Patents by Inventor Cheng-Chung Lin

Cheng-Chung Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120088362
    Abstract: A method includes allowing a work piece having a solder bump to contact a bond head; heating the bond head until the solder bump is melted; and conducting a cooling media into the bond head to cool the solder bump and to solidify the solder bump.
    Type: Application
    Filed: October 8, 2010
    Publication date: April 12, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien Ling Hwang, Cheng-Chung Lin, Ying-Jui Huang, Chung-Shi Liu
  • Publication number: 20120049346
    Abstract: Apparatus and methods for providing solder pillar bumps. Pillar bump connections are formed on input/output terminals for integrated circuits by forming a pillar of conductive material using plating of a conductive material over terminals of an integrated circuit. A base portion of the pillar bump has a greater width than an upper portion. A cross-section of the base portion of the pillar bump may make a trapezoidal, rectangular or sloping shape. Solder material may be formed on the top surface of the pillar. The resulting solder pillar bumps form fine pitch package solder connections that are more reliable than those of the prior art.
    Type: Application
    Filed: August 30, 2010
    Publication date: March 1, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Chung Lin, Chung-Shi Liu, Meng-Wei Chou, Kuo Cheng Lin, Wen-Hsiung Lu, Chien Ling Hwang, Ying-Jui Huang, De-Yuan Lu
  • Publication number: 20120038466
    Abstract: A picking system comprises a radio frequency identification (RFID) tag, a case, a two-wire conductive strip, at least one identifying unit and a processing unit. The two-wire conductive strip is electrically connected between the identifying unit and the processing unit. The identifying unit reads tag information within the RFID tag for actively and instantly controlling the authorization of an operating staff assigned for particular items thereby improving the accuracy of picking items.
    Type: Application
    Filed: January 6, 2011
    Publication date: February 16, 2012
    Inventors: Chun-Hui HUANG, Hsien-Min Hsu, Cheng-Chung Lin, Chih-Lung Liu
  • Patent number: 8104666
    Abstract: A method of bonding includes providing a first work piece, and attaching a second work piece on the first work piece, with a solder bump disposed between the first and the second work pieces. The second work piece is heated using a heating head of a heating tool to melt the solder bump. After the step of heating the second work piece, one of the first and the second work pieces is allowed to move freely in a horizontal direction to self-align the first and the second work pieces. After the step of allowing one of the first and the second work pieces to move, a temperature of the heating head is lowed until the first solder bump solidifies to form a second solder bump.
    Type: Grant
    Filed: September 1, 2010
    Date of Patent: January 31, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien Ling Hwang, Ying-Jui Huang, Cheng-Chung Lin, Chung-Shi Liu
  • Publication number: 20120018878
    Abstract: A method of forming a device includes providing a substrate, and forming a solder bump over the substrate. A minor element is introduced to a region adjacent a top surface of the solder bump. A re-flow process is then performed to the solder bump to drive the minor element into the solder bump.
    Type: Application
    Filed: July 26, 2010
    Publication date: January 26, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Da Cheng, MIng-Che Ho, Chung-Shi Liu, Chien Ling Hwang, Cheng-Chung Lin, Hui-Jung Tsai, Zheng-Yi Lim
  • Publication number: 20120007230
    Abstract: An embodiment of the disclosure includes a conductive bump on a semiconductor die. A substrate is provided. A bond pad is over the substrate. An under bump metallurgy (UBM) layer is over the bond pad. A copper pillar is over the UBM layer. The copper pillar has a top surface with a first width and sidewalls with a concave shape. A nickel layer having a top surface and a bottom surface is over the top surface of the copper pillar. The bottom surface of the nickel layer has a second width. A ratio of the second width to the first width is between about 0.93 to about 1.07. A solder material is over the top surface of the cap layer.
    Type: Application
    Filed: July 8, 2010
    Publication date: January 12, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chien Ling Hwang, Ying-Jui Huang, Zheng-Yi Lim, Yi-Yang Lei, Cheng-Chung Lin, Chung-Shi Liu
  • Patent number: 8053894
    Abstract: Apparatus for forming a semiconductor structure comprising a first layer on top of a substrate wherein the first layer defines conductive regions such as copper interconnect lines and non-conductive regions such as dielectric materials. The conductive regions are covered by a second layer of a material different than the first layer such as for example nickel and then the structure is heat treated such that the interconnect lines and second metal, such as a copper interconnect line and a nickel second layer, interact with each other to form an alloy layer. The alloy layer has superior qualities for adhering to both the copper interconnect lines and a subsequently deposited dielectric material.
