Patents Examined by Pamela E Perkins
  • Patent number: 9324705
    Abstract: A lateral bipolar junction transistor includes an emitter region; a base region surrounding the emitter region; a gate disposed at least over a portion of the base region; and a collector region surrounding the base region; wherein the portion of the base region under the gate does not under go a threshold voltage implant process.
    Type: Grant
    Filed: January 22, 2014
    Date of Patent: April 26, 2016
    Assignee: MEDIATEK INC.
    Inventors: Ching-Chung Ko, Tung-Hsing Lee
  • Patent number: 9318328
    Abstract: A method of forming a silicon film includes a first film forming process, an etching process, a doping process, and a second film forming process. In the first film forming process, a silicon film doped with impurities containing boron is formed so as to embed a groove provided on an object to be processed. In the etching process, the silicon film formed in the first film forming process is etched. In the doping process, the silicon film etched in the etching process is doped with impurities containing boron. In the second film forming process, a silicon film doped with impurities containing boron is formed so as to embed the silicon film that is doped in the doping process.
    Type: Grant
    Filed: May 24, 2013
    Date of Patent: April 19, 2016
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Katsuhiko Komori, Akinobu Kakimoto, Mitsuhiro Okada, Nobuhiro Takahashi
  • Patent number: 9318728
    Abstract: A manufacturing method for an organic light-emitting element includes: a first step of forming a first electrode, and forming an organic layer including a light-emitting layer; a second step of forming a second electrode, and thereby forming an element structure including the first electrode, the organic layer, and the second electrode; and a third step of performing an aging process by applying electric power between the first electrode and the second electrode in the element structure. a duration of the application of electric power in the third step is determined as the time elapsed before a time point at which a rate of decrease in a luminance of the light-emitting layer is substantially equal to a rate of decrease in a luminance of the element structure.
    Type: Grant
    Filed: May 27, 2011
    Date of Patent: April 19, 2016
    Assignee: JOLED INC.
    Inventor: Masaki Aonuma
  • Patent number: 9318697
    Abstract: In a method of detecting an etch by-product, the method including forming a magnetic layer including palladium (Pd) on a substrate; etching the magnetic layer to form a magnetic layer pattern; depositing a mixture including an alkyl bromide compound on a surface of the magnetic layer pattern; and measuring a current difference between the substrate and the mixture to detect an etch by-product on the surface of the magnetic layer pattern.
    Type: Grant
    Filed: August 1, 2014
    Date of Patent: April 19, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jin-Hye Bae, Won-Jun Lee, Sung-Yoon Chung, Taek-Dong Chung
  • Patent number: 9318525
    Abstract: A first pixel includes a first charge accumulation portion of a first conductivity type in a first region. A second pixel includes a second charge accumulation portion of the first conductivity type in a second region and a semiconductor region of a second conductivity type in a third region. Impurities of the second conductivity type are doped in the third region and the impurities of the second conductivity type are doped in at least the second region to generate a first difference between quantities of doping the impurities of the second conductivity type in the first and second regions. Impurities are doped in the first and second regions to reduce a second difference, caused by the first difference, between net quantities of doping impurities of the first conductivity type in the first and second regions.
    Type: Grant
    Filed: August 1, 2014
    Date of Patent: April 19, 2016
    Assignee: Canon Kabushiki Kaisha
    Inventor: Hideyuki Itoh
  • Patent number: 9318447
    Abstract: According to an exemplary embodiment, a method of forming a vertical structure with at least two barrier layers is provided. The method includes the following operations: providing a substrate; providing a vertical structure over the substrate; providing a first barrier layer over a source, a channel, and a drain of the vertical structure; and providing a second barrier layer over a gate and the drain of the vertical structure.
    Type: Grant
    Filed: July 18, 2014
    Date of Patent: April 19, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chih-Tang Peng, Tai-Chun Huang, Teng-Chun Tsai, Cheng-Tung Lin, De-Fang Chen, Li-Ting Wang, Chien-Hsun Wang, Huan-Just Lin, Yung-Cheng Lu, Tze-Liang Lee
  • Patent number: 9312227
    Abstract: A method of joining semiconductor substrates, which may include: forming an alignment key on a first semiconductor substrate; forming an insulating layer on the first semiconductor substrate and the alignment key; forming a first metal layer pattern and a second metal layer pattern on the insulating layer; forming a first protrusion and a second protrusion, and an alignment recess positioned between the first protrusion and the second protrusion on a second semiconductor substrate; forming a third metal layer pattern and a fourth metal layer pattern on the first protrusion and the second protrusion, respectively; and joining the first semiconductor substrate and the second semiconductor substrate, in which the alignment key is positioned at the alignment recess when the first semiconductor substrate and the second semiconductor substrate are joined, is provided.
