Patents by Inventor Chia-Chung Chen

Chia-Chung Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9633956
    Abstract: A device includes a semiconductor substrate of a first conductivity type, and a deep well region in the semiconductor substrate, wherein the deep well region is of a second conductivity type opposite to the first conductivity type. The device further includes a well region of the first conductivity type over the deep well region. The semiconductor substrate has a top portion overlying the well region, and a bottom portion underlying the deep well region, wherein the top portion and the bottom portion are of the first conductivity type, and have a high resistivity. A gate dielectric is over the semiconductor substrate. A gate electrode is over the gate dielectric. A source region and a drain region extend into the top portion of the semiconductor substrate. The source region, the drain region, the gate dielectric, and the gate electrode form a Radio Frequency (RF) switch.
    Type: Grant
    Filed: September 21, 2015
    Date of Patent: April 25, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Shu Fang Fu, Tzu-Jin Yeh, Chewn-Pu Jou
  • Publication number: 20170047323
    Abstract: A bipolar junction transistor includes an emitter, a base contact, a collector and a shallow trench isolation. The base contact has two base fingers that form a corner to receive the emitter. The collector has two collector fingers extending along the base fingers of the base contact. The shallow trench isolation is disposed in between the emitter and the base contact and in between the base contact and the collector.
    Type: Application
    Filed: October 31, 2016
    Publication date: February 16, 2017
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Han-Min TSAI, Chi-Feng HUANG, Chia-Chung CHEN, Victor Chiang LIANG, Hsiao-Chun LEE, Shou-Chun CHOU, Shu-Fang FU
  • Publication number: 20170018511
    Abstract: A semiconductor device is provided. The semiconductor device includes a seal ring and a noise-absorbing circuit. The noise-absorbing circuit is electrically connected between the seal ring and a ground pad. The noise-absorbing circuit includes at least one capacitor and at least one inductor to form a first noise-absorbing path, a second noise-absorbing path and a third noise-absorbing path.
    Type: Application
    Filed: July 16, 2015
    Publication date: January 19, 2017
    Inventors: Shuo-Chun CHOU, Chi-Feng HUANG, Chia-Chung CHEN, Victor Chiang LIANG
  • Publication number: 20170012114
    Abstract: A transistor includes a substrate having an upper surface, a fin structure protruding from the upper surface of the substrate, an isolation structure over the upper surface of the substrate and surrounding a lower portion of the fin structure, and a first doped region at least partially embedded in an upper portion of the fin structure. The fin structure extends along a first direction. The first doped region has a first type doping different from that of the fin structure.
    Type: Application
    Filed: September 23, 2016
    Publication date: January 12, 2017
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Publication number: 20160358912
    Abstract: A method for manufacturing a semiconductor device including an upper-channel implant transistor is provided. The method includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is shallowly implanted in an upper portion of the first region of the fins but not in the second regions and not in a lower portion of the first region of the fins. A gate structure extending in a second direction perpendicular to the first direction is formed overlying the first region of the fins, and source/drains are formed overlying the second regions of the fins, thereby forming an upper-channel implant transistor.
    Type: Application
    Filed: June 5, 2015
    Publication date: December 8, 2016
    Inventors: Chia-Chung CHEN, Chi-Feng HUANG, Victor Chiang LIANG, Fu-Huan TSAI, Hsieh-Hung HSIEH, Tzu-Jin YEH, Han-Min TSAI, Hong-Lin CHU
  • Publication number: 20160358911
    Abstract: A method for manufacturing a semiconductor device includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is implanted in the first region of the fins but not in the second regions. A gate structure overlies the first region of the fins and source/drains are formed on the second regions of the fins.
    Type: Application
    Filed: June 5, 2015
    Publication date: December 8, 2016
    Inventors: Chia-Chung CHEN, Chi-Feng HUANG, Victor Chiang LIANG, Fu-Huan TSAI, Hsieh-Hung HSIEH, Tzu-Jin YEH, Han-Min TSAI, Hong-Lin CHU
  • Patent number: 9484408
    Abstract: A bipolar junction transistor includes an emitter, a base contact, a collector and a shallow trench isolation. The base contact has two base fingers that form a corner to receive the emitter. The collector has two collector fingers extending along the base fingers of the base contact. The shallow trench isolation is disposed in between the emitter and the base contact and in between the base contact and the collector.
