Patents Examined by Thien F Tran
  • Patent number: 10930568
    Abstract: A semiconductor structure includes at least one non-self-aligned contact in a metallization layer and a fabrication method for forming the same are disclosed. The method includes forming gate metal in a gate stack on a substrate and forming a source-drain contact in a source-drain stack on the substrate. The gate stack and the source-drain stack are separated by a sidewall spacer. The method recesses the sidewall spacer thereby forming a trench. In the trench, a first outer metal liner and a second outer metal liner are recessed, horizontally enlarging the trench to form a widened trench over respective top surfaces of the recessed first outer metal liner, second outer metal liner, and sidewall spacer. The method then deposits dielectric material filling the widened trench and contacting the first inner metal core, the second inner metal core, the first outer metal liner, the second outer metal liner, and the sidewall spacer.
    Type: Grant
    Filed: September 23, 2019
    Date of Patent: February 23, 2021
    Assignee: International Business Machines Corporation
    Inventors: Ruilong Xie, Kangguo Cheng, Chanro Park, Juntao Li
  • Patent number: 10930748
    Abstract: A semiconductor device includes: a semiconductor (10 ?m?tsi?30 ?m); a metal layer (30 ?m?tag?60 ?m) comprising Ag; a metal layer (10 ?m?tni?35 ?m) comprising Ni; and transistors. The transistors include a source electrode and a gate electrode on the semiconductor layer. The metal layer functions as a common drain region for the transistors. The ratio of the lengths of the longer side and the shorter side of the semiconductor layer is at most 1.73. The ratio of the surface area and the perimeter length of each electrode included in the source electrode is at most 0.127. The cumulative surface area of the source electrode and the gate electrode is at most 2.61 mm2. The length of the shorter side of the source electrode is at most 0.3 mm, and 702<2.33×tsi+10.5×tag+8.90×tni<943 is satisfied.
    Type: Grant
    Filed: January 17, 2019
    Date of Patent: February 23, 2021
    Assignee: PANASONIC SEMICONDUCTOR SOLUTIONS CO., LTD.
    Inventors: Masao Hamasaki, Masaaki Hirako, Ryosuke Okawa, Ryou Kato
  • Patent number: 10908321
    Abstract: A glass laminate includes a glass substrate including a first main surface and a second main surface, and a functional layer at least on the first main surface. The functional layer includes at least two layers having a refractive index different from each other and the at least two layers are alternately laminated. The functional layer includes an outermost layer farthest from the glass substrate and a second layer that is adjacent to the outermost layer and lies closer to the glass substrate than the outermost layer. The outermost layer includes SiO2 as a main component. The second layer has a carbon concentration of 3×1018 atoms/cm3 or more and 5×1019 atoms/cm3 or less, and the carbon concentration of the second layer is lower than that of the outermost layer.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: February 2, 2021
    Assignee: AGC Inc.
    Inventors: Kensuke Fujii, Michinori Suehara, Kazunari Tohyama
  • Patent number: 10910478
    Abstract: A MOSFET device includes an epitaxial region disposed on an upper surface of a substrate, and at least two body regions formed in the epitaxial region. The body regions are disposed proximate an upper surface of the epitaxial region and spaced laterally apart. The device further includes at least two source regions disposed in respective body regions, proximate an upper surface of the body regions, and a gate structure including at least two planar gates and a trench gate. Each of the planar gates is disposed on the upper surface of the epitaxial region and overlaps at least a portion of a corresponding body region. The trench gate is formed partially through the epitaxial region and between the body regions. A drain contact disposed on a back surface of the substrate provides electrical connection with the substrate.
