Patents Examined by Molly K Reida
  • Patent number: 11744078
    Abstract: A semiconductor device includes a substrate having a first region and a second region, gate electrodes stacked and spaced apart from each other in a first direction, perpendicular to an upper surface of the substrate in the first region and extending in different lengths along a second direction, perpendicular to the first direction in the second region, first separation regions penetrating the gate electrodes in the first and second regions, extending in the second direction, and spaced apart from each other in a third direction, perpendicular to the first and second directions, second separation regions penetrating the gate electrodes in the second region and spaced apart from each other in the second direction between the separation regions, and a first vertical structure penetrating the gate electrodes in the second region and closest to the first region, wherein a width of the second separation regions in the third direction is greater than a width of the first vertical structure, a first end point of th
    Type: Grant
    Filed: October 30, 2020
    Date of Patent: August 29, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dawoon Jeong, Youngwoo Kim, Jaesung Kim, Hyoungryeol In
  • Patent number: 11735651
    Abstract: A method includes forming a fin on a substrate, forming an insulating material over the fin, recessing the insulating material to form an isolation region surrounding the fin, wherein an upper portion of the fin protrudes above the isolation region, performing a trimming process to reduce a width of the upper portion of the fin, and forming a gate structure extending over the isolation region and the upper portion of the fin.
    Type: Grant
    Filed: July 25, 2022
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Shu Wu, Ying-Ya Hsu, Ching-Yu Pan, Hsiu-Hao Tsao, An Chyi Wei, Yuan-Hung Chiu
  • Patent number: 11737275
    Abstract: A microelectronic device may include a source structure and a stack structure. The stack structure may include a vertically alternating sequence of insulative structures and conductive structures. Filled slits may extend through the stack structure and into the source structure, the slits dividing the stack structure into multiple blocks. Memory cell pillars may extend through the stack structure and into the source structure, the memory cell pillars and the filled slits terminated at substantially the same depth within the source structure as one another.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: August 22, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Collin Howder, Justin D. Shepherdson, Chet E. Carter
  • Patent number: 11735642
    Abstract: A method includes providing a layer of porous silicon carbide supported by a silicon carbide substrate, providing a layer of epitaxial silicon carbide on the layer of porous silicon carbide, forming a plurality of semiconductor devices in the layer of epitaxial silicon carbide, and separating the substrate from the layer of epitaxial silicon carbide at the layer of porous silicon carbide. Additional methods are described.
    Type: Grant
    Filed: May 7, 2021
    Date of Patent: August 22, 2023
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Roland Rupp, Francisco Javier Santos Rodriguez
  • Patent number: 11723202
    Abstract: A semiconductor memory device and a method for fabricating a semiconductor memory device, the device including a peripheral logic structure on a substrate; a horizontal conductive substrate on the peripheral logic structure; a stacked structure including a plurality of electrode pads stacked in a vertical direction; a plate contact plug connected to the horizontal conductive substrate; and a first penetration electrode connected to the lower connection wiring body, wherein upper surfaces of the plate contact plug and the first penetration electrode are on a same plane, the plate contact plug includes an upper part and a lower part directly connected to each other, the first penetration electrode includes an upper part and a lower part directly connected to each other, moving away from upper surfaces of the first penetration electrode and the plate contact plug, widths of the upper parts increase and widths of the lower parts decrease.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: August 8, 2023
    Inventors: Ga Eun Kim, Yoon Hwan Son, Sung Won Cho, Joo Hee Park
  • Patent number: 11723225
    Abstract: An imaging device including a semiconductor substrate including a first surface that receives light from outside, and a second surface opposite to the first surface; a first transistor located on the second surface; and a photoelectric converter that faces the second surface and that receives light transmitted through the semiconductor substrate. The semiconductor substrate is a silicon substrate or a silicon compound substrate, and the photoelectric converter includes a first electrode electrically connected to the first transistor, a second electrode, and a photoelectric conversion layer that is located between the first electrode and the second electrode and that contains a material which absorbs light having a first wavelength longer than or equal to 1.1 ?m, and the material has a quantum nanostructure.
