Patents by Inventor Chien-Hsun Wang

Chien-Hsun Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9147766
    Abstract: A method for forming a semiconductor device having a fin-type channel is provided. The method may include the following operations: forming a first buffer layer over a substrate; forming a first dielectric layer over the first buffer layer; patterning the first dielectric layer over the first buffer layer; forming a barrier layer over the first buffer layer; forming a second dielectric layer over the barrier layer; patterning the second dielectric layer over the barrier layer; forming a channel layer over the barrier layer; and patterning the second dielectric layer, such that at least a portion of the channel layer protrudes to form the fin-type channel.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: September 29, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hsun Wang, Chun-Hsiung Lin, Mao-Lin Huang
  • Publication number: 20150263094
    Abstract: A device structure includes: a core structure formed on a support, and a shell material formed on the core structure and surrounding at least part of the core structure. The shell material and the core structure are configured to form a quantum-well channel in the shell material.
    Type: Application
    Filed: March 14, 2014
    Publication date: September 17, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: CARLOS H. DIAZ, CHUN-HSIUNG LIN, HUI-CHENG CHANG, SYUN-MING JANG, CHIEN-HSUN WANG, MAO-LIN HUANG
  • Publication number: 20150255306
    Abstract: A nanowire field effect transistor (FET) device and method for forming the same is disclosed. The device comprises: a semiconductor substrate; a device layer including a source region and a drain region connected by a suspended nanowire channel; and etch stop layers respectively arranged beneath the source region and the drain region, the etch stop layers forming support structures interposed between the semiconductor substrate and the source and drain regions. The suspended nanowire channel is formed by etching a sacrificial material disposed beneath the suspended nanowire channel and between the etch stop layers. The etching is selective to the sacrificial material to prevent the removal of the etch stop layers beneath the source region and the drain region.
    Type: Application
    Filed: May 26, 2015
    Publication date: September 10, 2015
    Inventors: CHIEN-HSUN WANG, MAO-LIN HUANG, CHUN-HSIUNG LIN, JEAN-PIERRE COLINGE
  • Publication number: 20150228721
    Abstract: According to an exemplary embodiment, a method of forming a fin structure is provided. The method includes the following operations: etching a first dielectric layer to form at least one recess and a first core portion of a fin core; form an oxide layer as a shallow trench isolation layer in the recess; etching back the oxide layer to expose a portion of the fin core; and forming a fin shell to cover a sidewall of the exposed portion of the fin core.
    Type: Application
    Filed: February 13, 2014
    Publication date: August 13, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: CHUN-HSIUNG LIN, CARLOS H. DIAZ, HUI-CHENG CHANG, SYUN-MING JANG, MAO-LIN HUANG, CHIEN-HSUN WANG
  • Publication number: 20150171083
    Abstract: A method includes growing a plurality of parallel mandrels on a surface of a semiconductor substrate, each mandrel having at least two laterally opposite sidewalls and a predetermined width. The method further includes forming a first type of spacers on the sidewalls of the mandrels, wherein the first type of spacers between two adjacent mandrels are separated by a gap. The predetermined mandrel width is adjusted to close the gap between the adjacent first type of spacers to form a second type of spacers. The mandrels are removed to form a first type of fins from the first type of spacers, and to form a second type of fins from spacers between two adjacent mandrels. The second type of fins are wider than the first type of fins.
    Type: Application
    Filed: December 12, 2013
    Publication date: June 18, 2015
    Inventors: Chien-Hsun Wang, Chih-Sheng Chang, Yi-Tang Lin
  • Patent number: 9048301
    Abstract: A transistor device and method for forming a nanowire field effect transistor (FET) device are provided. A device layer including a source region and a drain region is formed, where the source region and the drain region are connected by a suspended nanowire channel. Etch stop layers are formed beneath the source region and the drain region. The etch stop layers comprise support structures interposed between a semiconductor substrate and the source and drain regions. The suspended nanowire channel is formed by etching a sacrificial material beneath the suspended nanowire channel. The etching is selective to the sacrificial material to prevent the removal of the etch stop layers beneath the source region and the drain region.
    Type: Grant
    Filed: October 16, 2013
    Date of Patent: June 2, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chien-Hsun Wang, Mao-Lin Huang, Chun-Hsiung Lin, Jean-Pierre Colinge
  • Publication number: 20150129981
    Abstract: A method for forming a semiconductor device having a fin-type channel is provided. The method may include the following operations: forming a first buffer layer over a substrate; forming a first dielectric layer over the first buffer layer; patterning the first dielectric layer over the first buffer layer; forming a barrier layer over the first buffer layer; forming a second dielectric layer over the barrier layer; patterning the second dielectric layer over the barrier layer; forming a channel layer over the barrier layer; and patterning the second dielectric layer, such that at least a portion of the channel layer protrudes to form the fin-type channel.
