Patents by Inventor Chia-Yu Chen

Chia-Yu Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170098665
    Abstract: A method for forming a hybrid complementary metal oxide semiconductor (CMOS) device includes orienting a semiconductor layer of a semiconductor-on-insulator (SOI) substrate with a base substrate of the SOI, exposing the base substrate in an N-well region by etching through a mask layer, a dielectric layer, the semiconductor layer and a buried dielectric to form a trench and forming spacers on sidewalls of the trench. The base substrate is epitaxially grown from a bottom of the trench to form an extended region. A fin material is epitaxially grown from the extended region within the trench. The mask layer and the dielectric layer are restored over the trench. P-type field-effect transistor (PFET) fins are etched on the base substrate, and N-type field-effect transistor (NFET) fins are etched in the semiconductor layer.
    Type: Application
    Filed: December 16, 2016
    Publication date: April 6, 2017
    Inventors: Chia-Yu Chen, Bruce B. Doris, Hong He, Rajasekhar Venigalla
  • Publication number: 20170092646
    Abstract: A semiconductor device that includes at least one germanium containing fin structure having a length along a <100> direction and a sidewall orientated along the (100) plane. The semiconductor device also includes at least one germanium free fin structure having a length along a <100> direction and a sidewall orientated along the (100) plane. A gate structure is present on a channel region of each of the germanium containing fin structure and the germanium free fin structure. N-type epitaxial semiconductor material having a square geometry present on the source and drain portions of the sidewalls having the (100) plane orientation of the germanium free fin structures. P-type epitaxial semiconductor material having a square geometry is present on the source and drain portions of the sidewalls having the (100) plane orientation of the germanium containing fin structures.
    Type: Application
    Filed: October 4, 2016
    Publication date: March 30, 2017
    Inventors: CHIA-YU CHEN, BRUCE B. DORIS, HONG HE, RAJASEKHAR VENIGALLA
  • Publication number: 20170092713
    Abstract: A semiconductor device that includes at least one germanium containing fin structure having a length along a <100> direction and a sidewall orientated along the (100) plane. The semiconductor device also includes at least one germanium free fin structure having a length along a <100> direction and a sidewall orientated along the (100) plane. A gate structure is present on a channel region of each of the germanium containing fin structure and the germanium free fin structure. N-type epitaxial semiconductor material having a square geometry present on the source and drain portions of the sidewalls having the (100) plane orientation of the germanium free fin structures. P-type epitaxial semiconductor material having a square geometry is present on the source and drain portions of the sidewalls having the (100) plane orientation of the germanium containing fin structures.
    Type: Application
    Filed: September 25, 2015
    Publication date: March 30, 2017
    Inventors: CHIA-YU CHEN, BRUCE B. DORIS, HONG HE, RAJASEKHAR VENIGALLA
  • Publication number: 20170080550
    Abstract: A one-way ratchet tool set includes an operating member, a clockwise connector unit and a reverse connector unit. The clockwise connector unit and the reverse connector unit are respectively provided with a plurality of clockwise ratchets and reverse ratchets that are able to be engaged mutually. By so designing, a user can have the driving portion of the operating member connected with either the clockwise connector unit or the reverse connector unit for carrying out clockwise rotation or reverse rotation according to need. The one-way ratchet tool set of this invention can attain an effect of clockwise rotation by the mutual engagement of the clockwise ratchets, or attain an effect of reverse rotation via the mutual engagement of the reverse ratchets, thus enhancing operation efficiency of a hand tool and elevating convenience in use of the hand tool.
    Type: Application
    Filed: September 17, 2015
    Publication date: March 23, 2017
    Inventor: Chia-Yu CHEN
  • Patent number: 9573253
    Abstract: A ratchet wrench structure includes a main body provided therein with a ratchet wheel, an actuating member and a restraining block positioned between the ratchet wheel and the actuating member. The restraining member has one side provided with two recessed portions, and the actuating member is provided with a position-limiting groove corresponding with the recessed portion, and an elastic member. When the actuating member is rotated, the elastic member will be actuated to push the recessed portion to have its front edge longitudinally and evenly pressing the recessed portion to enable the elastic member to support the restraining block in its entirety. Further, when the restraining block is stressed by rotation of the ratchet wheel, the restraining block can carry out reciprocating movement because of extension and contraction of the elastic member. Thus, the ratchet wrench structure can be simplified in number of components.
