Patents Examined by Khatib A Rahman
  • Patent number: 11916152
    Abstract: A semiconductor device includes a Schottky diode on a silicon-on-insulator (SOI) substrate. The Schottky diode includes a guard ring with a first guard ring segment contacting a barrier region on a first lateral side of the barrier region, and a second guard ring segment contacting the barrier region on a second, opposite, lateral side of the barrier region. The first and second guard ring segments extend deeper in the semiconductor layer than the barrier region. The Schottky diode further includes a drift region contacting the barrier region, and may include a buried layer having the same conductivity type as the barrier region, extending at least partway under the drift region. The barrier region is isolated from the substrate dielectric layer of the SOI substrate by an isolation region having the same conductivity type as the guard ring. A metal containing layer is formed on the barrier region.
    Type: Grant
    Filed: December 30, 2020
    Date of Patent: February 27, 2024
    Assignee: Texas Instruments Incorporated
    Inventor: Zachary K. Lee
  • Patent number: 11916119
    Abstract: Disclosed are embodiments of a transistor (e.g., a III-V high electron mobility transistor (HEMT), a III-V metal-insulator-semiconductor HEMT (MISHEMT), or the like) that has multiple self-aligned terminals. The self-aligned terminals include a self-aligned gate, a self-aligned source terminal and, optionally, a self-aligned drain terminal. By forming self-aligned terminals during processing, the separation distances between the terminals (e.g., between the gate and source terminal and, optionally, between the gate and drain terminal) can be reduced in order to reduce device size and to improve performance (e.g., to reduce on resistance and increase switching speeds). Also disclosed herein are method embodiments for forming such a transistor.
    Type: Grant
    Filed: November 3, 2021
    Date of Patent: February 27, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Zhong-Xiang He, Jeonghyun Hwang, Ramsey M. Hazbun, Brett T. Cucci, Ajay Raman, Johnatan A. Kantarovsky
  • Patent number: 11908908
    Abstract: A semiconductor device includes a substrate. The device includes a stacked film that includes a plurality of first electrode layers provided over the substrate and separated from each other in a first direction perpendicular to a front surface of the substrate and a plurality of second electrode layers provided over the first electrode layer and separated from each other in the first direction. The device further includes a first insulating film and a second insulating film that penetrate the plurality of first electrode layers and the plurality of second electrode layers in the first direction. The stacked film further includes a first gap portion including a first portion provided between the substrate and a lowermost layer of the plurality of first electrode layers and a second portion connected to the first portion, penetrating the plurality of first electrode layers in the first direction, between the first insulating film and the second insulating film.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: February 20, 2024
    Assignee: KIOXIA CORPORATION
    Inventor: Kazutaka Suzuki
  • Patent number: 11908928
    Abstract: A semiconductor device includes: a semiconductor substrate; a first gate trench and a second gate trench both extending from a first main surface of the semiconductor substrate into the semiconductor substrate; a semiconductor mesa delimited by the first and second gate trenches; and a field plate trench extending from the first main surface through the semiconductor mesa. The field plate trench includes a field plate separated from each sidewall and a bottom of the field plate trench by an air gap. The field plate is anchored to the semiconductor substrate at the bottom of the field plate trench by an electrically insulative material that occupies a space in a central part of the field plate, the electrically insulative material spanning the air gap to contact the semiconductor substrate at the bottom of the field plate trench. Methods of producing the semiconductor device are also described.
    Type: Grant
    Filed: November 24, 2021
    Date of Patent: February 20, 2024
    Assignee: Infineon Technologies Austria AG
    Inventor: Ling Ma
  • Patent number: 11908912
    Abstract: A semiconductor device includes: a first electrode; a first semiconductor layer; a first insulating film extending downward from an upper surface of the first semiconductor layer, the first insulating film being columnar; a second electrode located in the first insulating film, the second electrode extending in a vertical direction, the second electrode being columnar; a second semiconductor layer partially provided in an upper layer portion of the first semiconductor layer, the second semiconductor layer being next to the first insulating film with the first semiconductor layer interposed; a third semiconductor layer partially provided in an upper layer portion of the second semiconductor layer; and a third electrode located higher than the upper surface of the first semiconductor layer, the third electrode overlapping a portion of the first insulating film, a portion of the first semiconductor layer, and a portion of the second semiconductor layer when viewed from above.
