Patents Examined by Reema Patel
-
Patent number: 11482532Abstract: Joint opening structures of 3D memory devices and fabricating method are provided. A joint opening structure comprises a first through hole penetrating a first stacked layer and a first insulating connection layer, a first channel structure at the bottom of the first through hole, a first functional layer on the sidewall of the first through hole, a second channel structure on the sidewall of the first functional layer, a third channel structure over the first through hole, a second stacked layer on the third channel structure, a second insulating connection layer on the second stacked layer, a second through hole penetrating the second stacked layer and the second insulating connection layer, a second functional layer disposed on the sidewall of the second through hole, a fourth channel structure on the sidewall of the second functional layer, and a fifth channel structure over the second through hole.Type: GrantFiled: November 18, 2020Date of Patent: October 25, 2022Assignee: Yangtze Memory Technologies Co., Ltd.Inventors: Zhenyu Lu, Wenguang Shi, Guanping Wu, Feng Pan, Xianjin Wan, Baoyou Chen
-
Patent number: 11482584Abstract: A display apparatus including a shielding conductive layer is disclosed. The display apparatus includes a substrate, a driving thin film transistor disposed on the substrate, wherein the driving thin film transistor includes a driving semiconductor layer and a driving gate electrode, a scan line overlapping the substrate and extending in a first direction, a data line extending in a second direction crossing the first direction, wherein the data line is insulated from the scan line by an insulating layer, a node connection line disposed on a same layer as the scan line, and a shielding conductive layer disposed between the data line and the node connection line, in which a first end of the node connection line is connected to the driving gate electrode via a first node contact hole.Type: GrantFiled: February 4, 2021Date of Patent: October 25, 2022Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Wonse Lee, Kyunghoon Kim
-
Patent number: 11476415Abstract: Aspects of the invention are directed to a method of forming an integrated circuit. Both a dielectric layer and a bottom contact are formed with the bottom contact disposed at least partially in the dielectric layer. The bottom contact is subsequently recessed into the dielectric layer to cause the dielectric layer to define two sidewalls bordering regions of the bottom contact removed during recessing. Two sidewall spacers are then formed along the two sidewalls. A landing pad is formed on the recessed bottom contact and between the two sidewall spacers. Lastly, an additional feature is formed on top of the landing pad at least in part by anisotropic etching. In one or more embodiments, the additional feature includes a magnetic tunnel junction patterned at least in part by ion beam etching.Type: GrantFiled: November 30, 2018Date of Patent: October 18, 2022Assignee: International Business Machines CorporationInventors: Kisup Chung, Michael Rizzolo, Fee Li Lie
-
Patent number: 11476111Abstract: A semiconductor substrate includes a base portion, an auxiliary layer and a surface layer. The auxiliary layer is formed on the base portion. The surface layer is formed on the auxiliary layer. The surface layer is in contact with a first main surface of the semiconductor substrate. The auxiliary layer has a different electrochemical dissolution efficiency than the base portion and the surface layer. At least a portion of the auxiliary layer and at least a portion of the surface layer are converted into a porous structure. Subsequently, an epitaxial layer is formed on the first main surface.Type: GrantFiled: March 6, 2020Date of Patent: October 18, 2022Assignee: INFINEON TECHNOLOGIES AGInventors: Iris Moder, Bernhard Goller, Tobias Franz Wolfgang Hoechbauer, Roland Rupp, Francisco Javier Santos Rodriguez, Hans-Joachim Schulze
-
Patent number: 11469320Abstract: A semiconductor device includes a source region and a drain region formed in a substrate and having different conductivity types, an insulating film formed between the source region and the drain region, a deep well region formed under the insulating film, and a pinch-off region formed under the insulating film and having a same conductivity type as the deep well region, wherein a depth of a bottom surface of the pinch-off region is different from a depth of a bottom surface of the deep well region.Type: GrantFiled: November 30, 2020Date of Patent: October 11, 2022Assignee: KEY FOUNDRY CO., LTD.Inventor: Young Bae Kim
-
Patent number: 11469175Abstract: The present application discloses a semiconductor device with a programmable unit and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a bottom conductive layer positioned in the substrate, an insulation layer positioned on the substrate, a first conductive layer positioned on the insulation layer and above the bottom conductive layer, a second conductive layer positioned on the insulation layer and above the bottom conductive layer and spaced apart from the first conductive layer, a conductive plug electrically coupled to the bottom conductive layer, and a top conductive layer electrically coupled to the first conductive layer and the second conductive layer. The first conductive layer has a first work function and the second conductive layer has a second work function different from the first work function. The bottom conductive layer, the insulation layer, the first conductive layer, and the second conductive layer together configure a programmable unit.Type: GrantFiled: January 14, 2021Date of Patent: October 11, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Hsih-Yang Chiu, Tse-Yao Huang
-
