Patents Examined by Molly K Reida
  • Patent number: 11980017
    Abstract: The present disclosure discloses a capacitor structure and its formation method and a memory. The method includes: providing a substrate; forming an electrode support structure on the substrate in a stacking fashion, wherein the electrode support structure includes at least a first support layer on its top, a capacitor hole is formed at intervals within the electrode support structure and extends upwards in a direction perpendicular to a surface of the substrate; forming, within the capacitor hole, an electrode post and an electrode layer extending from the electrode post to the upper surface of the first support layer; removing the electrode layer; removing the first support layer; forming a dielectric layer on the top of the electrode support structure, wherein the dielectric layer covers the top of the electrode post, and an outer peripheral wall of the top of the electrode post is connected with the dielectric layer.
    Type: Grant
    Filed: October 20, 2021
    Date of Patent: May 7, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Kangshu Zhan, Qiang Wan, Penghui Xu, Tao Liu, Sen Li, Jun Xia
  • Patent number: 11972992
    Abstract: A substrate for mounting an electronic component according to an aspect of an embodiment includes a base that is a plate-shaped body, where a first surface of the base is sloped relative to a second surface that is opposed to the first surface, and when the base is bisected into a lower part and a higher part in a slope direction thereof, a thermal conductivity of the lower part is higher than a thermal conductivity of the higher part.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: April 30, 2024
    Assignee: KYOCERA Corporation
    Inventors: Takafumi Yamaguchi, Toshifumi Higashi, Youji Furukubo
  • Patent number: 11956944
    Abstract: Embodiments of the present application provide a semiconductor structure formation method and a semiconductor structure. The method includes: the substrate including contact region and dummy region, a first bitline structure and a first dielectric layer being formed on the substrate, the first bitline structure and the first dielectric layer defining discrete capacitor contact openings; forming a first sacrificial layer filling the capacitor contact opening; removing, in the dummy region, part of height of the first bitline structure, part of height of the first dielectric layer and part of height of the first sacrificial layer to form a first opening located at top of a second bitline structure, a second dielectric layer and a second sacrificial layer; forming an insulation layer filling the first opening; removing, in the contact region, the first sacrificial layer to form a second opening; and forming a capacitor contact structure located in the second opening.
    Type: Grant
    Filed: November 22, 2021
    Date of Patent: April 9, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Longyang Chen, Hongfa Wu, Gongyi Wu
  • Patent number: 11955384
    Abstract: A device includes a bottom transistor, a top transistor, and an epitaxial isolation structure. The bottom transistor includes a first channel layer, first source/drain epitaxial structures, and a first gate structure. The first source/drain epitaxial structures are on opposite sides of the first channel layer. The first gate structure is around the first channel layer. The top transistor is over the bottom transistor and includes a second channel layer, second source/drain epitaxial structures, and a second gate structure. The second source/drain epitaxial structures are on opposite sides of the second channel layer. The second gate structure is around the second channel layer. The epitaxial isolation structure is between and in contact with one of the first source/drain epitaxial structures and one of the second source/drain epitaxial structures, such that the one of the first source/drain epitaxial structures is electrically isolated from the one of the second source/drain epitaxial structures.
    Type: Grant
    Filed: February 17, 2022
    Date of Patent: April 9, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Chien-Te Tu, Hsin-Cheng Lin, Chee-Wee Liu
  • Patent number: 11955329
    Abstract: A method of forming a semiconductor device includes forming a first conductive feature on a bottom surface of an opening through a dielectric layer. The forming the first conductive feature leaves seeds on sidewalls of the opening. A treatment process is performed on the seeds to form treated seeds. The treated seeds are removed with a cleaning process. The cleaning process may include a rinse with deionized water. A second conductive feature is formed to fill the opening.
    Type: Grant
    Filed: April 28, 2023
    Date of Patent: April 9, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Wei Chang, Min-Hsiu Hung, Chun-I Tsai, Ken-Yu Chang, Yi-Ying Liu
  • Patent number: 11956958
    Abstract: Methods for forming a semiconductor device are disclosed. According to some aspects, a first implantation is performed on a first of a first semiconductor structure to form a buried stop layer in the first substrate. A second semiconductor device is formed. The first semiconductor structure and the second semiconductor device are bonded. The first substrate is thinned and the buried stop layer is removed, and an interconnect layer is formed above the thinned first substrate.
    Type: Grant
    Filed: April 22, 2021
    Date of Patent: April 9, 2024
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventor: He Chen
  • Patent number: 11956945
    Abstract: A semiconductor device includes: a bit line structure formed over a substrate; a storage node contact plug spaced apart from the bit line structure; and a nitride spacer positioned between the bit line structure and the storage node contact plug, wherein the nitride spacer has a higher silicon content in a portion adjacent to the storage node contact plug than in a portion adjacent to the bit line structure.
    Type: Grant
    Filed: July 26, 2023
    Date of Patent: April 9, 2024
    Assignee: SK hynix Inc.
