Patents Examined by Reema Patel
  • Patent number: 11817503
    Abstract: A device includes a substrate, a shallow trench isolation (STI) structure, an isolation structure, and a gate stack. The substrate has a semiconductor fin. The shallow trench isolation (STI) structure is over the substrate and laterally surrounding the semiconductor fin. The isolation structure is disposed on a top surface of the STI structure. The gate stack crosses the semiconductor fin, over the STI structure, and in contact with a sidewall the isolation structure, in which the gate stack includes a high-k dielectric layer extending from a sidewall of the semiconductor fin to the top surface of the STI structure and terminating prior to reaching the sidewall of the isolation structure, and the high-k dielectric layer is in contact with the top surface of the STI structure. The gate stack includes a gate electrode over the high-k dielectric layer and in contact with the sidewall of the isolation structure.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: November 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Che-Cheng Chang, Chih-Han Lin
  • Patent number: 11810959
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a substrate. An isolation structure is arranged within the substrate and surrounds an upper surface of the substrate. The isolation structure includes one or more surfaces defining one or more trenches that are laterally between the isolation structure and the substrate. A conductive gate is over the substrate and laterally between a source region and a drain region disposed within the upper surface of the substrate. The conductive gate extends into the one or more trenches and has an upper surface that continuously extends past opposing sides of the one or more trenches.
    Type: Grant
    Filed: June 1, 2022
    Date of Patent: November 7, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Han Lin, Te-Hsin Chiu, Wei Cheng Wu
  • Patent number: 11810822
    Abstract: Apparatuses including structures in scribe lines are described. An example apparatus includes: a first chip and a second chip; a scribe region between the first chip and the second chip; a crack guide region in the scribe region, the crack guide region including a dicing line along which the first chip and the second chip are to be divided; and a structure disposed in the crack guide region and extending along the dicing line.
    Type: Grant
    Filed: September 22, 2021
    Date of Patent: November 7, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Shigeru Sugioka, Keizo Kawakita, Raj K. Bansal, Tsung Che Tsai
  • Patent number: 11810783
    Abstract: A gallium nitride semiconductor device includes: a chip formation substrate made of gallium nitride and having one surface and an other surface opposite to the one surface; a one surface side element component disposed on the one surface and providing a component of an one surface side of a semiconductor element; and a metal film constituting a back surface electrode in contact with the other surface. The other surface has an irregularity provided by a plurality of convex portions with a trapezoidal cross section and a plurality of concave portions located between the convex portions; and an upper base surface of the trapezoidal cross section in each of the plurality of convex portions is opposed to the one surface.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: November 7, 2023
    Assignees: DENSO CORPORATION, HAMAMATSU PHOTONICS K.K., National University Corporation Tokai National Higher Education and Research System
    Inventors: Chiaki Sasaoka, Jun Kojima, Shoichi Onda, Masatake Nagaya, Kazukuni Hara, Daisuke Kawaguchi
  • Patent number: 11804374
    Abstract: Strain relief trenches may be formed in a substrate prior to growth of an epitaxial layer on the substrate. The trenches may reduce the stresses and strains on the epitaxial layer that occur during the epitaxial growth process due to differences in material properties (e.g., lattice mismatches, differences in thermal expansion coefficients, and/or the like) between the epitaxial layer material and the substrate material. The stress and strain relief provided by the trenches may reduce or eliminate cracks and/or other types of defects in the epitaxial layer and the substrate, may reduce and/or eliminate bowing and warping of the substrate, may reduce breakage of the substrate, and/or the like. This may increase the center-to-edge quality of the epitaxial layer, may permit epitaxial layers to be grown on larger substrates, and/or the like.
