Abstract: A film quality inspecting method comprising applying a measuring beam having a specific wavelength to an annealed silicon film formed on a substrate in a direction inclined with respect to the silicon film, measuring a reflection intensity or reflectivity of a reflection beam reflected by the silicon film as a result of the application, and inspecting a film quality of the silicon film based on a measurement value obtained by the measurement.

Abstract: The invention relates to a method comprising passing a first variable intensity light beam across a first test-tube (3) wherein the substance (1) to be controlled is circulating. Subsequently, a second fixed-intensity light beam is passed across a second test-tube (4) with a reference sample. The intensities of both beams are compared once they have crossed over the test tubes and the intensity of the first beam is varied so that said intensities are equal. The parameter of interest in the first test tube is calculated by means of signal processing which causes the first beam to vary.

Abstract: A device for determining the properties of reflective bodies has at least one illuminator that emits light onto a measurement surface, at least one detector for recording the light reflected from the measurement surface, the at least one detector includes a plurality of light-sensitive sensors. Substantially each sensor issues a measurement value characteristic of the light received by each respective sensor. Also included is at least one memory, having at least one first predefined threshold, at least one controller for the measurement sequence which includes at least one processor, whereby a measurement sequence is controllable such that a measurement value of a sensor is allocated to a first surface type when same exceeds the first threshold, wherein at least two sensors are respectively associated with different locations to be measured on the measurement surface, and wherein the controller is configured to issue at least one surface characteristic statistical parameter.

Abstract: A method and apparatus are disclosed for evaluating relatively small periodic structures formed on semiconductor samples. In this approach, a light source generates a probe beam which is directed to the sample. In one preferred embodiment, an incoherent light source is used. A lens is used to focus the probe beam on the sample in a manner so that rays within the probe beam create a spread of angles of incidence. The size of the probe beam spot on the sample is larger than the spacing between the features of the periodic structure so some of the light is scattered from the structure. A detector is provided for monitoring the reflected and scattered light. The detector includes multiple detector elements arranged so that multiple output signals are generated simultaneously and correspond to multiple angles of incidence. The output signals are supplied to a processor which analyzes the signals according to a scattering model which permits evaluation of the geometry of the periodic structure.

Abstract: Vehicle measuring apparatus and method are disclosed to accurately measure height and width of a vehicle moving at a high speed. The vehicle measuring apparatus includes: a plurality of laser sensors separated from the road surface with a predetermined height and installed closely to each other corresponding to width of every roadway on the road, and receiving a reflection light of a laser light emitted onto the road from the plurality of the laser sensors and outputting a vehicle measurement signal; and a processor means electrically connected to the laser sensors and calculating height and width of the vehicle on the basis of the signal to measure the vehicle and previously stored installation information of the plurality of laser sensors.

Abstract: The present invention relates to a method for determining the reflectance profile of materials and more particularly, the present invention relates to a method for calculating specular and diffuse reflectance and hence, the emittance of materials at ambient temperatures.

Abstract: A method for monitoring two or more movable objects in a monitoring region. A substantially horizontal light barrier grid having a plurality of parallel light barriers monitors the region. To permit a plurality of objects to simultaneously move in the monitored region without deactivating the monitoring function of the system, the system controls an entry area for the objects, the size of the objects as well as the distance between the objects to ascertain that predetermined criteria therefor are met. If one or more of these criteria is not met, a control signal is generated which can be used, for example, to deactivate the machinery and/or prevent access to the monitored region.

Abstract: An apparatus measures a property of a layer (such as the sheet resistance of a conductive layer) by performing the following method: (1) focusing the heating beam on the heated a region (also called “heated region”) of the conductive layer (2) modulating the power of the heating beam at a predetermined frequency that is selected to be sufficiently low to ensure that at any time the temperature of the optically absorbing layer is approximately equal to (e.g., within 90% of) a temperature of the optically absorbing layer when heated by an unmodulated beam, and (3) measuring the power of another beam that is (a) reflected by the heated region, and (b) modulated in phase with modulation of the heating beam. The measurement in act (3) can be used directly as a measure of the resistance (per unit area) of a conductive pad formed by patterning the conductive layer.

Abstract: The methods and systems are provided that alleviate the impact of experimental systematic errors. These calibration methods and systems can be based on the discovery that by including source and detector calibration factors as part of the inverse calculation for image reconstruction, image artifacts can be significantly reduced. The novel methods and systems enhance contrast in images of the distribution of the radioactive properties of a medium, and enable improved detection of, for example, spatial variations in optical properties within highly scattering media, such as human or animal tissue. The novel methods and systems receive radiation which exits from the medium. Then, one or more optical properties of the medium are derived using the received radiation and one or more calibration factors, wherein the calibration factors are variables. Subsequently, a distribution of the optical properties in the medium is determined using the derived optical properties.

Abstract: Optical Integrated Circuits (OIC) in Surface Plasmon Resonance (SPR) Analysis Systems combined with micorarray or microwell plates to provide enhanced sensitivity, stability, speed of analysis and reduced size are disclosed. Using the OIC with other optical analysis methods to provide enhance analysis systems is also disclosed.

Abstract: The present invention provides a defect inspection apparatus comprising an inspection section which inspects a front surface and a rear surface of a sample, a control section which processes image data on the front surface and rear surface of the sample obtained by the inspection section, moving section provided in the inspection section and capable of reciprocating the sample, illumination section which illuminates the front surface and rear surface of the sample moved by the moving section, and image pickup section which picks up images of the front surface and rear surface of the sample illuminated by the illumination section, wherein at least one of an incidence angle of the illumination section on the sample and an image pickup angle of the image pickup section to the sample is changeable.

