Patents by Inventor Chen Yu-Tsai

Chen Yu-Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12278203
    Abstract: A semiconductor structure including a first die, a second die stacked on the first die, a smoothing layer disposed on the first die and a filling material layer disposed on the smoothing layer. The second die has a dielectric portion and a semiconductor material portion disposed on the dielectric portion. The smoothing layer includes a first dielectric layer and a second dielectric layer, and the second dielectric layer is disposed on the first dielectric layer. The dielectric portion is surrounded by the smoothing layer, and the semiconductor material portion is surrounded by the filling material layer. A material of the first dielectric layer is different from a material of the second dielectric layer and a material of the filling material layer.
    Type: Grant
    Filed: June 16, 2022
    Date of Patent: April 15, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Tsang-Jiuh Wu, Wen-Chih Chiou
  • Publication number: 20250096584
    Abstract: An inlet for a charger is provided. The inlet includes a body, a first plate, a circuit board assembly, and a second plate. The first plate is disposed on the body. The first plate has a first hole. The circuit board assembly is disposed on the first plate. The circuit board assembly has a second hole. The second plate is disposed on the circuit board assembly. The body has a first pin. The first pin penetrates through the first hole and the second hole and is covered by the second plate.
    Type: Application
    Filed: January 9, 2024
    Publication date: March 20, 2025
    Inventors: Chen-Yu TSAI, Yu-Po Chen
  • Patent number: 12237284
    Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes an interconnect structure disposed over a semiconductor substrate, contact pads disposed on the interconnect structure, a dielectric structure disposed on the interconnect structure and covering the contact pads, bonding connectors covered by the dielectric structure and landing on the contact pads, and a dummy feature covered by the dielectric structure and laterally interposed between adjacent two of the bonding connectors. Top surfaces of the bonding connectors are substantially coplanar with a top surface of the dielectric structure, and the bonding connectors are electrically coupled to the interconnect structure through the contact pads.
    Type: Grant
    Filed: February 16, 2022
    Date of Patent: February 25, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Tsang-Jiuh Wu, Wen-Chih Chiou
  • Patent number: 12227867
    Abstract: A plating apparatus includes a workpiece holder, a plating bath, and a clamp ring. The plating bath is underneath the workpiece holder. The clamp ring is connected to the workpiece holder. The clamp ring includes channels communicating an inner surface of the clamp ring and an outer surface of the clamp ring.
    Type: Grant
    Filed: January 9, 2023
    Date of Patent: February 18, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Publication number: 20240371804
    Abstract: A method includes forming a conductive pad over an interconnect structure of a wafer, forming a capping layer over the conductive pad, forming a dielectric layer covering the capping layer, and etching the dielectric layer to form an opening in the dielectric layer. The capping layer is exposed to the opening. A wet-cleaning process is then performed on the wafer. During the wet-cleaning process, a top surface of the capping layer is exposed to a chemical solution used for performing the wet-cleaning process. The method further includes depositing a conductive diffusion barrier extending into the opening, and depositing a conductive material over the conductive diffusion barrier.
    Type: Application
    Filed: July 17, 2024
    Publication date: November 7, 2024
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Patent number: 12132016
    Abstract: A method includes forming a conductive pad over an interconnect structure of a wafer, forming a capping layer over the conductive pad, forming a dielectric layer covering the capping layer, and etching the dielectric layer to form an opening in the dielectric layer. The capping layer is exposed to the opening. A wet-cleaning process is then performed on the wafer. During the wet-cleaning process, a top surface of the capping layer is exposed to a chemical solution used for performing the wet-cleaning process. The method further includes depositing a conductive diffusion barrier extending into the opening, and depositing a conductive material over the conductive diffusion barrier.