    Type: Grant
    Filed: October 27, 2020
    Date of Patent: October 31, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Chuan Lo, Pravanshu Mohanta, Jiang-He Xie, Ching Yu Chen, Ming-Tsung Chen, Chia-Ling Yeh
  • Patent number: 11798965
    Abstract: Provided is a solid-state imaging device capable of reducing bonding defects when two substrates are bonded to each other, and a method for manufacturing the solid-state imaging device. The solid-state imaging device includes a first substrate including a first electrode formed with a metal, and a second substrate that is a substrate bonded to the first substrate, the second substrate including a second electrode formed with a metal, the second electrode being bonded to the first electrode. In at least one of the first substrate or the second substrate, a diffusion preventing layer of the metal is formed for a layer formed with the metal filling a hole portion, the metal forming the electrodes.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: October 24, 2023
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventor: Masanaga Fukasawa
  • Patent number: 11784228
    Abstract: A method includes providing a structure having source/drain electrodes and a first dielectric layer over the source/drain electrodes; forming a first etch mask covering a first area of the first dielectric layer; performing a first etching process to the first dielectric layer, resulting in first trenches over the source/drain electrodes; filling the first trenches with a second dielectric layer that has a different material than the first dielectric layer; removing the first etch mask; performing a second etching process including isotropic etching to the first area of the first dielectric layer, resulting in a second trench above a first one of the source/drain electrodes; depositing a metal layer into at least the second trench; and performing a chemical mechanical planarization (CMP) process to the metal layer.
    Type: Grant
    Filed: June 3, 2021
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Huan Jao, Lin-Yu Huang, Sheng-Tsung Wang, Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang
  • Patent number: 11784175
    Abstract: An optoelectronic assembly and methods of fabrication thereof are provided. The assembly includes a mold compound; a photonic integrated circuit (PIC) embedded in the mold compound, that has a face exposed from the mold compound in a first plane; an interposer embedded in the mold compound, that has a face exposed from the mold compound in the first plane (i.e., co-planar with the exposed face of the PIC); and an electrical integrated circuit (EIC) coupled to the exposed face of the PIC and the exposed face of the interposer, that establishes bridging electrical connections between the PIC and the interposer.
    Type: Grant
    Filed: May 13, 2021
    Date of Patent: October 10, 2023
    Assignee: Cisco Technology, Inc.
    Inventors: Matthew J. Traverso, Sandeep Razdan, Ashley J. Maker
  • Patent number: 11784045
    Abstract: A semiconductor device is provided. The semiconductor device includes a template layer disposed over a substrate and having a trench therein, a buffer structure disposed over a bottom surface of the trench and comprising a metal oxide, a single crystal semiconductor structure disposed within the trench and over the buffer structure and a gate structure disposed over a channel region of the single crystal semiconductor structure.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: October 10, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Martin Christopher Holland
  • Patent number: 11776882
    Abstract: A method includes: arranging a semiconductor device on a redistribution substrate, the device having a first power electrode and a control electrode on a first surface and a second power electrode on a second surface, the redistribution substrate having an insulating board having a first major surface and a second major surface having solderable contact pads, so that the first power electrode is arranged on a first conductive pad and the control electrode is arranged on a second conductive pad on the first major surface; arranging a contact clip such that a web portion is arranged on the second power electrode and a peripheral rim portion is arranged on a third conductive pad on the first major surface; and electrically coupling the first power electrode, control electrode and peripheral rim portion to the respective conductive pads and electrically coupling the web portion to the second power electrode.
    Type: Grant
    Filed: April 4, 2022
    Date of Patent: October 3, 2023
    Assignee: Infineon Technologies Austria AG
    Inventors: Markus Dinkel, Petteri Palm, Eung San Cho, Josef Hoeglauer, Ralf Otremba, Fabian Schnoy
  • Patent number: 11769797
    Abstract: A nanosheet semiconductor device and fabrication method are described for integrating the fabrication of nanosheet transistors (71) and capacitors/sensors (72) in a single nanosheet process flow by forming separate transistor and capacitor/sensor stacks (12A-16A, 12B-16B) which are selectively processed to form gate electrode structures (68A-C) which replace remnant SiGe sandwich layers in the transistor stack, to form silicon fixed electrodes using silicon nanosheets (13C, 15C) on a first side of the capacitor/sensor stack, and to form SiGe fixed electrodes using SiGe nanosheets (12C, 14C, 16C) from the middle of remnant SiGe sandwich layers in the capacitor/sensor stack (e.g., 16-2) which are separated from the silicon fixed electrodes by selectively removing top and bottom SiGe nanosheets (e.g., 16-1, 16-3) from the remnant SiGe sandwich layers in the capacitor/sensor stack.
