Patent number: 4865658
Abstract: A method of preparing an oxygen-containing ferromagnetic amorphous alloy comprising the step of: sputtering an oxygen-containing composite target composed of an oxide and a metal or metal alloy, thereby forming a film of the amorphous alloy on a substrate, the amorphous alloy consisting of:M.sub.x G.sub.y O.sub.zwhere M is one or more transition metals of Fe, Co and Ni; or a combination of the transition metal or metals and one or more metals selected from the group consisting of V, Cr, Mn, Nb, Mo, Hf, Ta, W, Pt, Sm, Gd, Tb, Dy and Ho; G is one or more elements selected from the group consisting of B, Ge, As, Sb, Ti, Sn and Zr; oxygen (O) is supplied by the oxide; and x, y and z are the atomic percentages of M, G and O and x+y+z=100, the composition of the amorphous alloy being in the pentagonal hatched zone in FIG. 1 and the pentagonal zone being defined by the lines joining the points of A (80, 19, 1), B (50, 49, 1), C (36, 36, 28), D (36, 4, 60) and E (38.5, 1.5, 60) shown in FIG. 1.
Type:
Grant
Filed:
June 8, 1988
Date of Patent:
September 12, 1989
Assignees:
Research Development Corporation of Japan, Casio Computer Co., Ltd.
Inventor:
Toshio Kudo