    Type: Grant
    Filed: August 26, 2005
    Date of Patent: November 8, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Kai Wan, Yih-Hsiung Lin, Ming-Ta Lei, Baw-Ching Perng, Cheng-Chung Lin, Chia-Hui Lin, Ai-Sen Liu
  • Publication number: 20110266667
    Abstract: A sidewall protection structure is provided for covering at least a portion of a sidewall surface of a bump structure, in which a protection structure on the sidewalls of a Cu pillar and a surface region of an under-bump-metallurgy (UBM) layer is formed of at least one non-metal material layers, for example a dielectric material layer, a polymer material layer, or combinations thereof.
    Type: Application
    Filed: April 29, 2010
    Publication date: November 3, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-Wen WU, Cheng-Chung LIN, Chien Ling HWANG, Chung-Shi LIU
  • Publication number: 20110133331
    Abstract: An integrated circuit device is disclosed. An exemplary integrated circuit device includes a first copper layer, a second copper layer, and an interface between the first and second copper layers. The interface includes a flat zone interface region and an intergrowth interface region, wherein the flat zone interface region is less than or equal to 50% of the interface.
    Type: Application
    Filed: December 8, 2009
    Publication date: June 9, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Cheng-Chung Lin, Chung-Shi Liu, Chen-Hua Yu
  • Publication number: 20110092064
    Abstract: A method of forming an integrated circuit structure includes forming a copper-containing seed layer on a wafer, and performing a descum step on an exposed surface of the copper-containing seed layer. The descum step is performed using a process gas including fluorine and oxygen. A reduction/purge step is then performed on the exposed surface of the copper-containing seed layer using a nitrogen-containing gas. A copper-containing layer is plated on the copper-containing seed layer.
    Type: Application
    Filed: July 23, 2010
    Publication date: April 21, 2011
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Shi Liu, Cheng-Chung Lin, Ming-Che Ho, Kuo Cheng Lin, Meng-Wei Chou
  • Publication number: 20100201490
    Abstract: A display device includes a RFID tag unit, a display unit, a processing unit and a power supply unit. The RFID tag unit follows a wireless communication standard of a RFID system to receive a wireless signal and outputs identification information. The processing unit electrically connected with the RFID tag unit and the display unit receives the identification information and outputs to the display unit for displaying. The power supply unit supplies operation power required to the processing unit and the display unit. The required power while the above-mentioned display device refreshes the information is supplied by the power supply unit, so that the information can be refreshed with longer communication distance and power saving is achieved. A display system including the above-mentioned display device and a reader/writer device is also disclosed.
    Type: Application
    Filed: March 16, 2009
    Publication date: August 12, 2010
    Inventors: Chun-Hui Huang, Cheng-Chung Lin, Kuo-Yuan Tseng
  • Patent number: 7271103
    Abstract: A Cu damascene structure is formed where Cu diffusion barrier is formed by treating the top surface of the surrounding low-k interlayer dielectric with nitrogen or carbon containing medium to form a silicon nitride or silicon carbide diffusion barrier rather than capping the top surface of the Cu with metal diffusion barrier as is conventionally done.
    Type: Grant
    Filed: October 17, 2003
    Date of Patent: September 18, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuei-Wu Huang, Ai-Sen Liu, Baw-Ching Perng, Ming-Ta Lei, Wen-Kai Wan, Cheng-Chung Lin, Yih-Shung Lin, Chia-Hui Lin
  • Patent number: 7176137
    Abstract: A method of forming pluralities of gate sidewall spacers each plurality comprising different associated gate sidewall spacer widths including providing a first plurality of gate structures; blanket depositing a first dielectric layer over the first plurality of gate structures; blanket depositing a second dielectric layer over the first dielectric layer; etching back through a thickness of the first and second dielectric layers; blanket depositing a first photoresist layer to cover the first plurality and patterning to selectively expose at least a second plurality of gate structures; isotropically etching the at least a second plurality of gate structures for a predetermined time period to selectively etch away a predetermined portion of the first dielectric layer; and, selectively etching away the second dielectric layer to leave gate structures comprising a plurality of associated sidewall spacer widths.
    Type: Grant
    Filed: May 9, 2003
    Date of Patent: February 13, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Baw-Ching Perng, Yih-Shung Lin, Ming-Ta Lei, Ai-Sen Liu, Chia-Hui Lin, Cheng-Chung Lin
  • Publication number: 20060113616
    Abstract: A method of forming spacers with different widths on a semiconductor substrate, includes the steps of disposing a first spacer layer over the substrate, defining the first spacer layer into a plurality of spacers of a first width, and disposing a second spacer layer selectively over the first spacer layer of a number of the spacers preselected for the second spacer layer, the predetermined number of the spacers with the second spacer layer each having a second width which is different from the first width.
