Patents Examined by Steven J. Fulk
  • Patent number: 9070599
    Abstract: An array substrate, a manufacturing method thereof and a display device are provided, and the array substrate comprises: a substrate (1); a plurality of data lines (16), formed on the substrate and extending in a first direction; a plurality of gate lines (15), formed on the substrate (1), crossing the plurality of data lines (15), and extending in a second direction perpendicular to the first direction; a plurality of pixel regions, defined by the plurality of gate lines (15) and the plurality of data lines (15) crossing each other and arranged in a matrix form, wherein each of the pixel regions is provided with a thin film transistor and a pixel electrode (12), wherein, the thin film transistor comprises: a gate electrode (2), connected with one of the plurality of gate lines (15); a gate insulating layer (3), provided above the gate line (15) and the gate electrode (2); an active layer (5), formed on the gate insulating layer (3) and disposed corresponding to the gate electrode (2); a drain electrode (8) a
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: June 30, 2015
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Heecheol Kim, Youngsuk Song, Seongyeol Yoo, Seungjin Choi
  • Patent number: 9070738
    Abstract: An SCR-type component of vertical structure has a main upper electrode formed on a silicon region of a first conductivity type which is formed in a silicon layer of a second conductivity type. The silicon region is interrupted in first areas where the material of the silicon layer comes into contact with the upper electrode, and is further interrupted in second areas filled with resistive porous silicon extending between the silicon layer and the main upper electrode.
    Type: Grant
    Filed: September 24, 2014
    Date of Patent: June 30, 2015
    Assignee: STMicroelectronics (Tours) SAS
    Inventor: Samuel Menard
  • Patent number: 9070607
    Abstract: In a method of manufacturing a semiconductor device using an electron beam lithography apparatus configured to emit an electron beam to perform lithography of a pattern, processing including pattern formation with the electron beam lithography apparatus is performed on a wafer, and an electric characteristic of the thus manufactured semiconductor devices is measured by a semiconductor testing apparatus. Then, electron beam lithography data to be used by the electron beam lithography apparatus is adjusted based on a result of measurement of the electric characteristic so as to reduce a variation in the electric characteristic of the semiconductor device within a surface of the wafer.
    Type: Grant
    Filed: October 19, 2012
    Date of Patent: June 30, 2015
    Assignee: Advantest Corp.
    Inventors: Masahiro Ishida, Daisuke Watanabe, Masayuki Kawanabe
  • Patent number: 9070624
    Abstract: A described method includes providing a semiconductor substrate. A first gate structure is formed on the semiconductor substrate and a sacrificial gate structure formed adjacent the first gate structure. The sacrificial gate structure may be used to form a metal gate structure using a replacement gate methodology. A dielectric layer is formed overlying the first gate structure and the sacrificial gate structure. The dielectric layer has a first thickness above a top surface of the first gate structure and a second thickness, less than the first thickness, above a top surface of the sacrificial gate structure. (See, e.g., FIGS. 5, 15, 26). Thus, a subsequent planarization process of the dielectric layer may not contact the first gate structure.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: June 30, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jian-Hao Chen, Chia-Yu Lu, Tung-Heng Hsieh, Kuo-Feng Yu, Chin-Shan Hou, Hsien-Chin Lin, Shyue-Shyh Lin
  • Patent number: 9070594
    Abstract: There is provided a display device comprising a display panel, wherein the display panel comprises pixels, data lines, thin film transistors including first electrodes electrically connected with the data lines, second electrodes disposed to be spaced apart from the first electrodes in a first direction, semiconductor layers overlapping the first electrodes and the second electrodes, and gate electrodes overlapping the semiconductor layers and pads electrically connected with the second electrodes, wherein the thin film transistors includes first thin film transistors and second thin film transistors, which are alternately disposed, the semiconductor layers are divided into first semiconductor layers included in the first thin film transistors and second semiconductor layers included in the second thin film transistors, which are alternately disposed, and a length of the first semiconductor layer in the first direction is larger than a length of the second semiconductor layer in the first direction.