    Type: Grant
    Filed: July 29, 2014
    Date of Patent: April 12, 2016
    Assignee: Hyundai Motor Company
    Inventors: Ilseon Yoo, Hiwon Lee, Soon-myung Kwon, Hyunsoo Kim
  • Patent number: 9312480
    Abstract: Some embodiments include a memory cell having a data storage region between a pair of conductive structures. The data storage region is configured to support a transitory structure which alters resistance through the memory cell. The data storage region includes two or more portions, with one of the portions supporting a higher resistance segment of the transitory structure than another of the portions. Some embodiments include a method of forming a memory cell. First oxide and second oxide regions are formed between a pair of conductive structures. The oxide regions are configured to support a transitory structure which alters resistance through the memory cell. The oxide regions are different from one another so that one of the oxide regions supports a higher resistance segment of the transitory structure than the other.
    Type: Grant
    Filed: July 3, 2014
    Date of Patent: April 12, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Sumeet C. Pandey
  • Patent number: 9312344
    Abstract: A method includes annealing a silicon region in an environment including hydrogen (H2) and hydrogen chloride (HCl) as process gases. After the step of annealing, a semiconductor region is grown from a surface of the silicon region.
    Type: Grant
    Filed: May 15, 2013
    Date of Patent: April 12, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Martin Christopher Holland, Georgios Vellianitis
  • Patent number: 9312169
    Abstract: Method for producing a microelectronic device formed from a stack of supports (W) each provided with one or more electronic components (C) and comprising a conductive structure (170, 470) formed from a first blind conductive via (171b, 472) and a second blind conductive via (171a, 473) with a greater height, the first via and the second via being connected together.
    Type: Grant
    Filed: August 7, 2014
    Date of Patent: April 12, 2016
    Assignee: Commissariat a l'energie atomique et aux energies alternatives
    Inventors: Christophe Bouvier, Gabriel Pares
  • Patent number: 9305846
    Abstract: Embodiments herein provide approaches for device isolation in a complimentary metal-oxide fin field effect transistor. Specifically, a semiconductor device is formed with a retrograde doped layer over a substrate to minimize a source to drain punch-through leakage. A set of replacement fins is formed over the retrograde doped layer, each of the set of replacement fins comprising a high mobility channel material (e.g., silicon, or silicon-germanium). The retrograde doped layer may be formed using an in situ doping process or a counter dopant retrograde implant. The device may further include a carbon liner positioned between the retrograde doped layer and the set of replacement fins to prevent carrier spill-out to the replacement fins.
    Type: Grant
    Filed: January 19, 2015
    Date of Patent: April 5, 2016
    Assignees: GlobalFoundries Inc., International Business Machines Corporation, Renesas Electronics Corporation
    Inventors: Ajey Poovannummoottil Jacob, Murat Kerem Akarvardar, Steven Bentley, Toshiharu Nagumo, Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz
  • Patent number: 9306110
    Abstract: Apparatuses and methods for synthesizing nanoscale materials are provided, including semiconductor nanowires. Precursor solutions include mixed reagent precursor solutions of metal and chalcogenide precursors and a catalyst, where such solutions are liquid at room temperature. The precursor solutions are mixed by dividing a solution flow into multiple paths and converging the paths to form a uniform solution. A thermally controlled reactor receives the uniform solution to form semiconductor nanowires. Various electronic, optical, and sensory devices may employ the semiconductor nanowires described herein, for example.
    Type: Grant
    Filed: July 29, 2014
    Date of Patent: April 5, 2016
    Assignee: US Nano LLC
    Inventors: Anthony C. Onicha, Louise E. Sinks, Stefanie L. Weber
  • Patent number: 9305922
    Abstract: A method of manufacturing a semiconductor device comprises forming an interlayer insulating film on a semiconductor substrate, the interlayer insulating film including a trench, forming a work function metal layer in the trench, forming an insulating film on the work function metal layer, forming a sacrificial film on the insulating film and filling the trench, forming a sacrificial film pattern with a top surface disposed in the trench by etching the sacrificial film, forming an insulating film pattern by selectively etching a portion of the insulating film which is formed higher than the sacrificial film pattern, and forming a work function metal pattern with a top surface disposed in the trench by selectively etching a portion of the work function metal layer which is formed higher than the insulating film pattern.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: April 5, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Ju-Youn Kim
  • Patent number: 9305937
    Abstract: A method of minimizing an overetch or damage to a semiconductor surface underneath a memory opening is provided. A first blocking dielectric layer is formed in a memory opening through a stack of an alternating plurality of material layers and insulator layers. A sacrificial liner is formed over the first blocking dielectric layer. An opening is formed through a horizontal portion of the sacrificial liner. A horizontal portion of the first blocking dielectric layer at a bottom of the memory opening can be etched through the opening in the sacrificial liner. A semiconductor surface of the substrate can be physically exposed at a bottom of the memory opening with minimal overetch and/or surface damage. A second blocking dielectric layer can be formed, before or after formation of the sacrificial liner, to provide a multilayer blocking dielectric.
    Type: Grant
    Filed: October 21, 2014
    Date of Patent: April 5, 2016
    Assignee: SANDISK TECHNOLOGIES INC.
