Patents Examined by Nikolay K Yushin
  • Patent number: 11869904
    Abstract: An array substrate, a method for fabricating the same, and a display device are provided. The method includes: forming a passivation layer on an array substrate, wherein the array substrate includes a thin film transistor and a conductive pad, and the passivation layer covers the thin film transistor and the conductive pad; forming a full-surface carbon film on the passivation layer; and patterning the carbon film and the passivation layer to remove the passivation layer and the carbon film corresponding to the conductive pad by a patterning process to obtain the array substrate.
    Type: Grant
    Filed: August 5, 2020
    Date of Patent: January 9, 2024
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    Inventor: Xiaobo Hu
  • Patent number: 11862642
    Abstract: A display panel, an array substrate, and a manufacturing method thereof, wherein the array substrate includes a thin film transistor device, and an interface layer, a first transparent conductive layer, a passivation layer, and a second transparent conductive layer which are formed on the thin film transistor device in sequence. By replacing a planarization layer in the prior art with the interface layer, performing a gate re-etching process, and perforating the interface layer and the passivation layer to simultaneously form a deep via and a shallow via, a number of photomasks required to form the array substrate is reduced to 8. It effectively reduces costs of production materials and costs of photomasks.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: January 2, 2024
    Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
    Inventors: Juncheng Xiao, Yong Xu, Fei Ai, Dewei Song
  • Patent number: 11862711
    Abstract: The present disclosure provides a method for fabricating a thin film transistor substrate, which includes: sequentially depositing a light shielding layer pattern, a buffer layer, an active layer pattern, a gate insulating layer, and a gate layer; wet etching the gate layer to form a gate layer pattern with a photoresist; stripping off the photoresist; forming a protective layer covering the gate layer pattern; etching the gate insulating layer to form a gate insulating layer pattern; and metalizing a non-channel region of the active layer pattern. This method can ensure that an orthographic projection of the gate layer pattern on the substrate completely coincides with that of the gate insulating pattern. Therefore, the entire active layer pattern is regulated by the gate layer pattern, thereby improving a turn-on current of a thin film transistor.
    Type: Grant
    Filed: October 22, 2019
    Date of Patent: January 2, 2024
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    Inventors: Ziran Li, Qianyi Zhang
  • Patent number: 11856879
    Abstract: A selector device for a memory cell in a memory array may include a first electrode, and a separator that include a first region of a single-composition layer of a mixed ionic-electronic conduction material with a first concentration of defects; and a second region of a single-composition layer of a transitional metal oxide with a second concentration of defects that is different from the first concentration of defects. The selector device may also include a second electrode, where the separator is between the first electrode and the second electrode.
    Type: Grant
    Filed: October 25, 2021
    Date of Patent: December 26, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Milan Pe{hacek over (s)}ic, Andrea Padovani, Bastien Beltrando
  • Patent number: 11855226
    Abstract: A thin film transistor, a semiconductor device having a thin film transistor and a method of fabricating a thin film transistor are provided. The thin film transistor includes a gate metal; a gate dielectric layer disposed on the gate metal; a semiconductor layer disposed on the gate dielectric layer; an interlayer dielectric disposed on the semiconductor layer and having a contact hole over the semiconductor layer; a source/drain metal disposed in the contact hole; a first liner disposed between the interlayer dielectric and the source/drain metal; and a second liner disposed between the first liner and the source/drain metal and being in contact with the semiconductor layer in the contact hole.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Neil Quinn Murray, Hung-Wei Li, Mauricio Manfrini, Sai-Hooi Yeong
  • Patent number: 11855102
    Abstract: The purpose of the present invention is to improve reliability of the TFT of the oxide semiconductor. The feature of the invention is: A display device comprising: a substrate including a display area where plural pixels are formed, the pixel includes a first TFT of a first oxide semiconductor, a first gate insulating film is formed under the first oxide semiconductor, a first gate electrode is formed under the first gate insulating film, an interlayer insulating film is formed on the first oxide semiconductor; a drain wiring, which connects with the first oxide semiconductor, and a source wiring, which connects with the first oxide semiconductor, are formed on the interlayer insulating film; the drain wiring or the source wiring is a laminated structure of a second oxide semiconductor and a first metal, the second oxide semiconductor is under the first metal.
    Type: Grant
    Filed: June 3, 2022
    Date of Patent: December 26, 2023
    Assignee: Japan Display Inc.
    Inventor: Yohei Yamaguchi
  • Patent number: 11848341
    Abstract: A highly sensitive imaging device that can perform imaging even under a low illuminance condition is provided. One electrode of a photoelectric conversion element is electrically connected to one of a source electrode and a drain electrode of a first transistor and one of a source electrode and a drain electrode of a third transistor. The other of the source electrode and the drain electrode of the first transistor is electrically connected to a gate electrode of the second transistor. The other electrode of the photoelectric conversion element is electrically connected to a first wiring. A gate electrode of the first transistor is electrically connected to a second wiring. When a potential supplied to the first wiring is HVDD, the highest value of a potential supplied to the second wiring is lower than HVDD.
