Abstract: A method and apparatus for scanning a vehicle wheel rotatable about a measuring shaft of a wheel balancing machine. A light source scans the vehicle wheel by emitting a light beam onto the wheel surface, which is reflected and received by a receiver 11. The light source and the receiver are configured to move together with each other. An evaluation device is coupled to the receiver and a position sensor specifying the positions of the light source and the receiver. The evaluation device ascertains dimensions and positions of constituent parts of the vehicle wheel in a computer-aided procedure based on data obtained by the scanning process.

Abstract: Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, a thin film characteristic and an electrical property of a specimen. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.

Abstract: A method for using light to indicate locations of flaws and defects on a composite structure generally includes electronically accessing positional data defining one or more defect locations on a composite structure. The positional data can be extracted from a part fabrication file in which resides numerical control (NC) data that can be used by a material placement machine to fabricate the composite structure. The method also includes automatically causing at least one light source to direct light at the composite structure to indicate the defect locations as defined by the positional data. Accordingly, the light allows the defect locations to be readily ascertained for later action, such as manual defect repair and/or FOD removal by an operator.

Abstract: An apparatus for monitoring the functionality of an optical element includes a detector and a light source whose radiation is reflected to the detector by a surface of the optical element facing the detector and the light source.

Abstract: A film is placed between contacting surfaces in an assembly. The film has an optical property responsive to pressure. A compressive force is applied to the contacting surfaces to generate an initial pressure pattern. The film is removed from between the contacting surfaces. The optical property is sensed to derive a sensed initial pressure pattern. A stored setting controls the compressive force. The sensed initial pressure pattern is compared to a reference pressure pattern. The stored setting is updated to adjust the compressive force as a function of the comparing.

Abstract: A system for focusing broadband light within a reflectometer includes a concave spherical mirror for gathering light from the surface of a sample under inspection. The concave spherical mirror projects the received light to a convex spherical mirror. The combination of the two mirrors captures the light diverging from the sample and collimates the light into parallel rays. The light can then be passed through an aperture prior to entering a detector. Each of the two mirrors is fabricated as an off-axis section of a spherical mirror and positioned to form a partial Schwarzschild design without the associated problem of a central obscuration.

Abstract: Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

Abstract: A system (20) and method are disclosed for the self-calibrating, on-line determination of size distribution f(x) and volume fraction ? of a number of particles (P) dispersed in a medium (M) by detecting one or more propagation characteristics of multiply scattered light from the particles (P). The multiply scattered light is re-emitted in response to exposure to a light source (21) configured to provide light at selected wavelengths. The determination includes calculating the isotropic scattering and absorption coefficients for the particles (P) by comparing the incident and detected light to determine a measurement corresponding to the propagation time through the scattering medium (M), and iteratively estimating the size distribution f(x) and volume fraction ? as a function of the coefficients for each of the wavelengths. An estimation approach based on an expected form of the distribution and the mass of the particles is also disclosed.

Abstract: A real-time monitoring apparatus for a plasma process comprises a plurality of measuring units (10) mounted on a semiconductor wafer, a receiving device (7) for receiving a signal transmitted from each of the measuring units (10), and a data processing apparatus (6) for detecting a condition of the semiconductor wafer (3) based on the received signal. In this apparatus, each of the measuring units (10) includes at least one plasma process detection sensor (11), a light-emitting device (16) for converting an output of the plasma process detection sensor into an optical output, and a power supply (17) for supplying drive power to the light-emitting device (16).

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described.

Abstract: A device reader having a multiplex illuminator, the illuminator, and methods for reading deflection of a large number of microcantilevers are provided. The illuminator includes a micro-optical subassembly for illuminating cantilevers (illuminator) that uses a plurality of VCSELs for generating an array of electromagnetic beams, and focuses the beams on the cantilevers. Deflection of the cantilevers causes a change in angle of the beams reflected from the cantilevers, which is recorded by a plurality of position sensitive devices.

