Patents Examined by Thai T Vuong
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Patent number: 9799678Abstract: A method for forming a thin film according to an exemplary embodiment of the present invention includes forming the thin film at a power density in the range of approximately 1.5 to approximately 3 W/cm2 and at a pressure of an inert gas that is in the range of approximately 0.2 to approximately 0.3 Pa. This process results in an amorphous metal thin film barrier layer that prevents undesired diffusion from adjacent layers, even when this barrier layer is thinner than many conventional barrier layers.Type: GrantFiled: January 26, 2015Date of Patent: October 24, 2017Assignee: Samsung Display Co., Ltd.Inventors: Byeong-Beom Kim, Je-Hyeong Park, Jae-Hyoung Youn, Jean-Ho Song, Jong-In Kim
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Patent number: 9793474Abstract: A method of forming a non-volatile memory device. The method includes providing a substrate having a surface region and forming a first dielectric material overlying the surface region of the substrate. A first electrode structure is formed overlying the first dielectric material and a p+ polycrystalline silicon germanium material is formed overlying the first electrode structure. A p+ polycrystalline silicon material is formed overlying the first electrode structure using the polycrystalline silicon germanium material as a seed layer at a deposition temperature ranging from about 430 Degree Celsius to about 475 Degree Celsius without further anneal. The method forms a resistive switching material overlying the polycrystalline silicon material, and a second electrode structure including an active metal material overlying the resistive switching material.Type: GrantFiled: February 24, 2014Date of Patent: October 17, 2017Assignee: CROSSBAR, INC.Inventors: Xin Sun, Sung Hyun Jo, Tanmay Kumar
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Patent number: 9780325Abstract: Disclosed is an organic light emitting display device having excellent lifespan and current efficiency characteristics, as well as high luminance to provide increased resolution and improved reliability, and a method for manufacturing the same. The organic light emitting display device comprises a substrate having first, second, and third pixel regions; a first electrode arranged on the substrate; a second electrode arranged on the first electrode; and an organic layer arranged between the first electrode and the second electrode. The organic layer includes first, second and third organic layers on the first, second and third pixel regions, respectively. Each of the first, second and third organic layers includes a plurality unit organic layers and at least one charge generating layer arranged between the plurality of unit organic layers.Type: GrantFiled: December 4, 2014Date of Patent: October 3, 2017Assignee: LG DISPLAY CO., LTD.Inventor: Se Hee Lee
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Patent number: 9768243Abstract: A plurality of openings is formed in a dielectric layer formed on a semiconductor substrate. The plurality of openings comprises a first opening extending to the semiconductor substrate, a second opening extending to a first depth that is substantially less than a thickness of the dielectric layer, and a third opening extending to a second depth that is substantially greater than the first depth. A multi-layer gate electrode is formed in the first opening. A thin resistor structure is formed in the second opening, and a connection structure is formed in the third opening, by filling the second and third openings substantially simultaneously with a resistor metal.Type: GrantFiled: July 5, 2013Date of Patent: September 19, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsiu-Jung Yen, Jen-Pan Wang, Yu-Hong Pan, Chih-Fu Chang
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Patent number: 9761749Abstract: A photoelectric conversion device with improved electric characteristics is provided. The photoelectric conversion device has a structure in which a window layer is formed by a stack of a first silicon semiconductor layer and a second silicon semiconductor layer, and the second silicon semiconductor layer has high carrier concentration than the first silicon semiconductor layer and has an opening. Light irradiation is performed on the first silicon semiconductor layer through the opening without passing through the second silicon semiconductor layer; thus, light absorption loss in the window layer can be reduced.Type: GrantFiled: February 20, 2015Date of Patent: September 12, 2017Assignee: Semiconductor Energy Laboratory Co., LTD.Inventors: Takashi Hirose, Naoto Kusumoto
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Patent number: 9698155Abstract: A semiconductor device includes a plurality of first insulating layers and a plurality of second layers alternately and vertically stacked on a substrate. Each of the plurality of second layers includes a horizontal electrode horizontally separated by a second insulating layer. A contact plug penetrates the plurality of first insulating layers and the second insulating layer of the plurality of second layers.Type: GrantFiled: December 8, 2014Date of Patent: July 4, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sunil Shim, Wonseok Cho, Woonkyung Lee
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Patent number: 9698099Abstract: A semiconductor structure includes a first conductive path and a second conductive path configured to carry a first pair of differential signals representative of an in-phase signal. The semiconductor device further includes a third conductive path and a fourth conductive path configured to carry a second pair of differential signals representative of a quadrature signal corresponding to the in-phase signal. The first and second conductive paths are in a conductive layer of the semiconductor structure, and the third and fourth conductive paths are in another conductive layer of the semiconductor structure.Type: GrantFiled: April 28, 2015Date of Patent: July 4, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hui Yu Lee, Feng Wei Kuo, Jui-Feng Kuan, Yi-Kan Cheng
