Patents by Inventor Chang Yun

Chang Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8846465
    Abstract: A system and method for forming multi recessed shallow trench isolation structures on substrate of an integrated circuit is provided. An integrated circuit includes a substrate, at least two shallow trench isolation (STI) structures formed in the substrate, an oxide fill disposed in the at least two STI structures, and semiconductor devices disposed on the oxide fill in the at least two STI structures. A first STI structure is formed to a first depth and a second STI structure is formed to a second depth. The oxide fill fills the at least two STI structures, and the first depth and the second depth are based on semiconductor device characteristics of semiconductor devices disposed thereon.
    Type: Grant
    Filed: June 5, 2013
    Date of Patent: September 30, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Lin Lee, Chang-Yun Chang
  • Patent number: 8847295
    Abstract: A structure and method of forming a semiconductor device with a fin is provided. In an embodiment a hard mask is utilized to pattern a gate electrode layer and is then removed. After the hard mask has been removed, the gate electrode layer may be separated into individual gate electrodes.
    Type: Grant
    Filed: August 1, 2013
    Date of Patent: September 30, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Feng Shieh, Chih-Hao Yu, Chang-Yun Chang
  • Patent number: 8847361
    Abstract: A system and method for a memory cell layout is disclosed. An embodiment comprises forming dummy layers and spacers along the sidewalls of the dummy layer. Once the spacers have been formed, the dummy layers may be removed and the spacers may be used as a mask. By using the spacers instead of a standard lithographic process, the inherent limitations of the lithographic process can be avoided and further scaling of FinFET devices can be achieved.
    Type: Grant
    Filed: June 14, 2013
    Date of Patent: September 30, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jhon-Jhy Liaw, Chang-Yun Chang
  • Patent number: 8846466
    Abstract: An integrated circuit structure includes a substrate having a first portion in a first device region and a second portion in a second device region; and two insulation regions in the first device region and over the substrate. The two insulation regions include a first dielectric material having a first k value. A semiconductor strip is between and adjoining the two insulation regions, with a top portion of the semiconductor strip forming a semiconductor fin over top surfaces of the two insulation regions. An additional insulation region is in the second device region and over the substrate. The additional insulation region includes a second dielectric material having a second k value greater than the first k value.
    Type: Grant
    Filed: September 5, 2013
    Date of Patent: September 30, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Feng Yuan, Tsung-Lin Lee, Hung-Ming Chen, Chang-Yun Chang
  • Publication number: 20140256107
    Abstract: A method of forming a semiconductor device includes providing a semiconductor substrate and forming a plurality of dummy gate structures in the substrate. The method further includes forming sidewall spacers on sidewalls of the dummy gate structures and forming a plurality of epitaxial growth regions between the dummy gate structures. After forming the plurality of epitaxial growth regions, one of the dummy gate structures is removed to form an isolation trench, which is filled with a dielectric layer to form an isolation feature. The remaining dummy gate structures are removed to form gate trenches, and gate structures are formed in the gate trenches.
    Type: Application
    Filed: May 23, 2014
    Publication date: September 11, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Feng Shieh, Chang-Yun Chang, Hsin-Chih Chen
  • Patent number: 8813014
    Abstract: A method for designing a semiconductor ic chip includes dividing the chip into functional blocks such as a core portion and one or more other functional cells and applying design rules concerning the spatial arrangement of semiconductor fins to the core portion but not to the other functional cells. The design guidelines include the application of design rules to some but not all functional blocks of the chip, may be stored on a computer-readable medium and the design of the semiconductor ic chip and the generation of a photomask set for manufacturing the semiconductor ic chip may be carried out using a CAD or other automated design system. The semiconductor ic chip formed in accordance with this method includes semiconductor fins that are formed in both the core portion and the other functional cells but are only required to be tightly packed in the core portion.
    Type: Grant
    Filed: December 30, 2009
    Date of Patent: August 19, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shao-Ming Yu, Chang-Yun Chang
  • Patent number: 8796156
    Abstract: A method of forming an integrated circuit structure includes providing a semiconductor substrate; providing a first lithography mask, a second lithography mask, and a third lithography mask; forming a first mask layer over the semiconductor substrate, wherein a pattern of the first mask layer is defined using the first lithography mask; performing a first etch to the semiconductor substrate to define an active region using the first mask layer; forming a second mask layer having a plurality of mask strips over the semiconductor substrate and over the active region; forming a third mask layer over the second mask layer, wherein a middle portion of the plurality of mask strips is exposed through an opening in the third mask layer, and end portions of the plurality of mask strips are covered by the third mask layer; and performing a second etch to the semiconductor substrate through the opening.
