Patents Examined by Stephen W. Smoot
  • Patent number: 11177259
    Abstract: The present disclosure describes a semiconductor device that includes a semiconductor device that includes a first transistor having a first gate structure. The first gate structure includes a first gate dielectric layer doped with a first dopant at a first dopant concentration and a first work function layer on the first gate dielectric layer. The first gate structure also includes a first gate electrode on the first work function layer. The semiconductor device also includes a second transistor having a second gate structure, where the second gate structure includes a second gate dielectric layer doped with a second dopant at a second dopant concentration lower than the first dopant concentration. The second gate structure also includes a second work function layer on the second gate dielectric layer and a second gate electrode on the second work function layer.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: November 16, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang Cheng, I-Ming Chang, Ziwei Fang, Huang-Lin Chao
  • Patent number: 11177212
    Abstract: A method and structure for forming semiconductor device includes forming a contact via opening in a first dielectric layer, where the contact via opening exposes a first portion of a contact etch stop layer (CESL). The method further includes etching both the first portion of the CESL exposed by the contact via opening and adjacent lateral portions of the CESL to expose a source/drain contact and form an enlarged contact via opening having cavities disposed on either side of a bottom portion of the enlarged contact via opening. The method further includes forming a passivation layer on sidewall surfaces of the enlarged contact via opening including on sidewall surfaces of the cavities. The method further includes depositing a first metal layer within the enlarged contact via opening and within the cavities to provide a contact via in contact with the exposed source/drain contact.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: November 16, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Po-Yu Huang, Shih-Che Lin, Chao-Hsun Wang, Kuo-Yi Chao, Mei-Yun Wang
  • Patent number: 11177346
    Abstract: A semiconductor device including an active fin that protrudes from a substrate and forms a plurality of recess regions spaced apart from each other, a gate pattern between the plurality of recess regions that covers a lateral surface and a top surface of the active fin, a plurality of source/drain patterns in the plurality of recess regions, and a diffusion reduction region adjacent to each of a plurality of bottoms of the plurality of recess regions and each of a plurality of sidewalls of the plurality of recess regions, the diffusion reduction region including a dopant having a lower diffusion coefficient than phosphorus (P).
    Type: Grant
    Filed: October 29, 2019
    Date of Patent: November 16, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Ki Hwan Kim, Sunguk Jang, Pankwi Park, Sangmoon Lee, Sujin Jung
  • Patent number: 11171183
    Abstract: A display panel including: a first display substrate and a second display substrate. The second display substrate includes: a base substrate; a light control layer disposed on the base substrate and including a first conversion part configured to convert the first color light into a second color light, a second conversion part configured to convert the first color light into a third color light, and a transmission part configured to transmit the first color light; and a nano particle layer disposed between the base substrate and the light control layer and configured to absorb at least one of a first light having an overlapping wavelength range of a wavelength range of the first color and a wavelength range of the third color and a second light having an overlapping wavelength range of a wavelength range of the second color and a wavelength range of the third color.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: November 9, 2021
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jeaheon Ahn, Jang-Il Kim, Yeogeon Yoon, Seok-Joon Hong
  • Patent number: 11164777
    Abstract: A method of forming a top via is provided. The method includes forming a sacrificial trench layer and conductive trench plug in an interlayer dielectric (ILD) layer on a conductive line. The method further includes forming a cover layer on the ILD layer, sacrificial trench layer, and conductive trench plug, and forming a sacrificial channel layer and a conductive channel plug on the conductive trench plug. The method further includes removing the cover layer and the ILD layer to expose the sacrificial trench layer and the sacrificial channel layer. The method further includes removing the sacrificial trench layer and the sacrificial channel layer, and forming a barrier layer on the conductive channel plug and conductive trench plug.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: November 2, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Lawrence A. Clevenger, Brent Anderson, Kisik Choi, Nicholas Anthony Lanzillo, Christopher J. Penny, Robert Robison
  • Patent number: 11164789
    Abstract: A method includes forming a dummy gate structure over a substrate; forming a plurality of gate spacers on opposite sidewalls of the dummy gate structure; forming an interlayer dielectric (ILD) layer surrounding the gate spacers; replacing the dummy gate structure with a metal gate structure; etching back the metal gate structure to form a gate trench between the gate spacers; depositing a first dielectric layer in the gate trench, in which the first dielectric layer has horizontal portions over the metal gate structure and the ILD layer, and vertical portions on sidewalls of the gate spacers; etching the vertical portions of the first dielectric layer until the sidewalls of the gate spacers exposed; and performing depositing the first dielectric layer and etching the vertical portions of the first dielectric layer in an alternate manner.
    Type: Grant
    Filed: April 17, 2020
    Date of Patent: November 2, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsai-Jung Ho, Yu-Shih Wang, Tze-Liang Lee
  • Patent number: 11158649
    Abstract: A semiconductor storage device includes a stacked body and a columnar body. The stacked body includes a plurality of conductive layers and a plurality of insulating layers that are alternately stacked in a first direction. The columnar body extends through the stacked body in the first direction and includes a core portion, a channel film, a tunnel oxide film, and a charge storage film in this order from a center portion thereof. The channel film has a first region in contact with the core portion and a second region in contact with the tunnel oxide film. The first region is a semiconductor doped with impurities. The second region is a semiconductor. A concentration of the impurities in the second region is lower than that in the first region.
