Patents by Inventor Chia-Lin Yu

Chia-Lin Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8058082
    Abstract: A light-emitting diode (LED) device is provided. The LED device has raised semiconductor regions formed on a substrate. LED structures are formed over the raised semiconductor regions such that bottom contact layers and active layers of the LED device are conformal layers. The top contact layer has a planar surface. In an embodiment, the top contact layers are continuous over a plurality of the raised semiconductor regions while the bottom contact layers and the active layers are discontinuous between adjacent raised semiconductor regions.
    Type: Grant
    Filed: August 11, 2008
    Date of Patent: November 15, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Wen-Chih Chiou, Ding-Yuan Chen, Chia-Lin Yu, Hung-Ta Lin
  • Patent number: 8044409
    Abstract: A semiconductor structure includes a substrate and a conductive carrier-tunneling layer over and contacting the substrate. The conductive carrier-tunneling layer includes first group-III nitride (III-nitride) layers having a first bandgap, wherein the first III-nitride layers have a thickness less than about 5 nm; and second III-nitride layers having a second bandgap lower than the first bandgap, wherein the first III-nitride layers and the second III-nitride layers are stacked in an alternating pattern. The semiconductor structure is free from a III-nitride layer between the substrate and the conductive carrier-tunneling layer. The semiconductor structure further includes an active layer over the conductive carrier-tunneling layer.
    Type: Grant
    Filed: August 11, 2008
    Date of Patent: October 25, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Lin Yu, Ding-Yuan Chen, Chen-Hua Yu, Wen-Chih Chiou
  • Publication number: 20110241061
    Abstract: The package substrates with through silicon plugs (or vias) described above provide lateral and vertical heat dissipation pathways for semiconductor chips that require thermal management. Designs of through silicon plugs (TSPs) with high duty ratios can most effectively provide heat dissipation. TSP designs with patterns of double-sided combs can provide high duty ratios, such as equal to or greater than 50%. Package substrates with high duty ratios are useful for semiconductor chips that generate large amount of heat. An example of such semiconductor chip is a light-emitting diode (LED) chip.
    Type: Application
    Filed: September 10, 2010
    Publication date: October 6, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hua YU, Hung-Pin CHANG, Yung-Chi LIN, Chia-Lin YU, Jui-Pin HUNG, Chien Ling HWANG
  • Publication number: 20110241040
    Abstract: The substrate with through silicon plugs (or vias) described above removes the need for conductive bumps. The process flow is very simple and cost efficient. The structures described combines the separate TSV, redistribution layer, and conductive bump structures into a single structure. By combining the separate structures, a low resistance electrical connection with high heat dissipation capability is created. In addition, the substrate with through silicon plugs (or vias, or trenches) also allows multiple chips to be packaged together. A through silicon trench can surround the one or more chips to provide protection against copper diffusing to neighboring devices during manufacturing. In addition, multiple chips with similar or different functions can be integrated on the TSV substrate. Through silicon plugs with different patterns can be used under a semiconductor chip(s) to improve heat dissipation and to resolve manufacturing concerns.
    Type: Application
    Filed: October 4, 2010
    Publication date: October 6, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hua YU, Hung-Pin CHANG, Yung-Chi LIN, Chia-Lin YU, Jui-Pin HUNG, Chien Ling HWANG
  • Publication number: 20110198721
    Abstract: A method for thinning a wafer is provided. In one embodiment, a wafer is provided having a plurality of semiconductor chips, the wafer having a first side and a second side opposite the first side, wherein each of the chips includes a set of through silicon vias (TSVs), each of the TSVs substantially sealed by a liner layer and a barrier layer. A wafer carrier is provided for attaching to the second side of the wafer. The first side of the wafer is thinned and thereafer recessed to partially expose portions of the liner layers, barrier layers and the TSVs protruding from the wafer. An isolation layer is deposited over the first side of the wafer and the top portions of the liner layers, barrier layers and the TSVs. Thereafter, an insulation layer is deposited over the isolation layer. The insulation layer is then planarized to expose top portions of the TSVs. A dielectric layer is deposited over the planarized first side of the wafer.
    Type: Application
    Filed: February 12, 2010
    Publication date: August 18, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ku-Feng YANG, Weng-Jin Wu, Hsin-Hsien Lu, Chia-Lin Yu, Chu-Sung Shih, Fu-Chi Hsu, Shau-Lin Shue
  • Publication number: 20110189837
    Abstract: A method of forming a semiconductor structure includes providing a substrate; forming a buffer/nucleation layer over the substrate; forming a group-III nitride (III-nitride) layer over the buffer/nucleation layer; and subjecting the III-nitride layer to a nitridation. The step of forming the III-nitride layer comprises metal organic chemical vapor deposition.
