Patents Examined by Thao P. Le
  • Patent number: 11791320
    Abstract: Integrated circuit (IC) packages employing a package substrate with a double side embedded trace substrate (ETS), and related fabrication methods. To facilitate providing a reduced thickness substrate in the IC package to reduce overall height of the IC package while supporting higher density input/output (I/O) connections, a package substrate in the IC package includes a double side ETS. A double side ETS includes two (2) adjacent ETS metallization layers that both include metal traces embedded in an insulating layer. The embedded metal traces in the ETS metallization layers of the double side ETS can be electrically coupled to each other through vertical interconnect accesses (vias) (e.g., metal pillars, metal posts) to provide signal routing paths between embedded metal traces in the ETS metallization layers.
    Type: Grant
    Filed: November 22, 2021
    Date of Patent: October 17, 2023
    Assignee: QUALCOMM INCORPORATED
    Inventors: Hong Bok We, Joan Rey Villarba Buot, Michelle Yejin Kim, Kuiwon Kang, Aniket Patil
  • Patent number: 11791328
    Abstract: The present application discloses a method for fabricating a semiconductor device with integrated decoupling alignment features. The method includes providing a first substrate; forming a plurality of first alignment marks on the first substrate and parallel to each other, wherein the first substrate and the plurality of first alignment marks together configure a first wafer; providing a second wafer comprising a plurality of second alignment marks parallel to each other; and bonding the second wafer onto the first wafer. The plurality of second alignment marks are arranged parallel to the plurality of first alignment marks and adjacent to the plurality of first alignment marks in a top-view perspective. The plurality of first alignment marks and the plurality of second alignment marks comprise a fluorescence material.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: October 17, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Tse-Yao Huang
  • Patent number: 11784168
    Abstract: A semiconductor chip including a semiconductor substrate having a first surface and a second surface and having an active layer in a region adjacent to the first surface, a first through electrode penetrating at least a portion of the semiconductor substrate and connected to the active layer, a second through electrode located at a greater radial location from the center of the semiconductor substrate than the first through electrode, penetrating at least a portion of the semiconductor substrate, and connected to the active layer. The semiconductor chip also including a first chip connection pad having a first height and a first width, located on the second surface of the semiconductor substrate, and connected to the first through electrode, and a second chip connection pad having a second height greater than the first height and a second width greater than the first width, located on the second surface of the semiconductor substrate, and connected to the second through electrode.
    Type: Grant
    Filed: May 19, 2022
    Date of Patent: October 10, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yongwon Choi, Wonkeun Kim, Inyoung Lee
  • Patent number: 11784260
    Abstract: A semiconductor device includes a first transistor having a first threshold voltage, and including first channels, first source/drain layers connected to opposite sidewalls of the first channels, and a first gate structure surrounding the first channels and including a first gate insulation pattern, a first threshold voltage control pattern, and a first workfunction metal pattern sequentially stacked. The semiconductor device includes a second transistor having a second threshold voltage greater than the first threshold voltage, and including second channels, second source/drain layers connected to opposite sidewalls of the second channels, and a second gate structure surrounding the second channels and including a second gate insulation pattern, a second threshold voltage control pattern, and a second workfunction metal pattern sequentially stacked. A thickness of the second threshold voltage control pattern is equal to or less than a thickness of the first threshold voltage control pattern.
    Type: Grant
    Filed: July 12, 2022
    Date of Patent: October 10, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jae-Jung Kim, Dong-Soo Lee, Sang-Yong Kim, Jin-Kyu Jang, Won-Keun Chung, Sang-Jin Hyun
  • Patent number: 11784169
    Abstract: A semiconductor device, the device including: a first substrate; a first metal layer disposed over the substrate; a second metal layer disposed over the first metal layer; a first level including a plurality of transistors, the first level disposed over the second metal layer, where the plurality of transistors include a second single crystal silicon; a third metal layer disposed over the first level; a fourth metal layer disposed over the third metal layer, where the fourth metal layer is aligned to the first metal layer with a less than 100 nm alignment error; and a via disposed through the first level, where the via has a diameter of less than 450 nm, where the fourth metal layer provides a global power distribution, and where a typical thickness of the fourth metal layer is at least 50% greater than a typical thickness of the third metal.
