Abstract: A semiconductor structure comprises a gate structure of a transistor. The gate structure comprises a gate conductive portion disposed on a gate dielectric layer. The semiconductor structure further comprises a capacitor structure disposed on the gate structure. The capacitor structure comprises a first conductive layer, a dielectric layer disposed on the first conductive layer and a second conductive layer disposed on the dielectric layer. The first and second conductive layers are respectively connected to a first contact portion and a second contact portion.

Abstract: Embodiments disclosed herein include a semiconductor structure. The semiconductor structure may include a spin transfer torque (STT) magnetoresistive random access memory (MRAM) stack. The semiconductor structure may also include a spin orbit torque (SOT) MRAM stack vertically in series with the STT-MRAM. The SOT-MRAM stack may include a heavy metal spin hall effect rail configured to flip an SOT free-layer magnetic orientation in response to a horizontal signal through the heavy metal rail.

Abstract: An integrated circuit, a system, and a method to integrate phase change memory and magnetoresistive random access memory within a same integrated circuit in a system. The integrated circuit may include an MRAM and a PCM. The MRAM may include an MRAM bottom electrode, an MRAM stack, and an MRAM top electrode. The PCM may include a PCM bottom electrode, where the PCM bottom electrode has a lower height than the MRAM bottom electrode, a phase change material, and a PCM top electrode.

Abstract: A Vertical Reconfigurable Field Effect Transistor (VRFET) has a substrate and a vertical channel. The vertical channel is in contact with a top silicide region that forms a lower Schottky junction with the vertical channel and a top silicide region that forms an upper Schottky junction with the vertical channel. The lower silicide region and the upper silicide region each form a source/drain (S/D) of the device. A lower gate stack surrounds the vertical channel and has a lower overlap that encompasses the lower Schottky junction. An upper gate stack surrounds the vertical channel and has an upper overlap that encompasses the upper Schottky junction. The lower gate stack is electrically insulated from the upper gate stack. The lower gate stack can electrically control the lower Schottky junction (S/D). The upper gate stack can electrically control the upper Schottky junction (S/D).

Abstract: Techniques for fabricating semiconductor structures and devices with stacked structures having embedded capacitors are disclosed. In one example, a semiconductor structure includes a substrate having a first region and a second region. The semiconductor structure further includes a capacitor structure disposed in the second region of the substrate. The capacitor structure includes a capacitor conductor and a dielectric insulator disposed between the capacitor conductor and the substrate. The semiconductor structure further includes a stacked device disposed on the first region of the substrate. The stacked device includes a first transistor and a second transistor. At least a portion of the second transistor is disposed under at least a portion of the first transistor. The first transistor and the second transistor are each coupled to the capacitor conductor.

Abstract: A vertical FET includes a channel fin between a bottom source/drain (S/D) region and a top S/D region, a gate upon a sidewall of the channel fin, a top metallization upon the top S/D region, a first contact metallization connected to the gate, a second contact metallization connected to the bottom S/D region, a first vertical liner between a portion of the gate and the first contact metallization, and a second vertical liner between the top metallization and the second contact metallization. The vertical FET may be fabricated by forming a self-aligned block and utilizing the self-aligned block to e.g., prevent gate to gate shorting during replacement gate formation or processing.

Abstract: A vertical resistive memory array is presented. The array includes a pillar electrode and a switching liner around the side perimeter of the pillar electrode. The array includes two or more vertically stacked single cell (SC) electrodes connected to a first side of the switching liner. The juxtaposition of the switching liner, the pillar electrode, and each SC electrode forms respective resistance switching cells (e.g., OxRRAM cell). A vertical group or bank of these cells may be connected in parallel and each share the same pillar electrode. The cells in the vertical cell bank may written to or read from as a group to limit the effects of inconsistent CF formation of any one or more individual cells within the group.