    Type: Grant
    Filed: February 17, 2022
    Date of Patent: February 20, 2024
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventors: Tatsuya Nishiwaki, Tsuyoshi Kachi, Shuhei Tokuyama
  • Patent number: 11901407
    Abstract: A semiconductor device having an improved junction termination extension region is provided. The disclosure particularly relates to diodes having such an improved junction termination extension. The semiconductor device includes an active area extending in a first direction, and a junction termination extension, ‘JTE’, region of a first charge type surrounding the active area. The JTE region includes a plurality of field relief sub-regions that each surround the active area and that are mutually spaced apart in a direction perpendicular to a circumference of the active area. The plurality of field relief sub-regions includes a first group of field relief sub-regions, and for each field relief sub-region of the first group, a plurality of field relief elements of a second charge type is provided therein, which field relief elements are mutually spaced apart in a circumferential direction with respect to the active area.
    Type: Grant
    Filed: September 24, 2021
    Date of Patent: February 13, 2024
    Assignee: Nexperia B.V
    Inventors: Romain Esteve, Tim Böttcher
  • Patent number: 11903179
    Abstract: The present disclosure provides a method of manufacturing a semiconductor structure. The method includes providing a semiconductor substrate including an active region and an isolation structure. The method also includes forming a contact structure on the active region of the semiconductor substrate. The method further includes forming a dielectric spacer on opposite sides of the contact structure. The method also includes forming a conductive element on the isolation structure of the semiconductor substrate, wherein the dielectric spacer has a concave surface facing the conductive element.
    Type: Grant
    Filed: April 19, 2022
    Date of Patent: February 13, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chih-Ying Tsai, Jui-Seng Wang, Yi-Yi Chen
  • Patent number: 11895837
    Abstract: A semiconductor device includes a substrate including a memory cell region and a connection region, a plurality of gate electrodes stacked on the substrate, a channel structure penetrating the plurality of gate electrodes and including a channel layer extending in a vertical direction perpendicular to an upper surface of the substrate in the memory cell region, a dummy channel structure penetrating the plurality of gate electrodes and including a dummy channel layer extending in the vertical direction in the connection region, a first semiconductor layer disposed between the substrate and a lowermost one of the plurality of gate electrodes and surrounding the channel structure in the memory cell region, and an insulating separation structure disposed between the substrate and the lowermost one of the plurality of gate electrodes and surrounding the dummy channel layer.
    Type: Grant
    Filed: May 5, 2022
    Date of Patent: February 6, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Janggn Yun, Jaeduk Lee
  • Patent number: 11894455
    Abstract: A precursor for a vertical semiconductor device is provided with a substrate, a drift region over the substrate, and an upper precursor region over the drift region. The top surface of the precursor is substantially planar, and the substrate and the drift region are doped with a first dopant of a first polarity. In a first embodiment, a series of implants with a second dopant is provided in the upper precursor region via the top surface to form each of at least two gate regions such that each implant of the series of implants is provided at a different depth below the top surface. In a second embodiment, a series of implants with the first dopant is provided in the upper precursor region via the top surface to form a channel region that has at least a portion between two gate regions.
    Type: Grant
    Filed: September 22, 2021
    Date of Patent: February 6, 2024
    Assignee: Wolfspeed, Inc.
    Inventors: Daniel Jenner Lichtenwalner, Sei-Hyung Ryu, Arman Ur Rashid
  • Patent number: 11894433
    Abstract: A stacked semiconductor device comprising a lower source/drain epi located on top of a bottom dielectric layer. An isolation layer located on top of the lower source/drain epi and an upper source/drain epi located on top of the isolation layer. A lower electrical contact that is connected to the lower source/drain epi, wherein the lower electrical contact is in direct contact with multiple side surfaces of the lower source/drain epi.