    Type: Application
    Filed: December 17, 2010
    Publication date: August 4, 2011
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chia-Lin Yu, Ding-Yuan Chen, Wen-Chih Chiou
  • Patent number: 7947588
    Abstract: A semiconductor device and method for fabricating a semiconductor device for providing improved work function values and thermal stability is disclosed. The semiconductor device comprises a semiconductor substrate; an interfacial dielectric layer over the semiconductor substrate; a high-k gate dielectric layer over the interfacial dielectric layer; and a doped-conducting metal oxide layer over the high-k gate dielectric layer.
    Type: Grant
    Filed: April 15, 2009
    Date of Patent: May 24, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Cheng-Tung Lin, Hsiang-Yi Wang, Yung-Sheng Chiu, Chia-Lin Yu
  • Patent number: 7875534
    Abstract: A method of forming a semiconductor structure includes providing a substrate; forming a buffer/nucleation layer over the substrate; forming a group-III nitride (III-nitride) layer over the buffer/nucleation layer; and subjecting the III-nitride layer to a nitridation. The step of forming the III-nitride layer comprises metal organic chemical vapor deposition.
    Type: Grant
    Filed: August 13, 2008
    Date of Patent: January 25, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chia-Lin Yu, Ding-Yuan Chen, Wen-Chih Chiou
  • Publication number: 20100068866
    Abstract: A method of forming a circuit structure includes providing a substrate; forming recesses in the substrate; forming a mask layer over the substrate, wherein the mask layer covers non-recessed portions of the substrate, with the recesses exposed through openings in the mask layer; forming a buffer/nucleation layer on exposed portions of the substrate in the recesses; and growing a group-III group-V (III-V) compound semiconductor material from the recesses until portions of the III-V compound semiconductor material grown from the recesses join each other to form a continuous III-V compound semiconductor layer.
    Type: Application
    Filed: August 11, 2009
    Publication date: March 18, 2010
    Inventors: Chia-Lin Yu, Chen-Hua Yu, Ding-Yuan Chen, Wen-Chih Chiou
  • Publication number: 20100051965
    Abstract: A light-emitting diode (LED) device is provided. The LED device is formed on a substrate having a carbon-containing layer. Carbon atoms are introduced into the substrate to prevent or reduce atoms from an overlying metal/metal alloy transition layer from inter-mixing with atoms of the substrate. In this manner, a crystalline structure is maintained upon which the LED structure may be formed.
    Type: Application
    Filed: July 24, 2009
    Publication date: March 4, 2010
    Inventors: Chen-Hua Yu, Chia-Lin Yu, Ding-Yuan Chen, Wen-Chih Chiou, Hung-Ta Lin
  • Publication number: 20100052066
    Abstract: A semiconductor device and method for fabricating a semiconductor device for providing improved work function values and thermal stability is disclosed. The semiconductor device comprises a semiconductor substrate; an interfacial dielectric layer over the semiconductor substrate; a high-k gate dielectric layer over the interfacial dielectric layer; and a doped-conducting metal oxide layer over the high-k gate dielectric layer.
    Type: Application
    Filed: April 15, 2009
    Publication date: March 4, 2010
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chen-Hua Yu, Cheng-Tung Lin, Hsiang-Yi Wang, Yung-Sheng Chiu, Chia-Lin Yu
  • Publication number: 20100044719
    Abstract: A circuit structure includes a substrate; a patterned mask layer over the substrate, wherein the patterned mask layer includes a plurality of gaps; and a group-III group-V (III-V) compound semiconductor layer. The III-V compound semiconductor layer includes a first portion over the mask layer and second portions in the gaps, wherein the III-V compound semiconductor layer overlies a buffer/nucleation layer.
    Type: Application
    Filed: August 10, 2009
    Publication date: February 25, 2010
    Inventors: Chen-Hua Yu, Chia-Lin Yu, Ding-Yuan Chen, Wen-Chih Chiou, Hung-Ta Lin
  • Publication number: 20100038655
    Abstract: A system and method for manufacturing a light-generating device is described. A preferred embodiment comprises a plurality of LEDs formed on a substrate. Each LED preferably has spacers along the sidewalls of the LED, and a reflective surface is formed on the substrate between the LEDs. The reflective surface is preferably located lower than the active layer of the individual LEDs.
    Type: Application
    Filed: November 13, 2008
    Publication date: February 18, 2010
    Inventors: Ding-Yuan Chen, Chia-Lin Yu, Chen-Hua Yu, Wen-Chih Chiou
  • Publication number: 20100032718
    Abstract: A semiconductor structure includes a substrate and a conductive carrier-tunneling layer over and contacting the substrate. The conductive carrier-tunneling layer includes first group-III nitride (III-nitride) layers having a first bandgap, wherein the first III-nitride layers have a thickness less than about 5 nm; and second III-nitride layers having a second bandgap lower than the first bandgap, wherein the first III-nitride layers and the second III-nitride layers are stacked in an alternating pattern. The semiconductor structure is free from a III-nitride layer between the substrate and the conductive carrier-tunneling layer. The semiconductor structure further includes an active layer over the conductive carrier-tunneling layer.
