Abstract: A method of enhancing the quality of laser ablation by controlling the laser repetition rate during the ablation process, wherein the method enhances the quality of laser ablation of a photomask in order to improve the optical quality thereof. Also provided is a system employing the method of enhancing the quality of laser ablation.

Abstract: A preventatively acting safety system for a motor vehicle comprises safety devices which are actuated as a function of information which is recorded by a driving situation detection device by means of a driving state sensor system and is evaluated in a data evaluation device. The recorded information are compared with at least one triggering threshold value and the safety devices being actuated when the triggering threshold value is exceeded. The triggering threshold value is adapted as a function of a total vehicle acceleration and a vehicle speed, to correspond to a degree of danger felt by a vehicle occupant.

Abstract: A method and an apparatus of minimizing the deposition of debris onto a sample being ablated. The method comprising the steps of: 1) reducing a laser pulse energy to approximately a threshold level for ablation; and 2) ablating a region of the sample using a multitude of laser pulses, each pulse being sufficiently separated in time to reduce a concentration of ablation products in a gas phase. An apparatus for ablating a region of a sample with a laser beam. The apparatus comprises: 1) a source providing a pulsed laser beam of a certain energy, the source focusing the laser beam on the sample to ablate a region of the sample; and 2) a device for providing a flowing fluid over the region being ablated to remove the ablation products.

Abstract: One exemplary aspect of this invention pertains to a method to evaluate an image processing algorithm. The method includes varying a parameter of a model of an imaging system and, for each variation of the parameter, calculating with a data processor a corresponding image of a sample; applying an image processing algorithm to the calculated corresponding images of the sample; and determining an ability of the image processing algorithm to detect the variation in the parameter.

Abstract: A motor vehicle, such as a passenger car, having a preventive action protection system is provided, which includes safety devices which are actuated as a function of features which are based on input variables from a safety sensor system in a data evaluation and control device, wherein, when a critical driving state is detected, the data evaluation and control device actuates at least one safety device which is assigned to the driving state. The features are each assigned a specific weighting relating to the criticality of the driving state.

Abstract: A method and device for drilling, particularly percussion drilling or rotary percussion drilling a hole in soil or rock material and fixing an anchoring in the hole. To this end, a drilled hole is made by a drill bit mounted on a drill rod. The drill rod, on the rear side facing away from the drilling surface of the drill bit, is surrounded at a distance from the drill bit by an anchoring element whose outside dimension exceeds, at least in part, the circumference of the drilled hole made by the drill bit.

Abstract: A method of enhancing the quality of laser ablation by controlling the laser repetition rate during the ablation process, wherein the method enhances the quality of laser ablation of a photomask in order to improve the optical quality thereof. Also provided is a system employing the method of enhancing the quality of laser ablation.

Abstract: The present technology relates generally to laser ablation, and more particularly pertains to a system and method for eliminating structure and edge roughness, which is produced during the laser ablation of a material. Ablation of materials using a femtosecond laser beam produces a fine scale periodic structure in the ablated region. The structure consists of residual (i.e. unablated material) and is always perpendicular to the polarization direction of the laser beam. By changing the polarization direction during the ablation process, the structure is averaged over many directions and thus eliminated. This eliminates structure and edge roughness in a material caused by the laser ablation of the material. The method is employed to the repairing of photomasks so as to cause the optical quality thereof to be improved.

Abstract: A method of selectively ablating an undesired material from a substrate includes providing a substrate with two regions; providing laser pulses; tuning a wavelength of the laser pulses to match a desired wavelength characteristic of a material and directing the tuned laser pulses onto the substrate; and controlling a pulse duration, wavelength, or both, of the laser pulses to ablate the undesired material without damaging the substrate or any adjacent material. In another embodiment, an apparatus for repairing a defect on a reflective photomask includes a femtosecond pulse width laser; a harmonic conversion cell; a filter for passing a selected EUV harmonic of the laser light; a lens arrangement configured to direct the selected EUV harmonic of the laser light onto the photomask; and a control unit connected to the laser to control an ablation of the defect on the reflective photomask.

Abstract: The present technology relates generally to laser ablation, and more particularly pertains to a system and method for eliminating structure and edge roughness, which is produced during the laser ablation of a material. Ablation of materials using a femtosecond laser beam produces a fine scale periodic structure in the ablated region. The structure consists of residual (i.e. unablated material) and is always perpendicular to the polarization direction of the laser beam. By changing the polarization direction during the ablation process, the structure is averaged over many directions and thus eliminated. This eliminates structure and edge roughness in a material caused by the laser ablation of the material. The method is employed to the repairing of photomasks so as to cause the optical quality thereof to be improved.

