Patents by Inventor Chen Zhang

Chen Zhang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10615267
    Abstract: A method for forming a semiconductor device comprises forming a first buffer layer with a first melting point on a substrate. A second buffer layer is formed on the first buffer layer. The second buffer layer has a second melting point that is greater than the first melting point. Annealing process is performed that increases a temperature of the first buffer layer such that the first buffer layer partially liquefies and causes a strain in the second buffer layer to be substantially reduced.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: April 7, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Patent number: 10612929
    Abstract: Provided is a process that includes: obtaining a first version of a map of a workspace; selecting a first undiscovered area of the workspace; in response to selecting the first undiscovered area, causing the robot to move to a position and orientation to sense data in at least part of the first undiscovered area; and obtaining an updated version of the map mapping a larger area of the workspace than the first version.
    Type: Grant
    Filed: October 17, 2018
    Date of Patent: April 7, 2020
    Assignee: AI Incorporated
    Inventors: Ali Ebrahimi Afrouzi, Sebastian Schweigert, Chen Zhang, Lukas Fath
  • Patent number: 10608083
    Abstract: Methods are provided to construct field-effect transistors comprising low-resistance metallic gate structures. A field-effect transistor includes a nanosheet stack and a metal gate which covers a gate region of the nanosheet stack. The nanosheet stack includes nanosheet channel layers and an etch stop layer disposed above an upper nanosheet channel layer. The metal gate includes a work function metal which encapsulates the nanosheet channel layers, and a gate electrode disposed above and in contact with the work function metal. An upper surface of the work function metal is recessed to be substantially coplanar with the etch stop layer. The gate electrode has a resistivity which is less than a resistivity of the work function metal. The etch stop layer protects the portion of the work function metal disposed between the etch stop layer and the upper nanosheet channel layer from being etched when recessing the work function metal.
    Type: Grant
    Filed: August 31, 2018
    Date of Patent: March 31, 2020
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Chen Zhang, Wenyu Xu, Xin Miao
  • Patent number: 10607892
    Abstract: A method for manufacturing a semiconductor device includes forming a first plurality of fins in a first device region on a substrate, forming a second plurality of fins in a second device region on the substrate, forming bottom source/drain regions on the substrate and around lower portions of each of the first and second plurality of fins in the first and second device regions, forming a dummy spacer layer on the bottom source/drain region in the first device region, wherein the dummy spacer layer includes one or more dopants, and forming a plurality of doped regions in the first and second plurality of fins in the first and second device regions, wherein the plurality of doped regions in the first device region extend to a greater height on the first plurality of fins than the plurality of doped regions in the second device region on the second plurality of fins.
    Type: Grant
    Filed: December 26, 2017
    Date of Patent: March 31, 2020
    Assignee: International Business Machines Corporation
    Inventors: Xin Miao, Kangguo Cheng, Wenyu Xu, Chen Zhang
  • Patent number: 10607894
    Abstract: A method of fabricating a vertical fin field effect transistor with a merged top source/drain, including, forming a source/drain layer at the surface of a substrate, forming a plurality of vertical fins on the source/drain layer; forming protective spacers on each of the plurality of vertical fins, forming a sacrificial plug between two protective spacers, forming a filler layer on the protective spacers not in contact with the sacrificial plug, and selectively removing the sacrificial plug to form an isolation region trench between the two protective spacers.
    Type: Grant
    Filed: June 15, 2017
    Date of Patent: March 31, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Publication number: 20200099838
    Abstract: A method for interactive photography performed by a device, a device for interactive photography, and a computer program product for interactive photography are disclosed. An image is captured by a first device used by a first user to photograph a second user and the image received at a device for interactive photography. An adjustment input from the second user to adjust the image is received. An adjusted image is generated at the device for interactive photography based on the received adjustment input to the received image. The adjusted image is sent to the first device as adjustment information, for use in photographing the second user.