    Type: Application
    Filed: November 14, 2013
    Publication date: May 14, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: CHIEN-HSUN WANG, CHUN-HSIUNG LIN, MAO-LIN HUANG
  • Publication number: 20150129938
    Abstract: A semiconductor devices and method of formation are provided herein. A semiconductor device includes a gate structure over a channel and an active region adjacent the channel. The active region includes a repaired doped region and a growth region over the repaired doped region. The repaired doped region includes a first dopant and a second dopant, where the second dopant is from the growth region. A method of forming a semiconductor device includes increasing a temperature during exposure to at least one of dopant(s) or agent(s) to form an active region adjacent a channel, where the active region includes a repaired doped region and a growth region over the repaired doped region.
    Type: Application
    Filed: November 8, 2013
    Publication date: May 14, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Mao-Lin Huang, Chien-Hsun Wang, Chun-Hsiung Lin, Meng-Ku Chen, Li-Ting Wang, Hung-Ta Lin
  • Patent number: 9026959
    Abstract: A semiconductor manufacturing method of generating a layout for a device includes defining a first plurality of mandrels in a first active region of a first layout. Each mandrel of the first plurality of mandrels extends in a first direction and being spaced apart in a second direction perpendicular to the first direction. The method further includes defining a second plurality of mandrels in a second active region of the first layout. Each mandrel of the second plurality of mandrels extends in the first direction and being spaced apart in the second direction. An edge of the first active region is spaced from an edge of the second active region by a minimum distance less than a specified minimum spacing. The method further includes connecting, using a layout generator, at least one mandrel of the first plurality of mandrels to a corresponding mandrel of the second plurality of mandrels.
    Type: Grant
    Filed: July 17, 2014
    Date of Patent: May 5, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hsun Wang, Chih-Sheng Chang, Yi-Tang Lin, Ming-Feng Shieh
  • Publication number: 20150108550
    Abstract: A method for forming a transistor is provided. The method includes: forming a channel layer over a substrate; patterning the channel layer to form a recess; and forming a source layer in the recess, such that at least a portion of the channel layer protrudes to form the fin-type channel.
    Type: Application
    Filed: October 17, 2013
    Publication date: April 23, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: CHIEN-HSUN WANG, MAO-LIN HUANG, CHUN-HSIUNG LIN
  • Publication number: 20150102287
    Abstract: A transistor device and method for forming a nanowire field effect transistor (FET) device are provided. A device layer including a source region and a drain region is formed, where the source region and the drain region are connected by a suspended nanowire channel. Etch stop layers are formed beneath the source region and the drain region. The etch stop layers comprise support structures interposed between a semiconductor substrate and the source and drain regions. The suspended nanowire channel is formed by etching a sacrificial material beneath the suspended nanowire channel. The etching is selective to the sacrificial material to prevent the removal of the etch stop layers beneath the source region and the drain region.
    Type: Application
    Filed: October 16, 2013
    Publication date: April 16, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: CHIEN-HSUN WANG, MAO-LIN HUANG, CHUN-HSIUNG LIN, JEAN-PIERRE COLINGE
  • Publication number: 20150069467
    Abstract: A transistor includes a gate terminal, a source terminal and a drain terminal. At least one of the source and drain terminals has a layered configuration that includes a terminal layer and an intervening layer. The terminal layer has a top surface and a bottom surface. The intervening layer is located within the terminal layer, between and spaced from the top and bottom surfaces, is oriented to be perpendicular to current flow, and is less than one tenth the thickness of the terminal layer. The terminal layer and the intervening layer include a common semiconductive compound and a common dopant, with a concentration of the dopant in the intervening layer being over ten times an average concentration of the dopant in the terminal layer.
    Type: Application
    Filed: September 12, 2013
    Publication date: March 12, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: HUNG-TA LIN, MAO-LIN HUANG, LI-TING WANG, CHIEN-HSUN WANG, MENG-KU CHEN, CHUN-HSIUNG LIN, PANG-YEN TSAI, HUI-CHENG CHANG
  • Publication number: 20140353771
    Abstract: A semiconductor/dielectric interface having reduced interface trap density and a method of manufacturing the interface are disclosed. In an exemplary embodiment, the method of forming a semiconductor device includes receiving a substrate and forming a termination layer on a top surface of the substrate. The termination layer includes at least one of hydrogen, deuterium, or nitrogen. The method further includes depositing a dielectric layer on the termination layer such that the depositing of the dielectric layer does not disrupt the termination layer. The termination layer may be formed by a first deposition process that deposits a first material of the termination layer and a subsequent deposition process that introduces a second material of the termination layer into the first material. The termination layer may also be formed by a single deposition process that deposits both a first material and a second material of the termination layer.