    Type: Grant
    Filed: December 9, 2015
    Date of Patent: February 21, 2017
    Inventor: Chia-Yu Chen
  • Publication number: 20170047331
    Abstract: A method for forming a hybrid complementary metal oxide semiconductor (CMOS) device includes orienting a semiconductor layer of a semiconductor-on-insulator (SOI) substrate with a base substrate of the SOI, exposing the base substrate in an N-well region by etching through a mask layer, a dielectric layer, the semiconductor layer and a buried dielectric to form a trench and forming spacers on sidewalls of the trench. The base substrate is epitaxially grown from a bottom of the trench to form an extended region. A fin material is epitaxially grown from the extended region within the trench. The mask layer and the dielectric layer are restored over the trench. P-type field-effect transistor (PFET) fins are etched on the base substrate, and N-type field-effect transistor (NFET) fins are etched in the semiconductor layer.
    Type: Application
    Filed: July 6, 2016
    Publication date: February 16, 2017
    Inventors: Chia-Yu Chen, Bruce B. Doris, Hong He, Rajasekhar Venigalla
  • Publication number: 20170047445
    Abstract: A method for forming a hybrid complementary metal oxide semiconductor (CMOS) device includes orienting a semiconductor layer of a semiconductor-on-insulator (SOI) substrate with a base substrate of the SOI, exposing the base substrate in an N-well region by etching through a mask layer, a dielectric layer, the semiconductor layer and a buried dielectric to form a trench and forming spacers on sidewalls of the trench. The base substrate is epitaxially grown from a bottom of the trench to form an extended region. A fin material is epitaxially grown from the extended region within the trench. The mask layer and the dielectric layer are restored over the trench. P-type field-effect transistor (PFET) fins are etched on the base substrate, and N-type field-effect transistor (NFET) fins are etched in the semiconductor layer.
    Type: Application
    Filed: August 11, 2015
    Publication date: February 16, 2017
    Inventors: Chia-Yu Chen, Bruce B. Doris, Hong He, Rajasekhar Venigalla
  • Publication number: 20170033188
    Abstract: A semiconductor device includes a gate disposed over a substrate; a source region and a drain region on opposing sides of the gate; and a pair of trench contacts over and abutting an interfacial layer portion of at least one of the source region and the drain region; wherein the interfacial layer includes boron in an amount in a range from about 5×1021 to about 5×1022 atoms/cm2.
    Type: Application
    Filed: August 26, 2016
    Publication date: February 2, 2017
    Inventors: Chia-Yu Chen, Zuoguang Liu, Sanjay C. Mehta, Tenko Yamashita
  • Publication number: 20170033193
    Abstract: A semiconductor device includes a gate disposed over a substrate; a source region and a drain region on opposing sides of the gate; and a pair of trench contacts over and abutting an interfacial layer portion of at least one of the source region and the drain region; wherein the interfacial layer includes boron in an amount in a range from about 5×1021 to about 5×1022 atoms/cm2.
    Type: Application
    Filed: August 26, 2016
    Publication date: February 2, 2017
    Inventors: Chia-Yu Chen, Zuoguang Liu, Sanjay C. Mehta, Tenko Yamashita
  • Publication number: 20160375561
    Abstract: A ratchet wrench able to automatically adjust engaging tooth number according to extent of torsion includes a ratchet block having two ends respectively extending to form an extension portion able to be optionally pushed and stuck between a ratchet ring and the resisting surface of a ratchet moving groove. The engaging surface of the ratchet block is a concave arcuate surface, and the ratio of the radius of the concave arcuate surface and the radius of the ratchet ring is between 1.017 and 1.033. Thus, when the ratchet block bears high torsion, the extension portion will be pushed toward the ratchet ring and the resisting surface of the ratchet moving groove to be pushed by the resisting surface to increase mutually engaging tooth number of the ratchet block and the ratchet ring, thus enabling the ratchet block to automatically adjust engaging tooth number according to extent of torsion.
    Type: Application
    Filed: June 25, 2015
    Publication date: December 29, 2016
    Inventor: Chia-Yu CHEN
  • Patent number: 9530864
    Abstract: Approaches for providing junction overlap control in a semiconductor device are provided. Specifically, at least one approach includes: providing a gate over a substrate; forming a set of junction extensions in a channel region adjacent the gate; forming a set of spacer layers along each of a set of sidewalls of the gate; removing the gate between the set of spacer layers to form an opening; removing, from within the opening, an exposed sacrificial spacer layer of the set of spacer layers, the exposed sacrificial spacer layer defining a junction extension overlap linear distance from the set of sidewalls of the gate; and forming a replacement gate electrode within the opening. This results in a highly scaled advanced transistor having precisely defined junction profiles and well-controlled gate overlap geometry achieved using extremely abrupt junctions whose surface position is defined using the set of spacer layers.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: December 27, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Steven J. Bentley, Michael J. Hargrove, Chia-Yu Chen, Ryan O. Jung, Sivanandha K. Kanakasabapathy, Tenko Yamashita
  • Publication number: 20160336321
    Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.