Patent number: 11462565Abstract: Embodiments of a method for forming three-dimensional (3D) memory devices include the following operations. First, an initial channel hole is formed in a stack structure of a plurality first layers and a plurality of second layers alternatingly arranged over a substrate. An offset is formed between a side surface of each one of the plurality of first layers and a side surface of each one of the plurality of second layers on a sidewall of the initial channel hole to form a channel hole. A semiconductor channel is further formed by filling the channel hole with a channel-forming structure. The semiconductor channel may have a memory layer having a first memory portion surrounding a bottom of each second layer and a second memory portion connecting adjacent first memory portions. The first memory portion and the second memory portion may be staggered along a vertical direction.Type: GrantFiled: November 21, 2020Date of Patent: October 4, 2022Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventor: Li Hong Xiao
-
Patent number: 11450702Abstract: An image sensor device which can reduce a chip size and power consumption, is disclosed. The image sensor device includes a substrate provided with a first surface and a second surface that are arranged to face each other, a pad disposed at the first surface of the substrate, a line layer disposed below the second surface of the substrate, a first through silicon via (TSV) formed to penetrate the substrate and the line layer, and disposed at one side of the pad, a second TSV formed to penetrate the substrate and the line layer, and disposed at the other side of the pad, and a power-supply switch disposed between the first TSV and the second TSV.Type: GrantFiled: August 31, 2020Date of Patent: September 20, 2022Assignee: SK hynix Inc.Inventor: Young Guk Lee
-
Patent number: 11450688Abstract: Provided is a semiconductor integrated circuit device including a nanowire field effect transistor (FET) and having a layout configuration effective for making manufacturing the device easy. A standard cell having no logical function is disposed adjacent to a standard cell having a logical function. The standard cell includes nanowire FETs having nanowires and pads. The standard cell further includes dummy pads, which have no contribution to a logical function of a circuit.Type: GrantFiled: November 25, 2020Date of Patent: September 20, 2022Assignee: SOCIONEXT INC.Inventor: Hiroyuki Shimbo
-
Patent number: 11450525Abstract: Methods of depositing films are described. Specifically, methods of depositing metal oxide films are described. A metal oxide film is selectively deposited on a metal layer relative to a dielectric layer by exposing a substrate to an organometallic precursor followed by exposure to an oxidant.Type: GrantFiled: September 14, 2018Date of Patent: September 20, 2022Assignee: Applied Materials, Inc.Inventors: Liqi Wu, Hung Nguyen, Bhaskar Jyoti Bhuyan, Mark Saly, Feng Q. Liu, David Thompson
-
Patent number: 11424366Abstract: A device includes a substrate, a shallow trench isolation (STI) structure, an isolation structure, and a gate stack. The substrate has a semiconductor fin. The shallow trench isolation (STI) structure is over the substrate and laterally surrounding the semiconductor fin. The isolation structure is disposed on a top surface of the STI structure. The gate stack crosses the semiconductor fin, over the STI structure, and in contact with a sidewall the isolation structure, in which the gate stack includes a high-k dielectric layer extending from a sidewall of the semiconductor fin to the top surface of the STI structure and terminating prior to reaching the sidewall of the isolation structure, and in which the high-k dielectric layer is in contact with the top surface of the STI structure.Type: GrantFiled: November 13, 2020Date of Patent: August 23, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Che-Cheng Chang, Chih-Han Lin
-
Patent number: 11424336Abstract: A system and method for laying out power grid connections for standard cells are described. In various implementations, gate metal is placed over non-planar vertical conducting structures, which are used to form non-planar devices (transistors). Gate contacts connect gate metal to gate extension metal (GEM) above the gate metal. GEM is placed above the gate metal and makes a connection with gate metal through the one or more gate contacts. Gate extension contacts are formed on the GEM above the active regions. Similar to gate contacts, gate extension contacts are formed with a less complex fabrication process than using a self-aligned contacts process. Gate extension contacts connect GEM to an interconnect layer such as a metal zero layer. Gate extension contacts are aligned vertically with one of the non-planar vertical conducting structures. Therefore, in an implementation, one or more gate extension contacts are located above the active region.Type: GrantFiled: October 14, 2020Date of Patent: August 23, 2022Assignee: Advanced Micro Devices, Inc.Inventor: Richard T. Schultz
-
Patent number: 11417529Abstract: A p-n diode includes a first electrode, a n-GaN layer on the first electrode, a p-GaN layer on the n-GaN layer, and a second electrode on a first portion of the p-GaN layer. A region of the p-GaN layer surrounding the electrode is a passivated region. Treating a GaN power device having a p-GaN layer includes covering a portion of the p-GaN layer with a metal layer, exposing the p-GaN layer to a hydrogen plasma, and thermally annealing the p-GaN layer, thereby passivating a region of the p-GaN layer proximate the metal layer.Type: GrantFiled: October 16, 2020Date of Patent: August 16, 2022Assignee: Arizona Board of Regents on behalf of Arizona State UniversityInventors: Yuji Zhao, Houqiang Fu, Kai Fu
-
