Patents Examined by Joseph M Galvin, III
  • Patent number: 10607934
    Abstract: A fuse of a semiconductor device may include: a fuse link suitable for extending in a first direction and connecting first and second electrodes; a dummy strip suitable for extending in the first direction, and with a predetermined distance from the fuse link in a second direction perpendicular to the first direction; and an air channel formed between the fuse link and the dummy strip to contact with the fuse link.
    Type: Grant
    Filed: October 20, 2017
    Date of Patent: March 31, 2020
    Assignees: SK hynix Inc., INDUSTRY-ACAMEDIA COOPERATION GROUP OF SEJONG UNIVERSITY
    Inventors: Deok-Kee Kim, Jae Hong Kim, Seo Woo Nam
  • Patent number: 10593804
    Abstract: Non-planar semiconductor devices having hybrid geometry-based active regions are described. For example, a semiconductor device includes a hybrid channel region including a nanowire portion disposed above an omega-FET portion disposed above a fin-FET portion. A gate stack is disposed on exposed surfaces of the hybrid channel region. The gate stack includes a gate dielectric layer and a gate electrode disposed on the gate dielectric layer. Source and drain regions are disposed on either side of the hybrid channel region.
    Type: Grant
    Filed: August 22, 2018
    Date of Patent: March 17, 2020
    Assignee: Intel Corporation
    Inventors: Seiyon Kim, Rafael Rios, Fahmida Ferdousi, Kelin J. Kuhn
  • Patent number: 10586863
    Abstract: Provided are a low-cost semiconductor device manufacturing method and a semiconductor device made using the method. The method includes forming multiple body regions in a semiconductor substrate, forming multiple gate insulating layers and multiple gate electrodes in the body region; implementing a blanket ion implantation in an entire surface of the substrate to form a low concentration doping region (LDD region) in the body region without a mask, forming a spacer at a side wall of the gate electrode, and implementing a high concentration ion implantation to form a high concentration source region and a high concentration drain region around the LDD region. According to the examples, devices have favorable electrical characteristics and at the same time, manufacturing costs are reduced. Since, when forming high concentration source region and drain regions, tilt and rotation co-implants are applied, an LDD masking step is potentially omitted.
    Type: Grant
    Filed: May 22, 2017
    Date of Patent: March 10, 2020
    Assignee: MagnaChip Semiconductor, Ltd.
    Inventors: Francois Hebert, Yon Sup Pang, Yu Shin Ryu, Seong Min Cho, Ju Ho Kim
  • Patent number: 10586868
    Abstract: Non-planar semiconductor devices having hybrid geometry-based active regions are described. For example, a semiconductor device includes a hybrid channel region including a nanowire portion disposed above an omega-FET portion disposed above a fin-FET portion. A gate stack is disposed on exposed surfaces of the hybrid channel region. The gate stack includes a gate dielectric layer and a gate electrode disposed on the gate dielectric layer. Source and drain regions are disposed on either side of the hybrid channel region.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: March 10, 2020
    Assignee: Intel Corporation
    Inventors: Seiyon Kim, Rafael Rios, Fahmida Ferdousi, Kelin J. Kuhn
  • Patent number: 10585630
    Abstract: A memory device and method for providing the memory device are described. The memory device includes word lines, a first plurality of bit lines, a second plurality of bit lines and selectorless memory cells. Each selectorless memory cell is coupled with a word line, a first bit line of the first plurality of bit lines and a second bit line of the second plurality of bit lines. The selectorless memory cell includes first and second magnetic junctions. The first and second magnetic junctions are each programmable using a spin-orbit interaction torque. The word line is coupled between the first and second magnetic junctions. The first and second bit lines are coupled with the first and second magnetic junctions, respectively. The selectorless memory cell is selected for a write operation based on voltages in the word line, the first bit line and the second bit line.