    Type: Application
    Filed: August 18, 2005
    Publication date: June 1, 2006
    Inventors: Ai-Sen Liu, Baw-Ching Perng, Ming-Ta Lei, Yih-Shung Lin, Cheng-Chung Lin, Chia-Hui Lin
  • Patent number: 7011929
    Abstract: A method of forming pluralities of gate sidewall spacers each plurality comprising different associated gate sidewall spacer widths including providing a plurality of gate structures formed overlying a substrate and a plurality of dielectric layers formed substantially conformally overlying the gate structures; exposing a first selected portion of the plurality followed by anisotropically etching through a thickness portion comprising at least the uppermost dielectric layer to form a first sidewall spacer width; exposing a first subsequent selected portion of the plurality followed by etching through at least a thickness portion of the uppermost dielectric layer; and, exposing a second subsequent selected portion of the plurality followed by anisotropically etching through at least a thickness portion of the uppermost dielectric layer to form a subsequent sidewall spacer width.
    Type: Grant
    Filed: January 9, 2003
    Date of Patent: March 14, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ming-Ta Lei, Yih-Shung Lin, Ai-Sen Liu, Cheng-Chung Lin, Baw-Ching Perng, Chia-Hui Lin
  • Publication number: 20060001160
    Abstract: Apparatus for forming a semiconductor structure comprising a first layer on top of a substrate wherein the first layer defines conductive regions such as copper interconnect lines and non-conductive regions such as dielectric materials. The conductive regions are covered by a second layer of a material different than the first layer such as for example nickel and then the structure is heat treated such that the interconnect lines and second metal, such as a copper interconnect line and a nickel second layer, interact with each other to form an alloy layer. The alloy layer has superior qualities for adhering to both the copper interconnect lines and a subsequently deposited dielectric material.
    Type: Application
    Filed: August 26, 2005
    Publication date: January 5, 2006
    Inventors: Wen-Kai Wan, Yih-Hsiung Lin, Ming-Ta Lei, Baw-Ching Perng, Cheng-Chung Lin, Chia-Hui Lin, Ai-Sen Liu
  • Patent number: 6955984
    Abstract: Methods and apparatus for forming a semiconductor structure comprising a first layer on top of a substrate wherein the first layer defines conductive regions such as copper interconnect lines and non-conductive regions such as dielectric materials. The conductive regions are covered by a second layer of a material different than the first layer such as for example nickel and then the structure is heat treated such that the interconnect lines and second metal, such as a copper interconnect line and a nickel second layer, interact with each other to form an alloy layer. The alloy layer has superior qualities for adhering to both the copper interconnect lines and a subsequently deposited dielectric material.
    Type: Grant
    Filed: May 16, 2003
    Date of Patent: October 18, 2005
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Kai Wan, Yih-Hsiung Lin, Ming-Dai Lei, Baw-Ching Perng, Cheng-Chung Lin, Chia-Hui Lin, Ai-Sen Liu
  • Patent number: 6943077
    Abstract: A method of forming spacers with different widths on a semiconductor substrate, includes the steps of disposing a first spacer layer over the substrate, defining the first spacer layer into a plurality of spacers of a first width, and disposing a second spacer layer selectively over the first spacer layer of a number of the spacers preselected for the second spacer layer, the predetermined number of the spacers with the second spacer layer each having a second width which is different from the first width.
    Type: Grant
    Filed: April 7, 2003
    Date of Patent: September 13, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ai-Sen Liu, Baw-Ching Perng, Ming-Ta Lei, Yih-Shung Lin, Cheng-Chung Lin, Chia-Hui Lin
  • Publication number: 20050085083
    Abstract: A Cu damascene structure is formed where Cu diffusion barrier is formed by treating the top surface of the surrounding low-k interlayer dielectric with nitrogen or carbon containing medium to form a silicon nitride or silicon carbide diffusion barrier rather than capping the top surface of the Cu with metal diffusion barrier as is conventionally done.
    Type: Application
    Filed: October 17, 2003
    Publication date: April 21, 2005
    Inventors: Kuei-Wu Huang, Ai-Sen Liu, Baw-Ching Perng, Ming-Ta Lei, Wen-Kai Wan, Cheng-Chung Lin, Yih-Shung Lin, Chia-Hui Lin
  • Publication number: 20040229460
    Abstract: Methods and apparatus for forming a semiconductor structure comprising a first layer on top of a substrate wherein the first layer defines conductive regions such as copper interconnect lines and non-conductive regions such as dielectric materials. The conductive regions are covered by a second layer of a material different than the first layer such as for example nickel and then the structure is heat treated such that the interconnect lines and second metal, such as a copper interconnect line and a nickel second layer, interact with each other to form an alloy layer. The alloy layer has superior qualities for adhering to both the copper interconnect lines and a subsequently deposited dielectric material.
    Type: Application
    Filed: May 16, 2003
    Publication date: November 18, 2004
    Inventors: Wen-Kai Wan, Yih-Hsiung Lin, Ming-Ta Lei, Baw-Ching Perng, Cheng-Chung Lin, Chia-Hui Lin, Ai-Sen Liu