    Type: Grant
    Filed: December 15, 2022
    Date of Patent: August 8, 2023
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Takeyoshi Tokuhara, Sanshiro Shishido, Yasuo Miyake, Shinichi Machida
  • Patent number: 11716840
    Abstract: A semiconductor device including a substrate; bottom electrodes on the substrate, each bottom electrode including a first region and a second region, the second region containing an additional element relative to the first region; a first supporting pattern on the substrate and in contact with a portion of a side surface of each bottom electrode; a top electrode on the bottom electrodes; a dielectric layer between the bottom electrodes and the top electrode; and a capping layer between the bottom electrodes and the dielectric layer, the capping layer covering a top surface and a bottom surface of the first supporting pattern, wherein the second region is in contact with the capping layer, and the capping layer and the dielectric layer include different materials from each other.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: August 1, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kyooho Jung, Yukyung Shin, Jinho Lee
  • Patent number: 11715815
    Abstract: An optoelectronic semiconductor device may include a first semiconductor layer, a second semiconductor layer, first and second current spreading structures, and an insulating intermediate layer. The second semiconductor layer may be arranged over a substrate. The first semiconductor layer may be arranged between the second semiconductor layer and the substrate. The first current spreading structure may be electrically connected to the first semiconductor layer, and the second current spreading structure electrically may be connected to the second semiconductor layer. The insulating intermediate layer may include a dielectric mirror and may be arranged between the second current spreading structure and the second semiconductor layer. The current spreading structures may overlap one another in a plane perpendicular to a main surface of the substrate. The first current spreading structure may be arranged at a larger distance from the first semiconductor layer than the second current spreading structure.
    Type: Grant
    Filed: May 8, 2019
    Date of Patent: August 1, 2023
    Assignee: OSRAM OLED GMBH
    Inventors: Michael Völkl, Siegfried Herrmann
  • Patent number: 11715635
    Abstract: A method comprises providing a substrate comprising an n-type Al/In/GaN semiconductor material. A surface of the substrate is dry-etched to form a trench therein and cause dry-etch damage to remain on the surface. The surface of the substrate is immersed in an electrolyte solution and illuminated with above bandgap light having a wavelength that generates electron-hole pairs in the n-type Al/In/GaN semiconductor material, thereby photoelectrochemically etching the surface to remove at least a portion of the dry-etch damage.
    Type: Grant
    Filed: November 12, 2021
    Date of Patent: August 1, 2023
    Inventors: Morteza Monavarian, Daniel Feezell, Andrew Aragon, Saadat Mishkat-Ul-Masabih, Andrew Allerman, Andrew Armstrong, Mary Crawford
  • Patent number: 11705478
    Abstract: A display device includes a first pixel including a first light emitting area in which first light emitting elements are arranged, a second pixel including a second light emitting area in which second light emitting elements are arranged, a light blocking pattern disposed on the first and second pixels to overlap a peripheral area of the first and second light emitting areas and including a first opening corresponding to the first light emitting area and a second opening corresponding to the second light emitting area, and a color filter including a first color filter pattern disposed in the first opening and a second color filter pattern disposed in the second opening. The second pixel includes a greater number of second light emitting elements than a number of the first light emitting elements. The second opening has an area smaller than an area of the first opening.
    Type: Grant
    Filed: February 19, 2021
    Date of Patent: July 18, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jong Chan Lee, Jeong Nyun Kim, Jung Gun Nam, Sung Geun Bae, Sung Jin Lee, Tae Hee Lee
  • Patent number: 11696431
    Abstract: A semiconductor device includes a substrate, a lower electrode provided over the substrate, a capacitive insulating film, and an upper electrode provided over the lower electrode, wherein the lower electrode has an upper portion and a lower portion, and at a boundary between the upper portion and the lower portion, the diameter of the upper portion is smaller than the diameter of the lower portion.