    Type: Grant
    Filed: March 25, 2021
    Date of Patent: September 26, 2023
    Assignee: NXP B.V.
    Inventors: Tushar Praful Merchant, Mark Douglas Hall, Anirban Roy
  • Patent number: 11764224
    Abstract: Provided is a semiconductor integrated circuit device including a nanowire field effect transistor (FET) and having a layout configuration effective for making manufacturing the device easy. A standard cell having no logical function is disposed adjacent to a standard cell having a logical function. The standard cell includes nanowire FETs having nanowires and pads. The standard cell further includes dummy pads, which have no contribution to a logical function of a circuit.
    Type: Grant
    Filed: August 15, 2022
    Date of Patent: September 19, 2023
    Assignee: SOCIONEXT INC.
    Inventor: Hiroyuki Shimbo
  • Patent number: 11758732
    Abstract: Embodiments of through array contact structures of a 3D memory device and fabricating method thereof are disclosed. The memory device includes an alternating layer stack disposed on a first substrate. The alternating layer stack includes a first region including an alternating dielectric stack, and a second region including an alternating conductor/dielectric stack. The memory device further comprises a barrier structure including two parallel barrier walls extending vertically through the alternating layer stack and laterally along a word line direction to laterally separate the first region from the second region. The memory device further comprises a plurality of through array contacts in the first region, each through array contact extending vertically through the alternating dielectric stack.
    Type: Grant
    Filed: November 3, 2022
    Date of Patent: September 12, 2023
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Zhenyu Lu, Simon Shi-Ning Yang, Feng Pan, Steve Weiyi Yang, Jun Chen, Guanping Wu, Wenguang Shi, Weihua Cheng
  • Patent number: 11749721
    Abstract: Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate and an adjacent second gate above the quantum well stack; and a gate wall between the first gate and the second gate, wherein the gate wall includes a spacer and a capping material, the spacer has a top and a bottom, the bottom of the spacer is between the top of the spacer and the quantum well stack, and the capping material is proximate to the top of the spacer.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: September 5, 2023
    Assignee: Intel Corporation
    Inventors: Hubert C. George, Ravi Pillarisetty, Lester Lampert, James S. Clarke, Nicole K. Thomas, Roman Caudillo, David J. Michalak, Jeanette M. Roberts
  • Patent number: 11749757
    Abstract: Provided is a semiconductor chip including a nanowire field effect transistor (FET) and having a layout configuration effective for making manufacturing the chip easy. A semiconductor chip includes a first block including a standard cell having a nanowire FET and a second block including a nanowire FET. In the first and second blocks, nanowires extending in an X direction have an arrangement pitch in a Y direction of an integer multiple of a pitch P1. Pads have an arrangement pitch in the X direction of an integer multiple of a pitch P2.
    Type: Grant
    Filed: April 19, 2022
    Date of Patent: September 5, 2023
    Assignee: SOCIONEXT INC.
    Inventor: Hiroyuki Shimbo
  • Patent number: 11749558
    Abstract: A method for treating a wafer is provided with a portion of a semiconductor layer is selectively removed from the wafer so as to create an inactive region of the wafer surrounding a first active region of the wafer. The inactive region of the wafer has an exposed portion of an insulator layer, but none of the semiconductor layer. The first active region of the wafer includes a first portion of the semiconductor layer and a first portion of the insulator layer. At least one conductor is formed in contact with the first portion of the semiconductor layer, such that the conductor and the first portion of the semiconductor layer form a portion of an electrical circuit. The first active region of the wafer is selectively treated to remove a native oxide layer from the first portion of the semiconductor layer. A resulting wafer is also disclosed.