    Type: Grant
    Filed: January 4, 2012
    Date of Patent: August 5, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Feng Shieh, Tsung-Lin Lee, Chang-Yun Chang
  • Patent number: 8748993
    Abstract: An integrated circuit structure includes a semiconductor substrate, and a FinFET over the semiconductor substrate. The FinFET includes a semiconductor fin; a gate dielectric on a top surface and sidewalls of the semiconductor fin; a gate electrode on the gate dielectric; and a source/drain region at an end of the semiconductor fin. A first pair of shallow trench isolation (STI) regions includes portions directly underlying portions of the source/drain regions, wherein the first pair of STI regions is separated by, and adjoining a semiconductor strip. The first pair of STI regions further has first top surfaces. A second pair of STI regions comprises portions directly underlying the gate electrode, wherein the second pair of STI regions is separated from each other by, and adjoining, the semiconductor strip. The second pair of STI regions has second top surfaces higher than the first top surfaces.
    Type: Grant
    Filed: October 4, 2013
    Date of Patent: June 10, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Lin Lee, Chih Chieh Yeh, Chang-Yun Chang, Feng Yuan
  • Patent number: 8735991
    Abstract: A semiconductor device with an isolation feature is disclosed. The semiconductor device includes a plurality of gate structures disposed on a semiconductor substrate, a plurality of gate sidewall spacers of a dielectric material formed on respective sidewalls of the plurality of gate structures, an interlayer dielectric (ILD) disposed on the semiconductor substrate and the gate structures, an isolation feature embedded in the semiconductor substrate and extended to the ILD and a sidewall spacer of the dielectric material disposed on sidewalls of extended portion of the isolation feature.
    Type: Grant
    Filed: December 1, 2011
    Date of Patent: May 27, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Feng Shieh, Chang-Yun Chang, Hsin-Chih Chen
  • Patent number: 8723271
    Abstract: An integrated circuit structure includes a substrate; two insulation regions over the substrate, with one of the two insulation regions including a void therein; and a first semiconductor strip between and adjoining the two insulation regions. The first semiconductor strip includes a top portion forming a fin over top surfaces of the two insulation regions.
    Type: Grant
    Filed: June 14, 2013
    Date of Patent: May 13, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Feng Yuan, Tsung-Lin Lee, Hung-Ming Chen, Chang-Yun Chang
  • Patent number: 8709928
    Abstract: An angled implantation process is used in implanting semiconductor fins of a semiconductor device and provides for covering some but not necessarily all of semiconductor fins of a first type with patterned photoresist, and implanting using an implant angle such that all semiconductor fins of a second type are implanted and none of the semiconductor fins of the first type, are implanted. A higher tilt or implant angle is achieved due to the reduced portions of patterned photoresist, that are used.
    Type: Grant
    Filed: January 19, 2010
    Date of Patent: April 29, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shao-Ming Yu, Chang-Yun Chang
  • Patent number: 8673709
    Abstract: An integrated circuit structure includes a semiconductor substrate, and a FinFET over the semiconductor substrate. The FinFET includes a semiconductor fin; a gate dielectric on a top surface and sidewalls of the semiconductor fin; a gate electrode on the gate dielectric; and a source/drain region at an end of the semiconductor fin. A first pair of shallow trench isolation (STI) regions includes portions directly underlying portions of the source/drain regions, wherein the first pair of STI regions is separated by, and adjoining a semiconductor strip. The first pair of STI regions further has first top surfaces. A second pair of STI regions comprises portions directly underlying the gate electrode, wherein the second pair of STI regions is separated from each other by, and adjoining, the semiconductor strip. The second pair of STI regions has second top surfaces higher than the first top surfaces.
    Type: Grant
    Filed: February 11, 2013
    Date of Patent: March 18, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Lin Lee, Chih Chieh Yeh, Chang-Yun Chang, Feng Yuan
  • Patent number: 8670097
    Abstract: A liquid crystal display device includes a plurality of pixels at intersections of a plurality of row lines and a plurality of column lines, wherein each pixel includes a switching transistor, and pixel and common electrodes that induce an in-plane electric field; a plurality of gate lines each connected to the pixels on each row line; a plurality of data lines each connected to the pixels on each column line; and a plurality of common lines each connected to the common electrodes of the pixels alternately located on neighboring two row lines per one column line.
    Type: Grant
    Filed: December 28, 2010
    Date of Patent: March 11, 2014
    Assignee: LG Display Co., Ltd.
    Inventors: Sai-Chang Yun, Seung-Ho Heo, You-Sung Nam, Yong-Hwa Park, Dae-Seok Oh
  • Patent number: 8654269
    Abstract: A liquid crystal display panel capable of reducing a capacitance of a parasitic capacitor between a data line and a pixel electrode. The liquid crystal display panel comprises: a thin film transistor at a crossing of a gate line and a data line, liquid crystal cells including a pixel electrode connected to the thin film transistor; first shield patterns in the liquid crystal cells, each shield pattern being parallel to the data line without overlapping the data line, wherein the shield patterns are insulated from and overlap with an outer portion of the pixel electrode; and a common line arrayed to connect the shield patterns for each the liquid crystal cell.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: February 18, 2014
    Assignee: LG Display Co., Ltd.