    Type: Grant
    Filed: May 30, 2014
    Date of Patent: June 30, 2015
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventor: Jung Jun Im
  • Patent number: 9064842
    Abstract: A semiconductor device includes a substrate, first plural contacts formed in the substrate, a graphene layer formed on the substrate and on the first plural contacts and second plural contacts formed on the graphene layer such that the graphene layer is formed between the first plural contacts and the second plural contacts.
    Type: Grant
    Filed: March 20, 2012
    Date of Patent: June 23, 2015
    Assignee: International Business Machines Corporation
    Inventors: Ageeth Anke Bol, Aaron Daniel Franklin, Shu-Jen Han
  • Patent number: 9064928
    Abstract: A method includes forming a first epitaxial layer over a semiconductor substrate and etching the first epitaxial layer to form multiple separated first epitaxial regions. The method also includes forming a second epitaxial layer over the etched first epitaxial layer. Each epitaxial layer includes at least one Group III-nitride, and the epitaxial layers collectively form a buffer. The method further includes forming a device layer over the buffer and fabricating a semiconductor device using the device layer. The second epitaxial layer could include second epitaxial regions substantially only on the first epitaxial regions. The second epitaxial layer could also cover the first epitaxial regions and the substrate, and the second epitaxial layer may or may not be etched. The device layer could be formed during the same operation used to form the second epitaxial layer.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: June 23, 2015
    Assignee: NATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Sandeep R. Bahl, Jamal Ramdani
  • Patent number: 9064739
    Abstract: Techniques for quantifying ?Dfin in FINFET technology are provided. In one aspect, a method for quantifying ?Dfin between a pair of long channel FINFET devices includes the steps of: (a) obtaining Vth values for each of the long channel FINFET devices in the pair; (b) determining a ?Vth for the pair of long channel FINFET devices; and (c) using the ?Vth to determine the ?Dfin between the pair of long channel FINFET devices, wherein the ?Vth is a function of a difference in a Qbody and a gate capacitance between the pair of long channel FINFET devices, and wherein the Qbody is a function of Dfin and Nch for each of the long channel FINFET devices in the pair, and as such the ?Vth is proportional to the ?Dfin between the pair of long channel FINFET devices.
    Type: Grant
    Filed: September 17, 2013
    Date of Patent: June 23, 2015
    Assignee: International Business Machines Corporation
    Inventors: Wilfried E. A. Haensch, Chung-Hsun Lin, Philip J. Oldiges, Kern Rim
  • Patent number: 9059043
    Abstract: A gate cavity is formed over a semiconductor fin by forming a disposable gate structure and a planarization dielectric layer over the semiconductor fin, and by removing the disposable gate structure. A doped silicate glass spacer including an electrical dopant is formed on sidewalls of the gate cavity by deposition and an anisotropic etch of a conformal doped silicate glass layer. A gate spacer including a diffusion barrier material is formed on inner sidewalls of the doped silicate glass spacer. A replacement gate structure is formed within the gate cavity, and source/drain regions are formed in portions of the semiconductor fin by outdiffusion of the electrical dopant during an anneal. The source/drain regions are formed within the semiconductor fin, and are self-aligned to the replacement gate electrode.
    Type: Grant
    Filed: February 11, 2014
    Date of Patent: June 16, 2015
    Assignee: International Business Machines Corporation
    Inventors: Effendi Leobandung, Tenko Yamashita
  • Patent number: 9058998
    Abstract: An input signal having a high level or a low level is input to a pad. A first protection element includes a first transistor configured as an N-channel MOSFET designed so as to withstand ESD. A second protection element includes a second transistor configured as a P-channel MOSFET designed so as to withstand ESD. A capacitance element is connected to a second line, and forms an RC filter together with a filter resistor. The capacitance element includes at least one from among a third transistor having the same device structure as that of the first transistor and a fourth transistor having the same device structure as that of the second transistor.