    Type: Grant
    Filed: December 13, 2021
    Date of Patent: September 5, 2023
    Assignees: Quantum Silicon Inc., The Governors of the University of Alberta, National Research Council of Canada
    Inventors: Bruno Vieira Da Cunha Martins, Robert A. Wolkow, Marco Taucer, Jason Pitters
  • Patent number: 11744111
    Abstract: A plurality of thin film transistors provided in a peripheral region are first staggered thin film transistors where a first channel layer configured of low-temperature polysilicon is included, and the first channel layer is not interposed between a first source electrode and a first gate electrode, and between a first drain electrode and the first gate electrode. A plurality of thin film transistors provided in a display region are second staggered thin film transistors where a second channel layer configured of an oxide semiconductor is included, and the second channel layer is not interposed between a second source electrode and a second gate electrode, and between a second drain electrode and the second gate electrode. The first thin film transistor is located below the second thin film transistor.
    Type: Grant
    Filed: June 14, 2022
    Date of Patent: August 29, 2023
    Assignee: Japan Display Inc.
    Inventor: Satoshi Maruyama
  • Patent number: 11742410
    Abstract: Gate-all-around integrated circuit structures having oxide sub-fins, and methods of fabricating gate-all-around integrated circuit structures having oxide sub-fins, are described. For example, an integrated circuit structure includes an oxide sub-fin structure having a top and sidewalls. An oxidation catalyst layer is on the top and sidewalls of the oxide sub-fin structure. A vertical arrangement of nanowires is above the oxide sub-fin structure. A gate stack is surrounding the vertical arrangement of nanowires and on at least the portion of the oxidation catalyst layer on the top of the oxide sub-fin structure.
    Type: Grant
    Filed: January 3, 2019
    Date of Patent: August 29, 2023
    Assignee: Intel Corporation
    Inventors: Leonard P. Guler, Biswajeet Guha, Tahir Ghani, Swaminathan Sivakumar
  • Patent number: 11742209
    Abstract: The present disclosure provides a method for preparing a semiconductor device. The method includes forming a first metal plug, a second metal plug, a third metal plug, and a fourth metal plug over a semiconductor substrate. The method also includes depositing a dielectric layer over the first metal plug, the second metal plug, the third metal plug, and the fourth metal plug. A first portion of the dielectric layer extends between the first metal plug and the second metal plug such that the first portion of the dielectric layer and the semiconductor substrate are separated by an airgap while a second portion of the dielectric layer extends between the third metal plug and the fourth metal plug such that the second portion of the dielectric layer is in direct contact with the semiconductor substrate.
    Type: Grant
    Filed: November 2, 2021
    Date of Patent: August 29, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Jar-Ming Ho
  • Patent number: 11744093
    Abstract: An organic light-emitting diode includes: a first electrode, a light-emitting stack thereon including: a hole transport layer (HTL), a blue light-emitting layer including: a blue host material (BHM), and a blue fluorescent dopant (BFD) material, and an electron transport layer (ETL), and a second electrode on the light-emitting stack, wherein BFD LUMO>BHM, BFD HOMO>BHM, BFD singlet energy <BHM, HTL HOMO>BHM and BFD, HTL HOMO?BFD HOMO?0.1 eV, the HTL material LUMO>the BHM, HTL LUMO?BHM LUMO>0.5 eV, HTL LUMO>BFD, ETL LUMO>BHM and BFD, a difference in LUMO between the ETL material and the BFD material ?0.1 eV, and the HTL material, the ETL material, and the BHM have the following triplet energy relationships: T1,BH<T1,HTL and T1,BH<T1,ETL, 2.8<T1,HTL<3.0, and 2.6<T1,ETL<2.8.
    Type: Grant
    Filed: April 20, 2022
    Date of Patent: August 29, 2023
    Assignee: LG Display Co., Ltd.
    Inventors: Sangbeom Kim, Jeongdae Seo