    Type: Grant
    Filed: December 31, 2021
    Date of Patent: July 4, 2023
    Assignee: Micron Technology, Inc.
    Inventor: Akira Kaneko
  • Patent number: 11688642
    Abstract: Aspects of the present disclosure provide a method for forming a chiplet onto a semiconductor structure. The method can include providing a first semiconductor structure having a first circuit and a first wiring structure formed on a first side thereof, and attaching the first side to a carrier substrate. The method can further include forming a composite of a first stress film and a second stress film on a second side of the first semiconductor structure, and separating the carrier substrate from the first semiconductor structure. The method can further include cutting the composite of the first stress film and the second stress film and the first semiconductor structure to define at least one chiplet, and bonding the at least one chiplet to a second semiconductor structure that has a second circuit and a second wiring structure such that the second wiring structure is connected to the first wiring structure.
    Type: Grant
    Filed: September 27, 2021
    Date of Patent: June 27, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Anton J. Devilliers, Daniel J. Fulford, Anthony R. Schepis, Mark I. Gardner, H. Jim Fulford
  • Patent number: 11688799
    Abstract: Provided is an IGBT device. The IGBT device includes an MOSFET cell array, where each MOSFET cell includes a p-type body region located at the top of an n-type drift region, an n-type emitter region located in the p-type body region, and a gate dielectric layer, a gate electrode and an n-type floating gate which are located above the p-type body region. The gate electrode is located above the gate dielectric layer, the n-type floating gate is located above the gate dielectric layer, and the gate electrode acts on the n-type floating gate through capacitive coupling. The n-type floating gate of at least one MOSFET cell is isolated from the p-type body region through the gate dielectric layer, and the n-type floating gate of at least one MOSFET cell contacts the p-type body region through an opening in the gate dielectric layer to form a p-n junction diode.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: June 27, 2023
    Assignee: SUZHOU ORIENTAL SEMICONDUCTOR CO., LTD.
    Inventors: Yi Gong, Wei Liu, Lei Liu, Zhendong Mao, Xin Wang
  • Patent number: 11676870
    Abstract: A stacked-layer body including a gate insulating film and a control gate electrode is formed in a product region and a scribe region. Next, a gate insulating film and a conductive film are so formed that the stacked-layer body is covered. Next, an etching process is so performed to the conductive film that an upper surface of the conductive film is lower than that of an upper surface of the stacked-layer body, thereby forming a measurement pattern in the scribe region. Next, a memory gate electrode is formed by patterning the conductive film in the product region. Next, a silicide layer is formed on an upper surface of the memory gate electrode in the product region in a state where an upper surface of the measurement pattern is covered by an insulating film. Next, a resistance value of the measurement pattern covered by the insulating film is measured.