    Type: Grant
    Filed: August 8, 2023
    Date of Patent: October 29, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Patent number: 11990430
    Abstract: A method includes forming a conductive pad over an interconnect structure of a wafer, forming a capping layer over the conductive pad, forming a dielectric layer covering the capping layer, and etching the dielectric layer to form an opening in the dielectric layer. The capping layer is exposed to the opening. A wet-cleaning process is then performed on the wafer. During the wet-cleaning process, a top surface of the capping layer is exposed to a chemical solution used for performing the wet-cleaning process. The method further includes depositing a conductive diffusion barrier extending into the opening, and depositing a conductive material over the conductive diffusion barrier.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: May 21, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Publication number: 20240074536
    Abstract: A foot protection pad is provided, comprising: a body, a midfoot elastic body and a heel elastic body; wherein, the body is formed with a first elastic material to form a front plantar area, a midfoot area and a heel area; the bottom surface of the midfoot area is formed with a midfoot arch, and opposite sides are formed with a concave arc surface of the inner arch and the concave arc surface of the outer arch; a recession is formed on the body of the heel area, and the opposite two sides of the recession are formed with a concave arc surface of the inner arch and a concave arc surface of the outer arch, and the rear end is formed with a heel concave arc surface; the midfoot elastic body and the heel elastic body are formed with a second elastic material and respectively combined with the body.
    Type: Application
    Filed: September 7, 2022
    Publication date: March 7, 2024
    Inventor: Chen-Yu Tsai
  • Publication number: 20240006792
    Abstract: A power device is provided. The power device includes a body and a plug rotatably assembled on the body. The body includes a lower housing and a connection element in the lower housing. The connection element includes a pathway and a conductive pin at least partially disposed in the pathway. The plug includes an upper housing and an upper pin rotatably and pivotally connected to the upper housing. The upper pin is used to electrically connect to an external power supply. The plug rotates relative to the body to move the conductive pin along the pathway from a storage position to an extending position to electrically connect to the upper pin.
    Type: Application
    Filed: February 22, 2023
    Publication date: January 4, 2024
    Inventors: Shuo-Jen SHIEH, Chen-Yu TSAI, Yu-Po CHEN
  • Publication number: 20230411326
    Abstract: A semiconductor structure including a first die, a second die stacked on the first die, a smoothing layer disposed on the first die and a filling material layer disposed on the smoothing layer. The second die has a dielectric portion and a semiconductor material portion disposed on the dielectric portion. The smoothing layer includes a first dielectric layer and a second dielectric layer, and the second dielectric layer is disposed on the first dielectric layer. The dielectric portion is surrounded by the smoothing layer, and the semiconductor material portion is surrounded by the filling material layer. A material of the first dielectric layer is different from a material of the second dielectric layer and a material of the filling material layer.
    Type: Application
    Filed: June 16, 2022
    Publication date: December 21, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Tsang-Jiuh Wu, Wen-Chih Chiou
  • Publication number: 20230387051
    Abstract: A method includes forming a conductive pad over an interconnect structure of a wafer, forming a capping layer over the conductive pad, forming a dielectric layer covering the capping layer, and etching the dielectric layer to form an opening in the dielectric layer. The capping layer is exposed to the opening. A wet-cleaning process is then performed on the wafer. During the wet-cleaning process, a top surface of the capping layer is exposed to a chemical solution used for performing the wet-cleaning process. The method further includes depositing a conductive diffusion barrier extending into the opening, and depositing a conductive material over the conductive diffusion barrier.
    Type: Application
    Filed: August 8, 2023
    Publication date: November 30, 2023
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Publication number: 20230317648
    Abstract: Semiconductor devices and methods of manufacture are presented which form metallization layers over a semiconductor substrate; form a first pad over the metallization layers; deposit one or more passivation layers over the first pad; and form a first bond pad via through the one or more passivation layers and at least partially through the first pad.
    Type: Application
    Filed: May 10, 2022
    Publication date: October 5, 2023
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Tsang-Jiuh Wu, Wen-Chih Chiou
  • Publication number: 20230260940
    Abstract: A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes an interconnect structure disposed over a semiconductor substrate, contact pads disposed on the interconnect structure, a dielectric structure disposed on the interconnect structure and covering the contact pads, bonding connectors covered by the dielectric structure and landing on the contact pads, and a dummy feature covered by the dielectric structure and laterally interposed between adjacent two of the bonding connectors. Top surfaces of the bonding connectors are substantially coplanar with a top surface of the dielectric structure, and the bonding connectors are electrically coupled to the interconnect structure through the contact pads.