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Patent number: 9698266Abstract: A method for forming a semiconductor device comprises forming a first buffer layer with a first melting point on a substrate. A second buffer layer is formed on the first buffer layer. The second buffer layer has a second melting point that is greater than the first melting point. Annealing process is performed that increases a temperature of the first buffer layer such that the first buffer layer partially liquefies and causes a strain in the second buffer layer to be substantially reduced.Type: GrantFiled: March 9, 2016Date of Patent: July 4, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
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Patent number: 9691849Abstract: Under one aspect, a plurality of silicon nanostructures is provided. Each of the silicon nanostructures includes a length and a cross-section, the cross-section being substantially constant along the length, the length being at least 100 microns. Under another aspect, a method of making nanostructures is provided that includes providing a silicon wafer including a thickness and first and second surfaces separated from one another by the thickness; forming a patterned layer of metal on the first surface of the silicon wafer; generating a current through the thickness of the silicon wafer, the metal oxidizing the silicon wafer in a region beneath the patterned layer of the metal; and exposing the silicon wafer to an etchant in the presence of the current, the etchant removing the oxidized region of the silicon wafer so as to define a plurality of nanostructures. Methods of transferring nanowires also are provided.Type: GrantFiled: April 9, 2015Date of Patent: June 27, 2017Assignee: Alphabet Energy, Inc.Inventors: Jeffrey M. Weisse, John P. Reifenberg, Lindsay M. Miller, Matthew L. Scullin
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Patent number: 9685321Abstract: A semiconductor memory device in an embodiment includes a semiconductor layer, a control gate electrode, an organic molecular layer provided between the semiconductor layer and the control gate electrode, and a first insulating layer provided between the organic molecular layer and the semiconductor layer, the first insulating layer having a first layer containing alkyl chains and a second layer containing siloxane, the second layer being provided between the first layer and the organic molecular layer.Type: GrantFiled: March 9, 2016Date of Patent: June 20, 2017Assignee: Kabushiki Kaisha ToshibaInventors: Masaya Terai, Shigeki Hattori, Hideyuki Nishizawa, Koji Asakawa
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Patent number: 9680026Abstract: A semiconductor device that can operate at high speed or having high strength against stress is provided. One embodiment of the present invention is a semiconductor device including a semiconductor film including a channel formation region and a pair of impurity regions between which the channel formation region is positioned; a gate electrode overlapping side and top portions of the channel formation region with an insulating film positioned between the gate electrode and the side and top portions; and a source electrode and a drain electrode in contact with side and top portions of the pair of impurity regions.Type: GrantFiled: September 5, 2014Date of Patent: June 13, 2017Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 9673064Abstract: A lattice structure is formed in a non-silicon interposer substrate to create large cells that are multiples of through hole pitches to act as islands for dielectric fields. Each unit cell is then filled with a dielectric material. Thereafter, holes (i.e., through holes or blind holes) are created within the dielectric material in the cells. After hole formation, a conductive metal is formed into each of the holes providing an interposer. This method can enable fine pitch processing in organic-based materials, isolates the thermal coefficient of expansion (TCE) stress from metal vias to low TCE carriers and creates a path to high volume, low costs components in panel form.Type: GrantFiled: October 3, 2015Date of Patent: June 6, 2017Assignee: International Business Machines CorporationInventors: Jean Audet, Benjamin V. Fasano, Shidong Li
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Patent number: 9664956Abstract: The inventive concept relates to a liquid crystal display and a manufacturing method thereof. More particularly, the inventive concept relates to a liquid crystal display including one substrate and a manufacturing method thereof. A liquid crystal display according to an exemplary embodiment of the inventive concept includes: a thin film transistor; a passivation layer; a pixel electrode; an opposing electrode disposed on the pixel electrode and spaced apart from the pixel electrode by a microcavity interposed therebetween; a roof layer disposed on the opposing electrode and overlapping the pixel electrode, wherein the roof layer and the opposing electrode form a valley exposing an injection hole of the microcavity, a buffer zone disposed between the light transmitting area and the valley and a light blocking member overlapping the valley. A height of the microcavity in the buffer zone is higher than a height of the microcavity in the light transmitting area.Type: GrantFiled: July 10, 2014Date of Patent: May 30, 2017Assignee: Samsung Display Co., Ltd.Inventors: Jung Suk Bang, Seon Uk Lee
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Patent number: 9636026Abstract: One aspect relates to a layered structure with a substrate, a first layer over the substrate, and a second layer over the first layer. The substrate and the second layer are an electrically conductive material and the first layer is an insulating material or the substrate and the second layer are insulating material and the first layer is electrically conductive material. At least one of the first and second layers comprises an electrically conductive polymer.Type: GrantFiled: January 8, 2016Date of Patent: May 2, 2017Assignee: Heraeus Deutschland GmbH & Co. KGInventors: Jami A. Hafiz, Stefan Schibli, Jens Troetzschel
