Patents Examined by Karen Kusumakar
  • Patent number: 11778852
    Abstract: A display device includes: an insulating substrate, where a through hole is defined through the insulating substrate; and an organic layer which covers the insulating substrate. In the display device, a barrier area surrounding the through hole is defined in the insulating substrate, and an interruption portion, at which the organic layer is interrupted, is defined in the barrier area.
    Type: Grant
    Filed: January 3, 2022
    Date of Patent: October 3, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Kwang Soo Lee, Jong Hyun Yun
  • Patent number: 11776900
    Abstract: A semiconductor process system etches thin films on semiconductor wafers. The semiconductor process system includes a machine learning based analysis model. The analysis model dynamically selects process conditions for an etching process by receiving static process conditions and target thin-film data. The analysis model identifies dynamic process conditions data that, together with the static process conditions data, result in predicted remaining thin-film data that matches the target thin-film data. The process system then uses the static and dynamic process conditions data for the next etching process.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: October 3, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Chung-Liang Cheng
  • Patent number: 11776960
    Abstract: The present disclosure describes a semiconductor device and methods for forming the same. The semiconductor device includes a first transistor device of a first type and a second transistor device of a second type. The first transistor device includes first nanostructures, a first pair of source/drain structures, and a first gate structure on the first nanostructures. The second transistor device of a second type is formed over the first transistor device. The second transistor device includes second nanostructures over the first nanostructures, a second pair of source/drain structures over the first pair of source/drain structures, and a second gate structure on the second nanostructures and over the first nanostructures. The semiconductor device further includes a first isolation structure in contact with the first and second nanostructures and a second isolation structure in contact with a top surface of the first pair of source/drain structures.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: October 3, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Mrunal Abhijith Khaderbad, Sathaiya Mahaveer Dhanyakumar, Huicheng Chang, Keng-Chu Lin
  • Patent number: 11776845
    Abstract: A semiconductor arrangement is provided. The semiconductor arrangement includes a first dielectric layer over a substrate, a metal layer over the first dielectric layer, a first conductive structure passing through the metal layer and the first dielectric layer, a second conductive structure passing through the metal layer and the first dielectric layer, and a third conductive structure coupling the first conductive structure to the second conductive structure, and overlying a first portion of the metal layer between the first conductive structure and the second conductive structure, wherein an interface exists between the metal layer and at least one of the first conductive structure or the second conductive structure.
    Type: Grant
    Filed: November 29, 2021
    Date of Patent: October 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Hsi-Wen Tien, Wei-Hao Liao, Pin-Ren Dai, Chih Wei Lu, Chung-Ju Lee
  • Patent number: 11769689
    Abstract: A method of manufacturing a semiconductor device is provided. The method may include forming a stack, forming a preliminary stepped structure by patterning the stack, forming a first stepped structure, a second stepped structure, and an opening located between the first stepped structure and the second stepped structure by etching the preliminary stepped structure, forming a passivation layer that fills the opening and covers the first stepped structure, and forming a third stepped structure by etching the second stepped structure using the passivation layer as an etching barrier.
    Type: Grant
    Filed: June 11, 2021
    Date of Patent: September 26, 2023
    Assignee: SK hynix Inc.
    Inventors: Dong Hun Lee, Jeong Hwan Kim, Mi Seong Park, Jung Shik Jang, Won Geun Choi
  • Patent number: 11764153
    Abstract: The present disclosure provides an interconnect structure and a method for forming an interconnect structure. The interconnect structure includes a first metal line, a first interlayer dielectric (ILD) layer over the first metal line, a first conductive feature over the first metal line, wherein at least a portion of the first conductive feature is laterally surrounded by the first ILD layer, and a sidewall of the first conductive feature has a corrugated profile.
    Type: Grant
    Filed: July 28, 2022
    Date of Patent: September 19, 2023
    Inventor: Chun-Ming Lin
  • Patent number: 11764215
    Abstract: Various semiconductor techniques described herein enable reductions in one or more sizes of a fin field-effect transistor (finFET) and/or increasing one or more sizes of a finFET. In various implementations described herein, a material may be used to reduce the one or more x-direction sizes of the finFET by selective deposition while enabling the one or more y-direction sizes of the finFET to be increased or enlarged by etching. The x-direction size of a source or drain of the finFET, the x-direction size of an active region of the finFET, and/or the x-direction size of a polysilicon region of the finFET may be increased by selective deposition of a boron nitride (BxNy), a boron carbide (BxC), a boron oxide (BxOy) (e.g., boric oxide (B2O3), a fluorocarbon (CxFy) polymer, and/or another material.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: September 19, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Yu-Lien Huang
  • Patent number: 11764157
    Abstract: Electronic devices and methods of forming electronic devices using a ruthenium or doped ruthenium liner and cap layer are described. A liner with a ruthenium layer and a cobalt layer is formed on a barrier layer. A conductive fill forms a second conductive line in contact with the first conductive line.
