product ions.

Abstract: In a beam transport system, based on a beam temporal-variation related amount that has been calculated by a beam analyzer and that is a beam-position temporal variation amount or a beam diameter at a beam profile monitor, an optical parameter calculator calculates a start-point momentum dispersion function that is a momentum dispersion function (?, ??) of a charged particle beam at a start point in design of the beam transport system that is set on a beam trajectory of the accelerator; and calculates optical parameters using, as an initial condition, the start-point momentum dispersion function and a beginning condition at an irradiation position at the time of detecting profile data.

Abstract: This invention relates to the design and construction of a novel sample cup including an integral venting cap for use in XRF Spectroscopy.

Abstract: A multi-beam writing method includes irradiating a target object with a multi-beam each being one of beams of irradiation time periods of a set of irradiation steps corresponding to writing processing concerned of plural writing processing of the multi-pass writing, for each writing processing of the multi-pass writing, using each set of irradiation steps, obtained by dividing entire irradiation steps of all the number of writing times of a beam concerned into a predetermined digit number irradiation steps to be set as an irradiation time obtained by multiplying a corresponding second gray scale by a quantization unit, as a set of irradiation steps of one of the plural writing processing of the multi-pass writing, wherein the corresponding second gray scale is one of plural second gray scales defined in decimals converted from each digit value of a binary number of a predetermined digit number.

Abstract: When injection of electrons into a sample supporting member causes a potential gradient between an insulative thin film and a conductive thin film at a site of electron beam injection, the potential barrier of the surface of the insulative thin film becomes thin, and an electron emission phenomenon is caused by tunnel effects. Secondary electrons caused in the insulative thin film tunnel to the conductive thin film along the potential gradient. The secondary electrons, having tunneled, reach a sample while diffusing in the conductive thin film. In the case where the sample is a sample with a high electron transmittance, such as a biological sample, the secondary electrons also tunnel through the interior of the sample. The secondary electrons are detected to acquire an SEM image in which the inner structure of the sample is reflected.

Abstract: In laser-produced plasma (LPP) extreme ultraviolet (EUV) systems, pressure waves and other impulsive disturbances originating from plasma bubble emitting EUV light are created which affect flight of incoming droplets. These disturbances slow the migration of subsequent droplets to the plasma bubble. Because the incoming droplets are slowed, the laser beam does not directly hit the droplet at a primary focus point. This causes the resulting level of EUV light generated to be lower than expected and is manifested as a periodic oscillation in the LPP EUV system. An iterative learning controller (ILC) is used to reduce the periodic oscillations when operating the LPP EUV system in a burst mode or a continuous mode. The ILC, on the rising edge of each burst, uses an error signal collected during a completed burst and the input control signal from the completed burst to update the input control signal for a next burst.

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (<100 nm thick) TEM lamellae. Preferred embodiments of the present invention also provide an in-line process for S/TEM based metrology on objects such as integrated circuits or other structures fabricated on semiconductor wafer by providing methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.

Abstract: An apparatus, referred to as a light bath, is disposed in a beamline ion implantation system and is used to photoionize particles in the ion beam into positively charged particles. Once positively charged, these particles can be manipulated by the various components in the beamline ion implantation system. In certain embodiments, a positively biased electrode is disposed downstream from the light bath to repel the formerly non-positively charged particles away from the workpiece. In certain embodiments, the light bath is disposed within an existing component in the beamline ion implantation system, such as a deceleration stage or a Vertical Electrostatic Energy Filter. The light source emits light at a wavelength sufficiently short so as to ionize the non-positively charged particles. In certain embodiments, the wavelength is less than 250 nm.

Abstract: A method is presented for determining at least one piece of information representative of a phase fraction of a fluid in a pipe. The method comprises the estimation of a number of counts received in each measuring interval based on each piece of representative information determined at a preceding iteration, then calculating a residual comprising a first criterion calculated from probabilities using a given statistical law to measure, for each energy, the number of counts measured in each interval, the given statistical law being parameterized based on the number of estimated counts.

Abstract: An improved process workflow and apparatus for S/TEM sample preparation and analysis is provided. Preferred embodiments provide improved methods for an automated recipe TEM sample creation, especially for small geometry TEM lamellae, employing CAD data to automatically align various stages of sample preparation. The process automatically verifies and aligns the position of FIB-created fiducials by masking off portions of acquired images, and then comparing them to synthesized images from CAD data. SEM beam positions are verified by comparison to images synthesized from CAD data. FIB beam position is also verified by comparison to already-aligned SEM images, or by synthesizing an FIB image from CAD using techniques for simulating FIB images. The automatic alignment techniques herein allow creation of sample lamellas at specified locations without operator intervention.

Abstract: A system and method for matrix assisted laser desorption time-of-flight (MALDI-TOF) mass spectrometry. A method for MALDI-TOF mass spectrometry includes initiating a spectral analysis of a sample on a MALDI-TOF spectrometer. The sample is ionized, and a first ion spectrum is detected and stored. Thereafter, the spectrometer is reset, and the ionizing, detecting, storing, and resetting are repeated until a predetermined plurality of spectra of the sample is acquired.

Abstract: Systems and methods of controlling characteristics of a proton beam emitted from a nozzle of a proton treatment system including one or more beam modifying members to define a characteristic of an emitted proton beam, and a clamping member mounted to the nozzle, the clamping member having one or more receiving portions to receive the one or more beam modifying members therein. In some embodiments, the beam modifying members comprise plate structures and the receiving portions include a plurality of slots spaced apart from one another on opposing surfaces of the clamping member to receive opposing ends of the plate structures.

Abstract: A sample material is scanned with a transmission electron microscope (TEM) over multiple steps having a predetermined size at a predetermined angle. Each scan at a predetermined step and angle is compared to a template, wherein the template is generated from parameters of the material and the scanning. The data is then analyzed using local mis-orientation mapping and/or Nye's tensor analysis to provide information about local strain states.

Abstract: The invention relates to an ion generation device and an ion generation method, and more particularly to a device and a method which generates ions at the low pressure and then said ions can be transferred into the next stage in an off-axis manner. In the invention, ions from electrospray or other types of ion source are generated in the pressure which is lower than atmosphere pressure. A followed ion guide device can then transfer most of said generated ions into next stage in an off-axis manner, while most of neutral noise can be eliminated in this process.

Abstract: With example embodiments described herein, a probe tip of a scanning probe microscope (such as an atomic force microscope (AFM)) is directly detected as it moves in a tapping mode to determine the tip positions over time, and a force for the tip is computed from these determined tip positions.