    Type: Application
    Filed: February 16, 2022
    Publication date: August 17, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Tsang-Jiuh Wu, Wen-Chih Chiou
  • Publication number: 20230167568
    Abstract: A semiconductor apparatus for pre-wetting a semiconductor workpiece includes a process chamber, a workpiece holder disposed within the process chamber to hold the semiconductor workpiece, a pre-wetting fluid tank disposed outside the process chamber and containing a pre-wetting fluid, and a conduit coupled to the pre-wetting fluid tank and extending into the process chamber. The conduit delivers the pre-wetting fluid from the pre-wetting fluid tank out through an outlet of the conduit to wet a major surface of the semiconductor workpiece, wherein the outlet of the conduit is positioned above the major surface of the semiconductor workpiece by a vertical distance.
    Type: Application
    Filed: February 2, 2023
    Publication date: June 1, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Publication number: 20230142163
    Abstract: A plating apparatus includes a workpiece holder, a plating bath, and a clamp ring. The plating bath is underneath the workpiece holder. The clamp ring is connected to the workpiece holder. The clamp ring includes channels communicating an inner surface of the clamp ring and an outer surface of the clamp ring.
    Type: Application
    Filed: January 9, 2023
    Publication date: May 11, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Patent number: 11585005
    Abstract: A semiconductor apparatus and methods of processing a semiconductor workpiece are provided. The semiconductor apparatus for pre-wetting a semiconductor workpiece includes a process chamber, a workpiece holder disposed within the process chamber to hold the semiconductor workpiece, a pre-wetting fluid tank disposed outside the process chamber and containing a pre-wetting fluid, and a conduit coupled to the pre-wetting fluid tank and extending into the process chamber. The conduit delivers the pre-wetting fluid from the pre-wetting fluid tank out through an outlet of the conduit to wet a major surface of the semiconductor workpiece comprising a plurality of recess portions.
    Type: Grant
    Filed: January 13, 2021
    Date of Patent: February 21, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Patent number: 11585008
    Abstract: A plating apparatus includes a workpiece holder, a plating bath, and a clamp ring. The plating bath is underneath the workpiece holder. The clamp ring is connected to the workpiece holder. The clamp ring includes channels communicating an inner surface of the clamp ring and an outer surface of the clamp ring.
    Type: Grant
    Filed: December 29, 2020
    Date of Patent: February 21, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Patent number: 11488842
    Abstract: A method of manufacturing a semiconductor device includes bonding a first semiconductor die and a second semiconductor die to a first substrate, forming a conductive layer over the first semiconductor die, the second semiconductor die, and the first substrate, applying an encapsulant over the conductive layer, and removing a portion of the encapsulant, wherein the removing the portion of the encapsulant exposes the conductive layer.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: November 1, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Yu Tsai, Tsung-Shang Wei, Yu-Sheng Lin, Wen-Chih Chiou, Shin-Puu Jeng
  • Publication number: 20220238466
    Abstract: A method includes forming a conductive pad over an interconnect structure of a wafer, forming a capping layer over the conductive pad, forming a dielectric layer covering the capping layer, and etching the dielectric layer to form an opening in the dielectric layer. The capping layer is exposed to the opening. A wet-cleaning process is then performed on the wafer. During the wet-cleaning process, a top surface of the capping layer is exposed to a chemical solution used for performing the wet-cleaning process. The method further includes depositing a conductive diffusion barrier extending into the opening, and depositing a conductive material over the conductive diffusion barrier.
    Type: Application
    Filed: February 26, 2021
    Publication date: July 28, 2022
    Inventors: Chen-Yu Tsai, Ku-Feng Yang, Wen-Chih Chiou
  • Patent number: D1053540
    Type: Grant
    Filed: August 11, 2022
    Date of Patent: December 10, 2024
    Assignee: FUSCO INDUSTRIAL CORPORATION
    Inventor: Chen-Yu Tsai