    Type: Grant
    Filed: June 22, 2021
    Date of Patent: February 6, 2024
    Assignee: International Business Machines Corporation
    Inventors: Alexander Reznicek, Ruilong Xie, Chen Zhang, Kangguo Cheng
  • Patent number: 11889698
    Abstract: A semiconductor storage device includes first wiring layers stacked along a first direction, a first pillar including a first semiconductor layer and extending along the first direction through the first wiring layers, a second wiring layer disposed above the first pillar in the first direction and extending along a second direction perpendicular to the first direction, a semiconductor-containing layer including a first portion disposed on an upper end of the first pillar in the first direction, a second portion contacting the first portion and formed along the second wiring layer, and a third portion contacting an upper end of the second portion and extending along a third direction perpendicular to the first direction and crossing the second direction, and a first insulating layer between each of the first and second portions of the semiconductor-containing layer and the second wiring layer. An upper surface of the third portion contains a metal.
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: January 30, 2024
    Assignee: Kioxia Corporation
    Inventors: Yasuhito Yoshimizu, Hiroshi Nakaki, Kazuaki Nakajima
  • Patent number: 11882724
    Abstract: A first light-emitting element and a second light-emitting element that have a resonance structure that causes output light from a light-emission functional layer to resonate between a reflective layer and a semi-transmissive reflective layer, and a pixel definition layer, and in which an aperture part is formed to correspond to each of the first light-emitting element and the second light-emitting element, are formed on a base. A first interval between the reflective layer and the semi-transmissive reflective layer in the first light-emitting element and a second interval between the reflective layer and the semi-transmissive reflective layer in the second light-emitting element are different, and a film thickness of the pixel definition layer is less than a difference between the first interval and the second interval.
    Type: Grant
    Filed: June 28, 2022
    Date of Patent: January 23, 2024
    Assignee: SEIKO EPSON CORPORATION
    Inventors: Ryoichi Nozawa, Atsushi Amano, Takeshi Koshihara, Akio Fukase, Shinichi Iwata
  • Patent number: 11882699
    Abstract: A silicon-oxide-nitride-oxide-silicon (SONOS) memory cell for FinFET includes a fin, a control gate and a selective metal gate. The fin is on a top surface of a substrate, wherein the fin has two sidewalls and a top surface, and the fin includes a memory region and a logic region. The control gate is disposed over the fin of the memory region and covers the two sidewalls and the top surface of the fin, wherein the control gate includes a charge trapping layer and a control electrode, wherein the charge trapping layer is sandwiched by the fin and the control electrode. The selective metal gate is disposed over the fin adjacent to the control gate and covers the two sidewalls and the top surface of the fin. The present invention also provides a method of forming said silicon-oxide-nitride-oxide-silicon (SONOS) memory cell.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: January 23, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Liang Yi, Zhiguo Li, Chi Ren
  • Patent number: 11876132
    Abstract: A semiconductor device includes a first electrode; a first semiconductor region provided on the first electrode; a second semiconductor region provided on the first semiconductor region; a third semiconductor region provided on the second semiconductor region; a second electrode provided on the third semiconductor region and electrically connected to the third semiconductor region; a third electrode aligned with the first semiconductor region and the second semiconductor region; a gate electrode provided between the third electrode and the second semiconductor region; a first insulating portion including a first insulating region provided between the third electrode and the first semiconductor region and facing the third electrode, a second insulating region facing the first semiconductor region, and at least one air-gap region located between the first insulating region and the second insulating region; and a second insulating portion provided between the gate electrode and the second semiconductor region.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: January 16, 2024
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventor: Toshifumi Nishiguchi
  • Patent number: 11876092
    Abstract: An ion trap apparatus (e.g., ion trap chip) having a plurality of electrodes is provided. The ion trap apparatus may comprise a plurality of interconnect layers, a substrate, and at least one integrated switching network layer disposed between the plurality of interconnect layers and the substrate. The integrated switching network layer may comprise a plurality of monolithically-integrated controls and/or switches configured to condition a voltage signal applied to at least one of the plurality of electrodes. An example ion trap apparatus may comprise a surface ion trap chip. The ion trap apparatus may be configured to operate within a cryogenic chamber.