    Type: Grant
    Filed: September 16, 2021
    Date of Patent: June 13, 2023
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Kounosuke Tateishi, Hiroaki Mizushima
  • Patent number: 11670499
    Abstract: A method of forming a semiconductor device includes forming a first conductive feature on a bottom surface of an opening through a dielectric layer. The forming the first conductive feature leaves seeds on sidewalls of the opening. A treatment process is performed on the seeds to form treated seeds. The treated seeds are removed with a cleaning process. The cleaning process may include a rinse with deionized water. A second conductive feature is formed to fill the opening.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Wei Chang, Min-Hsiu Hung, Chun-I Tsai, Ken-Yu Chang, Yi-Ying Liu
  • Patent number: 11646069
    Abstract: A method for forming a semiconductor structure is disclosed. A substrate having a logic device region and a memory device region is provided. A first dielectric layer is formed on the substrate. Plural memory stack structures are formed on the first dielectric layer on the memory device region. An insulating layer is formed and conformally covers the memory stack structures and the first dielectric layer. An etching back process is performed to remove a portion of the insulating layer without exposing any portion of the memory stack structures. After the etching back process, a second dielectric layer is formed on the insulating layer and completely fills the spaces between the memory stack structures.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: May 9, 2023
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hui-Lin Wang, Yu-Ping Wang, Chen-Yi Weng, Chin-Yang Hsieh, Yi-Hui Lee, Ying-Cheng Liu, Yi-An Shih, I-Ming Tseng, Jing-Yin Jhang, Chien-Ting Lin
  • Patent number: 11647629
    Abstract: A method for forming a 3D memory device is disclosed. A gate electrode having an inverted “T” shape is formed above a substrate. A continuous blocking layer is formed on the gate electrode. A continuous charge trapping layer is formed on the blocking layer. A first thickness of a first part of the charge trapping layer extending laterally is greater than a second thickness of a second part of the charge trapping layer extending vertically. The second part of the charge trapping layer extending vertically is removed to form a plurality of discrete charge trapping layers disposed at different levels on the blocking layer from the first part of the charge trapping layer extending laterally. A continuous tunneling layer is formed on the discrete charge trapping layers. A continuous channel layer is formed on the tunneling layer.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: May 9, 2023
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventor: Hongbin Zhu
  • Patent number: 11646248
    Abstract: A semiconductor device comprises a substrate having a substrate top side, a substrate lateral side, and a substrate bottom side, an electronic device on the substrate top side, and an encapsulant on the substrate top side and contacting a lateral surface of the electronic device. The substrate comprises a conductive structure and a dielectric structure that extends comprising a protrusion in contact with the encapsulant. The conductive structure comprises a lead comprising a lead flank, the lead flank comprising a cavity and a conductive coating on a surface of the lead in the cavity. The conductive structure comprises a pad exposed at the substrate top side, embedded in the dielectric structure, and adjacent to the protrusion, to electrically couple with the electronic device via a first internal interconnect. Other examples and related methods are also disclosed herein.
    Type: Grant
    Filed: March 22, 2022
    Date of Patent: May 9, 2023
    Assignee: Amkor Technology Singapore Holding Pte. Ltd.
    Inventors: Won Bae Bang, Kwang Seok Oh, George Scott
  • Patent number: 11637139
    Abstract: A semiconductor device is provided. The semiconductor device includes a substrate and a light-collimating layer. The substrate has a plurality of pixels. The light-collimating layer is disposed on the substrate, and the light-collimating layer includes a transparent material layer, a first light-shielding layer, a second light-shielding layer and a plurality of transparent pillars. The transparent material layer covers the pixels. The first light-shielding layer is disposed on the substrate and the first light-shielding layer has a plurality of holes corresponding to the pixels. The second light-shielding layer is disposed on the first light-shielding layer. The transparent pillars are disposed in the second light-shielding layer.
    Type: Grant
    Filed: April 13, 2022
    Date of Patent: April 25, 2023
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Chung-Ren Lao, Chih-Cherng Liao, Shih-Hao Liu, Wu-Hsi Lu, Ming-Cheng Lo, Wei-Lun Chung, Chih-Wei Lin
  • Patent number: 11631630
    Abstract: Semiconductor devices having one or more vias filled with an electrically conductive material are disclosed herein. In one embodiment, a semiconductor device includes a semiconductor substrate having a first side, a plurality of circuit elements proximate to the first side, and a second side opposite the first side. A via can extend between the first and second sides, and a conductive material in the via can extend beyond the second side of the substrate to define a projecting portion of the conductive material. The semiconductor device can have a tall conductive pillar formed over the second side and surrounding the projecting portion of the conductive material, and a short conductive pad formed over the first side and electrically coupled to the conductive material in the via.
    Type: Grant
    Filed: February 12, 2021
    Date of Patent: April 18, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Anilkumar Chandolu, Wayne H. Huang, Sameer S. Vadhavkar