Abstract: A method and apparatus of sorting plant products based on damage to the plant products is disclosed. A beam emitter emits an illumination light toward the outer surface of a plant product. A beam detector detects substantially a single wavelength of a reflected light produced by the plant product responsive to the illumination light. A control unit determines at least one of a presence, an amount, and a severity of damage responsive to the reflected light. The control unit assigns a damage category to the plant product responsive to the determination of damage.

Abstract: A media sensor 68 includes a cap 85 with a common opening 85b for restricting the beam spread of light emitted from a light-emitting element 82 and the range of light receivable by a light-receiving element 83, while suppressing the effects of disturbance. Accordingly, the media sensor 68 can prevent a decline in detection accuracy while using inexpensive elements with low directivity. Since the light-emitting element 82 and light-receiving element 83 are oriented perpendicularly to the paper P, the media sensor 68 is superior to sensors equipped with elements disposed at an angle to the paper P by avoiding a decline in detection accuracy caused by errors in the angular positioning of the elements, errors in angular positioning of the sensor itself, and the like, and by reducing the space required in the sensor to dispose the elements, thereby reducing the size of the sensor.

Abstract: A package information capture system that provides dimensioning information about, and machine readable codes from, packages passing across a data capture point either singulated or non-singulated. The resulting data can be used to determine, for example, package dimensions, package coordinates, dimension confidence, package classification, and content and coordinates of the machine readable code. The dimensioning information is correlated with the machine readable code to form one record. Subsequent processes can access the record from all or part of the captured machine readable information to retrieve package dimension information.

Abstract: In one embodiment, a system to inspect the edge of a wafer, comprises an surface analyzer assembly, a first drive assembly to impart linear motion between the surface analyzer and a first surface of the wafer, and a second drive assembly to impart rotary motion between the surface analyzer and the wafer about an axis parallel to the first surface of the wafer.

Abstract: In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a reflected radiation collecting assembly that collects radiation reflected from the surface, wherein the reflected radiation collecting assembly comprises a mirror to collect radiation reflected from the surface.

Abstract: In one embodiment, a system to inspect an edge region of a wafer, comprises a surface analyzer assembly comprising a radiation targeting assembly that targets a radiation beam onto a surface of the wafer; a reflected radiation collection assembly to collect radiation reflected from a surface of the wafer; means for rotating the surface analyzer assembly about an edge surface of the wafer; and means for detecting one or more defects in the edge region of the wafer.

Abstract: The optical wavelength standard comprises a diffraction grating having a diffractive surface, an input arrangement and an output optical arrangement. The input optical arrangement is located to illuminate the diffractive surface of the diffraction grating with incident light at an angle of incidence at which absorption of the incident light at a resonance wavelength generates surface plasmons. The output optical arrangement is located to receive the incident light specularly reflected from the diffractive surface of the diffraction grating as reflected light. The reflected light includes an absorption line at the resonance wavelength. The absorption line provides the wavelength reference. The resonance wavelength is defined by the angle of incidence and the physical characteristics of the diffraction grating. A desired resonance wavelength can be obtained by appropriately defining the angle of incidence and the physical characteristics of the diffraction grating.

Abstract: A surface plasmon resonant device provides practical portable operation through the use of a low power high efficiency LED source and a high-efficiency prism sample cell pre-loaded with probe molecules and sealed for field use. A simple mechanical control allows adjustment of angulation of the light and camera for accurate response outside of the laboratory.

Abstract: Apparatus and a method are disclosed for the simultaneous or rapid sequential use of two or more different separations between the source and detector of the measuring apparatus to obtain spectral measurement data in diffuse transmission or “interaction” modes of collecting optical information from a specimen. The method and apparatus subsequently combine separate data taken from two or more different pathlengths to provide discrimination against undesired information while preserving or enhancing desired information. Additional reference information to normalize the optical signal is also provided. The optical and mechanical design of the optical probe also provides for transmittance, reflectance and interactance measurements on small amounts of specimen.