    Type: Grant
    Filed: December 18, 2017
    Date of Patent: March 10, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Titash Rakshit, Borna J. Obradovic, Ryan M. Hatcher, Vladimir Nikitin, Dmytro Apalkov
  • Patent number: 10566382
    Abstract: A semiconductor light emitting device includes a plurality of light emitting cells including a first conductivity type semiconductor layer, a second conductivity type semiconductor layer, and an active layer between the first and second conductivity type semiconductor layers, an insulating layer on the plurality of light emitting cells and having a first opening and a second opening defining a first contact region of the first conductivity type semiconductor layer and a second contact region of the second conductivity type semiconductor layer, respectively, in each of the plurality of light emitting cells, a connection electrode on the insulating layer and connecting the first contact region and the second contact region to electrically connect the plurality of light emitting cells to each other, a transparent support substrate on the insulating layer and the connection electrode, and a transparent bonding layer between the insulating layer and the transparent support substrate.
    Type: Grant
    Filed: October 20, 2017
    Date of Patent: February 18, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Ji Hye Yeon, Han Kyu Seong, Wan Tae Lim, Sung Hyun Sim, Hanul Yoo
  • Patent number: 10566267
    Abstract: A microelectronic device is formed by thinning a substrate of the microelectronic device from a die attach surface of the substrate, and forming a copper-containing layer on the die attach surface of the substrate. A protective metal layer is formed on the copper-containing layer. Subsequently, the copper-containing layer is attached to a package member having a package die mount area. The protective metal layer may optionally be removed prior to attaching the copper-containing layer to the package member. Alternatively, the protective metal layer may be left on the copper-containing layer when the copper-containing layer is attached to the package member. A structure formed by the method is also disclosed.
    Type: Grant
    Filed: May 19, 2018
    Date of Patent: February 18, 2020
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Christopher Daniel Manack, Nazila Dadvand, Salvatore Frank Pavone
  • Patent number: 10556789
    Abstract: A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity: in a first method step, an access opening, connecting the first cavity to surroundings of the micromechanical component, being formed in the substrate or in the cap; in a second method step, the first pressure and/or the first chemical composition being adjusted in the first cavity; in a third method step, the access opening being sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser; in a fourth method step, a recess being formed, and/or an elevation being formed, and/or a reflection area being formed, and/or an absorption area being formed.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: February 11, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Frank Reichenbach, Jochen Reinmuth, Philip Kappe, Mawuli Ametowobla
  • Patent number: 10559571
    Abstract: A method of fabricating a semiconductor memory device includes forming a bit line and a bit line capping pattern on the semiconductor substrate, forming a first spacer covering a sidewall of the bit line capping pattern and a sidewall of the bit line, forming a contact plug in contact with a sidewall of the first spacer and having a top surface that is lower than an upper end of the first spacer, removing an upper portion of the first spacer, forming a first sacrificial layer closing at least an entrance of the void, forming a second spacer covering the sidewall of the bit line capping pattern and having a bottom surface in contact with a top surface of the first spacer, and removing the first sacrificial layer. The bit line capping pattern is on the bit line. The contact plug includes a void exposed on the top surface.
    Type: Grant
    Filed: April 13, 2018
    Date of Patent: February 11, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Eunjung Kim, Daeik Kim, Bong-Soo Kim, Jemin Park, Semyeong Jang, Yoosang Hwang
  • Patent number: 10553433
    Abstract: A method for preparing a semiconductor structure includes the following steps: providing a substrate including a first region and a second region defined thereon, forming a first mask structure over the substrate, forming a plurality of first features in the first mask structure in the first region, forming a second mask structure over the first mask structure, simultaneously forming a plurality of second features in the second mask structure in the second region and a plurality of third features in the second mask structure in the first region, and transferring the second features and the third features to the first mask structure to simultaneously form a plurality of islanding features in the first region and a plurality of line features in the second region.