    Type: Grant
    Filed: July 22, 2021
    Date of Patent: September 19, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Wenjing Xu, Feng Chen, Tae Hong Ha, Xianmin Tang, Lu Chen, Zhiyuan Wu
  • Patent number: 11765962
    Abstract: A stretchable display device according to an aspect of the present disclosure includes: a first substrate including an active area, a non-active area adjacent to the active area, and a pad area extending from a side of the non-active area; a plurality of second substrates are spaced apart from each other on the first substrate; and connecting lines electrically connecting pads disposed on the second substrates adjacent to each other of the plurality of second substrates. The plurality of second substrates includes a first set disposed in the non-active area, a second set disposed in the active area and a third set disposed in the pad area. Accordingly, a stretchable display device according to an aspect of the present disclosure may stretch throughout not only the active area, but also the non-active area and the pad area.
    Type: Grant
    Filed: July 13, 2021
    Date of Patent: September 19, 2023
    Assignee: LG Display Co., Ltd.
    Inventors: Seulki Kim, JiYoung Ahn
  • Patent number: 11756854
    Abstract: A package structure includes a circuit substrate, a semiconductor package, a thermal interface material, a lid structure and a heat dissipation structure. The semiconductor package is disposed on and electrically connected to the circuit substrate. The thermal interface material is disposed on the semiconductor package. The lid structure is disposed on the circuit substrate and surrounding the semiconductor package, wherein the lid structure comprises a supporting part that is partially covering and in physical contact with the thermal interface material. The heat dissipation structure is disposed on the lid structure and in physical contact with the supporting part of the lid structure.
    Type: Grant
    Filed: July 4, 2021
    Date of Patent: September 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Sheng Lin, Po-Yao Lin, Shu-Shen Yeh, Chin-Hua Wang, Shin-Puu Jeng
  • Patent number: 11756949
    Abstract: An integrated circuit includes at least one decoupling cell, wherein the at least one decoupling cell includes at least one P-type decoupling MOSFET and at least one N-type decoupling MOSFET, and a number of the at least one P-type decoupling MOSFET is different from a number of the at least one N-type decoupling MOSFET.
    Type: Grant
    Filed: April 30, 2021
    Date of Patent: September 12, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sungwe Cho, Subin Jin
  • Patent number: 11757039
    Abstract: Example embodiments relate to methods for inducing stress in semiconductor devices. One method includes a method for producing a first semiconductor device and a second semiconductor device configured to conduct current through the controlled density of charge carriers in a channel area. The charge carriers of the first semiconductor device have opposite polarity to the charge carriers of the second semiconductor device. The method includes producing a stress relaxed buffer (SRD) layer. The back side of the SRB layer is positioned on a substrate. The method also includes producing a semiconductor layer on the front side of the SRB layer. Additionally, the method includes producing the first semiconductor device and the second semiconductor device on the semiconductor layer, removing the substrate, thinning the SRB layer, producing a cavity in the SRB layer, and filling the cavity with a material to create a stress compensation area.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: September 12, 2023
    Assignee: IMEC VZW
    Inventors: Gaspard Hiblot, Geert Van der Plas
  • Patent number: 11756929
    Abstract: A semiconductor package includes a first chip, a first chip and a molding compound. The first chip has a first via protruding from the first chip. The second chip has a second via protruding from the second chip, wherein a thickness of the first chip is different from a thickness of the second chip. The molding compound encapsulates the first chip, the second chip, the first via and the second via, wherein surfaces of the first via, the second via and the molding compound are substantially coplanar.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: September 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Zi-Jheng Liu, Chen-Cheng Kuo, Hung-Jui Kuo
  • Patent number: 11756878
    Abstract: In one embodiment, a self-aligned via is presented. In one embodiment, an inhibitor layer is selectively deposited on the lower conductive region. In one embodiment, a dielectric is selectively deposited on the lower conductive region. In one embodiment, the deposited dielectric may be selectively etched. In one embodiment, an inhibitor is selectively deposited on the lower dielectric region. In one embodiment, a dielectric is selectively deposited on the lower dielectric region. In one embodiment, the deposited dielectric over the lower conductive region has a different etch rate than the deposited dielectric over the lower dielectric region which may lead to a via structure that is aligned with the lower conductive region.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Shao-Kuan Lee, Hsin-Yen Huang, Cheng-Chin Lee, Hai-Ching Chen, Shau-Lin Shue
  • Patent number: 11756962
    Abstract: Provided is a semiconductor device including a substrate, one hybrid fin, a gate, and a dielectric structure. The substrate includes at least two fins. The hybrid fin is disposed between the at least two fins. The gate covers portions of the at least two fins and the hybrid fin. The dielectric structure lands on the hybrid fin to divide the gate into two segment. The two segments are electrically isolated to each other by the dielectric structure and the hybrid fin. The hybrid fin includes a first portion, disposed between the two segments of the gate; and a second portion, disposed aside the first portion, wherein a top surface of the second portion is lower than a top surface of the first portion.