    Type: Grant
    Filed: March 4, 2020
    Date of Patent: February 2, 2021
    Inventor: Shuming Xu
  • Patent number: 10903237
    Abstract: Memory stack structures and dielectric wall structures are formed through a vertically alternating sequence of continuous insulating layers and continuous sacrificial material layers. Backside trenches are formed to divide the vertically alternating sequence into multiple alternating stacks. First portions of the continuous sacrificial material layers are replaced with electrically conductive layers. A connection region including a pair of dielectric wall structures is provided between a first memory array region and a second memory array region of a first alternating stack. Second portions of the continuous sacrificial material layers remain between the pair of dielectric wall structures as a vertical stack of dielectric plates. An upper subset of the first electrically conductive layers is patterned and is divided into multiple discrete portions. The multiple discrete portions are electrically connected by a respective set of connection metal interconnect structures.
    Type: Grant
    Filed: November 1, 2019
    Date of Patent: January 26, 2021
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Naohiro Hosoda, Hiroyuki Ogawa, Yuki Mizutani
  • Patent number: 10903236
    Abstract: A three-dimensional (3D) semiconductor memory device includes a substrate that includes a cell array region and a connection region, a dummy trench formed on the connection region, an electrode structure on the substrate and that includes vertically stacked electrodes that have a staircase structure on the connection region, a dummy insulating structure disposed in the dummy trench, the dummy insulating structure including an etch stop pattern spaced apart from the substrate and the electrode structure, a cell channel structure disposed on the cell array region and that penetrates the electrode structure and makes contact with the substrate, and a dummy channel structure disposed on the connection region and that penetrates the electrode structure and a portion of the dummy insulating structure and that makes contact with the etch stop pattern.
    Type: Grant
    Filed: October 24, 2019
    Date of Patent: January 26, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kangyoon Choi, Dong-Sik Lee, Jongwon Kim, Gilsung Lee, Eunsuk Cho, Byungyong Choi, Sung-Min Hwang
  • Patent number: 10886456
    Abstract: A nonvolatile magnetic memory device having a magnetoresistance-effect element includes: (A) a laminated structure having a recording layer in which an axis of easy magnetization is oriented in a perpendicular direction; (B) a first wiring line electrically connected to a lower part of the laminated structure; and (C) a second wiring line electrically connected to an upper part of the laminated structure, wherein a high Young's modulus region having a Young's modulus of a higher value than that of a Young's modulus of a material forming the recording layer is provided close to a side surface of the laminated structure.
    Type: Grant
    Filed: October 10, 2018
    Date of Patent: January 5, 2021
    Assignee: SONY CORPORATION
    Inventor: Mitsuharu Shoji
  • Patent number: 10886256
    Abstract: Embodiments of methods and systems for wafer bonding alignment compensation are disclosed. The method comprises bonding a first pair of wafers including a first wafer and a second wafer, wherein the first pair of wafers have a plurality of corresponding bonding alignment mark pairs each including a first bonding alignment mark on the first wafer and a second bonding alignment mark on the second wafer; measuring alignment positions of the plurality of bonding alignment mark pairs; determining a mean run-out misalignment between the first pair of wafers using the alignment measurement, wherein the mean run-out misalignment indicates a deformation of at least one of the first pair of wafers; and during bonding of a second pair of wafers, controlling a wafer deformation adjustment module to compensate for the run-out misalignment based on the mean run-out misalignment of the first pair of wafers.
    Type: Grant
    Filed: January 7, 2020
    Date of Patent: January 5, 2021
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventor: Shuai Guo
  • Patent number: 10886152
    Abstract: Described herein is a method and system for dual stretching of wafers to create isolated segmented chip scale packages. A wafer having an array of light-emitting diodes (LEDs) is scribed into LED segments, where each LED segment includes a predetermined number of LEDs. The scribed wafer is placed on a stretchable substrate or tape. The tape is stretched and a layer of optically material is placed in the separation gaps. The stretched wafer is scribed on a LED level. The tape is stretched and another layer of optically opaque material is placed in the separation gaps. The same or different optically opaque material can be used for the layers. The two layers of optically opaque material are formed to provide electrical connectivity between the LEDs in each LED segment. In an implementation, each segment or LED is individually addressable.
