Patents by Inventor Brian J. Greene
Brian J. Greene has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20140191325Abstract: Various embodiments include fin-shaped field effect transistor (finFET) structures that enhance work function and threshold voltage (Vt) control, along with methods of forming such structures. The finFET structures can include a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET). In some embodiments, the PFET has fins separated by a first distance and the NFET has fins separated by a second distance, where the first distance and the second distance are distinct from one another. In some embodiments, the PFET or the NFET include fins that are separated from one another by non-uniform distances. In some embodiments, the PFET or the NFET include adjacent fins that are separated by distinct distances at their source and drain regions.Type: ApplicationFiled: January 7, 2013Publication date: July 10, 2014Applicant: International Business Machines CorporationInventors: Murshed M. Chowdhury, Benjamin R. Cipriany, Brian J. Greene, Arvind Kumar
-
Patent number: 8772149Abstract: FinFET structures and methods of manufacturing the FinFET structures are disclosed. The method includes performing an oxygen anneal process on a gate stack of a FinFET structure to induce Vt shift. The oxygen anneal process is performed after sidewall pull down and post silicide.Type: GrantFiled: October 19, 2011Date of Patent: July 8, 2014Assignee: International Business Machines CorporationInventors: Eduard A. Cartier, Brian J. Greene, Dechao Guo, Gan Wang, Yanfeng Wang, Keith Kwong Hon Wong
-
Publication number: 20140070274Abstract: Doped wells, gate stacks, and embedded source and drain regions are formed on, or in, a semiconductor substrate, followed by formation of shallow trenches in the semiconductor substrate. The shallow trenches can be formed by forming a planarized material layer over the doped wells, the gate stacks, and the embedded source and drain regions; patterning the planarized material layer; and transferring the pattern in the planarized material layer into the gate stacks, embedded source and drain regions, and the doped wells. The shallow trenches are filled with a dielectric material to form shallow trench isolation structures. Alternately, the shallow trenches can be formed by applying a photoresist over the doped wells, the gate stacks, and the embedded source and drain regions, and subsequently etching exposed portions of the underlying structures. After removal of the photoresist, shallow trench isolation structures can be formed by filling the shallow trenches.Type: ApplicationFiled: November 15, 2013Publication date: March 13, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brian J. Greene, Yue Liang, Xiaojun Yu
-
Publication number: 20140042541Abstract: A method of forming a transistor device includes implanting a diffusion inhibiting species in a semiconductor-on-insulator substrate comprising a bulk substrate, a buried insulator layer, and a semiconductor-on-insulator layer, the semiconductor-on-insulator substrate having one or more gate structures formed thereon such that the diffusion inhibiting species is disposed in portions of the semiconductor-on-insulator layer corresponding to a channel region, and disposed in portions of the buried insulator layer corresponding to source and drain regions. A transistor dopant species is introduced in the source and drain regions. An anneal is performed so as to diffuse the transistor dopant species in a substantially vertical direction while substantially preventing lateral diffusion of the transistor dopant species into the channel region.Type: ApplicationFiled: October 15, 2013Publication date: February 13, 2014Applicant: International Business Machines CorporationInventors: Brian J. Greene, Jeffrey B. Johnson, Qingqing Liang, Edward P. Maciejewski
-
Patent number: 8633096Abstract: A method of forming a transistor device includes implanting a diffusion inhibiting species in a semiconductor-on-insulator substrate comprising a bulk substrate, a buried insulator layer, and a semiconductor-on-insulator layer, the semiconductor-on-insulator substrate having one or more gate structures formed thereon such that the diffusion inhibiting species is disposed in portions of the semiconductor-on-insulator layer corresponding to a channel region, and disposed in portions of the buried insulator layer corresponding to source and drain regions. A transistor dopant species is introduced in the source and drain regions. An anneal is performed so as to diffuse the transistor dopant species in a substantially vertical direction while substantially preventing lateral diffusion of the transistor dopant species into the channel region.Type: GrantFiled: November 11, 2010Date of Patent: January 21, 2014Assignee: International Business Machines CorporationInventors: Brian J. Greene, Jeffrey B. Johnson, Qingqing Liang, Edward P. Maciejewski
-