    Type: Grant
    Filed: November 14, 2018
    Date of Patent: February 4, 2020
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Shing-Yih Shih
  • Patent number: 10553510
    Abstract: A semiconductor apparatus includes a plurality of stacked chips. Each of the plurality of stacked chips includes a delay chain. Each of the plurality of stacked chips comprises a plurality of Through-Vias, wherein one of the plurality of Through-Vias formed in a first one of the plurality of stacked chips and electrically coupled to a predetermined location of a first delay chain on the first one of the plurality of stacked chips and one of the plurality of Through-Vias formed in a neighboring one of the plurality of stacked chips and electrically coupled to a predetermined location of a delay chain on the neighboring one of the plurality of stacked chips are configured to electrically couple the first one of the plurality of stacked chips to the neighboring one of the plurality of stacked chips. A signal transmitted from a first one of the plurality of stacked chips generates a feedback signal to the first one of the plurality of stacked chips through one or more of the plurality of Through-Vias.
    Type: Grant
    Filed: October 30, 2018
    Date of Patent: February 4, 2020
    Assignee: SK hynix Inc.
    Inventor: Sang Ho Lee
  • Patent number: 10553784
    Abstract: A vertical Hall element and method of fabricating are disclosed. The method includes forming a buried region having a first conductivity type in a substrate having a second conductivity type and implanting a dopant of the first conductivity type into a well region between the top surface of the substrate and the buried region. The buried region has a doping concentration increasing with an increasing depth from a top surface of the substrate and the well region has a doping concentration decreasing from the top surface of the substrate to the buried region. The method includes forming first through fifth contacts on the well region. First and second contacts define a conductive path and second and third contacts define another conductive path through the well region. The fourth contact is formed between first and second contacts and the fifth contact is formed between second and third contacts.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: February 4, 2020
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Keith Ryan Green, Iouri Mirgorodski
  • Patent number: 10553665
    Abstract: A flexible display device includes a substrate including a non-bending area and a bending area adjacent to the non-bending area, and a crack prevention pattern disposed in the bending area. The bending area includes a first area having a first stress when bending, a second area having a second stress less than the first stress when bending, and a third area having a third stress less than the second stress when bending. The crack prevention pattern includes a plurality of crack prevention lines. The number of the crack prevention lines in the first area is greater than the number of the crack prevention lines in the third area.
    Type: Grant
    Filed: January 2, 2018
    Date of Patent: February 4, 2020
    Assignee: Samsung Display Co., Ltd.
    Inventors: Suhwan Hwang, Youngtae Choi, Jongwoo Park, Youngsun Hwang
  • Patent number: 10546983
    Abstract: A lighting device includes (1) one or more solid-state lighting (SSL) devices, (2) a thick, for example prism- or cylinder- or spherical- or dome-shaped scattering element, and (3) an optical extractor with a convex output surface.
    Type: Grant
    Filed: November 25, 2015
    Date of Patent: January 28, 2020
    Assignee: Quarkstar LLC
    Inventors: Roland H. Haitz, Ferdinand Schinagl
  • Patent number: 10546779
    Abstract: A through substrate via (TSV) and method of forming the same are provided. The method of making the TSV may include etching a via opening into the backside of semiconductor substrate, the via opening exposing a surface of a metal landing structure. A conductive layer is deposited over the backside of semiconductor substrate, sidewalls of the via opening, and exposed surface of the metal landing structure. The conductive layer is coated with a polymer material, filling the via opening. The polymer material is developed to remove the polymer material from the backside of semiconductor substrate, leaving the via opening filled with undeveloped polymer material. A planar backside surface of semiconductor substrate is formed by removing the conductive layer.
    Type: Grant
    Filed: November 1, 2018
    Date of Patent: January 28, 2020
    Assignee: NXP USA, INC.
    Inventors: Qing Zhang, Lianjun Liu
  • Patent number: 10541130
    Abstract: A semiconductor structure, a method, and an apparatus for in-situ sulfur vapor passivation of an interface surface of an indium gallium arsenide layer of the semiconductor structure. A method includes elemental sulfur-vapor passivation of an interface surface of an indium gallium arsenide layer disposed on a substrate. A dielectric layer can be deposited on the sulfur-vapor passivated interface surface. An annealing process can be performed after the deposition of the dielectric layer. The annealing process anneals the indium gallium arsenide layer including the sulfur-vapor passivated interface surface and the dielectric layer disposed on the sulfur-vapor passivated interface surface. The sulfur-vapor passivation, the deposition of the dielectric layer, and the anneal, can be performed in-situ in a vacuum chamber without breaking a vacuum of the vacuum chamber following a III-V material growth process in the vacuum chamber to form the indium gallium arsenide layer.