    Type: Grant
    Filed: May 6, 2020
    Date of Patent: January 5, 2021
    Assignee: Lumileds LLC
    Inventors: Arjen Gerben Van der Sijde, Nicola Bettina Pfeffer, Brendan Jude Moran
  • Patent number: 10886414
    Abstract: A semiconductor device in which fluctuation in electric characteristics due to miniaturization is less likely to be caused is provided. The semiconductor device includes an oxide semiconductor film including a first region, a pair of second regions in contact with side surfaces of the first region, and a pair of third regions in contact with side surfaces of the pair of second regions; a gate insulating film provided over the oxide semiconductor film; and a first electrode that is over the gate insulating film and overlaps with the first region. The first region is a CAAC oxide semiconductor region. The pair of second regions and the pair of third regions are each an amorphous oxide semiconductor region containing a dopant. The dopant concentration of the pair of third regions is higher than the dopant concentration of the pair of second regions.
    Type: Grant
    Filed: September 19, 2019
    Date of Patent: January 5, 2021
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 10872944
    Abstract: A method of manufacturing a display substrate may include the following steps: forming a drain electrode on a pixel area of a substrate; forming a pad electrode on a pad area of the substrate; forming an inorganic insulation layer that covers the drain electrode and the pad electrode; forming an organic insulation member that has a first thickness at the pixel area of the substrate, has a second thickness less than the first thickness at the pad area of the substrate, exposes a first portion of the inorganic insulation layer on the drain electrode, and exposes a second portion of the inorganic insulation layer on the pad electrode; removing the first portion of the inorganic insulation layer and the second portion of the inorganic insulation layer; and partially removing the organic insulation member.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: December 22, 2020
    Assignee: Samsung Display Co., Ltd.
    Inventors: Sang Gab Kim, Hyunmin Cho, Taesung Kim, Subin Bae, Yu-Gwang Jeong, Jinseock Kim
  • Patent number: 10872920
    Abstract: A sensor chip includes: a pixel array unit that has a rectangular-shaped area in which a plurality of sensor elements are arranged in an array pattern; and a global control circuit, in which driving elements simultaneously driving the sensor elements are arranged in one direction, and each of the driving elements is connected to a control line disposed for each one column of the sensor elements, that is arranged to have a longitudinal direction to be along a long side of the pixel array unit. For example, the present technology can be applied to ToF sensor.
    Type: Grant
    Filed: August 22, 2018
    Date of Patent: December 22, 2020
    Assignee: Sony Semiconductor Solutions Corporation
    Inventors: Yohtaro Yasu, Katsuhiko Hanzawa
  • Patent number: 10873021
    Abstract: According to one embodiment, a magnetic device includes a magnetoresistive effect element including a first ferromagnet, a conductor, and an oxide provided between the first ferromagnet and the conductor, the oxide including a first oxide of a rare-earth element and a second oxide of an element of which a covalent radius is smaller than a covalent radius of the rare-earth element.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: December 22, 2020
    Assignees: TOSHIBA MEMORY CORPORATION, SK HYNIX INC.
    Inventors: Young Min Eeh, Daisuke Watanabe, Jae-Hyoung Lee, Toshihiko Nagase, Kazuya Sawada, Tadaaki Oikawa, Kenichi Yoshino, Taiga Isoda
  • Patent number: 10867099
    Abstract: An integrated circuit designing system includes a non-transitory storage medium, the non-transitory storage medium being encoded with a layout of a standard cell corresponding to a predetermined manufacturing process, the predetermined manufacturing process having a nominal minimum pitch of metal lines along a predetermined direction, the layout of the standard cell having a cell height along the predetermined direction, and the cell height is a non-integral multiple of the nominal minimum pitch. The integrated circuit designing system further includes a hardware processor communicatively coupled with the non-transitory storage medium and configured to execute a set of instructions for generating an integrated circuit layout based on the layout of the standard cell and the nominal minimum pitch.
