Abstract: An optical apparatus for total internal reflection spectroscopy comprises: a transparent body having an internally reflective surface; at least one source of electromagnetic radiation for providing at least one beam of collimated electromagnetic radiation; optical scanning means for directing the beam or beams to the transparent body so that the radiation is internally reflected at the reflective surface, and sequentially or continuously scanning the incident angle of the radiation over an angular range; at least one detector for detecting electromagnetic radiation exiting the transparent body, and means for counteracting variation of the irradiance in the illuminated area of the surface during the angular scan, or the effect of such variation on the reflected beam or beams. An optical apparatus for examining thin layer structures on a surface for differences in respect of optical thickness and/or refractive index, and a method for total internal reflection spectroscopy are also disclosed.

Abstract: In a method for detecting impurities in a transparent material, the material (2) is scanned line by line and the light transmission through the material is measured and compared with a reference value. If the transmission value at one point of the material is in a predetermined relation to said reference value, indicating the occurrence of impurities, the light transmission is studied in an area around the measured point for this transmission value in order to determine the extent and shape of the impurity, the light transmission values in the central area of the impurity being compared with transmission values measured in surrounding parts of the impurity to determine whether the impurity is of gel type or an impurity of some other type.

Abstract: An analyzer apparatus includes a receptacle for an ampoule, an analysis system, an incubator, and a master control. The analysis system includes a light source and a photodetector positioned such that the light from the light source passes through the receptacle. The master control includes a display, a timer, and a memory provided with a look-up table. During operation, an ampoule containing a sample and an indicator which changes color when a certain level of biological activity is present in the sample is placed within the receptacles. The analysis system is operated to transmit light at the predetermined wavelength through the ampoule to the detector, and a maximum amount of light passing through the ampoule is logged. The incubator is operated to heat the receptacle and the ampoule therein to a desired test temperature and the timer is started. The analysis system periodically transmits light through the ampoule.

Abstract: An apparatus is provided for optically inspecting containers of liquid solutions. The apparatus includes a fixture for gripping the container and a conveyor or indexable table for moving the fixtured container into alignment with a camera or other optical inspection device. The apparatus further includes a vibrator at the inspection station. The vibrator causes the container of the liquid solution to vibrate sufficiently for extraneous material in the solution to move into a position that permits accurate visual inspection.

Abstract: An improved laser scanning apparatus (46) for determining frame or unibody alignment or misalignment of a vehicle (40) is provided, which includes a laser assembly (54), a pair of rotatable mirror assemblies (56,58) and laser detectors (114,116) located within an enclosed housing (50,52). The laser assembly (54) has an upper pair of lasers (122,126) located in known, spaced relationship above a lower pair of lasers (124,128); detector assemblies (114, 116) are also provided including substantially parabolic reflective surfaces (118a, 120a) with detectors (114a, 116a) disposed substantially at the focal point of the surfaces (118a, 120a). The apparatus (46) is used in conjunction with a plurality of individually coded reflective targets (44) which are suspended from known reference points on the vehicle (40).

Abstract: A system for inspecting a component, such as a die formed on a silicon wafer, is provided. The system includes a two dimensional inspection system that can locate one or more features, such as bump contacts on the die, and which can also generate feature coordinate data. The system also includes a three dimensional inspection system that is connected to the two dimensional inspection system, such as through an operating system of a processor. The three dimensional inspection system receives the feature coordinate data and generates inspection control data.

Abstract: An optical system for simultaneously compensating a source drift of a light source and a detector drift of a light detector includes a test location, a first beam path from the light source to the test location, a second beam path from the test location to the light detector. First and second beam paths are arranged to intersect at a beam crossing. A calibration sample having a known reflectivity is positioned at the test location and illuminated by a probe beam generated by the light source. A known response beam of the calibration sample is used for calibrating the light source and the detector. A reference sample is placed at the beam crossing and illuminated by the probe beam. In response, the reference sample sends a reference beam along the second path length, which is used for compensating the source and detector drift.

Abstract: A light analysis system for analyzing light transmitted through an ampoule includes a housing having at least one receptacle for the ampoule, a cover for substantially preventing ambient light from affecting the receptacle and having an interior reflective surface, and a master control system. Each receptacle includes at least one light source and a photodetector positioned such that the light from the light source passes through the receptacle (and thereby the ampoule and its contents) prior to entering the photodetector. According to one preferred aspect of the invention, the receptacles are provided preferably at a 30° to 45° angle relative to vertical. According to another preferred aspect of the invention, the light source is at least one LED which is directed to transmit light upward into the reflective surface of the cover such that the light is reflected by the cover downward into the receptacle toward the photodetector.

Abstract: In analyzing radiation from a sample, single-quanta counting can be used to advantage especially at low levels of radiation energy, e.g. in the detection of fluorescent radiation. Preferred detection techniques include methods in which (i) fluorescence-stimulating radiation is intensity-modulated in accordance with a preselected code, (ii) wherein it is the fluorescent radiation which is intensity-modulated with the preselected code, and (iii) wherein modulation with a preselected code is applied to a sample to influence a property which functionally affects emitted fluorescent radiation. For registration of the signals from a sensing element of a single-photon detector, time of arrival is recorded, optionally in conjunction with registration of time intervals. Advantageously, in the interest of minimizing the number of pulses missed due to close temporal spacing of pulses, D-triggers can be included in counting circuitry.