    Inventor: Seung Mi Lee
  • Patent number: 11956959
    Abstract: A semiconductor memory device includes a semiconductor substrate including a diode formed in an upper layer portion of the semiconductor substrate, a first insulating film provided above the semiconductor substrate, a first conductive film provided above the first insulating film and coupled to the diode, a stacked body provided above the first conductive film, an insulator and an electrode film being stacked alternately in the stacked body, a semiconductor member piercing the stacked body and being connected to the first conductive film, and a charge storage member provided between the electrode film and the semiconductor member.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: April 9, 2024
    Assignee: Kioxia Corporation
    Inventors: Jun Fujiki, Shinya Arai, Kotaro Fujii
  • Patent number: 11937432
    Abstract: Embodiments provide a semiconductor device capable of being highly integrated. A semiconductor device includes a semiconductor substrate, a first insulating layer formed toward an inside of a semiconductor substrate from a main surface of the semiconductor substrate, and a transistor formed on the first insulating layer. the transistor has a first semiconductor layer formed on the first insulating layer to be insulated from the semiconductor substrate, a second insulating layer provided on a second region among of a first region, the second region, and a third region sequentially arranged in a first direction along the main surface of the first semiconductor layer, and a first conductive layer provided on the second insulating layer. a first contact is connected to the first region of the first semiconductor layer, a second contact is connected to the third region of the first semiconductor layer, and a third contact is connected to the first conductive layer.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: March 19, 2024
    Assignee: KIOXIA CORPORATION
    Inventor: Hiroyuki Kutsukake
  • Patent number: 11930630
    Abstract: A Dynamic Random Access Memory (DRAM) capacitor and a preparation method therefor are provided. The DRAM capacitor includes a dielectric layer, and the dielectric layer includes a high dielectric material layer, and low dielectric loss material layers provided on both side surfaces of the high dielectric material layer.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: March 12, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Zhuo Chen, Ying-Chih Wang, Shih-Shin Wang
  • Patent number: 11929290
    Abstract: A method is provided for producing a plurality of transistors on a substrate comprising at least two adjacent active areas separated by at least one electrically-isolating area, each transistor of the plurality of transistors including a gate having a silicided portion, and first and second spacers on either side of the gate, the first spacers being located on sides of the gate and the second spacers being located on sides of the first spacers. The method includes forming the gates of the transistors, forming the first spacers, forming the second spacers, siliciding the gates so as to form the silicided portions of the gates, and removing the second spacers. The removal of the second spacers takes place during the silicidation of the gates and before the silicided portions are fully formed.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: March 12, 2024
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Fabrice Nemouchi, Clemens Fitz, Nicolas Posseme
  • Patent number: 11910609
    Abstract: A semiconductor memory device includes a substrate including a first to a fourth region, first conductive layers from the first to second region, second conductive layers from the fourth to second region, third conductive layers from the first to third region, fourth conductive layers from the fourth to third region, a first semiconductor column opposed to the first and third conductive layers in the first region, a second semiconductor column opposed to the second and fourth conductive layers in the fourth region, first and second contacts connected to the first and the second conductive layers in the second region, third and fourth contacts connected to the third and fourth conductive layers in the third region, first wirings connected to the first and second contacts in the second region, and second wirings connected to the third and fourth contacts in the third region.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: February 20, 2024
    Assignee: Kioxia Corporation
    Inventor: Masaki Unno
  • Patent number: 11908739
    Abstract: Advanced flat metals for microelectronics are provided. While conventional processes create large damascene features that have a dishing defect that causes failure in bonded devices, example systems and methods described herein create large damascene features that are planar. In an implementation, an annealing process creates large grains or large metallic crystals of copper in large damascene cavities, while a thinner layer of copper over the field of a substrate anneals into smaller grains of copper. The large grains of copper in the damascene cavities resist dishing defects during chemical-mechanical planarization (CMP), resulting in very flat damascene features. In an implementation, layers of resist and layers of a second coating material may be applied in various ways to resist dishing during chemical-mechanical planarization (CMP), resulting in very flat damascene features.
    Type: Grant
    Filed: November 13, 2020
    Date of Patent: February 20, 2024
    Assignee: ADEIA SEMICONDUCTOR TECHNOLOGIES LLC
    Inventor: Cyprian Emeka Uzoh
  • Patent number: 11910592
    Abstract: A capacitor may include a lower electrode, a dielectric layer structure on the lower electrode, and an upper electrode on the dielectric layer structure. The dielectric layer structure may include a plurality of dielectric layers and at least one insert layer structure between ones of the plurality of dielectric layers. The insert layer structure may include a plurality of zirconium oxide layers and at least one insert layer. The insert layer may be between ones of the plurality of zirconium oxide layers. The capacitor may have a high capacitance and low leakage currents.