    Type: Grant
    Filed: September 3, 2019
    Date of Patent: October 26, 2021
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Shinichi Sotome, Tatsufumi Hamada
  • Patent number: 11158632
    Abstract: A device includes a memory cell having a gate-all-around (GAA) transistor and the well strap cell having a dummy fin-like field effect transistor (FinFET). The GAA transistor includes a first fin extending along a first direction, and the dummy FinFET includes a second fin extending along the first direction. The GAA transistor includes first source/drain features over the first fin and suspended channel layers between the first source/drain features. The first source/drain features include a first type dopant. The suspended channel layers have a first channel width along a second direction different than the first direction. The dummy FinFET includes second source/drain features over the second fin and a fin channel layer between the second source/drain features. The second source/drain features include a second type dopant. The fin channel layer has a second channel width along the second direction. The second channel width is greater than the first channel width.
    Type: Grant
    Filed: April 1, 2020
    Date of Patent: October 26, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventor: Jhon Jhy Liaw
  • Patent number: 11158624
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to unitary Cascode cells with resistance and capacitance optimization, and methods of manufacture. The structure includes a common source FET (CS-FET) in a first portion of a single common semiconductor region, the CS-FET comprising a source region and a drain region, a common gate FET (CG-FET) in a second portion of the single common semiconductor region, the CG-FET comprising a source region and a drain region, and a doped connecting region of the single common semiconductor region, connecting the drain of the CS-FET and the source of the CG-FET.
    Type: Grant
    Filed: April 24, 2020
    Date of Patent: October 26, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Wenjun Li, Chen Perkins Yan, Tamilmani Ethirajan, Cole E. Zemke
  • Patent number: 11152257
    Abstract: A method for fabricating a semiconductor device includes forming one or more layers including at least one of a liner and a barrier along surfaces of a first interlevel dielectric (ILD) layer within a trench, after forming the one or more liners, performing a via etch to form a via opening exposing a first conductive line corresponding to a first metallization level, and forming, within the via opening and on the first conductive line, a barrier-less prefilled via including first conductive material.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: October 19, 2021
    Assignee: International Business Machines Corporation
    Inventors: Nicholas Anthony Lanzillo, Hosadurga Shobha, Junli Wang, Lawrence A. Clevenger, Christopher J. Penny, Robert Robison, Huai Huang
  • Patent number: 11145653
    Abstract: The present disclosure describes a semiconductor device that includes a semiconductor device that includes a first transistor having a first gate structure. The first gate structure includes a first gate dielectric layer doped with a first dopant at a first dopant concentration and a first work function layer on the first gate dielectric layer. The first gate structure also includes a first gate electrode on the first work function layer. The semiconductor device also includes a second transistor having a second gate structure, where the second gate structure includes a second gate dielectric layer doped with a second dopant at a second dopant concentration lower than the first dopant concentration. The second gate structure also includes a second work function layer on the second gate dielectric layer and a second gate electrode on the second work function layer.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: October 12, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chung-Liang Cheng, I-Ming Chang, Ziwei Fang, Huang-Lin Chao
  • Patent number: 11145549
    Abstract: Production of a transistor, the channel structure of which comprises at least one finned channel structure, the method comprising: forming, from a substrate (1), a molding block (3), forming, on the molding block, a thin layer (7) made from a given semiconductor or semi-metallic material, and consisting of one to ten atomic or molecular monolayers of two-dimensional crystal, withdrawing the molding block while retaining a portion (7a) of the thin layer extending against a lateral face of the molding block, said retained portion (7a) forming a fin that is capable of forming a channel structure of the transistor, producing a coating gate electrode against said fin.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: October 12, 2021
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Thomas Alava, Thomas Ernst, Zheng Han
  • Patent number: 11145814
    Abstract: Methods and structures for fabricating a semiconductor device that includes a reduced programming current phase change memory (PCM) are provided. The method includes forming a bottom electrode. The method further includes forming a PCM and forming a conductive bridge filament in a dielectric to serve as a heater for the PCM. The method also includes forming a top electrode.
    Type: Grant
    Filed: August 12, 2019
    Date of Patent: October 12, 2021
    Assignee: International Business Machines Corporation
    Inventors: Nanbo Gong, Takashi Ando, Guy M. Cohen
  • Patent number: 11133416
    Abstract: In an embodiment, a device includes: a fin extending from a substrate; a gate stack over a channel region of the fin; and a source/drain region in the fin adjacent the channel region, the source/drain region including: a first epitaxial layer contacting sidewalls of the fin, the first epitaxial layer including silicon and germanium doped with a dopant, the first epitaxial layer having a first concentration of the dopant; and a second epitaxial layer on the first epitaxial layer, the second epitaxial layer including silicon and germanium doped with the dopant, the second epitaxial layer having a second concentration of the dopant, the second concentration being greater than the first concentration, the first epitaxial layer and the second epitaxial layer having a same germanium concentration.