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: September 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-San Chien, Chun-Sheng Liang, Jhon-Jhy Liaw, Kuo-Hua Pan, Hsin-Che Chiang
  • Patent number: 11749601
    Abstract: A semiconductor device includes a patterned metal layer on a substrate, via conductors on the patterned metal layer, first inter-metal dielectric (IMD) patterns embedded in the patterned metal layer, and a second IMD pattern surrounding the patterned metal layer. Preferably, the first IMD patterns are between and without overlapping the via conductors in a top view.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: September 5, 2023
    Assignee: United Semiconductor (Xiamen) Co., Ltd.
    Inventors: Bin Guo, Hailong Gu, Chin-Chun Huang, Wen Yi Tan
  • Patent number: 11749524
    Abstract: A method of forming a semiconductor structure includes forming a first top electrode (TE) layer over a magnetic tunnel junction (MTJ) layer and performing a smoothing treatment on the first TE layer. The smoothing treatment is performed in situ after the forming first TE layer. The smoothing treatment removes spike point defects from the first TE layer. Additional TE layers may be formed over the first TE layer.
    Type: Grant
    Filed: June 4, 2021
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jung-Tang Wu, Yu-Jen Chien, Szu-Hua Wu, Chin-Szu Lee, Yao-Shien Huang
  • Patent number: 11749677
    Abstract: A semiconductor structure includes a first semiconductor device formed over a substrate and a second semiconductor device formed over the substrate. The first semiconductor device includes a first source/drain feature over the substrate, a first gate structure over the substrate, a first conductive feature over the first source/drain feature, and a first insulation layer between the first gate structure and the first conductive feature. The second semiconductor device includes a second source/drain feature over the substrate, a second gate structure over the substrate, a second conductive feature over the second source/drain feature, and a second insulation layer between the second gate structure and the second conductive feature. A width of the first conductive feature and a width of the second conductive feature are different, and a width of the first insulation layer is less than a width of the second insulation layer.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Patent number: 11749683
    Abstract: A semiconductor device includes a first active region and a second active region disposed over a substrate. A first source/drain component is grown on the first active region. A second source/drain component is grown on the second active region. An interlayer dielectric (ILD) is disposed around the first source/drain component and the second source/drain component. An isolation structure extends vertically through the ILD. The isolation structure separates the first source/drain component from the second source/drain component.
    Type: Grant
    Filed: April 25, 2022
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
    Inventors: Ta-Chun Lin, Kuan-Lin Yeh, Chun-Jun Lin, Kuo-Hua Pan, Mu-Chi Chiang
  • Patent number: 11751400
    Abstract: In some embodiments, the present disclosure relates to an integrated circuit. The integrated circuit has a first doped region and a second doped region within a substrate. A ferroelectric material is arranged over the substrate and laterally between the first doped region and the second doped region. A conductive electrode is over the ferroelectric material and between sidewalls of the ferroelectric material. One or more sidewall spacers are arranged along opposing sides of the ferroelectric material. A dielectric layer continuously and laterally extends from directly below the one or more sidewall spacers to directly below the ferroelectric material.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: September 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Cheng Wu, Pai Chi Chou