    Type: Grant
    Filed: April 29, 2023
    Date of Patent: October 10, 2023
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist
  • Patent number: 11776908
    Abstract: Semiconductor dies with edges protected and methods for generating the semiconductor dies are disclosed. Further, the disclosed methods provide for separating the semiconductor dies without using a dicing technique. In one embodiment, trenches are formed on a front side of a substrate including semiconductor dies. Individual trenches correspond to scribe lines of the substrate where each trench has a depth greater than a final thickness of the semiconductor dies. A composite layer may be formed on sidewalls of the trenches to protect the edges of the semiconductor dies. The composite layer includes a metallic layer that shields the semiconductor dies from electromagnetic interference. Subsequently, the substrate may be thinned from a back side to singulate individual semiconductor dies from the substrate.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: October 3, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Brandon P. Wirz, Andrew M. Bayless
  • Patent number: 11764188
    Abstract: An electronic package is provided, in which a first electronic element and a second electronic element are disposed on a first side of a circuit structure and a second side of the circuit structure, respectively, where a first metal layer is formed between the first side of the circuit structure and the first electronic element, a second metal layer is formed on a surface of the second electronic element, and at least one thermally conductive pillar is disposed on the second side of the circuit structure and extends into the circuit structure to thermally conduct the first metal layer and the second metal layer. Therefore, through the thermally conductive pillar, heat generated during operations of the first electronic element and the second electronic element can be quickly dissipated to an external environment and would not accumulate.
    Type: Grant
    Filed: August 25, 2021
    Date of Patent: September 19, 2023
    Inventors: Meng-Huan Chia, Yih-Jenn Jiang, Chang-Fu Lin, Don-Son Jiang
  • Patent number: 11764200
    Abstract: Techniques herein include methods of forming higher density circuits by combining multiple substrates via stacking and bonding of individual substrates. High voltage and low voltage devices along with 3D NAND devises are fabricated on a first wafer, and high voltage and low voltage devices and/or memory are then fabricated on a second wafer and/or third wafer.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: September 19, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Mark Gardner, H. Jim Fulford
  • Patent number: 11764285
    Abstract: Provided is a method of manufacturing a semiconductor device including: providing a substrate having a memory cell region and a logic region; forming a plurality of stack structures on the substrate in the memory cell region; forming a polysilicon layer to cover the plurality of stack structures and the substrate in the logic region; performing a chemical-mechanical polishing (CMP) process on the polysilicon layer to expose top surfaces of the plurality of stack structures; and after performing the CMP process, patterning the polysilicon layer to form an erase gate between adjacent two stack structures and form a logic gate on the substrate in the logic region, wherein the logic gate has a topmost top surface lower than a topmost top surface of the erase gate.
    Type: Grant
    Filed: June 23, 2022
    Date of Patent: September 19, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Chuan Lin, Chiang-Ming Chuang, Shang-Yen Wu
  • Patent number: 11764080
    Abstract: Embodiments of the invention include device packages and methods of forming such packages. In an embodiment, the method of forming a device package may comprise forming a reinforcement layer over a substrate. One or more openings may be formed through the reinforcement layer. In an embodiment, a device die may be placed into one of the openings. The device die may be bonded to the substrate by reflowing one or more solder bumps positioned between the device die and the substrate. Embodiments of the invention may include a molded reinforcement layer. Alternative embodiments include a reinforcement layer that is adhered to the surface of the substrate with an adhesive layer.
    Type: Grant
    Filed: April 7, 2022
    Date of Patent: September 19, 2023
    Assignee: Intel Corporation
    Inventors: Omkar G. Karhade, Nitin A. Deshpande, Debendra Mallik, Bassam M. Ziadeh, Yoshihiro Tomita
  • Patent number: 11756853
    Abstract: A semiconductor package includes a substrate, first to third semiconductor chips disposed on the substrate, first to third heat transfer components, first and second heat spreaders, and a trench. The first semiconductor chip is between the second and third semiconductor chips. The first to third heat transfer components are disposed on the semiconductor chips, respectively. The first heat spreader is formed on the first to third heat transfer components. The second heat spreader protrudes from the first heat spreader. The trench is formed on the second heat spreader. The second heat spreader includes first and second side units spaced apart with the trench between. A distance between an outer surface of an uppermost part of the first side unit and an outer surface of an uppermost part of the second side unit is smaller than a width of an upper surface of the first semiconductor chip.
    Type: Grant
    Filed: April 7, 2022
    Date of Patent: September 12, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Dong Joo Choi, Seung Duk Baek
  • Patent number: 11756890
    Abstract: Embodiments disclosed herein include electronic packages and methods of forming such packages. In an embodiment, a microelectronic device package may include a redistribution layer (RDL) and an interposer over the RDL. In an embodiment, a glass core may be formed over the RDL and surround the interposer. In an embodiment, the microelectronic device package may further comprise a plurality of dies over the interposer. In an embodiment, the plurality of dies are communicatively coupled with the interposer.
    Type: Grant
    Filed: April 28, 2022
    Date of Patent: September 12, 2023
    Assignee: Intel Corporation
    Inventors: Srinivas Pietambaram, Rahul Manepalli, Gang Duan
  • Patent number: 11749585
    Abstract: An integrated circuit assembly may be formed comprising an electronic substrate, at least one integrated circuit device electrically attached to the electronic substrate, a mold material layer abutting electronic substrate and substantially surrounding the at least one integrated circuit, and at least one structure within the mold material layer, wherein the at least one structure comprises a material having a modulus of greater than about 20 gigapascals and a thermal conductivity of greater than about 10 watts per meter-Kelvin.