    Type: Grant
    Filed: August 23, 2019
    Date of Patent: September 28, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yan-Ting Lin, Hsueh-Chang Sung, Yen-Ru Lee
  • Patent number: 11133221
    Abstract: A method for forming a semiconductor device structure is provided. The method includes providing a substrate, a plurality of first nanostructures, a plurality of second nanostructures, two tensile epitaxial structures, two compressive epitaxial structures, and a dielectric layer over the substrate. The method includes forming a gate dielectric layer over the first nanostructures and the second nanostructures. The method includes forming a first work function metal layer over the gate dielectric layer over the first nanostructures. The method includes forming a second work function metal layer over the gate dielectric layer over the second nanostructures. The method includes forming a compressive gate electrode layer over the first work function metal layer using an atomic layer deposition process or a chemical vapor deposition process. The method includes forming a tensile gate electrode layer over the second work function metal layer using a physical vapor deposition process.
    Type: Grant
    Filed: June 17, 2020
    Date of Patent: September 28, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jin-Aun Ng, Sai-Hooi Yeong
  • Patent number: 11133304
    Abstract: A device includes a first die and a second die. The first die includes: a first substrate that contains first electrical circuitry, a first interconnection structure disposed over the first substrate, a first dielectric layer disposed over the first interconnection structure, and a plurality of first bonding pads disposed over the first dielectric layer. The second die includes: a second substrate that contains second electrical circuitry, a second interconnection structure disposed over the second substrate, a second dielectric layer disposed over the second interconnection structure, and a plurality of second bonding pads disposed over the second dielectric layer. The first bonding pads of the first die are bonded to the second bonding pads of the second die. At least one of the first die or the second die includes a metal-insulator-metal (MIM) capacitor. The MIM capacitor includes more than two metal layers that are stacked over one another.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: September 28, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsiang-Ku Shen, Ying-Ju Chen, Hsien-Wei Chen
  • Patent number: 11127675
    Abstract: An interconnection structure includes a first interlayer dielectric layer, a first conductive line, a protection layer, a second interlayer dielectric layer, and a connection plug. The first conductive line is partially disposed in the first interlayer dielectric layer. The protection layer is disposed on the first conductive line and the first interlayer dielectric layer. The protection layer covers a top surface and a sidewall of the first conductive line. The protection layer includes a recess disposed corresponding to the first conductive line in a vertical direction. The second interlayer dielectric layer is disposed on the protection layer. The connection plug penetrates at least a part of the second interlayer dielectric layer and the protection layer for being connected with the first conductive line.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: September 21, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Min-Shiang Hsu, Yu-Han Tsai, Chih-Sheng Chang
  • Patent number: 11127777
    Abstract: A first region includes first transfer column regions distributed in a first direction. A second region includes second transfer column regions distributed in the first direction. The second region is positioned downstream of the first region in a charge transfer direction. Lengths in a second direction of the first transfer column regions are equal. Lengths in the second direction of the second transfer column regions are longer than the length of the first transfer column region, and increase as the second transfer column region is positioned downstream in the charge transfer direction. A third region is disposed to correspond to the first region and extends along the first direction. A fourth region is disposed to correspond to the second region and extends such that an interval between the fourth region and a pixel region increases in response to a change in the lengths of the second transfer column regions.
    Type: Grant
    Filed: July 19, 2018
    Date of Patent: September 21, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Shin-ichiro Takagi, Yasuhito Yoneta, Masaharu Muramatsu
  • Patent number: 11121235
    Abstract: A structure and a manufacturing method of a metal-oxide-semiconductor field-effect transistor with an element of IVA group ion implantation are disclosed. The element of IVA group ion implantation layer is disposed in a body and close to an interface between a gate oxide layer and the body. The element of IVA group ion implantation layer is utilized to change a property of a channel of the structure.
    Type: Grant
    Filed: July 24, 2019
    Date of Patent: September 14, 2021
    Assignee: National Tsing Hua University
    Inventors: Chih-Fang Huang, Jheng-Yi Jiang, Sheng-Hong Wang, Jia-Qing Hung
  • Patent number: 11121317
    Abstract: Methods, systems, and devices for a low resistance crosspoint architecture are described. A manufacturing system may deposit a thermal barrier material, followed by a first layer of a first conductive material, on a layered assembly including a patterned layer of electrode materials and a patterned layer of a memory material. The manufacturing system may etch a first area of the layered assembly to form a gap in the first layer of the first conductive material, the thermal barrier material, the patterned layer of the memory material, and the patterned layer of electrode materials. The manufacturing system may deposit a second conductive material to form a conductive via in the gap, where the conductive via extends to a height within the layered assembly that is above the thermal barrier material.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: September 14, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Rajasekhar Venigalla, Patrick M. Flynn, Josiah Jebaraj Johnley Muthuraj, Efe Sinan Ege, Kevin Lee Baker, Tao Nguyen, Davis Weymann