Abstract: Embodiments of the present invention are directed to fabrication method and resulting structures for vertical tunneling field effect transistors (VFETs) having an oxygen vacancy passivating bottom spacer. In a non-limiting embodiment of the invention, a first semiconductor fin is formed in a first region of a substrate and a second semiconductor fin is formed in a second region of the substrate. A bilayer bottom spacer is formed in direct contact with sidewalls of the semiconductor fins. The bilayer bottom spacer includes a first layer and an oxygen-donating second layer positioned on the first layer. A first dielectric film is formed on the sidewalls of the first semiconductor fin. The first dielectric film terminates on the first layer. A second dielectric film is formed on the sidewalls of the second semiconductor fin. The second dielectric film extends onto a surface of the oxygen-donating second layer.

Abstract: A semiconductor structure may include a resistive random access memory device embedded between an upper metal interconnect and a lower metal interconnect in a backend structure of a chip. The resistive random access memory may include a first electrode and a second electrode separated by a dielectric film. A portion of the dielectric film directly above the first electrode may be crystalline. The semiconductor structure may include a stud below and in electrical contact with the first electrode and the lower metal interconnect and a dielectric layer between the upper metal interconnect and the lower metal interconnect. The dielectric layer may separate the upper metal interconnect from the lower metal interconnect. The crystalline portion of the dielectric film may include grain boundaries that extend through an entire thickness of the dielectric film. The crystalline portion of the dielectric film may include grains.

Abstract: A semiconductor structure may include a resistive random access memory device embedded between an upper metal interconnect and a lower metal interconnect in a backend structure of a chip. The resistive random access memory may include a bottom electrode and a top electrode separated by a dielectric film. A portion of the dielectric film directly above the bottom electrode may be doped and crystalline. The semiconductor structure may include a stud below and in electrical contact with the bottom electrode and the lower metal interconnect and a dielectric layer between the upper metal interconnect and the lower metal interconnect. The dielectric layer may separate the upper metal interconnect from the lower metal interconnect. The crystalline portion of the dielectric film may include grain boundaries that extend through an entire thickness of the dielectric film. The crystalline portion of the dielectric film may include grains.

Abstract: A spin-orbit torque magnetoresistive random-access memory device formed by fabricating a spin-Hall-effect (SHE) layer above and in electrical contact with a transistor, forming a spin-orbit-torque (SOT) magnetoresistive random access memory (MRAM) cell stack disposed above and in electrical contact with the SHE rail, wherein the SOT-MRAM cell stack comprises a free layer, a tunnel junction layer, and a reference layer, forming a cylindrical diode structure above and in electrical contact with the SOT-MRAM cell stack, forming a write line disposed in electrical contact with the SHE rail, and forming a read line disposed above and adjacent to an outer cylindrical electrode of the diode structure.

Abstract: A semiconductor device is provided that includes a local passthrough interconnect structure present in a non-active device region of the device. A dielectric fill material structure is located between the local passthrough interconnect structure and a functional gate structure that is present in an active device region that is laterally adjacent to the non-active device region. The semiconductor device has reduced capacitance (and thus circuit speed is not compromised) as compared to an equivalent device in which a metal-containing sacrificial gate structure is used instead of the dielectric fill material structure.

Abstract: A vertically stacked set of an n-type vertical transport field effect transistor (n-type VT FET) and a p-type vertical transport field effect transistor (p-type VT FET) is provided. The vertically stacked set of the n-type VT FET and the p-type VT FET includes a first bottom source/drain layer on a substrate, that has a first conductivity type, a lower channel pillar on the first bottom source/drain layer, and a first top source/drain on the lower channel pillar, that has the first conductivity type. The vertically stacked set of the n-type VT FET and the p-type VT FET further includes a second bottom source/drain on the first top source/drain, that has a second conductivity type different from the first conductivity type, an upper channel pillar on the second bottom source/drain, and a second top source/drain on the upper channel pillar, that has the second conductivity type.

