Abstract: A hard disk drive memory which stores pattern data of a high-frequency to be applied for each combination of energy and intensity of the generated particle beam and a local memory, which reads a plurality of pattern data of a high-frequency for each patient together with a sequential order of changing energy and intensity from the hard disk drive memory and stores data in order to perform a scanning irradiation method in which a layered particle beam irradiation region in a depth direction of an affected part of the patient is formed sequentially by changing energy and intensity of the particle beam sequentially to irradiate an affected part of a patient which is an irradiation subject with the particle beam, and which reads out data faster than the hard disk drive memory are provided.

Abstract: Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.

Abstract: The present disclosure provides a device and a method for transferring a display panel. The device includes a carrier configured to transfer the display panel, and a light-shielding plate secured onto the carrier and configured to shield a display region of the display panel when the display panel enters an irradiation region.

Abstract: An X-ray fluorescence spectrometer irradiates a measurement sample 1 with primary X rays from an X-ray source, and excites an element in the sample 1 to emit fluorescence X rays, and the primary X-rays are partially scattered as scattered X rays from the sample 1. A spectroscopic system is placed so that a first spectroscopic unit, a second spectroscopic unit, and a single X-ray detector form an optimized optical system. The first spectroscopic unit disperses the fluorescence X rays to collect the resultant X rays onto the X-ray detector. The second spectroscopic unit disperses the scattered X rays to collect the resultant X rays onto the X-ray detector. In this manner, the spectroscopic system disperses the fluorescence X rays and the scattered X rays so that the intensity of the fluorescence X rays and the intensity of the scattered X rays can be detected by the single X-ray detector 24.

Abstract: One embodiment relates to an electron beam apparatus for inspection and/or review. An electron source generates a primary electron beam, and an electron-optics system shapes and focuses said primary electron beam onto a sample held by a stage. A detection system detects signal-carrying electrons including secondary electrons and back-scattered electrons from said sample, and an image processing system processes data from said detection system. A host computer system that controls and coordinates operations of the electron-optics system, the detection system, and the image processing system. A graphical user interface shows a parameter space and provides for user selection and activation of operating parameters of the apparatus. Another embodiment relates to a method for detecting and/or reviewing defects using an electron beam apparatus. Other embodiments, aspects and features are also disclosed.

Abstract: A radiation source (e.g., LPP—laser produced plasma source) for generation of extreme UV (EUV) radiation has at least two fuel particle streams having different trajectories. Each stream is directed to cross the path of an excitation (laser) beam focused at a plasma formation region, but the trajectories are spaced apart at the plasma formation region, and the streams phased, so that only one stream has a fuel particle in the plasma formation region at any time, and so that when a fuel particle from one stream is generating plasma and EUV radiation at the plasma generation region, other fuel particles are sufficiently spaced so as to be substantially unaffected by the plasma. The arrangement permits potential doubling of the radiation intensity achievable for a particular fuel particle size.

Abstract: A recording unit is rotatable about an axis of rotation, and includes an X-ray emitter and detector to detect X-rays from a fan-shaped region. The fan-shaped region is asymmetrical in relation to a vertical to the axis of rotation, running through the X-ray detector wherein the two edges of the fan-shaped region, on rotation, in each case tangentially delimit a first projection region and a second projection region. The second projection region abuts the first projection region. A method includes recording projections of the two projection regions during a full rotation of the recording unit for the reconstruction of a first image of the first projection region in such a way that the projection angle intervals in each case exhibit the same start angle. It further includes reconstructing a second image of the second projection region to merge the two reconstructed projection regions to form one unitary image.

Abstract: In a charged-particle multi-beam processing apparatus for exposure of a target with a plurality of parallel particle-optical columns, each column has a beam shaping device forming the shape of the illuminating beam into a desired pattern composed of a multitude of sub-beams, by means of an aperture array device, which defines the shape of a respective sub-beam by means of an array of apertures, and a deflection array device selectively deflecting sub-beams off their nominal paths; thus, only the non-selected sub-beams can reach the target. According to many embodiments of the invention each beam shaping device is provided with a first field-boundary device and a second field-boundary device, which are the first and last plate elements traversed by the beam. One of the first and second field-boundary devices defines a field-free space interval so as to accommodate feeding lines for controlling the deflection array device.

Abstract: One embodiment relates to a dual Wien-filter monochromator. A first Wien filter focuses an electron beam in a first plane while leaving the electron beam to be parallel in a second plane. A slit opening allows electrons of the electron beam having an energy within an energy range to pass through while blocking electrons of the electron beam having an energy outside the energy range. A second Wien filter focuses the electron beam to become parallel in the first plane while leaving the electron beam to be parallel in the second plane. Other embodiments, aspects and features are also disclosed.