    Type: Grant
    Filed: September 1, 2020
    Date of Patent: December 19, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Yoshiyuki Kurokawa
  • Patent number: 11848332
    Abstract: A semiconductor die includes a semiconductor substrate and a transistor array disposed over the semiconductor substrate. The transistor array includes unit cells and spacers. The unit cells are disposed along rows of the transistor array extending in a first direction and columns of the transistor array extending in a second direction perpendicular to the first direction. The spacers encircle the unit cells. The unit cells include source contacts and drain contacts separated by interlayer dielectric material portions. First sections of the spacers contacting the interlayer dielectric material portions are thicker than second sections of the spacers contacting the source contacts and the drain contacts.
    Type: Grant
    Filed: July 23, 2021
    Date of Patent: December 19, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Gao-Ming Wu, Katherine H. Chiang, Chien-Hao Huang, Chung-Te Lin
  • Patent number: 11843056
    Abstract: A semiconductor structure is provided. The semiconductor structure may include a transistor structure, the transistor structure may include a gate region arranged over an upper surface of a substrate and extending substantially in a first direction that is perpendicular to the upper surface of the substrate; a first source/drain region over the upper surface of the substrate; a second source/drain region over the upper surface of the substrate; and a channel region vertically extending in the first direction between the first source/drain region and the second source/drain region, wherein the channel region comprises an oxide semiconductor material. Along the first direction, the gate region covers a sidewall of the channel region.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: December 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Neil Quinn Murray, Katherine H. Chiang, Chung-Te Lin
  • Patent number: 11843059
    Abstract: A novel semiconductor device is provided. A component extending in a first direction, and a first conductor and a second conductor extending in a second direction are provided. The component includes a third conductor, a first insulator, a first semiconductor, and a second insulator. In a first intersection portion of the component and the first conductor, the first insulator, the first semiconductor, the second insulator, a second semiconductor, and a third insulator are provided concentrically. In a second intersection portion of the component and the second conductor, the first insulator, the first semiconductor, the second insulator, a fourth conductor, and a fourth insulator are provided concentrically around the third conductor.
    Type: Grant
    Filed: April 4, 2022
    Date of Patent: December 12, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hajime Kimura, Hitoshi Kunitake
  • Patent number: 11830881
    Abstract: An array substrate, a manufacturing method thereof, and a display panel are provided. The array substrate includes at least one anti-radiation layer including a light incident side and a light-emitting side. The light-emitting side is positioned adjacent to an oxide semiconductor layer, the light incident side is configured to allow high energy light waves to enter the anti-radiation layer, the anti-radiation layer is configured to convert the high energy light waves into visible light, and the light-emitting side is configured to allow the visible light to enter the oxide semiconductor layer, thereby improving light stability of oxide semiconductors.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: November 28, 2023
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    Inventors: Miao Duan, Dongze Li
  • Patent number: 11825703
    Abstract: A display device includes a substrate, a first transistor including a channel on the substrate, a first electrode and a second electrode, and a gate electrode overlapping the channel of the first transistor, a first interlayer insulation layer on the first and second electrodes of the first transistor, a second transistor including a channel disposed on the first interlayer insulation layer, a first electrode and a second electrode of the second transistor, and a gate electrode that overlaps the channel of the second transistor, a first connection electrode disposed on the first interlayer insulation layer, and connected with the first electrode of the first transistor, a gate insulation layer disposed between the first interlayer insulation layer and the first connection electrode, and a second connection electrode that connects the first connection electrode and the first electrode of the second transistor.
    Type: Grant
    Filed: April 28, 2021
    Date of Patent: November 21, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jay Bum Kim, Myeong Ho Kim, Yeon Hong Kim, Kyoung Seok Son, Sun Hee Lee, Seung Jun Lee, Seung Hun Lee, Jun Hyung Lim
  • Patent number: 11824063
    Abstract: An object of the present invention is to provide a technology using which, in a thin film transistor using oxide semiconductor, the resistance of a channel region of the oxide semiconductor is made high, and at the same time the resistances of a source region and a drain region of the oxide semiconductor are made low. There is provided a semiconductor device including: a thin film transistor including oxide semiconductor, the oxide semiconductor including a channel region, a drain region, and a source region; a gate insulating film formed on the channel region; an aluminum oxide film formed on the gate insulating film; and a gate electrode formed on the aluminum oxide film, wherein the aluminum oxide film has a region that covers neither the drain region nor the source region in a plane view.
    Type: Grant
    Filed: January 14, 2021
    Date of Patent: November 21, 2023
    Assignee: Japan Display Inc.