Abstract: A vertical field effect transistor includes a first epitaxial region in contact with a top surface of a channel fin extending vertically from a bottom source/drain located above a substrate, a second epitaxial region above the first epitaxial region having a horizontal thickness that is larger than a horizontal thickness of the first epitaxial region. The first epitaxial region and the second epitaxial region form a top source/drain region of the semiconductor structure. The first epitaxial region has a first doping concentration and the second epitaxial region has a second doping concentration that is lower than the first doping concentration. A top spacer, adjacent to the first epitaxial region and the second epitaxial region, is in contact with a top surface of a high-k metal gate stack located around the channel fin and in contact with a top surface of a first dielectric layer disposed between adjacent channel fins.

Abstract: A semiconductor structure may include one or more metal gates, one or more channels below the one or more metal gates, a gate dielectric layer separating the one or more metal gates from the one or more channels, and a high-k material embedded in the gate dielectric layer. Both the high-k material and the gate dielectric layer may be in direct contact with the one or more channels. The high-k material may provide threshold voltage variation in the one or more metal gates. The high-k material is a first high-k material or a second high-k material. The semiconductor structure may only include the first high-k material embedded in the gate dielectric layer. The semiconductor structure may only include the second high-k material embedded in the gate dielectric layer. The semiconductor structure may include both the first high-k material and the second high-k material embedded in the gate dielectric layer.

Abstract: A uniform moon-shaped bottom spacer for a VTFET device is provided utilizing a replacement bottom spacer that is epitaxially grown above a bottom source/drain region. After filling a trench that is formed into a substrate with a dielectric fill material that also covers the replacement bottom spacer, the replacement bottom spacer is accessed, removed and then replaced with a moon-shaped bottom spacer.

Abstract: A method of manufacturing a magnetic tunnel junction device is provided. The method includes forming an MTJ stack including a reference layer, a tunnel barrier layer formed on the reference layer, a free layer formed on the barrier layer, and a cap layer formed on the free layer. The method also includes performing ion beam etching (IBE) through each layer of the MTJ stack to form at least one MTJ pillar. The method also includes forming an isolation layer on sidewalls of at least the tunnel barrier layer, the isolation layer comprising a same material as that of the tunnel barrier layer. A combined width of the isolation layer and the tunnel barrier layer is equal to or greater than a width of at least one of the reference layer and the free layer.

Abstract: A semiconductor device including at least one nanosheet and epitaxial source and drain regions are present on opposing ends of the at least one nanosheet. A gate structure is present on a channel of the at least one nanosheet. The gate structure includes a first work function metal gate portion present at a junction portion of the source and drain regions that interfaces with the channel portion of the at least one nanosheet, and a second work function metal gate portion present on a central portion of the channel of the at least one nanosheet. The amount of metal containing nitride in the second work function metal gate portion is greater than an amount of metal containing nitride in the first work function metal gate portion. The device further includes a rotated T-shaped dielectric spacer present between the gate structure and the epitaxial source and drain regions.

Abstract: A semiconductor device structure comprises at least one semiconductor fin for a vertical transport field effect transistor, a bottom source/drain layer, and an insulating layer underlying the bottom source/drain layer. A method of forming the structure comprises forming a sacrificial layer within a lower portion of a source/drain region for a vertical transport field effect transistor structure. The sacrificial layer being formed adjacent to at least one semiconductor fin and in contact with a substrate. A source/drain layer is formed within an upper portion of the source/drain region above the sacrificial layer. The sacrificial layer is removed thereby forming a cavity between the substrate and the source/drain layer. An insulating layer is formed within the cavity.

Abstract: A method of manufacturing a vertical transistor device comprises forming a bottom source region on a semiconductor substrate, forming a channel region extending vertically from the bottom source region, forming a top drain region on an upper portion of the channel region, forming a first gate region having a first gate length around the channel region, and forming a second gate region over the first gate region and around the channel region, wherein the second gate region has a second gate length different from the first gate length, and wherein at least one dielectric layer is positioned between the first and second gate regions.