    Type: Grant
    Filed: June 2, 2014
    Date of Patent: June 16, 2015
    Assignee: ROHM CO., LTD.
    Inventor: Kenji Arai
  • Patent number: 9051178
    Abstract: A transmissive light modulator including a first reflection layer; a first active layer, arranged on the first reflection layer and including a plurality of quantum well layers and a plurality of barrier layers; a second reflection layer arranged on the first active layer; a second active layer, arranged on the second reflection layer and including a plurality of quantum well layers and a plurality of barrier layers; and a third reflection layer arranged on the second active layer, wherein the first reflection layer and the third reflection layer are each doped with a first type dopant, and the second reflection layer is doped with a second type dopant, which is electrically opposite to the first type dopant.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: June 9, 2015
    Assignees: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY, SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yong-chul Cho, Yong-tak Lee, Jang-woo You, Byung-hoon Na, Yong-hwa Park, Chang-young Park, Hee-ju Chio, Gun-wu Ju
  • Patent number: 9054297
    Abstract: A conductive via for connecting between a digit line and one side of the magnetic device is positioned beneath, and aligned with, each magnetic device. Other contacts may satisfy the same design rules, using the same process step. An electrode formed on the conductive via is polished to eliminate step functions or seams originating at the conductive via from propagating up through the various deposited layers. This integration approach allows for improved scaling of the MRAM devices to at least a 45 nanometer node, a cell packing factor approaching 6F2, and a uniform thickness of material between the bit lines and the underlying memory elements.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: June 9, 2015
    Assignee: Everspin Technologies, Inc.
    Inventors: Kerry Nagel, Kenneth Smith, Moazzem Hossain, Sanjeev Aggarwal
  • Patent number: 9048349
    Abstract: A wafer processing method transfers an optical device layer (ODL) in an optical device wafer (ODW) to a transfer substrate. The ODL is formed on the front side of an epitaxy substrate through a buffer layer, and is partitioned by a plurality of crossing streets to define a plurality of regions where optical devices are formed. The transfer substrate is bonded to the front side of the ODL. The transfer substrate and the ODL are cut along the streets. The transfer substrate is attached to a supporting member, and a laser beam is applied to the epitaxy substrate from the back side of the epitaxy substrate to the unit of the ODW and the transfer substrate. The focal point of the laser beam is set in the buffer layer, thereby decomposing the buffer layer. The epitaxy substrate is then peeled off from the ODL.
    Type: Grant
    Filed: December 1, 2011
    Date of Patent: June 2, 2015
    Assignee: Disco Corporation
    Inventor: Kazuma Sekiya
  • Patent number: 9029229
    Abstract: Disclosed are devices and methods of forming the devices wherein pair(s) of first openings are formed through a dielectric layer and a first semiconductor layer into a substrate and, within the substrate, the first openings of each pair are expanded laterally and merged to form a corresponding trench. Dielectric material is deposited, filling the upper portions of the first openings and creating trench isolation region(s). A second semiconductor layer is deposited and second opening(s) are formed through the second semiconductor and dielectric layers, exposing monocrystalline portion(s) of the first semiconductor layer between the each pair of first openings. A third semiconductor layer is epitaxially deposited with a polycrystalline section on the second semiconductor layer and monocrystalline section(s) on the exposed monocrystalline portion(s) of the first semiconductor layer. A crystallization anneal is performed and a device (e.g.