    Type: Grant
    Filed: July 30, 2015
    Date of Patent: November 1, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Han-Min Tsai, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Hsiao-Chun Lee, Shou-Chun Chou, Shu-Fang Fu
  • Patent number: 9478659
    Abstract: A transistor includes a substrate having an upper surface, a fin structure protruding from the upper surface of the substrate, an isolation structure over the upper surface of the substrate and surrounding a lower portion of the fin structure, and a first doped region at least partially embedded in an upper portion of the fin structure. The fin structure extends along a first direction. The first doped region has a first type doping different from that of the fin structure.
    Type: Grant
    Filed: June 20, 2014
    Date of Patent: October 25, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Publication number: 20160252558
    Abstract: A method of testing a device under test (DUT) connected between first and second DUT nodes includes generating a set of control signals, and in response to the set of control signals, disconnecting a first voltage node from a first DUT node, connecting a second voltage node to the first DUT node, periodically connecting and disconnecting a third voltage node to and from the second DUT node at a predetermined frequency, disconnecting a fourth voltage node from the second DUT node when the third voltage node is connected to the second DUT node, and connecting the fourth voltage node to the second DUT node when the third voltage node is disconnected from the second DUT node. A circuit that performs the method is also disclosed.
    Type: Application
    Filed: February 26, 2015
    Publication date: September 1, 2016
    Inventors: SHUO-CHUN CHOU, CHI-FENG HUANG, CHIA-CHUNG CHEN, VICTOR CHIANG LIANG
  • Patent number: 9425154
    Abstract: A device includes a substrate having a front surface and a back surface; an integrated circuit device at the front surface of the substrate; and a metal plate on the back surface of the substrate, wherein the metal plate overlaps substantially an entirety of the integrated circuit device. A guard ring extends into the substrate and encircles the integrated circuit device. The guard ring is formed of a conductive material. A through substrate via (TSV) penetrates through the substrate and electrically couples to the metal plate.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: August 23, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chewn-Pu Jou, Sally Liu
  • Patent number: 9406672
    Abstract: Methods of forming semiconductor devices. The method includes forming a capacitor array comprising a plurality of cells in a two-dimensional grid. The step of forming includes forming a plurality of operational capacitors in a first subset of the plurality of cells along a diagonal of the array, the plurality of operational capacitors comprising a first operational capacitor formed in a cell at a first edge of the capacitor array and at a first edge of the diagonal of the capacitor array. The step of forming also includes forming a plurality of dummy patterns about the plurality of operational capacitors in the capacitor array in a second subset of the plurality of cells to achieve symmetry in the grid about the diagonal. The method also includes electrically coupling each one of the plurality of operational capacitors to another one of the plurality of operational capacitors.
    Type: Grant
    Filed: June 12, 2014
    Date of Patent: August 2, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chi-Feng Huang, Chia-Chung Chen
  • Patent number: 9406671
    Abstract: Semiconductor devices having capacitor arrays. A semiconductor device is formed including a capacitor array formed in a plurality of cells in a two-dimensional grid. The capacitor array includes a plurality of operational capacitors formed in a first subset of the plurality of cells along a diagonal of the capacitor array. A first operational capacitor is formed in a cell at a first edge of the capacitor array and at a first edge of the diagonal of the capacitor array. The capacitor array also includes a plurality of dummy patterns formed about the plurality of operational capacitors in the capacitor array in a second subset of the plurality of cells to achieve symmetry in the grid about the diagonal. Each one of the plurality of operational capacitors is electrically coupled to another one of the plurality of operational capacitors.
    Type: Grant
    Filed: June 12, 2014
    Date of Patent: August 2, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chi-Feng Huang, Chia-Chung Chen
  • Publication number: 20160197138
    Abstract: A high voltage metal-oxide-metal (HV-MOM) layout includes a first conductive element. The first element includes a first leg extending in a first direction, a second leg connected to the first leg, the second leg extending in a second direction different from the first direction, and a third leg connected to the second leg, the third leg extending in a first direction. The HV-MOM layout further includes a second conductive element separated from the first conductive element by a space. The second conductive element includes a serpentine structure, wherein the serpentine structure is enclosed on at least three sides by the first conductive element. The HV-MOM layout further includes a dielectric material filling the space between the first conductive element and the second conductive element.