    Type: Grant
    Filed: July 1, 2021
    Date of Patent: January 16, 2024
    Assignee: Quantinuum LLC
    Inventors: David Deen, Grahame Vittorini, Nathaniel Burdick
  • Patent number: 11871575
    Abstract: An electronic device comprising a lower deck and an upper deck adjacent to a source. Each of the lower deck and the upper deck comprise tiers of alternating conductive materials and dielectric materials. Each of the lower deck and the upper deck also comprise an array region and one or more non-array regions. Memory pillars are in the lower deck and the upper deck of the array region and the memory pillars are configured to be operably coupled to the source. Dummy pillars are in the upper deck of the one or more non-array regions and the dummy pillars are configured to be electrically isolated from the source. Another conductive material is in the upper deck and the lower deck of the one or more non-array regions. Additional electronic devices and related systems and methods of forming an electronic device are also disclosed.
    Type: Grant
    Filed: June 14, 2022
    Date of Patent: January 9, 2024
    Assignee: Micron Technology, Inc.
    Inventors: S M Istiaque Hossain, Christopher J. Larsen, Anilkumar Chandolu, Wesley O. McKinsey, Tom J. John, Arun Kumar Dhayalan, Prakash Rau Mokhna Rau
  • Patent number: 11862673
    Abstract: A device includes a buried oxide layer disposed on a substrate, a first region disposed on the buried oxide layer and a first ring region disposed in the first region. The first ring region includes a portion of a guardring. The device further includes a first terminal region disposed in the first ring region, a second ring region disposed in the first region and a second terminal region disposed in the second ring region. The first terminal region is connected to an anode and the second terminal region is connected to a cathode. The first region has a graded doping concentration. The first region, the second ring region and the second terminal region have a first conductivity type, and the first ring region and the first terminal region have a second conductivity type. The first conductivity type is different from the second conductivity type.
    Type: Grant
    Filed: December 13, 2021
    Date of Patent: January 2, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Kwangsik Ko, Qiuyi Xu, Shajan Mathew
  • Patent number: 11862645
    Abstract: A display device includes a substrate that includes a display area and a pad area, and a plurality of data pads that are provided on the pad area of the substrate and arranged along a first direction and a second direction, where the plurality of data pads includes a first data pad, a second data pad that is disposed adjacent to the first data pad along the first direction, a third data pad that is disposed adjacent to the first data pad along the second direction, and a fourth data pad that is disposed adjacent to the second data pad along the second direction, and the first data pad and the second connection wire are respectively disposed in different layers.
    Type: Grant
    Filed: January 12, 2021
    Date of Patent: January 2, 2024
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: So Young Lee, Dae-Hyun Noh, Hyun-Chol Bang, Sang Won Seo, Ju Hee Hyeon
  • Patent number: 11862571
    Abstract: A semiconductor package including a first semiconductor chip having an upper surface, a lower surface that is opposite to the upper surface, and a sidewall between the upper surface and the lower surface; a capping insulation layer covering the upper surface and the sidewall of the first semiconductor chip; and a shielding layer on the capping insulation layer, wherein a lower portion of the capping insulation layer includes a laterally protruding capping protrusion contacting a lower surface of the shielding layer.
    Type: Grant
    Filed: March 14, 2022
    Date of Patent: January 2, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Byoung-Gug Min, Younhee Kang, Min-Woo Song
  • Patent number: 11856779
    Abstract: A memory array includes a plurality of memory cells stacked up along a first direction. Each of the memory cells include a memory stack, connecting lines, and insulating layers. The memory stack includes a first dielectric layer, a channel layer disposed on the first dielectric layer, a charge trapping layer disposed on the channel layer, a second dielectric layer disposed on the charge trapping layer, and a gate layer disposed in between the channel layer and the second dielectric layer. The connecting lines are extending along the first direction and covering side surfaces of the memory stack. The insulating layers are extending along the first direction, wherein the insulating layers are located aside the connecting lines and covering the side surfaces of the memory stack.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chih Lai, Chung-Te Lin