Patent number: 8629501Abstract: A stack pad layers including a first pad oxide layer, a pad nitride layer, and a second pad oxide layer are formed on a semiconductor-on-insulator (SOI) substrate. A deep trench extending below a top surface or a bottom surface of a buried insulator layer of the SOI substrate and enclosing at least one top semiconductor region is formed by lithographic methods and etching. A stress-generating insulator material is deposited in the deep trench and recessed below a top surface of the SOI substrate to form a stress-generating buried insulator plug in the deep trench. A silicon oxide material is deposited in the deep trench, planarized, and recessed. The stack of pad layer is removed to expose substantially coplanar top surfaces of the top semiconductor layer and of silicon oxide plugs. The stress-generating buried insulator plug encloses, and generates a stress to, the at least one top semiconductor region.Type: GrantFiled: February 10, 2012Date of Patent: January 14, 2014Assignee: International Business Machines CorporationInventors: Huilong Zhu, Brian J. Greene, Dureseti Chidambarrao, Gregory G. Freeman
-
Patent number: 8598009Abstract: A low energy surface is formed by a high temperature anneal of the surfaces of trenches on each side of a gate stack. The material of the semiconductor layer reflows during the high temperature anneal such that the low energy surface is a crystallographic surface that is at a non-orthogonal angle with the surface normal of the semiconductor layer. A lattice mismatched semiconductor material is selectively grown on the semiconductor layer to fill the trenches, thereby forming embedded lattice mismatched semiconductor material portions in source and drain regions of a transistor. The embedded lattice mismatched semiconductor material portions can be in-situ doped without increasing punch-through. Alternately, a combination of intrinsic selective epitaxy and ion implantation can be employed to form deep source and drain regions.Type: GrantFiled: April 26, 2012Date of Patent: December 3, 2013Assignees: International Business Machines Corporation, Globalfoundries, Inc.Inventors: Brian J. Greene, William K. Henson, Judson R. Holt, Michael D. Steigerwalt, Kuldeep Amarnath, Rohit Pal, Johan W. Weijtmans
-
Publication number: 20130273699Abstract: A delta doping of silicon by carbon is provided on silicon surfaces by depositing a silicon carbon alloy layer on silicon surfaces, which can be horizontal surfaces of a bulk silicon substrate, horizontal surfaces of a top silicon layer of a semiconductor-on-insulator substrate, or vertical surfaces of silicon fins. A p-type field effect transistor (PFET) region and an n-type field effect transistor (NFET) region can be differentiated by selectively depositing a silicon germanium alloy layer in the PFET region, and not in the NFET region. The silicon germanium alloy layer in the PFET region can overlie or underlie a silicon carbon alloy layer. A common material stack can be employed for gate dielectrics and gate electrodes for a PFET and an NFET. Each channel of the PFET and the NFET includes a silicon carbon alloy layer, and is differentiated by the presence or absence of a silicon germanium layer.Type: ApplicationFiled: June 13, 2013Publication date: October 17, 2013Inventors: Dureseti Chidambarrao, Brian J. Greene, Yue Liang, Xiaojun Yu
-
Patent number: 8513085Abstract: Threshold voltage controlled semiconductor structures are provided in which a conformal nitride-containing liner is located on at least exposed sidewalls of a patterned gate dielectric material having a dielectric constant of greater than silicon oxide. The conformal nitride-containing liner is a thin layer that is formed using a low temperature (less than 500° C.) nitridation process.Type: GrantFiled: March 1, 2012Date of Patent: August 20, 2013Assignee: International Business Machines CorporationInventors: Sunfei Fang, Brian J. Greene, Effendi Leobandung, Qingqing Liang, Edward P. Maciejewski, Yanfeng Wang
-
Publication number: 20130168776Abstract: A complementary metal oxide semiconductor (CMOS) device including a substrate including a first active region and a second active region, wherein each of the first active region and second active region of the substrate are separated by from one another by an isolation region. A n-type semiconductor device is present on the first active region of the substrate, in which the n-type semiconductor device includes a first portion of a gate structure. A p-type semiconductor device is present on the second active region of the substrate, in which the p-type semiconductor device includes a second portion of the gate structure. A connecting gate portion provides electrical connectivity between the first portion of the gate structure and the second portion of the gate structure. Electrical contact to the connecting gate portion is over the isolation region, and is not over the first active region and/or the second active region.Type: ApplicationFiled: January 3, 2012Publication date: July 4, 2013Applicant: International Business Machines CorporationInventors: Yue Liang, Dureseti Chidambarrao, Brian J. Greene, William K. Henson, Unoh Kwon, Shreesh Narasimha, Xiaojun Yu