Abstract: In a mass spectrometer, a method for trapping ions includes providing at least first and second multipole rod sets positioned in tandem, introducing a plurality of ions into the first rod set, applying an RF potential to at least one of said rod sets to generate a radial trapping potential within said rod sets, applying a radial DC potential to said first rod set so as to modulate said radial trapping potential set as a function of m/z of said ions, and applying a DC potential between said two rod sets to provide an axial bias potential between said two rod sets. The method can further comprise selecting an axial barrier potential to selectively extract ions having an m/z ratio less than a threshold from said first rod set into said second rod set.

Abstract: A retarding field scanning electron microscope for imaging a specimen is described. The microscope includes a scanning deflection assembly configured for scanning an electron beam over the specimen, one or more controllers in communication with the scanning deflection assembly for controlling a scanning pattern of the electron beam, and a combined magnetic-electrostatic objection lens configured for focusing the electron beam, wherein the objective lens includes a magnetic lens portion and an electrostatic lens portion. The electrostatic lens portion includes an first electrode configured to be biased to a high potential, and a second electrode disposed between the first electrode and the specimen plane, the second electrode being configured to be biased to a potential lower than the first electrode, wherein the second electrode is configured for providing a retarding field of the retarding field scanning electron microscope.

Abstract: Disclosed herein are a monochromator and a charged particle beam apparatus including the same. The monochromator may include a first electrostatic lens configured to have a charged particle beam discharged by an emitter incident on the first electrostatic lens, refract a ray of the charged particle beam, and include a plurality of electrodes and a second electrostatic lens spaced apart from the first electrostatic lens at a specific interval and configured to have a central axis disposed identically with a central axis of the first electrostatic lens, have the charged particle beam output by the first electrostatic lens incident on the second electrostatic lens, refract the ray of the charged particle beam, and comprise a plurality of electrodes. Accordingly, there is an advantage in that a charged particle beam can have an excellent profile even after passing through the monochromator.

Abstract: A sample cell for IR spectrophotometric analysis of a liquid sample is provided. The sample cell comprises two substantially parallel transparent plates enclosing a cavity for holding the liquid sample, and a temperature control loop for controlling a temperature of the liquid sample in the cavity. The temperature control loop comprises at least one temperature sensor for measuring a temperature in or close to the cavity, at least one heating element for increasing a temperature of the liquid sample, and control means, coupled to the temperature sensor and the heating element for controlling the heating element in dependence of the temperature in or close to the cavity. The heating element comprises at least one heating foil which is attached to or thermally coupled to a first one of the transparent plates in such a way to allow an IR light beam to pass through the transparent plates and the cavity without being hindered by the heating foil.

Abstract: Systems and methods are provided for ion implantation. For example, ion implantation is performed using a first ion implant tool. At least one condition parameter associated with the first ion implant tool is dynamically obtained. Whether the first ion implant tool is in a first condition is determined based on the at least one condition parameter. Ion implantation is performed using a second ion implant tool based on the determination.

Abstract: A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. The FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.

Abstract: A mass spectrometer is disclosed comprising an ion mobility spectrometer or separator and an ion guide arranged downstream of the ion mobility spectrometer or separator. A plurality of axial potential wells are created in the ion guide so that ions received from the ion mobility spectrometer or separator become confined in separate axial potential wells. The potential wells maintain the fidelity and/or composition of ions received from the ion mobility spectrometer or separator. The potential wells are translated along the length of the ion guide.

Abstract: A mass spectrometer is disclosed comprising a RF ion guide wherein in a mode of operation a continuous, quasi-continuous or pulsed beam of ions is orthogonally sampled from the ion guide and wherein the continuous, quasi-continuous or pulsed beam of ions is not axially trapped or otherwise axially confined within the RF ion guide. The ion guide is maintained, in use, at a pressure selected from the group consisting of: (i) 0.0001-0.001 mbar; (ii) 0.001-0.01 mbar; (iii) 0.01-0.1 mbar; (iv) 0.1-1 mbar; (v) 1-10 mbar; (vi) 10-100 mbar; and (vii) >100 mbar.

Abstract: A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.

Abstract: An ion mobility gas detector apparatus including a detector core, an inlet gas path, an exhaust gas path, a source of diluent gas, and at least one or more sensors for measuring temperature, pressure and humidity of gas streams. Further included is a mixing mechanism adapted to mix at least first and second gas streams in response to one or more sensor measurements. A controller is provided for applying drive signals to the detector core.

Abstract: The subject matter described herein includes methods, systems, and computer readable media for dual resonance frequency enhanced electrostatic force microscopy. One method includes applying an alternating current (AC) bias and a direct current (DC) bias to an atomic force microscopy cantilever, wherein the AC bias has a frequency greater than a fundamental resonance frequency of the cantilever. The method further includes mechanically vibrating the cantilever at a frequency different from the frequency of the AC bias. The method further includes physically and electrostatically scanning a sample in the same pass using the cantilever while vibrating the cantilever and applying the AC and DC biases to the cantilever, and generating a topology image of the sample from the physical scanning and an electrostatic image of charged material under or on a surface of the sample from the electrostatic scanning.