Abstract: An objective lens system having reconfigurable optical components that enable the inspection of inspection surfaces in the absence of a pellicle or through a thin membrane pellicle, and using the same system, also enabling the inspection of inspection surfaces through a thick pellicle. An objective lens system includes a first group and a second group of optical elements. The first group of optical elements enables high numerical aperture and beam contraction. The second group of optical elements is capable of two mode operation enabling, in one mode, inspection through a thin membrane pellicle or in the absence of a pellicle and in another mode, enabling inspection through a thick pellicle. The system can also be enhanced through the use of an interposable aberration corrector plate that is used to correct optical aberrations caused by the presence, absence, or thickness of pellicles.

Abstract: A method for inspecting masks used to project patterns in photolithographic imaging comprises initially providing a photolithographic mask having a pattern field thereon, where in normal production use the pattern is transferred by a reduction projector as a demagnified pattern on a production substrate, and providing a movable field-defining aperture adjacent the mask, the aperture having a field area less than, and capable of defining a pattern subfield comprising only a portion of the entire photolithographic mask pattern field. The method then includes aligning the field-defining aperture with a pattern subfield comprising only a portion of the entire photolithographic mask pattern field. Using an energy source, the method includes projecting the pattern subfield onto a test substrate and exposing onto the test substrate the pattern subfield at a size between that normally exposed on a production substrate and the actual size of the pattern subfield on the photolithographic mask.

Abstract: A method and apparatus for determining out-of-plane defects in a paper sample are described. One embodiment of the method includes providing a paper sample, illuminating the sample with light, determining light scattering resulting from the light at a plurality of measuring regions, and determining an out-of-plane defect value by assigning the measuring regions to plural bands, calculating a standard deviation of light scattering for each of the bands, and averaging standard deviations of the bands. An alternative embodiment further includes assigning the measuring regions to plural columns of the sample, determining the out-of-plane defect value for each of the columns, and calculating the median of the out-of-plane defect values of the columns. The average out-of-plane defect value may also be calculated. One embodiment of the apparatus includes a housing for excluding ambient light and for holding a paper sample, a light source, and an image-capturing device.

Abstract: In a substrate inspecting apparatus comprising a projecting section (4) in which light sources (8), (9) and (10) are provided for emitting colored lights of R, G and B in directions having different elevation angles, one or two color components which is/are greater than the mean value of the intensities of color components is/are extracted for an inspecting region including a soldered portion. Inclined surfaces adapted to the light sources (8), (9) and (10) are converted into monochromatic shaded images by the extraction processing. A boundary position between the inclined surfaces adapted to the light sources (8) and (9) are converted into one shaded image having a mixed color of red and green and the boundary position between the inclined surfaces adapted to the light sources (9) and (10) is converted into a different shaded image.

Abstract: A gas sensor for detection of hydride and/or acid gas species, featuring a color changing material that changes color in exposure to hydride and/or acid gas species, component(s) for impinging radiation on the color changing material for reflection therefrom, and component(s) for receiving reflected radiation from the color changing material and responsively generating an output upon a change of color of the color changing material indicative of a presence of hydride and/or acid gas species in gas contacting the color changing material. The gas sensor may be embodied in a compact and efficient probe assembly, utilizing optical fibers to transmit incident radiation to the color changing material and to transmit reflected radiation to a detector and signal processing circuitry.

Abstract: The invention concerns an apparatus for inspecting a surface, in particular the surface of a mill roll, comprising a housing wherein are arranged means for transmitting and receiving a light beam, and an optical coupling device arranged on the outer surface of a front wall of the housing. The optical coupling device comprises: (a) a component (5), called fluid dispenser, (b) a hollow cylindrical nozzle (11), and (c) a mobile tubular component (16), successively traversed by the light beam. The mobile tubular component (18) is arranged partly inside the cylindrical nozzle (11), so as to be able to slide inside said cylindrical nozzle, and partly exits therefrom in the extension thereof, towards the surface to be inspected (2). Different cross-sections (shoulders 14, 19) are provided in the cylindrical nozzle (11) and in the mobile tubular component (16), in particular for limiting said sliding movement.

Abstract: A substrate-container measuring device has a kinematic plate 10 having securing pins 12 provided at positions defined by the SEMI standards. There is provided an optical distance-measuring sensor 14, in which a relative position between the optical distance-measuring sensor 14 and the kinematic plate 10 is fixed. A substrate-container measuring jig 20 is placed on the kinematic plate 10. The substrate-container measuring jig 20 has a base plate 22 to be placed on the kinematic plate 10, and a slide plate 24 that is slidable over the base plate 22. The base plate 22 has a group of grooves which uniquely determine a relative position between the base plate 22 and the kinematic plate 10 as a result of being fitted with the corresponding securing pins 12.

Abstract: A method and apparatus for measuring strain on a surface of a substrate utilizes a substrate surface coated with at least one coating layer. The coating layer provides both luminescence and photoelasticity. The coating layer is illuminated with excitation light, wherein longer wavelength light is emitted having a polarization dependent upon stress or strain in the coating. At least one characteristic of the emitted light is measured, and strain (if present) on the substrate is determined from the measured characteristic.

Abstract: A micro-doppler ladar comprising a tunable laser to identify an unknown constituent of a gaseous cloud or region at a safe distance from the cloud or region. The tunable laser produces a laser beam tunable over a range of different frequencies. Each frequency produces a different vibrational response in the constituent in the gaseous cloud when the cloud or region is illuminated by the laser beam. A micro-doppler ladar system then interprets a back scattered beam to determine the induced vibrations. The determined induced vibrations can then be compared to known vibrations stored in a look-up table to identify the specific constituent(s) in the cloud or region.