    Type: Grant
    Filed: June 5, 2018
    Date of Patent: January 21, 2020
    Assignee: International Business Machines Corporation
    Inventors: Yun Seog Lee, Talia S. Gershon, Joel P. De Souza, Devendra K. Sadana
  • Patent number: 10541129
    Abstract: A semiconductor structure, a method, and an apparatus for in-situ sulfur vapor passivation of an interface surface of an indium gallium arsenide layer of the semiconductor structure. A method includes elemental sulfur-vapor passivation of an interface surface of an indium gallium arsenide layer disposed on a substrate. A dielectric layer can be deposited on the sulfur-vapor passivated interface surface. An annealing process can be performed after the deposition of the dielectric layer. The annealing process anneals the indium gallium arsenide layer including the sulfur-vapor passivated interface surface and the dielectric layer disposed on the sulfur-vapor passivated interface surface. The sulfur-vapor passivation, the deposition of the dielectric layer, and the anneal, can be performed in-situ in a vacuum chamber without breaking a vacuum of the vacuum chamber following a III-V material growth process in the vacuum chamber to form the indium gallium arsenide layer.
    Type: Grant
    Filed: August 7, 2017
    Date of Patent: January 21, 2020
    Assignee: International Business Machines Corporation
    Inventors: Yun Seog Lee, Talia S. Gershon, Joel P. De Souza, Devendra K. Sadana
  • Patent number: 10541131
    Abstract: A semiconductor structure, a method, and an apparatus for in-situ sulfur vapor passivation of an interface surface of an indium gallium arsenide layer of the semiconductor structure. A method includes elemental sulfur-vapor passivation of an interface surface of an indium gallium arsenide layer disposed on a substrate. A dielectric layer can be deposited on the sulfur-vapor passivated interface surface. An annealing process can be performed after the deposition of the dielectric layer. The annealing process anneals the indium gallium arsenide layer including the sulfur-vapor passivated interface surface and the dielectric layer disposed on the sulfur-vapor passivated interface surface. The sulfur-vapor passivation, the deposition of the dielectric layer, and the anneal, can be performed in-situ in a vacuum chamber without breaking a vacuum of the vacuum chamber following a III-V material growth process in the vacuum chamber to form the indium gallium arsenide layer.
    Type: Grant
    Filed: June 5, 2018
    Date of Patent: January 21, 2020
    Assignee: International Business Machines Corporation
    Inventors: Yun Seog Lee, Talia S. Gershon, Joel P. De Souza, Devendra K. Sadana
  • Patent number: 10535776
    Abstract: When a semiconductor device including a transistor in which a gate electrode layer, a gate insulating film, and an oxide semiconductor film are stacked and a source and drain electrode layers are provided in contact with the oxide semiconductor film is manufactured, after the formation of the gate electrode layer or the source and drain electrode layers by an etching step, a step of removing a residue remaining by the etching step and existing on a surface of the gate electrode layer or a surface of the oxide semiconductor film and in the vicinity of the surface is performed. The surface density of the residue on the surface of the oxide semiconductor film or the gate electrode layer can be 1×1013 atoms/cm2 or lower.
    Type: Grant
    Filed: April 6, 2017
    Date of Patent: January 14, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Masahiko Hayakawa, Tatsuya Honda
  • Patent number: 10535566
    Abstract: A semiconductor device and method of manufacture are provided in which a passivation layer is patterned. In embodiments, by-products from the patterning process are removed using the same etching chamber and at the same time as the removal of a photoresist utilized in the patterning process. Such processes may be used during the manufacturing of FinFET devices.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: January 14, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Hao Chen, Che-Cheng Chang, Horng-Huei Tseng, Wen-Tung Chen, Yu-Cheng Liu