    Type: Application
    Filed: July 26, 2016
    Publication date: November 17, 2016
    Inventors: Chia-Yu Chen, Zuoguang Liu, Miaomiao Wang, Tenko Yamashita
  • Publication number: 20160336322
    Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.
    Type: Application
    Filed: July 26, 2016
    Publication date: November 17, 2016
    Inventors: Chia-Yu Chen, Zuoguang Liu, Miaomiao Wang, Tenko Yamashita
  • Publication number: 20160336236
    Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.
    Type: Application
    Filed: July 26, 2016
    Publication date: November 17, 2016
    Inventors: Chia-Yu Chen, Zuoguang Liu, Miaomiao Wang, Tenko Yamashita
  • Patent number: 9484431
    Abstract: A semiconductor device includes a gate disposed over a substrate; a source region and a drain region on opposing sides of the gate; and a pair of trench contacts over and abutting an interfacial layer portion of at least one of the source region and the drain region; wherein the interfacial layer includes boron in an amount in a range from about 5×1021 to about 5×1022 atoms/cm2.
    Type: Grant
    Filed: July 29, 2015
    Date of Patent: November 1, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Chia-Yu Chen, Zuoguang Liu, Sanjay C. Mehta, Tenko Yamashita
  • Patent number: 9484256
    Abstract: A semiconductor device includes a gate disposed over a substrate; a source region and a drain region on opposing sides of the gate; and a pair of trench contacts over and abutting an interfacial layer portion of at least one of the source region and the drain region; wherein the interfacial layer includes boron in an amount in a range from about 5×1021 to about 5×1022 atoms/cm2.
    Type: Grant
    Filed: December 10, 2015
    Date of Patent: November 1, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Chia-Yu Chen, Zuoguang Liu, Sanjay C. Mehta, Tenko Yamashita
  • Patent number: 9437445
    Abstract: A technique for forming a semiconductor device is provided. Sacrificial mandrels are formed over a hardmask layer on a semiconductor layer. Spacers are formed on sidewalls of the sacrificial mandrels. The sacrificial mandrels are removed to leave the spacers. A masking process leaves exposed a first set of spacers with a second set protected. In response to the masking process, a first fin etch process forms a first set of fins in the semiconductor layer via first set of spacers. The first set of fins has a vertical sidewall profile. Another masking process leaves exposed the second set of spacers with the first set of spacers and the first set of fins protected. In response to the other masking process, a second fin etch process forms a second set of fins in semiconductor layer using the second set of spacers. The second set of fins has a trapezoidal sidewall profile.
    Type: Grant
    Filed: February 24, 2015
    Date of Patent: September 6, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Chia-Yu Chen, Zuoguang Liu, Miaomiao Wang, Tenko Yamashita
  • Publication number: 20160254361
    Abstract: Embodiments of the present invention provide transistors with controlled junctions and methods of fabrication. A dummy spacer is used during the majority of front end of line (FEOL) processing. Towards the end of the FEOL processing, the dummy spacers are removed and replaced with a final spacer material. Embodiments of the present invention allow the use of a very low-k material, which is highly thermally-sensitive, by depositing it late in the flow. Additionally, the position of the gate with respect to the doped regions is highly controllable, while dopant diffusion is minimized through reduced thermal budgets. This allows the creation of extremely abrupt junctions whose surface position is defined using a sacrificial spacer. This spacer is then removed prior to final gate deposition, allowing a fixed gate overlap that is defined by the spacer thickness and any diffusion of the dopant species.
    Type: Application
    Filed: May 13, 2016
    Publication date: September 1, 2016
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Steven J. Bentley, Ajey Poovannummoottil Jacob, Chia-Yu Chen, Tenko Yamashita
  • Patent number: D773265
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: December 6, 2016
    Inventor: Chia-Yu Chen
  • Patent number: D775912
    Type: Grant
    Filed: November 24, 2015
    Date of Patent: January 10, 2017
    Inventor: Chia-Yu Chen