Abstract: A photomask includes a light transmitting substrate and an absorber layer adjacent thereto. The absorber layer includes a silicide, such as molybdenum silicide, patterned into a plurality of features. The surrounding environment is controlled to prevent undesirable growth by oxidation of the absorber layer when the mask is exposed to light while being used to fabricate integrated circuits. In another aspect, the surrounding environment is controlled to encourage desirable growth by oxidation of the absorber layer when the mask is exposed to light.

Abstract: A process for detecting the operating state of a pump of a pump system, involves the steps of: detecting at least one pressure and/or flow profile P(t) in the pump system, computing of at least one characteristic value Kkal from the pressure and/or flow profile P(t), comparing the computed characteristic value Kkal with at least one defined characteristic value Kvor or with a range bordered by the characteristic value Kvor, the defined characteristic value Kvor or the characteristic value range corresponding to the operating state of the pump of interest, and outputting the operating state determined by the comparison. With the process, the operating states of pumps, pump systems and hydraulic systems is determined by the computed characteristic value Kkal characterizing the pulsation of the pressure and/or flow profile P(t) in a computation time interval ?tB, the pulsation quotient being computed as the computed characteristic value Kkal.

Abstract: An electrical connector for connection to a sensor has an integrated microcontroller, with a plug-and-socket connection for connection to an interface of the sensor and with an electronic circuit. With the connector, the data of a sensor, especially the parameter data, can be mirrored outside the sensor in a simple and economical manner so that the data are available at any time and as much as possible on site. The electronic circuit has a memory for storage of data, especially parameter data and characteristic data of the sensor, and a microcontroller, the microcontroller operating the interface of the sensor, and depending on the characteristic data of the sensor, either reading data, especially parameter data, out of the sensor via the interface and storing it in the memory, or reading data stored in the memory, especially parameter data, out of the memory and transmitting them via the interface into the sensor.

Abstract: In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (Fth) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused above the surface of a material where laser induced breakdown is desired.

Abstract: In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (Fth) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused above the surface of a material where laser induced breakdown is desired.

Abstract: In a method for controlling the operation of a reversible belt retractor to release a belt extraction lock of a restraint belt in a motor vehicle, the lock can be activated by an acceleration sensor. After the belt retractor has been triggered as a consequence of a hazardous situation having been detected and after the hazardous situation has been recognized as being over, the operation of the belt retractor is controlled by a release signal at a release time in order to bring about the release of the belt extraction lock to shift it from a blocking state into a comfort-providing state. The release time is determined by a sensor model algorithm based on a model of the acceleration sensor from at least one variable characterizing the running dynamics.

Abstract: Disclosed is a connection between two pipes (1, 2) in which a final section of one pipe overlaps a final section of the other pipe or one respective joining element (3, 4) is inserted into the facing final sections of the pipes (1, 2). The pipes (1, 2) can be screwed together. The final section of the pipe that is overlapped by the other pipe, or at least one joining element (3, 4) that is inserted into a final section (3, 4), is embodied with an area (18, 19) having a lower rigidity than the adjoining subarea at the end facing the interior of the pipe. Said area (18, 19, 30) having a reduced rigidity is embodied with a least one depression or recess (20, 21, 21?, 31) on the inner circumference thereof, whereby one is able to ensure that the pipes (1, 2) that are to be interconnected remain undamaged if the same are tilted or inclined relative to each other, even in case forces act eccentrically upon the pipe connection.

Abstract: The invention relates to restraint system for a passenger of a vehicle who sits on a vehicle seat that can be placed in different positions. Said restraint system comprises an interior that is defined by a housing (1) and at least on gas bag, and at least one triggerable outlet (36-38) which is disposed on the housing (1) and can be closed by means of a closing element (3) that is movable from a closed position into an open position such that an internal pressure in the interior can be adjusted in accordance with passenger load-relevant parameters during an accident.

Abstract: In a motor vehicle, such as a passenger car, a preventive-action protection system is provided which includes safety devices that are actuated as a function of information detected by a driving-state sensor system and evaluated in a data evaluation and control device, which compares the detected information with at least one threshold value. When a critical condition of the driving state is detected, the data evaluation and control device actuates at least one safety device assigned to this driving state. Here, a theoretical, lateral-dynamics critical condition is detected and triggering of at least one assigned safety device occurs if a threshold value is exceeded when a current steering angle speed is logically combined with a parameter which represents the current driving-dynamics situation.

Abstract: The invention relates to a method and device for drilling, particularly percussion or rotary percussion drilling, a hole in soil or rock material and for producing an anchoring. According to the invention, a drill bit (2) fastened to drilling rods (3) makes a drilled hole (1). A number of, in particular, wedge-shaped spreading elements (7) oriented contrary to the direction of drilling (6) are provided in a part joined to the drill bit (2). These spreading elements can be introduced into the wall of the drilled hole (1) after the drilled hole (1) is completed whereby making it possible to obtain a secure anchoring immediately after the drilled hole (1) has been completed.