    Type: Grant
    Filed: May 2, 2019
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shang-Chih Hsieh, Hui-Zhong Zhuang, Ting-Wei Chiang, Chun-Fu Chen, Hsiang-Jen Tseng
  • Patent number: 10868111
    Abstract: A semiconductor device includes a plurality of broad buffer layers provided in a drift layer. Each of the plurality of the broad buffer layers has an impurity concentration exceeding that of a portion of the drift layer excluding the broad buffer layers, and has a mountain-shaped impurity concentration distribution in which a local maximum value is less than the impurity concentration of an anode layer and a cathode layer. The plurality of broad buffer layers are disposed at different depths from a first main surface of the drift layer, respectively, the number of broad buffer layers close to the first main surface from the intermediate position of the drift layer is at least one, and number of broad buffer layers close to a second main surface of the drift layer from the intermediate position of the drift layer is at least two. The broad buffer layer includes a hydrogen-related donor.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: December 15, 2020
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Michio Nemoto, Takashi Yoshimura
  • Patent number: 10868058
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method is performed by forming a gate dielectric layer over a substrate having a first photodetector region and forming a gate material over the gate dielectric layer. A dielectric protection layer is deposited over the gate dielectric layer and a first sidewall spacer is formed along a side of the gate material. The dielectric protection layer extends from a first location directly over the first photodetector region to a second location between the first sidewall spacer and the gate dielectric layer.
    Type: Grant
    Filed: December 13, 2018
    Date of Patent: December 15, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Hsien Chou, Wen-I Hsu, Tsun-Kai Tsao, Chih-Yu Lai, Jiech-Fun Lu, Yeur-Luen Tu
  • Patent number: 10867863
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first source/drain structure and a second source/drain structure in a substrate. The method includes forming a first dielectric layer over the first source/drain structure, the second source/drain structure, and the substrate. The method includes forming a gate electrode in the first trench. The method includes removing the first dielectric layer. The method includes forming a first conductive strip structure over the first source/drain structure and the substrate. The method includes partially removing the first conductive strip structure to form a second trench in the first conductive strip structure. The method includes forming a second dielectric layer in the second trench.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lin-Yu Huang, Sheng-Tsung Wang, Jia-Chuan You, Chia-Hao Chang, Tien-Lu Lin, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 10861767
    Abstract: Example implementations relate to an electronic module can include a first direct bonded metal (DBM) substrate, a second DBM substrate, a housing member, and a plurality of connection terminals. The first DBM substrate and second DBM substrate can be aligned along a same plane. The housing member can be coupled to the first substrate and the second substrate and the housing member can include a plurality of openings in a surface of the housing member. The plurality of connection terminals can be electrically coupled to at least one of the first DBM substrate and the second DBM substrate, in which a connection terminal from the plurality of terminals can extend through an opening from the plurality of openings of the housing member.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: December 8, 2020
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Atapol Prajuckamol, Chee Hiong Chew, Yushuang Yao
  • Patent number: 10854620
    Abstract: According to one embodiment, a semiconductor memory device includes: first interconnect layers; second interconnect layers; a first memory pillar extending through the first interconnect layers; a second memory pillar extending through the second interconnect layers; a first film provided above the first interconnect layers, having a planar shape corresponding to the first interconnect layers and extending in the first direction; and a second film provided above the second interconnect layers, separate from the first film in the second direction, having a planar shape corresponding to the second interconnect layers and extending in the first direction. The first and second films have a compressive stress higher than a silicon oxide film.
    Type: Grant
    Filed: August 26, 2019
    Date of Patent: December 1, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Takeo Mori, Takashi Terada
  • Patent number: 10854545
    Abstract: An anti-fuse structure includes a substrate, an active layer, an electrode layer, and a dielectric layer. The active layer is on the substrate and has a body portion and a convex portion protruding from the body portion. The electrode layer is on the active layer and partially overlaps the convex portion of the active layer. The electrode layer has a hollow region, and the convex portion of the active layer is in the hollow region. The dielectric layer is between the active layer and the electrode layer.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: December 1, 2020
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chin-Ling Huang, Chiang-Lin Shih