    Type: Application
    Filed: March 16, 2016
    Publication date: July 7, 2016
    Inventors: Chia-Chung CHEN, Shu Fang FU, Chang-Sheng LIAO
  • Patent number: 9337269
    Abstract: A fin field effect transistor (FinFET), and a method of fabrication, is introduced. In an embodiment, trenches are formed in a substrate, wherein a region between adjacent trenches defines a fin. A dielectric material is formed in the trenches. The fins are doped to form source, drain and buried channel regions. A gate stack is formed over the buried channel regions. Contacts are formed to provide electrical contacts to the source/drain regions and the gate.
    Type: Grant
    Filed: February 11, 2014
    Date of Patent: May 10, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fu-Huan Tsai, Chia-Chung Chen, Feng Yuan, Chi-Feng Huang, Victor Chiang Liang
  • Patent number: 9305920
    Abstract: A high voltage metal-oxide-metal (HV-MOM) device includes a substrate, a deep well in the substrate and at least one high voltage well in the substrate over the deep well. The HV-MOM device further includes a dielectric layer over each high voltage well of the at least one high voltage well and a gate structure over the dielectric layer. The HV-MOM device further includes an inter-layer dielectric (ILD) layer over the substrate, the ILD layer surrounding the gate structure. The HV-MOM device further includes a first inter-metal dielectric (IMD) layer over the ILD layer and a first metal feature in the first IMD layer, wherein the first metal feature is part of a MOM capacitor.
    Type: Grant
    Filed: July 18, 2013
    Date of Patent: April 5, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Chung Chen, Shu Fang Fu, Chang-Sheng Liao
  • Publication number: 20160086948
    Abstract: A method of determining the reliability of a high-voltage PMOS (HVPMOS) device includes determining a bulk resistance of the HVPMOS device, and evaluating the reliability of the HVPMOS device based on the bulk resistance.
    Type: Application
    Filed: December 4, 2015
    Publication date: March 24, 2016
    Inventors: Chi-Feng Huang, Chia-Chung Chen, Tse-Hua Lu
  • Patent number: 9287413
    Abstract: A junction gate field-effect transistor (JFET) includes a substrate, a source region formed in the substrate, a drain region formed in the substrate, a channel region formed in the substrate, and at least one gate region formed in the substrate. The channel region connects the source and drain regions. The at least one gate region is configured to cause a depletion region in one of the source and drain regions.
    Type: Grant
    Filed: May 13, 2013
    Date of Patent: March 15, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang
  • Publication number: 20160013141
    Abstract: A device includes a semiconductor substrate of a first conductivity type, and a deep well region in the semiconductor substrate, wherein the deep well region is of a second conductivity type opposite to the first conductivity type. The device further includes a well region of the first conductivity type over the deep well region. The semiconductor substrate has a top portion overlying the well region, and a bottom portion underlying the deep well region, wherein the top portion and the bottom portion are of the first conductivity type, and have a high resistivity. A gate dielectric is over the semiconductor substrate. A gate electrode is over the gate dielectric. A source region and a drain region extend into the top portion of the semiconductor substrate. The source region, the drain region, the gate dielectric, and the gate electrode form a Radio Frequency (RF) switch.
    Type: Application
    Filed: September 21, 2015
    Publication date: January 14, 2016
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Shu Fang Fu, Tzu-Jin Yeh, Chewn-Pu Jou
  • Publication number: 20160013293
    Abstract: A device includes a substrate, a gate dielectric over the substrate, and a gate electrode over the gate dielectric. A drain region and a source region are disposed on opposite sides of the gate electrode. Insulation regions are disposed in the substrate, wherein edges of the insulation regions are in contact with edges of the drain region and the source region. A dielectric mask includes a portion overlapping a first interface between the drain region and an adjoining portion of the insulation regions. A drain silicide region is disposed over the drain region, wherein an edge of the silicide region is substantially aligned to an edge of the first portion of the dielectric mask.
    Type: Application
    Filed: September 22, 2015
    Publication date: January 14, 2016
    Inventors: Chu-Fu Chen, Chia-Chung Chen, Chi-Feng Huang, Victor Chiang Liang
  • Patent number: 9209098
    Abstract: A method of determining the reliability of a high-voltage PMOS (HVPMOS) device includes determining a bulk resistance of the HVPMOS device, and evaluating the reliability of the HVPMOS device based on the bulk resistance.
    Type: Grant
    Filed: May 19, 2011
    Date of Patent: December 8, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Chung Chen, Chi-Feng Huang, Tse-Hua Lu