-
Publication number: 20130168695Abstract: A delta doping of silicon by carbon is provided on silicon surfaces by depositing a silicon carbon alloy layer on silicon surfaces, which can be horizontal surfaces of a bulk silicon substrate, horizontal surfaces of a top silicon layer of a semiconductor-on-insulator substrate, or vertical surfaces of silicon fins. A p-type field effect transistor (PFET) region and an n-type field effect transistor (NFET) region can be differentiated by selectively depositing a silicon germanium alloy layer in the PFET region, and not in the NFET region. The silicon germanium alloy layer in the PFET region can overlie or underlie a silicon carbon alloy layer. A common material stack can be employed for gate dielectrics and gate electrodes for a PFET and an NFET. Each channel of the PFET and the NFET includes a silicon carbon alloy layer, and is differentiated by the presence or absence of a silicon germanium layer.Type: ApplicationFiled: January 4, 2012Publication date: July 4, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Dureseti Chidambarrao, Brian J. Greene, Yue Liang, Xiaojun Yu
-
Patent number: 8476706Abstract: A delta doping of silicon by carbon is provided on silicon surfaces by depositing a silicon carbon alloy layer on silicon surfaces, which can be horizontal surfaces of a bulk silicon substrate, horizontal surfaces of a top silicon layer of a semiconductor-on-insulator substrate, or vertical surfaces of silicon fins. A p-type field effect transistor (PFET) region and an n-type field effect transistor (NFET) region can be differentiated by selectively depositing a silicon germanium alloy layer in the PFET region, and not in the NFET region. The silicon germanium alloy layer in the PFET region can overlie or underlie a silicon carbon alloy layer. A common material stack can be employed for gate dielectrics and gate electrodes for a PFET and an NFET. Each channel of the PFET and the NFET includes a silicon carbon alloy layer, and is differentiated by the presence or absence of a silicon germanium layer.Type: GrantFiled: January 4, 2012Date of Patent: July 2, 2013Assignee: International Business Machines CorporationInventors: Dureseti Chidambarrao, Brian J. Greene, Yue Liang, Xiaojun Yu
-
Patent number: 8466496Abstract: A complementary metal oxide semiconductor (CMOS) device that may include a substrate having a first active region and a second active region that are separated from one another by an isolation region. An n-type semiconductor device is present on the first active region that includes a first gate structure having a first gate dielectric layer and an n-type work function metal layer, wherein the n-type work function layer does not extend onto the isolation region. A p-type semiconductor device is present on the second active region that includes a second gate structure having a second gate dielectric layer and a p-type work function metal layer, wherein the p-type work function layer does not extend onto the isolation region. A connecting gate structure extends across the isolation region into direct contact with the first gate structure and the second gate structure.Type: GrantFiled: November 17, 2011Date of Patent: June 18, 2013Assignee: International Business Machines CorporationInventors: Xiaojun Yu, Dureseti Chidambarrao, Brian J. Greene, Yue Liang
-
Publication number: 20130126976Abstract: A complementary metal oxide semiconductor (CMOS) device that may include a substrate having a first active region and a second active region that are separated from one another by an isolation region. An n-type semiconductor device is present on the first active region that includes a first gate structure having a first gate dielectric layer and an n-type work function metal layer, wherein the n-type work function layer does not extend onto the isolation region. A p-type semiconductor device is present on the second active region that includes a second gate structure having a second gate dielectric layer and a p-type work function metal layer, wherein the p-type work function layer does not extend onto the isolation region. A connecting gate structure extends across the isolation region into direct contact with the first gate structure and the second gate structure.Type: ApplicationFiled: November 17, 2011Publication date: May 23, 2013Applicant: International Business Machines CorporationInventors: Xiaojun Yu, Dureseti Chidambarrao, Brian J. Greene, Yue Liang
-