    Type: Application
    Filed: September 20, 2018
    Publication date: March 26, 2020
    Inventors: Nan Song, Xiao Xia Mao, Ya Qing Chen, Yi Chen Zhang, Wen Wen Yang
  • Patent number: 10600887
    Abstract: A method of forming a vertical transport fin field effect transistor is provided. The method includes forming a doped layer on a substrate, and forming a multilayer fin on the doped layer, where the multilayer fin includes a lower trim layer portion, an upper trim layer portion, and a fin channel portion between the upper and lower trim layer portions. A portion of the lower trim layer portion is removed to form a lower trim layer post, and a portion of the upper trim layer portion is removed to form an upper trim layer post. An upper recess filler is formed adjacent to the upper trim layer post, and a lower recess filler is formed adjacent to the lower trim layer post. A portion of the fin channel portion is removed to form a fin channel post between the upper trim layer post and lower trim layer post.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: March 24, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Tenko Yamashita, Chun Wing Yeung, Chen Zhang
  • Patent number: 10602294
    Abstract: An audio processing system and method which calculates, based on spatial metadata of the audio object, a panning coefficient for each of the audio objects in relation to each of a plurality of predefined channel coverage zones. Converts the audio signal into submixes in relation to the predefined channel coverage zones based on the calculated panning coefficients and the audio objects. Each of the submixes indicating a sum of components of the plurality of the audio objects in relation to one of the predefined channel coverage zones. Generating a submix gain by applying an audio processing to each of the submix and controls an object gain applied to each of the audio objects. The object gain being as a function of the panning coefficients for each of the audio objects and the submix gains in relation to each of the predefined channel coverage zones.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: March 24, 2020
    Assignee: Dolby Laboratories Licensing Corporation
    Inventors: Alan J. Seefeldt, Lie Lu, Chen Zhang
  • Patent number: 10600886
    Abstract: A vertical fin field-effect-transistor and a method for fabricating the same. The vertical fin field-effect-transistor includes a substrate, a first source/drain layer including a plurality of pillar structures, and a plurality of fins disposed on and in contact with the plurality of pillar structures. A doped layer epitaxially grown from the first source/drain layer is in contact with the plurality of fins and the plurality of pillar structures. A gate structure is disposed in contact with two or more fins in the plurality of fins. The gate structure includes a dielectric layer and a gate layer. A second source/drain layer is disposed on the gate structure. The method includes epitaxially growing a doped layer in contact with a plurality of fins and a plurality of pillar structures. A gate structure is formed in contact with two or more fins. A second source/drain layer is formed on the gate structure.
    Type: Grant
    Filed: November 2, 2018
    Date of Patent: March 24, 2020
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Patent number: 10599611
    Abstract: A command request may be made to create a new entity in a data storage system. The new entity may be depend upon one or more base objects required to exist prior to creating the new entity. The command request may be processed in accordance with a selected policy affecting the required base objects. The selected policy may be one of a defined set of policies affecting actions taken with respect to the required base objects and new entity. For example, the policies may provide for automatically creating the required base objects and new entity; automatically selecting existing base objects used to create the new entity; generating a command list of recommend commands for creating the required base objects and the new entity; and generating a recommend list of existing base objects and a command for creating the new entity using at least one of the existing base objects.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: March 24, 2020
    Assignee: EMC IP Holding Company LLC
    Inventors: Dazhi Dong, Daniel S. Keefe, Xiaogang Wang, Binhua Lu, Xing Chen, Chen Zhang
  • Publication number: 20200089223
    Abstract: A method and device for controlling a vehicle, and an autonomous driving vehicle are provided. The method includes that: historical weather information of a present driving road planned for a vehicle is acquired; a slippery parameter of the present driving road is determined according to the historical weather information; and an autonomous driving mode of the vehicle is controlled according to the slippery parameter.
    Type: Application
    Filed: September 14, 2018
    Publication date: March 19, 2020
    Inventors: Hongwei FENG, Yinguang LI, Chen ZHANG, Weizhe ZHANG
  • Publication number: 20200091316
    Abstract: A method of forming a vertical fin field effect device is provided. The method includes, forming a vertical fin on a substrate, forming a masking block on the vertical fin, wherein the masking block extends a distance outward from the vertical fin sidewalls and endwalls, and a portion of the substrate surrounding the masking block is exposed. The method further includes removing at least a portion of the exposed portion of the substrate to form a recess and a fin mesa below the vertical fin, removing a portion of the fin mesa to form an undercut recess below an overhanging portion of the masking block, forming a spacer layer on the masking block and in the undercut recess, and removing a portion of the spacer layer to form an undercut spacer in the undercut recess.
    Type: Application
    Filed: November 15, 2019
    Publication date: March 19, 2020
    Inventors: Chen Zhang, Kangguo Cheng, Xin Miao, Wenyu Xu
  • Publication number: 20200091353
    Abstract: A solar cell is provided. The solar cell includes a p-n junction and a coating. The p-n junction includes upper and lower layers. The coating overlies the upper layer of the p-n junction. The coating includes a transparent conductive layer and a gate dielectric layer, which is interposed between the transparent conductive layer and the upper layer of the p-n junction. The solar cell further includes a front-contact and a back-contact, which are electrically communicative with each other. The front-contact is electrically communicative with the upper layer of the p-n junction through the coating. The back-contact is electrically communicative with the lower layer of the p-n junction. The solar cell can also include a contact via electrically communicative with the back-contact and with the transparent conductive layer.
    Type: Application
    Filed: November 21, 2019
    Publication date: March 19, 2020
    Inventor: CHEN ZHANG
  • Patent number: 10593598
    Abstract: Techniques for forming VFETs with differing gate lengths Lg on the same wafer using a gas cluster ion beam (GCIB) process to produce fins of differing heights are provided. In one aspect, a method of forming fins having different heights includes: patterning the fins having a uniform height in a substrate, the fins including at least one first fin and at least one second fin; forming an oxide at a base of the at least one second fin using a low-temperature directional oxidation process (e.g., GCIB oxidation); and removing the oxide from the base of the at least one second fin to reveal the at least one first fin having a height HI and the at least one second fin having a height H2, wherein H2>H1. VFETs and methods for forming VFETs having different fin heights using this process are also provided.