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Patent number: 9634186Abstract: A method of manufacturing a light emitting device package includes forming on a growth substrate a light emitting structure including a first conductivity-type semiconductor layer, an active layer, and a second conductivity-type semiconductor layer. First and second electrodes are formed on the light emitting structure to be connected to the first and second conductivity-type semiconductor layers, respectively. A first bonding layer is formed on the light emitting structure, and is polished A second bonding layer is formed on the polished first bonding layer, and a support substrate is bonded to the light emitting structure using the first and second bonding layers.Type: GrantFiled: December 5, 2014Date of Patent: April 25, 2017Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Jun Ho Lee
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Patent number: 9634007Abstract: Trench-confined selective epitaxial growth process in which epitaxial growth of a semiconductor device layer proceeds within the confines of a trench. In embodiments, a trench is fabricated to include a pristine, planar semiconductor seeding surface disposed at the bottom of the trench. Semiconductor regions around the seeding surface may be recessed relative to the seeding surface with Isolation dielectric disposed there on to surround the semiconductor seeding layer and form the trench. In embodiments to form the trench, a sacrificial hardmask fin may be covered in dielectric which is then planarized to expose the hardmask fin, which is then removed to expose the seeding surface. A semiconductor device layer is formed from the seeding surface through selective heteroepitaxy. In embodiments, non-planar devices are formed from the semiconductor device layer by recessing a top surface of the isolation dielectric.Type: GrantFiled: June 11, 2014Date of Patent: April 25, 2017Assignee: Intel CorporationInventors: Ravi Pillarisetty, Seung Hoon Sung, Niti Goel, Jack T. Kavalieros, Sansaptak Dasgupta, Van H. Le, Willy Rachmady, Marko Radosavljevic, Gilbert Dewey, Han Wui Then, Niloy Mukherjee, Matthew V. Metz, Robert S. Chau
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Patent number: 9634127Abstract: Methods are disclosed herein for fabricating integrated circuit devices, such as fin-like field-effect transistors (FinFETs). An exemplary method includes forming a first semiconductor material layer over a fin portion of a substrate; forming a second semiconductor material layer over the first semiconductor material layer; and converting a portion of the first semiconductor material layer to a first semiconductor oxide layer. The fin portion of the substrate, the first semiconductor material layer, the first semiconductor oxide layer, and the second semiconductor material layer form a fin. The method further includes forming a gate stack overwrapping the fin.Type: GrantFiled: April 15, 2016Date of Patent: April 25, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Cheng Ching, Gwan Sin Chang, Zhiqiang Wu, Chih-Hao Wang
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Patent number: 9627246Abstract: A method of forming a trench isolation (e.g., an STI) for an integrated circuit includes forming a pad oxide layer and then a nitride layer over a semiconductor substrate, performing a trench etch through the structure to form a trench, depositing a trench oxide layer over the structure to form a filled trench, depositing a sacrificial planarizing layer, which is etch-selective to the trench oxide layer, over the deposited oxide, performing a planarizing etch process that removes the sacrificial planarizing layer and decreases surface variations in an upper surface of the trench oxide layer, performing an oxide etch process that is selective to the trench oxide layer to remove remaining portions of the trench oxide layer outside the filled trench, and removing the remaining nitride layer such that the remaining oxide-filled trench defines a trench isolation structure that projects above an exposed upper surface of the semiconductor substrate.Type: GrantFiled: June 10, 2015Date of Patent: April 18, 2017Assignee: MICROCHIP TECHNOLOGY INCORPORATEDInventors: Justin Hiroki Sato, Gregory Allen Stom
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Patent number: 9627539Abstract: A replacement channel and a method for forming the same in a semiconductor device are provided. A channel area is defined in a substrate which is a surface of a semiconductor wafer or a structure such as a fin formed over the wafer. Portions of the channel region are removed and are replaced with a replacement channel material formed by an epitaxial growth/deposition process to include a first dopant concentration level less than a first dopant concentration level. A subsequent doping operation or operations is then used to boost the average dopant concentration to a level greater than the first dopant concentration level. The replacement channel material is formed to include a gradient in which the upper portion of the replacement channel material has a greater dopant concentration than the lower portion of replacement channel material.Type: GrantFiled: January 15, 2015Date of Patent: April 18, 2017Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Lien Huang, Ming-Huan Tsai, Clement Hsingjen Wann
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Patent number: 9620528Abstract: A display panel is disclosed, which comprises: a substrate with a first surface, a first thin film transistor unit and a second thin film transistor unit disposed on the first surface of the substrate; a first conductive line with a first inclined surface, disposed on the first surface of the substrate and electrically connecting to the first thin film transistor unit; a second conductive line with a second inclined surface, disposed on the first surface of the substrate and electrically connecting to the second thin film transistor unit, wherein an angle included between the first surface and the first inclined surface or an extension surface thereof of the first conductive line is defined as a first angle, an angle included between the first surface and the second inclined surface or an extension surface thereof of the second conductive line is defined as a second angle, and the first angle is different from the second angle.Type: GrantFiled: December 15, 2014Date of Patent: April 11, 2017Assignee: INNOLUX CORPORATIONInventors: Kuo-Hao Chiu, Peng-Cheng Huang, Hsia-Ching Chu