    Inventors: Akihiro Hanada, Toshihide Jinnai
  • Patent number: 11817509
    Abstract: A thin film transistor includes an active layer, a gate electrode spaced apart from and partially overlapped with the active layer, and a gate insulating film between the active layer and the gate electrode, wherein the active layer includes a channel portion overlapped with the gate electrode, a conductorization portion which is not overlapped with the gate electrode, and a gradient portion between the channel portion and the conductorization portion and not overlapped with the gate electrode, the conductorization portion and the gradient portion of the active layer are doped with a dopant, the gate insulating film covers an upper surface of the active layer facing the gate electrode during doping of the active layer, and in the gradient portion, a concentration of the dopant increases along a direction from the channel portion toward the conductorization portion. A display device may also include the thin film transistor.
    Type: Grant
    Filed: August 4, 2021
    Date of Patent: November 14, 2023
    Assignee: LG Display Co., Ltd.
    Inventor: JeongSuk Yang
  • Patent number: 11817453
    Abstract: A semiconductor device in which a circuit and a power storage element are efficiently placed is provided. The semiconductor device includes a first transistor, a second transistor, and an electric double-layer capacitor. The first transistor, the second transistor, and the electric double-layer capacitor are provided over one substrate. A band gap of a semiconductor constituting a channel region of the second transistor is wider than a band gap of a semiconductor constituting a channel region of the first transistor. The electric double-layer capacitor includes a solid electrolyte.
    Type: Grant
    Filed: March 4, 2022
    Date of Patent: November 14, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junpei Momo, Kazutaka Kuriki, Hiromichi Godo
  • Patent number: 11817485
    Abstract: Field effect transistors and method of making. The field effect transistors include a pair of active regions in a channel layer, a channel region located between the pair of active regions and a self-aligned passivation layer located on a surface of the pair of active regions.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: November 14, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Hung Wei Li, Mauricio Manfrini, Sai-Hooi Yeong, Yu-Ming Lin
  • Patent number: 11817505
    Abstract: When a semiconductor device including a transistor in which a gate electrode layer, a gate insulating film, and an oxide semiconductor film are stacked and a source and drain electrode layers are provided in contact with the oxide semiconductor film is manufactured, after the formation of the gate electrode layer or the source and drain electrode layers by an etching step, a step of removing a residue remaining by the etching step and existing on a surface of the gate electrode layer or a surface of the oxide semiconductor film and in the vicinity of the surface is performed. The surface density of the residue on the surface of the oxide semiconductor film or the gate electrode layer can be 1×1013 atoms/cm2 or lower.
    Type: Grant
    Filed: March 4, 2022
    Date of Patent: November 14, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Masahiko Hayakawa, Tatsuya Honda
  • Patent number: 11817462
    Abstract: A method for fabricating an array substrate, the array substrate, and a thin film transistor are provided. The thin film transistor includes a gate electrode, an active layer, a source electrode, a drain electrode, and an interlayer insulating layer. The active layer is disposed corresponding to the gate electrode. The source electrode and the drain electrode are disposed at both sides of the active layer and electrically connected to the active layer. The interlayer insulating layer is disposed between the active layer and the source electrode, and between the active layer and the drain electrode. The interlayer insulating layer is provided with step-shaped contact holes. The source electrode and the drain electrode are filled in the contact holes and electrically connected to the active layer.
    Type: Grant
    Filed: June 22, 2020
    Date of Patent: November 14, 2023
    Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
    Inventors: Jixiang Gong, Yixian Zhang, Wenxu Xianyu
  • Patent number: 11810879
    Abstract: A semiconductor structure includes a first contact pad over an interconnect structure. The semiconductor structure further includes a second contact pad over the interconnect structure, wherein the second contact pad is electrically separated from the first contact pad. The semiconductor structure further includes a first buffer layer over the first contact pad, wherein the first buffer layer is partially over the second contact pad, and an edge of the second contact pad farthest from the first contact pad extends beyond the first buffer layer.
    Type: Grant
    Filed: March 18, 2022
    Date of Patent: November 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Gulbagh Singh, Chih-Ming Lee, Chi-Yen Lin, Wen-Chang Kuo, C. C. Liu
  • Patent number: 11810850
    Abstract: In some implementations, a substrate for coupling to an integrated circuit includes multiple layers. Each of the multiple layers has, in a particular region of the substrate, a repeating pattern of regions corresponding to power and ground. The multiple layers include (i) a top layer having, in the particular region, power contacts and ground contacts for coupling to an integrated circuit and (ii) a bottom layer having, in the particular region, power contacts and ground contacts for coupling to another device. At least one layer of the multiple layers has a repeating pattern of signal traces that extend along and are located between the regions corresponding to ground in the at least one layer.
    Type: Grant
    Filed: March 1, 2022
    Date of Patent: November 7, 2023
    Assignee: Google LLC
    Inventors: Jin Young Kim, Zhonghua Wu