    Type: Grant
    Filed: February 28, 2020
    Date of Patent: September 5, 2023
    Assignee: Intel Corporation
    Inventors: Yiqun Bai, Vipul Mehta, John Decker, Ziyin Lin
  • Patent number: 11749668
    Abstract: A semiconductor device is formed by providing a semiconductor package including a shielding layer and forming a slot in the shielding layer using a laser. The laser is turned on and exposed to the shielding layer with a center of the laser disposed over a first point of the shielding layer. The laser is moved in a loop while the laser remains on and exposed to the shielding layer. Exposure of the laser to the shielding layer is stopped when the center of the laser is disposed over a second point of the shielding layer. A distance between the first point and the second point is approximately equal to a radius of the laser.
    Type: Grant
    Filed: June 9, 2021
    Date of Patent: September 5, 2023
    Assignee: STATS ChipPAC Pte. Ltd
    Inventors: ChangOh Kim, JinHee Jung
  • Patent number: 11749661
    Abstract: A package that includes a substrate, an integrated device coupled to the substrate, and an integrated passive device comprising at least two capacitors. The integrated passive device is coupled to the substrate. The integrated passive device includes a passive device substrate comprising a first trench and a second trench, an oxide layer located over the first trench and the second trench, a first electrically conductive layer located over the oxide layer the first trench, a dielectric layer located over the first electrically conductive layer, and a second electrically conductive layer located over the dielectric layer.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: September 5, 2023
    Assignee: QUALCOMM INCORPORATED
    Inventors: Biancun Xie, Shree Krishna Pandey
  • Patent number: 11749711
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate and a magnetic element over the semiconductor substrate. The semiconductor device structure also includes an adhesive element between the magnetic element and the substrate. The adhesive element extends exceeding opposite edges of the magnetic element. The semiconductor device structure further includes an isolation element extending exceeding the opposite edges of the magnetic element. The isolation element partially covers a top surface of the magnetic element. In addition, the semiconductor device structure includes a conductive line over the isolation element.
    Type: Grant
    Filed: January 19, 2022
    Date of Patent: September 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Cheng Chen, Wei-Li Huang, Chien-Chih Kuo, Hon-Lin Huang, Chin-Yu Ku, Chen-Shien Chen
  • Patent number: 11749611
    Abstract: A package comprising a substrate, a first integrated device and a second integrated device. The substrate includes at least one dielectric layer, a plurality of interconnects, a solder resist layer, and a plurality of periphery interconnects located over the solder resist layer. The first integrated device is coupled to the substrate. The second integrated device is coupled to the substrate. The second integrated device is configured to be electrically coupled to the first integrated device through the plurality of periphery interconnects.
    Type: Grant
    Filed: February 1, 2021
    Date of Patent: September 5, 2023
    Assignee: QUALCOMM INCORPORATED
    Inventors: Aniket Patil, Hong Bok We
  • Patent number: 11742260
    Abstract: Subject matter disclosed herein may relate to devices and techniques for cooling three-dimensional integrated circuit (IC) devices. In particular embodiments, an IC device may comprise a three-dimensional structure having a first surface adapted to face a mounting surface and a second surface opposite the first surface, and having one or more cavities to extend at least below the second surface.
    Type: Grant
    Filed: March 19, 2021
    Date of Patent: August 29, 2023
    Assignee: Arm Limited
    Inventor: Paul Harry Gleichauf
  • Patent number: 11742275
    Abstract: Embodiments of the present disclosure are directed towards techniques and configurations for ground via clustering for crosstalk mitigation in integrated circuit (IC) assemblies. In some embodiments, an IC package assembly may include a first package substrate configured to route input/output (I/O) signals and ground between a die and a second package substrate. The first package substrate may include a plurality of contacts disposed on one side of the first package substrate and at least two ground vias of a same layer of vias, and the at least two ground vias may form a cluster of ground vias electrically coupled with an individual contact. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: December 30, 2021
    Date of Patent: August 29, 2023
    Assignee: Intel Corporation
    Inventors: Zhiguo Qian, Kemal Aygun, Yu Zhang
  • Patent number: 11744104
    Abstract: A display panel includes a base substrate including a front surface and a rear surface and having first and second holes, and a pixel layer on the base substrate. A display area is defined in the front surface. The first hole overlaps with the display area and penetrates the front and rear surfaces. The second hole overlaps with the display area, is adjacent to the first hole, and is recessed from the front surface. The base substrate includes a first base layer including the rear surface, a first barrier layer on the first base layer and including first inorganic films having a first refractive index, and second inorganic films having a second refractive index, a second base layer on the first barrier layer, and a second barrier layer on the second base layer and including the front surface. The first and second inorganic films are alternately stacked.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: August 29, 2023
    Assignee: Samsung Display Co., Ltd.
    Inventors: Junghan Seo, Wooyong Sung