    Type: Grant
    Filed: March 23, 2022
    Date of Patent: February 20, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyooho Jung, Dongkwan Baek, Cheoljin Cho
  • Patent number: 11901304
    Abstract: The disclosure provides an integrated circuit (IC) structure with fluorescent materials, and related methods. An IC structure according to the disclosure may include a layer of fluorescent material on an IC component. The layer of fluorescent material defines a portion of an identification marker for the IC structure.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: February 13, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Sunil K. Singh, Vibhor Jain, Siva P. Adusumilli, Sebastian T. Ventrone, Johnatan A. Kantarovsky, Yves T. Ngu
  • Patent number: 11895854
    Abstract: An imaging device includes at least one first pixel electrode, at least one second pixel electrode, a photoelectric converter continuously covering upper surfaces of the at least one first pixel electrode and the at least one second pixel electrode, a first counter electrode facing the at least one first pixel electrode, a second counter electrode facing the at least one second pixel electrode, and a sealing layer continuously covering upper surfaces of the first and second counter electrodes. In a plan view, a first portion of an upper surface of the photoelectric converter in an interelectrode region between the first counter electrode and the second counter electrode is more depressed than a second portion of the upper surface of the photoelectric converter in an overlap region overlapping the first counter electrode or the second counter electrode. The sealing layer is in contact with the photoelectric converter in the interelectrode region.
    Type: Grant
    Filed: June 27, 2022
    Date of Patent: February 6, 2024
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Takahiro Koyanagi, Yuuko Tomekawa
  • Patent number: 11881457
    Abstract: Various embodiments disclosed relate to a semiconductor package. The present semiconductor package includes a substrate. The substrate is formed from alternating conducting layers and dielectric layers. A first active electronic component is disposed on an external surface of the substrate, and a second active electronic component is at least partially embedded within the substrate. A first interconnect region is formed from a plurality of interconnects between the first active electronic component and the second active electronic component. Between the first active electronic component and the substrate a second interconnect region is formed from a plurality of interconnects. Additionally, a third interconnect region is formed from a plurality of interconnects between the second active electronic component and the substrate.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: January 23, 2024
    Assignee: Tahoe Research, Ltd.
    Inventors: Adel A. Elsherbini, Johanna M. Swan, Shawna M. Liff, Henning Braunisch, Krishna Bharath, Javier Soto Gonzalez, Javier A. Falcon
  • Patent number: 11882688
    Abstract: A semiconductor memory device comprises a substrate, first and second lower electrode groups on the substrate and including a plurality of first and second lower electrodes, respectively, and first and second support patterns on side walls of and connecting each of the first and second lower electrodes, respectively. The first lower electrodes include a first center lower electrode arranged within a hexagonal shape defined by first edge lower electrodes. The second lower electrodes include a second center lower electrode arranged within a hexagonal shape defined by second edge lower electrodes. The first center lower electrode is spaced apart from each of the first edge lower electrodes in different first to third directions. The first support pattern is immediately adjacent to the second support pattern. The first center lower electrode is spaced apart from the second center lower electrode in a fourth direction different from the first to third directions.
    Type: Grant
    Filed: August 17, 2021
    Date of Patent: January 23, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jung-Hoon Han, Je Min Park
  • Patent number: 11862666
    Abstract: A capacitor structure and a manufacturing method thereof are disclosed in this invention. The capacitor structure includes a first electrode, a second electrode, and a capacitor dielectric stacked layer. The capacitor dielectric stacked layer is disposed between the first electrode and the second electrode, and the capacitor dielectric stacked layer includes a first dielectric layer. The first dielectric layer includes a first zirconium oxide layer and a first zirconium silicon oxide layer. A manufacturing method of a capacitor structure includes the following steps. A capacitor dielectric stacked layer is formed on a first electrode, and the capacitor dielectric stacked layer includes a first dielectric layer. The first dielectric layer includes a first zirconium oxide layer and a first zirconium silicon oxide layer. Subsequently, a second electrode is formed on the capacitor dielectric stacked layer, and the capacitor dielectric stacked layer is located between the first electrode and the second electrode.
    Type: Grant
    Filed: December 5, 2021
    Date of Patent: January 2, 2024
    Assignee: Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Chia-Wei Wu, Yu-Cheng Tung
  • Patent number: 11860404
    Abstract: A manufacturing method of a reflective display includes at least the following steps. A reflective display module having a display surface is provided. An adhesive is formed on the display surface of the reflective display module. A plurality of microstructures is formed on the adhesive. A cover plate is provided over the reflective display module, the microstructures, and the adhesive. The cover plate has a first surface, a second surface, and a third surface. The second surface is located between the first surface and the reflective display module, and the third surface is connected to the first surface and the second surface. The second surface of the cover plate is adhered to the adhesive having the microstructures thereon to bond the microstructures onto the second surface of the cover plate. A light source is disposed adjacent to the third surface of the cover plate.
    Type: Grant
    Filed: March 10, 2023
    Date of Patent: January 2, 2024
    Assignee: E Ink Holdings Inc.
    Inventors: Chang-Cheng Lo, Yue-Feng Lin