    Inventors: Hong Sung Song, Sai Chang Yun, Sang Chang Yun, Jae Woo Lee
  • Publication number: 20140035043
    Abstract: An integrated circuit structure includes a semiconductor substrate, and a FinFET over the semiconductor substrate. The FinFET includes a semiconductor fin; a gate dielectric on a top surface and sidewalls of the semiconductor fin; a gate electrode on the gate dielectric; and a source/drain region at an end of the semiconductor fin. A first pair of shallow trench isolation (STI) regions includes portions directly underlying portions of the source/drain regions, wherein the first pair of STI regions is separated by, and adjoining a semiconductor strip. The first pair of STI regions further has first top surfaces. A second pair of STI regions comprises portions directly underlying the gate electrode, wherein the second pair of STI regions is separated from each other by, and adjoining, the semiconductor strip. The second pair of STI regions has second top surfaces higher than the first top surfaces.
    Type: Application
    Filed: October 4, 2013
    Publication date: February 6, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Lin Lee, Chih Chieh Yeh, Chang-Yun Chang, Feng Yuan
  • Publication number: 20140009505
    Abstract: A display panel test apparatus that may include: a first measurer measuring first R, G, and B components of light emitted from a display panel at a first viewing angle; a second measurer measuring second R, G, and B components of light emitted from the display panel at a second viewing angle; a color coordinate calculator calculating a first xy color coordinate at the first viewing angle using the first R, G, and B components and calculating a second xy color coordinate at the second viewing angle using the second R, G, and B components; and a panel controller compensating a target color coordinate of the display panel to include the first xy color coordinate and the second xy color coordinate into a specification area on a color coordinate system.
    Type: Application
    Filed: November 14, 2012
    Publication date: January 9, 2014
    Applicant: Samsung Display Co., Ltd.
    Inventors: Chang-Yun MOON, Hee-Seong JEONG, Won-Ju SHIN
  • Publication number: 20140004682
    Abstract: An integrated circuit structure includes a substrate having a first portion in a first device region and a second portion in a second device region; and two insulation regions in the first device region and over the substrate. The two insulation regions include a first dielectric material having a first k value. A semiconductor strip is between and adjoining the two insulation regions, with a top portion of the semiconductor strip forming a semiconductor fin over top surfaces of the two insulation regions. An additional insulation region is in the second device region and over the substrate. The additional insulation region includes a second dielectric material having a second k value greater than the first k value.
    Type: Application
    Filed: September 5, 2013
    Publication date: January 2, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Feng Yuan, Tsung-Lin Lee, Hung-Ming Chen, Chang-Yun Chang
  • Patent number: 8610240
    Abstract: A system and method for forming multi recessed shallow trench isolation structures on substrate of an integrated circuit is provided. An integrated circuit includes a substrate, at least two shallow trench isolation (STI) structures formed in the substrate, an oxide fill disposed in the at least two STI structures, and semiconductor devices disposed on the oxide fill in the at least two STI structures. A first STI structure is formed to a first depth and a second STI structure is formed to a second depth. The oxide fill fills the at least two STI structures, and the first depth and the second depth are based on semiconductor device characteristics of semiconductor devices disposed thereon.
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: December 17, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Lin Lee, Chang-Yun Chang
  • Patent number: 8604403
    Abstract: An auto-focusing apparatus and method, the apparatus including an emission unit, the emission unit being configured to irradiate light on the organic light-emitting display apparatus; an optical system between the organic light-emitting display apparatus and the emission unit, the optical system being configured to adjust a position of the optical system on an optical axis and focus the irradiated light on the pixel unit; a light-receiving unit, the light-receiving unit being configured to receive light reflected by the organic light-emitting display apparatus and measure an intensity and a wavelength of the reflected light; and a controller, the controller being configured to receive the intensity of light measured by the light-receiving unit, control the position of the optical system, determine that the auto-focusing apparatus is focusing light onto the pixel unit when the intensity of light received by the light-receiving unit is a maximum value, and determine the position of the optical system as an opti
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: December 10, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventors: Chang-Yun Moon, Hee-Seong Jeong, Sun-Hwa Kim
  • Publication number: 20130313646
    Abstract: A structure and method of forming a semiconductor device with a fin is provided. In an embodiment a hard mask is utilized to pattern a gate electrode layer and is then removed. After the hard mask has been removed, the gate electrode layer may be separated into individual gate electrodes.
    Type: Application
    Filed: August 1, 2013
    Publication date: November 28, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Feng Shieh, Chih-Hao Yu, Chang-Yun Chang