Abstract: A DNA sample added with a plurality of fluorescent marks is irradiated with excitation lights having a plurality of wavelengths and when fluorescence intensities are detected separately, the excitation light and a position on the sample are relatively changed over a desired area once to thereby detect the plurality of fluorescent marks at high speed.

Abstract: A carrier shape measurement device includes: a stage which supports a carrier which is to be a subject of measurement; and a measurement section which measures a shape of the carrier, and the stage comprises kinematic coupling pins to support the carrier by a kinematic coupling.

Abstract: A transducer in an imaging optical system for generating optical contrasts in the near-field representation of topographies of an object by outcoupling evanescent waves from the underside of the transducer. The transducer comprises a substrate having a transparent plane-parallel protuberance corresponding to the field size of the imaging optical system and pointing toward the object. The specimen outcouples evanescent waves from an underside of the transducer, where the transducer underside is arranged in a focal plane of the imaging optical system.

Abstract: A film-thickness measurement apparatus of the present invention includes a lifter, a support mount, a light-emitting device, and a light-receiving device. With the center of a wafer staying in alignment with that of the support mount, the lifter places the wafer onto the surface of the support mount to determine the center of the wafer. While the wafer is being rotated about the center of the wafer, the light-emitting device irradiates the circumferential portion of the wafer with a laser beam, thereby allowing the position of a notch to be detected depending on whether or not the laser beam passes through the notch. This makes it possible to detect the positions of the notch and the center of the wafer to determine the center axis line of the surface of the wafer, thereby allowing the coordinates of a given position on the surface of the wafer to be defined in accordance with the center axis line and the center of the wafer.

Abstract: There is provided a clustered device for manufacturing a semiconductor device in which a cleaning chamber, a rapid thermal processing chamber, an optical measurement chamber, and the like are arranged around a load-lock room. In an optical measurement system, there are disposed an exciting light source, a measuring light source, a light detector, a control/analyze system, and the like. During the formation of an oxide film, for example, a wafer is cleaned in the cleaning chamber and then the amount of a natural oxide film remaining on the wafer or the like is measured by optical modulation reflectance spectroscopy in the optical measurement chamber. Thereafter, the wafer is oxidized in the rapid thermal processing chamber. As a result, the surface of the wafer is prevented from being oxidized on exposure to an atmosphere and the surface state of the wafer can be monitored in the course of sequential process steps.

Abstract: In a displacement sensor (10) comprising a sensor head (1) and a controller (2) either integrally or separately, the sensor head comprises a measurement light emitting optical system (113), an image acquiring optical system (127a, 127b) and a two dimensional imaging device (122). The controller can control the imaging condition associated with the brightness of the image in the form of a video signal both under a measurement mode and an observation mode. Under the measurement mode, with a light source (112) for measurement turned on, the imaging condition is adjusted in such a manner that a measurement light radiated light image (83) can be imaged at an appropriate brightness but a surrounding part (71) of the measurement object is substantially darker than the appropriate brightness, and a desired displacement is computed according the video signal obtained by the two dimensional imaging device (122).

Abstract: A photometric measurement flow cell having measurement path-lengths that can be adjusted down to less than 0.1 mm. The measurement path-length is controlled by both a common flow cell body and the dimensional parameters of a stepped sealing optical element. The stepped optical element includes a stem portion that can be made in various lengths to create a family flow cell measurement path-lengths. The replacement of one stepped element with another having a different stem length within the flow cell creates a reliable method to adjust the measured path-length of the flow cell.

Abstract: An optical inspection system and method which uses a procedure for determining an offset between a field of view and a center or rotation of an R-theta stage, or polar coordinate stage. Determining this offset allows the precise location of a site being inspected on a wafer to be determined. The system and method take advantage of the fact that in a R-theta system there can be only two positions for the R-theta stage that will position a particular site under the lens of the imaging system of the optical inspection system. By moving the stage from a first position where a particular site is positioned in the field of view, to the second position where the particular site is positioned in the field of view, the offset can be determined.

Abstract: Time-divisionally-multiplexed light receiving signals are sampled at a predetermined time interval as they are, and then converted into digital data. Then, address is determined based on an index signal as a standard of the time-divisional multiplexing, and the data are sequentially stored in a data memory. When the data are sequentially read out, change of quantity of the data is obtained to determine a period having the smallest change in quantity as an effective period. Then, the data included in the effective period are selected and separated to a sample side beam, reference side beam and cutoff period. Thus, the multiplexed light receiving signals are accurately separated by the digital data.

Abstract: A method and apparatus for measuring and calibrating the measurement of small volumes of liquids. The small volumes of liquid are typically dispensed from liquid delivery devices, the delivery device often having multiple channels to analyze many samples at once. The liquid samples are delivered to one or more cells, typically in a multi-well plate, and positioned in a spectrophotometer for determining an absorbance of a chromophore in the liquid sample. Based upon an absorbance measurement and the concentration of the chromophore, a path length of the liquid sample is determined, from which a volume of the sample may be calculated. The method and apparatus provide various means for correcting for differences in the dimensions and/or other factors causing a non-linear deviation from the Beer-Lambert law. A system or kit may be provided including sets of sample solutions of varying dilution ranges for calibrating different liquid volumes.

Abstract: An apparatus for flash photolysis has a light source and an optical fiber for directing light from the light source and through a sample. A laser or other such device is provided for initiating a chemical change within the sample. Additionally, a device is provided for determining the change in absorption of light by the sample during the chemical change.