    Inventors: Masanori Tsutsumi, Hiroshi Sasaki, Hiroyuki Ogawa, Michiaki Sano, Masato Miyamoto, Kensuke Yamaguchi, Seiji Shimabukuro
  • Patent number: 9299841
    Abstract: Semiconductor devices with reduced substrate defects and methods of manufacture are disclosed. The method includes forming at least one gate structure over a plurality of fin structures. The method further includes removing dielectric material adjacent to the at least one gate structure using a maskless process, thereby exposing an underlying epitaxial layer formed adjacent to the at least one gate structure. The method further includes depositing metal material on the exposed underlying epitaxial layer to form contact metal in electrical contact with source and drain regions, adjacent to the at least one gate structure. The method further includes forming active areas and device isolation after the formation of the contact metal, including the at least one gate structure. The active areas and the contact metal are self-aligned with each other in a direction parallel to the at least one gate structure.
    Type: Grant
    Filed: September 11, 2013
    Date of Patent: March 29, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Effendi Leobandung
  • Patent number: 9299562
    Abstract: Materials, methods, structures and device including the same can provide a semiconductor device such as an LED using an active region corresponding to a non-polar face or surface of III-V semiconductor crystalline material. In some embodiments, an active diode region contains more non-polar III-V material oriented to a non-polar plane than III-V material oriented to a polar plane. In other embodiments, a bottom region contains more non-polar m-plane or a-plane surface area GaN than polar c-plane surface area GaN facing an active region.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: March 29, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Anthony J. Lochtefeld
  • Patent number: 9293369
    Abstract: An embodiment 3DIC device includes a semiconductor chip, a die, and a polymer. The semiconductor chip includes a semiconductor substrate, wherein the semiconductor substrate comprises a first edge, and a dielectric layer over the semiconductor substrate. The die is disposed over and bonded to the semiconductor chip. The polymer is molded onto the semiconductor chip and the die. The polymer includes a portion level with the dielectric layer, wherein the portion of the polymer comprises a second edge vertically aligned to the first edge of the semiconductor substrate and a third edge contacting the dielectric layer, wherein the second and the third edges are opposite edges of the portion of the polymer.
    Type: Grant
    Filed: May 12, 2014
    Date of Patent: March 22, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Wei Wu, Szu Wei Lu, Jing-Cheng Lin, Shin-Puu Jeng, Chen-Hua Yu
  • Patent number: 9276172
    Abstract: It is provided a method of manufacturing a display device for which the damage caused to the display panel due to processing at high temperatures is reduced. The method of manufacturing a display device includes: preparing a carrier substrate including a surface treated region; laying a mother substrate on the carrier substrate; progressing a process of forming a thin film on the mother substrate; and separating the carrier substrate from the mother substrate by using the surface treated region as an initial separation point. Bonding is formed between the carrier substrate and the mother substrate during forming the thin film over the areas that are not surface treated. The two substrates may be separated by disposing permeating oil on the surface treated region wherefrom oil permeates through the remaining regions by osmotic pressure. This way damage caused to the display panel during thin film processing is reduced.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: March 1, 2016
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jong Hwan Lee, Young Bae Kim, Jong Seong Kim, Tae Hwan Kim, Myeong Hee Kim, Woo Jae Lee
  • Patent number: 9275890
    Abstract: One illustrative method disclosed herein includes forming a plurality of spaced-apart fin structures in a semiconductor substrate, wherein the fin structures define a portion of an alignment/overlay mark trench where at least a portion of an alignment/overlay mark will be formed, forming at least one layer of insulating material that overfills the alignment/overlay mark trench and removing excess portions of the layer of insulating material positioned above an upper surface of the plurality of fins to thereby define at least a portion of the alignment/overlay mark positioned within the alignment/overlay mark trench. A device disclosed herein includes a plurality of spaced-apart fin structures formed in a semiconductor substrate so as to partially define an alignment/overlay mark trench, an alignment/overlay mark consisting only of at least one insulating material positioned within the alignment/overlay mark trench, and a plurality of FinFET semiconductor devices formed in and above the substrate.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: March 1, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Andy C. Wei, Jeong Soo Kim, Francis M. Tambwe
  • Patent number: 9275902
    Abstract: Approaches for front side laser scribe plus backside bump formation and laser scribe and plasma etch dicing process are described. For example, a method of dicing a semiconductor wafer having integrated circuits on a front side thereof involves forming first scribe lines on the front side, between the integrated circuits, with a first laser scribing process. The method also involves forming arrays of metal bumps on a backside of the semiconductor wafer, each array corresponding to one of the integrated circuits. The method also involves forming second scribe lines on the backside, between the arrays of metal bumps, with a second laser scribing process, wherein the second scribe lines are aligned with the first scribe lines. The method also involves plasma etching the semiconductor wafer through the second scribe lines to singulate the integrated circuits.
    Type: Grant
    Filed: March 26, 2014
    Date of Patent: March 1, 2016
    Assignee: Applied Materials, Inc.
    Inventors: Wei-Sheng Lei, James S. Papanu, Aparna Iyer, Brad Eaton, Ajay Kumar