Publication number: 20130099281Abstract: Doped wells, gate stacks, and embedded source and drain regions are formed on, or in, a semiconductor substrate, followed by formation of shallow trenches in the semiconductor substrate. The shallow trenches can be formed by forming a planarized material layer over the doped wells, the gate stacks, and the embedded source and drain regions; patterning the planarized material layer; and transferring the pattern in the planarized material layer into the gate stacks, embedded source and drain regions, and the doped wells. The shallow trenches are filled with a dielectric material to form shallow trench isolation structures. Alternately, the shallow trenches can be formed by applying a photoresist over the doped wells, the gate stacks, and the embedded source and drain regions, and subsequently etching exposed portions of the underlying structures. After removal of the photoresist, shallow trench isolation structures can be formed by filling the shallow trenches.Type: ApplicationFiled: October 20, 2011Publication date: April 25, 2013Applicant: International Business Machines CorporationInventors: Xiaojun Yu, Brian J. Greene, Yue Liang
-
Publication number: 20130099313Abstract: FinFET structures and methods of manufacturing the FinFET structures are disclosed. The method includes performing an oxygen anneal process on a gate stack of a FinFET structure to induce Vt shift. The oxygen anneal process is performed after sidewall pull down and post silicide.Type: ApplicationFiled: October 19, 2011Publication date: April 25, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Eduard A. CARTIER, Brian J. GREENE, Dechao GUO, Gan WANG, Yanfeng WANG, Keith Kwong Hon WONG
-
Patent number: 8420468Abstract: Disclosed are embodiments of a field effect transistor (FET) having decreased drive current temperature sensitivity. Specifically, any temperature-dependent carrier mobility change in the FET channel region is simultaneously counteracted by an opposite strain-dependent carrier mobility change to ensure that drive current remains approximately constant or at least within a predetermined range in response to temperature variations. This opposite strain-dependent carrier mobility change is provided by a straining structure that is configured to impart a temperature-dependent amount of a pre-selected strain type on the channel region. Also disclosed are embodiments of an associated method of forming the field effect transistor.Type: GrantFiled: August 30, 2011Date of Patent: April 16, 2013Assignee: International Business Machines CorporationInventors: Alberto Escobar, Brian J. Greene, Edward J. Nowak
-
Publication number: 20130087832Abstract: In one embodiment, a semiconductor device is provided that includes a semiconductor substrate including an active region and at least one trench isolation region at a perimeter of the active region, and a functional gate structure present on a portion of the active region of the semiconductor substrate. Embedded semiconductor regions are present in the active region of the semiconductor substrate on opposing sides of the portion of the active region that the functional gate structure is present on. A portion of the active region of the semiconductor substrate separates the outermost edge of the embedded semiconductor regions from the at least one isolation region. Methods of forming the aforementioned device are also provided.Type: ApplicationFiled: October 5, 2011Publication date: April 11, 2013Applicant: International Business Machines CorporationInventors: Xiaojun Yu, Brian J. Greene, Yue Liang
-
Patent number: 8354309Abstract: Multiple types of gate stacks are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric is formed on the doped semiconductor well. A metal gate layer is formed in one device area, while the high-k gate dielectric is exposed in other device areas. Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration.Type: GrantFiled: January 10, 2012Date of Patent: January 15, 2013Assignee: International Business Machines CorporationInventors: Brian J. Greene, Michael P. Chudzik, Shu-Jen Han, William K. Henson, Yue Liang, Edward P. Maciejewski, Myung-Hee Na, Edward J. Nowak, Xiaojun Yu
-
Publication number: 20120208337Abstract: A low energy surface is formed by a high temperature anneal of the surfaces of trenches on each side of a gate stack. The material of the semiconductor layer reflows during the high temperature anneal such that the low energy surface is a crystallographic surface that is at a non-orthogonal angle with the surface normal of the semiconductor layer. A lattice mismatched semiconductor material is selectively grown on the semiconductor layer to fill the trenches, thereby forming embedded lattice mismatched semiconductor material portions in source and drain regions of a transistor. The embedded lattice mismatched semiconductor material portions can be in-situ doped without increasing punch-through. Alternately, a combination of intrinsic selective epitaxy and ion implantation can be employed to form deep source and drain regions.Type: ApplicationFiled: April 26, 2012Publication date: August 16, 2012Applicants: GLOBALFOUNDRIES INC., INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brian J. Greene, William K. Henson, Judson R. Holt, Michael D. Steigerwalt, Kuldeep Amarnath, Rohit Pal, Johan W. Weijtmans