    Type: Grant
    Filed: May 29, 2013
    Date of Patent: May 12, 2015
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Peng Cheng, Vibhor Jain, Vikas Kumar Kaushal, Qizhi Liu, John J. Pekarik
  • Patent number: 9025118
    Abstract: A display substrate includes a base substrate, a switching element, a gate line, a data line and a pixel electrode. Each of the gate line and the data line includes a first metal layer, and a second metal layer directly on the first metal layer. The switching element is on the base substrate, and includes a control electrode and an input electrode or an output electrode. The control electrode includes the first metal layer and excludes the second metal layer, and extends from the gate line. The input electrode or the output electrode includes a second metal layer and excludes the first metal layer. The input electrode extends from the data line. The pixel electrode is electrically connected to the output electrode of the switching element through a first contact hole, and includes a transparent conductive layer.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: May 5, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jung-Kyu Lee, Yoon-Ho Khang, Se-Hwan Yu, Cheol-Kyu Kim, Yong-Su Lee, Chong-Sup Chang, Sang-Ho Park, Su-Hyoung Kang, Hyun-Jae Na, Young-Ki Shin
  • Patent number: 9012255
    Abstract: A method of manufacturing a MEMS package includes initially providing a substrate formed of a first material and defining a bore therein. The bore is substantially completely lined with a second material that is different from the first material. A micromachined component having a fluid passageway formed therein is affixed to the substrate such that the bore and the fluid passageway are in fluid communication.
    Type: Grant
    Filed: October 23, 2013
    Date of Patent: April 21, 2015
    Assignee: DunAn Microstaq, Inc.
    Inventors: Parthiban Arunasalam, Joe Albert Ojeda, Sr.
  • Patent number: 9006877
    Abstract: A package for a micro-electromechanical device (MEMS package) includes an inner enclosure having an inner cavity defined therein, and a fill port channel communicating with the inner cavity and of sufficient length to allow a quantity of adhesive to enter the fill port channel while preventing the adhesive from entering the inner cavity.
    Type: Grant
    Filed: October 31, 2008
    Date of Patent: April 14, 2015
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Don Michael, Mari J. Rossman, Bradley Bower, Charles Craig Haluzak, John R. Sterner, Quan Qi, John Kane
  • Patent number: 9007541
    Abstract: A pixel array and a display panel are provided. The pixel array includes a plurality of pixel units. Each of the pixel units includes a first scan line, a second scan line, a data line, a first thin-film transistor, a second thin-film transistor, a first pixel electrode and a second pixel electrode. The first thin-film transistor is electrically connected to the first scan line and the data line. The first pixel electrode is electrically connected to the first thin-film transistor. The second thin-film transistor is electrically connected to the second scan line and the data line. The second pixel electrode is electrically connected to the second thin-film transistor. The orthogonal projection pattern of the first thin-film transistor on XY plane and the orthogonal projection pattern of the second thin-film transistor on XY plane are substantially the same.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: April 14, 2015
    Assignee: Au Optronics Corporation
    Inventors: Szu-Chieh Chen, Yu-Hsin Ting, Chen-Ming Chen, I-Fang Chen, Yi-Xuan Hung, Da-Wei Fan
  • Patent number: 9006079
    Abstract: A method includes forming Shallow Trench Isolation (STI) regions extending from a top surface of a semiconductor substrate into the semiconductor substrate, and after the forming the STI regions, oxidizing an upper portion of a semiconductor strip between the STI regions. A width of the upper portion of the semiconductor strip is reduced by the oxidizing. The STI regions are recessed, until a portion of the upper portion of the semiconductor strip is higher than a top surface of remaining portions of the STI regions to form a semiconductor fin.
    Type: Grant
    Filed: October 19, 2012
    Date of Patent: April 14, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Cheng Ching, Shi Ning Ju
  • Patent number: RE45462
    Abstract: A semiconductor device includes a first pMISFET region having an Si channel, a second pMISFET region having an Si channel and an nMISFET region having an Si channel. First SiGe layers which apply first compression strain to the Si channel are embedded and formed in the first pMISFET region to sandwich the Si channel thereof and second SiGe layers which apply second compression strain different from the first compression strain to the Si channel are embedded and formed in the second pMISFET region to sandwich the Si channel thereof.
    Type: Grant
    Filed: August 8, 2012
    Date of Patent: April 14, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shinji Mori, Tsutomu Sato, Koji Matsuo