    Type: Application
    Filed: August 11, 2008
    Publication date: February 11, 2010
    Inventors: Chia-Lin Yu, Ding-Yuan Chen, Chen-Hua Yu, Wen-Chih Chiou
  • Publication number: 20100032700
    Abstract: A semiconductor device having light-emitting diodes (LEDs) formed on a concave textured substrate is provided. A substrate is patterned and etched to form recesses. A separation layer is formed along the bottom of the recesses. An LED structure is formed along the sidewalls and, optionally, along the surface of the substrate between adjacent recesses. In these embodiments, the surface area of the LED structure is increased as compared to a planar surface. In another embodiment, the LED structure is formed within the recesses such that the bottom contact layer is non-conformal to the topology of the recesses. In these embodiments, the recesses in a silicon substrate result in a cubic structure in the bottom contact layer, such as an n-GaN layer, which has a non-polar characteristic and exhibits higher external quantum efficiency.
    Type: Application
    Filed: October 8, 2008
    Publication date: February 11, 2010
    Inventors: Chen-Hua Yu, Hung-Ta Lin, Wen-Chih Chiou, Ding-Yuan Chen, Chia-Lin Yu
  • Publication number: 20100032696
    Abstract: A light-emitting diode (LED) device is provided. The LED device has raised semiconductor regions formed on a substrate. LED structures are formed over the raised semiconductor regions such that bottom contact layers and active layers of the LED device are conformal layers. The top contact layer has a planar surface. In an embodiment, the top contact layers are continuous over a plurality of the raised semiconductor regions while the bottom contact layers and the active layers are discontinuous between adjacent raised semiconductor regions.
    Type: Application
    Filed: August 11, 2008
    Publication date: February 11, 2010
    Inventors: Chen-Hua Yu, Wen-Chih Chiou, Ding-Yuan Chen, Chia-Lin Yu, Hung-Ta Lin
  • Publication number: 20100015787
    Abstract: A method of forming a semiconductor structure includes providing a substrate; forming a buffer/nucleation layer over the substrate; forming a group-III nitride (III-nitride) layer over the buffer/nucleation layer; and subjecting the III-nitride layer to a nitridation. The step of forming the III-nitride layer comprises metal organic chemical vapor deposition.
    Type: Application
    Filed: August 13, 2008
    Publication date: January 21, 2010
    Inventors: Chen-Hua Yu, Chia-Lin Yu, Ding-Yuan Chen, Wen-Chih Chiou
  • Publication number: 20100012954
    Abstract: A light emitting diode (LED) device is presented. The LED device includes a substrate, a layered LED structure, and an embedded bottom electrode. The layered LED structure includes a buffer/nucleation layer disposed on the substrate, an active layer, and a top-side contact. A first-contact III-nitride layer is interposed between the buffer/nucleation layer and the active layer. A second-contact III-nitride layer is interposed between the active well layer and the top-side contact. A bottom electrode extends through the substrate, through the buffer/nucleation layer and terminates within the first-contact III-nitride layer.
    Type: Application
    Filed: August 13, 2008
    Publication date: January 21, 2010
    Inventors: Chen-Hua Yu, Chia-Lin Yu, Wen-Chih Chiou, Ding-Yuan Chen, Hung-Ta Lin
  • Publication number: 20100001302
    Abstract: A device structure includes a substrate; a group-III nitride layer over the substrate; a metal nitride layer over the group-III nitride layer; and a light-emitting layer over the metal nitride layer. The metal nitride layer acts as a reflector reflecting the light emitted by the light-emitting layer.
    Type: Application
    Filed: July 1, 2008
    Publication date: January 7, 2010
    Inventors: Chen-Hua Yu, Wen-Chih Chiou, Ding-Yuan Chen, Chia-Lin Yu
  • Publication number: 20100001257
    Abstract: A light emitting diodes (LEDs) is presented. The LED includes a stress-alleviation layer on a substrate. Open regions and stress-alleviation layer regions are formed on the substrate. Epitaxial layers are disposed on the substrate, at least in the open regions therein, thereby forming an LED structure. The substrate is diced through at least a first portion of the stress-alleviation regions, thereby forming the plurality of LEDs.
    Type: Application
    Filed: July 24, 2008
    Publication date: January 7, 2010
    Inventors: Chen-Hua Yu, Hung-Ta Lin, Ding-Yuan Chen, Wen-Chih Chiou, Chia-Lin Yu