Patent number: 11410850Abstract: A semiconductor manufacturing method by a semiconductor manufacturing device includes: positioning an anode, which causes an oxidation reaction, in a first end of a base material containing an aluminum oxide and a cathode, which causes a reduction reaction, in a second end of the base material; heating the base material to melt it with the anode being in contact with the first end of the base material and the cathode being in contact with the second end of the base material; causing a current to flow between the anode and the cathode to cause a molten salt electrolysis reaction for a whole of or a part of a period in which the base material is at least partially melted; and after the molten salt electrolysis reaction, cooling the base material to form a p-type aluminum oxide semiconductor layer and an n-type aluminum oxide semiconductor layer.Type: GrantFiled: August 30, 2019Date of Patent: August 9, 2022Assignee: UACJ CORPORATIONInventors: Hiroki Arima, Koichi Ashizawa
-
Patent number: 11404516Abstract: A plurality of thin film transistors provided in a peripheral region are first staggered thin film transistors where a first channel layer configured of low-temperature polysilicon is included, and the first channel layer is not interposed between a first source electrode and a first gate electrode, and between a first drain electrode and the first gate electrode. A plurality of thin film transistors provided in a display region are second staggered thin film transistors where a second channel layer configured of an oxide semiconductor is included, and the second channel layer is not interposed between a second source electrode and a second gate electrode, and between a second drain electrode and the second gate electrode. The first thin film transistor is located below the second thin film transistor.Type: GrantFiled: December 2, 2020Date of Patent: August 2, 2022Assignee: Japan Display Inc.Inventor: Satoshi Maruyama
-
Patent number: 11404333Abstract: A semiconductor device includes a first semiconductor die, a second semiconductor die, a dielectric layer, a first redistribution layer and a second redistribution layer. The first semiconductor die includes a first bonding pad and a second bonding pad. The second semiconductor die includes a third bonding pad and a fourth bonding pad. The dielectric layer covers the first semiconductor die and the second semiconductor die, and defines a first opening exposing the first bonding pad and the second bonding pad and a second opening exposing the third bonding pad and the fourth bonding pad. The first redistribution layer is disposed on the dielectric layer, and electrically connects the first bonding pad and the third bonding pad. The second redistribution layer is disposed on the dielectric layer, and electrically connects the second bonding pad and the fourth bonding pad.Type: GrantFiled: January 30, 2019Date of Patent: August 2, 2022Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.Inventors: Yuan-Ting Lin, Che Wei Chang, Chi-Yu Wang
-
Patent number: 11393684Abstract: A method of manipulating deposition rates of poly-silicon and a method of manufacturing a silicon-germanium (SiGe) heterojunction bipolar transistor (HBT) device are provided. The method of manipulating deposition rates of poly-silicon includes: providing a substrate, where a first surface of the substrate includes at least two of an oxide material region, a silicon nitride material region and a silicon material region; performing a first treatment on the first surface of the substrate, so as to manipulate the deposition rates of poly-silicon on different regions of the first surface to be closer; and forming a poly-silicon layer on the first surface of the substrate.Type: GrantFiled: January 8, 2021Date of Patent: July 19, 2022Assignee: Shanghai Huahong Grace Semiconductor Manufacturing CorporationInventors: Zhenqi Li, Gim Chye Owe, Ronghao Fu
-
Patent number: 11393809Abstract: Various embodiments of the present disclosure are directed towards a semiconductor device. The semiconductor device comprises a source region and a drain region in a substrate and laterally spaced. A gate stack is over the substrate and between the source region and the drain region. The drain region includes two or more first doped regions having a first doping type in the substrate. The drain region further includes one or more second doped regions in the substrate. The first doped regions have a greater concentration of first doping type dopants than the second doped regions, and each of the second doped regions is disposed laterally between two neighboring first doped regions.Type: GrantFiled: August 27, 2020Date of Patent: July 19, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Sheng-Fu Hsu, Ta-Yuan Kung, Chen-Liang Chu, Chih-Chung Tsai
-
Patent number: 11387332Abstract: A resist (4) is applied on a semiconductor substrate (1) and a first opening (5) and a second opening (6) whose width is narrower than that of the first opening (5) are formed at the resist (4). The semiconductor substrate (1) is wet-etched using the resist (4) as a mask to form one continuous recess (7) below the first opening (5) and the second opening (6). After forming the recess (7), a shrink material (8) is cross-linked with the resist (4) to block the second opening (6) without blocking the first opening (5). After blocking the second opening (6), a gate electrode (11) is formed within the recess (7) via the first opening (5).Type: GrantFiled: June 27, 2018Date of Patent: July 12, 2022Assignee: Mitsubishi Electric CorporationInventor: Tasuku Sumino
-
Patent number: 11373869Abstract: A semiconductor device comprising a semiconductor substrate is provided, wherein the semiconductor substrate has a hydrogen containing region that contains hydrogen, the hydrogen containing region contains helium in at least some region, a hydrogen chemical concentration distribution of the hydrogen containing region in a depth direction has one or more hydrogen concentration trough portions, and in each of the hydrogen concentration trough portions the hydrogen chemical concentration is equal to or higher than 1/10 of an oxygen chemical concentration. In at least one of the hydrogen concentration trough portions, the hydrogen chemical concentration may be equal to or higher than a helium chemical concentration.Type: GrantFiled: October 26, 2020Date of Patent: June 28, 2022Assignee: FUJI ELECTRIC CO., LTD.Inventors: Yasunori Agata, Takahiro Tamura, Toru Ajiki