    Type: Grant
    Filed: December 23, 2017
    Date of Patent: March 17, 2020
    Assignee: International Business Machines Corporation
    Inventors: Xin Miao, Kangguo Cheng, Chen Zhang
  • Patent number: 10592698
    Abstract: A semiconductor device includes a plurality of transistors on a substrate, each transistor of the plurality of transistors including a doped nanowire channel region, where the plurality of transistors are grouped into a plurality of transistor groups each including two transistors of the plurality of transistors, and where each transistor group is assigned a state based on an electrical characteristic of each transistor in each transistor group. The semiconductor device also includes a security code for the plurality of transistors generated by grouping together the states corresponding to each transistor group.
    Type: Grant
    Filed: March 1, 2017
    Date of Patent: March 17, 2020
    Assignee: International Business Machines Corporation
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Patent number: 10593753
    Abstract: Techniques for controlling top spacer thickness in VFETs are provided. In one aspect, a method of forming a VFET device includes: depositing a dielectric hardmask layer and a fin hardmask(s) on a wafer; patterning the dielectric hardmask layer and the wafer to form a fin(s) and a dielectric cap on the fin(s); forming a bottom source/drain at a base of the fin(s); forming bottom spacers on the bottom source/drain; forming a gate stack alongside the fin(s); burying the fin(s) in a dielectric fill material; selectively removing the fin hardmask(s); recessing the gate stack to form a cavity in the dielectric fill material; depositing a spacer material into the cavity; recessing the spacer material to form top spacers; removing the dielectric cap; and forming a top source/drain at a top of the fin(s). A VFET device is also provided.
    Type: Grant
    Filed: July 10, 2018
    Date of Patent: March 17, 2020
    Assignee: International Business Machines Corporation
    Inventors: Wenyu Xu, Chen Zhang, Kangguo Cheng, Xin Miao
  • Publication number: 20200083355
    Abstract: A method for fabricating a semiconductor device including a vertical transistor includes etching a longitudinal end portion of a fin on a substrate to form a gap exposing the substrate, forming a top source/drain region, and forming, around a horizontal portion and a vertical portion of a bottom source/drain region disposed on the substrate, a contact wrapping in a region including a location where the longitudinal end portion of the fin was removed by the etching.
    Type: Application
    Filed: November 13, 2019
    Publication date: March 12, 2020
    Inventors: Wenyu Xu, Chen Zhang, Kangguo Cheng, Xin Miao
  • Publication number: 20200083106
    Abstract: A method of forming a vertical fin field effect transistor (vertical finFET) with a self-aligned bottom source/drain, including forming a doped layer on a substrate, forming one or more vertical fins on the doped layer, forming a protective layer on the one or more vertical fins, wherein the protective layer has a thickness, and forming at least one isolation trench by removing at least a portion of the protective layer on the doped layer, wherein the isolation trench is laterally offset from at least one of the one or more vertical fins by the thickness of the protective layer.
    Type: Application
    Filed: November 13, 2019
    Publication date: March 12, 2020
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Publication number: 20200083217
    Abstract: A method of fabricating adjacent vertical fins with top source/drains having an air spacer and a self-aligned top junction, including, forming two or more vertical fins on a bottom source/drain, forming a top source/drain on each of the two or more vertical fins, wherein the top source/drains are formed to a size that leaves a gap between the adjacent vertical fins, and forming a source/drain liner on the top source/drains, where the source/drain liner occludes the gap between adjacent top source/drains to form a void space between adjacent vertical fins.
    Type: Application
    Filed: November 14, 2019
    Publication date: March 12, 2020
    Inventors: Kangguo Cheng, Xin Miao, Wenyu Xu, Chen Zhang
  • Publication number: 20200083353
    Abstract: A method of forming a vertical fin field effect device is provided. The method includes, forming a vertical fin on a substrate, forming a masking block on the vertical fin, wherein the masking block extends a distance outward from the vertical fin sidewalls and endwalls, and a portion of the substrate surrounding the masking block is exposed. The method further includes removing at least a portion of the exposed portion of the substrate to form a recess and a fin mesa below the vertical fin, removing a portion of the fin mesa to form an undercut recess below an overhanging portion of the masking block, forming a spacer layer on the masking block and in the undercut recess, and removing a portion of the spacer layer to form an undercut spacer in the undercut recess.
    Type: Application
    Filed: November 15, 2019
    Publication date: March 12, 2020
    Inventors: Chen Zhang, Kangguo Cheng, Xin Miao, Wenyu Xu