    Type: Application
    Filed: August 20, 2014
    Publication date: December 4, 2014
    Inventors: Chien-Hsun Wang, Shih-Wei Wang, Gerben Doornbos, Georgios Vellianitis, Matthias Passlack
  • Publication number: 20140331193
    Abstract: A semiconductor manufacturing method of generating a layout for a device includes defining a first plurality of mandrels in a first active region of a first layout. Each mandrel of the first plurality of mandrels extends in a first direction and being spaced apart in a second direction perpendicular to the first direction. The method further includes defining a second plurality of mandrels in a second active region of the first layout. Each mandrel of the second plurality of mandrels extends in the first direction and being spaced apart in the second direction. An edge of the first active region is spaced from an edge of the second active region by a minimum distance less than a specified minimum spacing. The method further includes connecting, using a layout generator, at least one mandrel of the first plurality of mandrels to a corresponding mandrel of the second plurality of mandrels.
    Type: Application
    Filed: July 17, 2014
    Publication date: November 6, 2014
    Inventors: Chien-Hsun WANG, Chih-Sheng CHANG, Yi-Tang LIN, Ming-Feng SHIEH
  • Publication number: 20140239418
    Abstract: A semiconductor/dielectric interface having reduced interface trap density and a method of manufacturing the interface are disclosed. In an exemplary embodiment, the method comprises receiving a substrate, the substrate containing a semiconductor; preparing a surface of the substrate; forming a termination layer bonded to the semiconductor at the surface of the substrate; and depositing a dielectric layer above the termination layer, the depositing configured to not disrupt the termination layer. The forming of the termination layer may be configured to produce the termination layer having a single layer of oxygen atoms between the substrate and the dielectric layer.
    Type: Application
    Filed: February 22, 2013
    Publication date: August 28, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hsun Wang, Shih Wei Wang, Ravi Droopad, Gerben Doombos, Georgios Vellianitis, Matthias Passlack
  • Patent number: 8806397
    Abstract: A method of generating a layout for a device includes receiving a first layout including a plurality of active regions, each active region of the plurality of active regions having sides. The method further includes defining a plurality of elongate mandrels that each extend in a first direction and are spaced apart from one another in a second direction perpendicular to the first direction. The method further includes for each adjacent pair of partially-parallel active regions of the plurality of active regions having a minimum distance less than a specified minimum spacing, connecting at least a portion of nearest ends of pairs of elongate mandrels, each mandrel of a pair from a different active region. The method further includes generating a second layout including a plurality of elongate mandrels in the plurality of active regions, and connective elements between active regions of at least one adjacent pair of active regions.
    Type: Grant
    Filed: September 4, 2013
    Date of Patent: August 12, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hsun Wang, Chih-Sheng Chang, Yi-Tang Lin, Ming-Feng Shieh
  • Publication number: 20140209800
    Abstract: An NDIR gas detector includes a photodetector for detecting a portion of stray visible light emitted from an incandescent lamp so as to generate an induced electrical signal, which is compared with a preset reference signal associated with a predetermined constant level of the stray visible light corresponding to a constant temperature of the lamp so as to obtain a level difference between the induced electrical signal and the reference signal. Electrical power supplied to the lamp is repeatedly regulated based on the level difference until the induced electrical signal and the reference signal have the same level, thereby stabilizing IR emission of the lamp in response to the lamp being kept at the constant temperature.
    Type: Application
    Filed: March 14, 2013
    Publication date: July 31, 2014
    Applicant: ORIENTAL SYSTEM TECHNOLOGY INC.
    Inventors: Jin-Shown SHIE, Chien-Hsun WANG
  • Patent number: 8769446
    Abstract: A method for generating a layout for a device having FinFETs from a first layout for a device having planar transistors is disclosed. A plurality of elongate mandrels is defined in a plurality of active regions. Where adjacent active regions are partially-parallel and within a specified minimum spacing, connective elements are added to a portion of the space between the adjacent active regions to connect the mandrel ends from one active region to another active region.
    Type: Grant
    Filed: September 8, 2011
    Date of Patent: July 1, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Hsun Wang, Chih-Sheng Chang, Yi-Tang Lin, Ming-Feng Shieh
  • Patent number: 8703565
    Abstract: An integrated circuit structure includes a substrate and a germanium-containing semiconductor fin over the substrate. The germanium-containing semiconductor fin has an upper portion having a first width, and a neck region under the upper portion and having a second width smaller than the first width.
    Type: Grant
    Filed: March 11, 2013
    Date of Patent: April 22, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Chang, Jeffrey Junhao Xu, Chien-Hsun Wang, Chih-Hsiang Chang
  • Publication number: 20140091362
    Abstract: An integrated circuit transistor structure includes a semiconductor substrate, a first SiGe layer in at least one of a source area or a drain area on the semiconductor substrate, and a channel between the source area and the drain area. The first SiGe layer has a Ge concentration of 50 percent or more.
    Type: Application
    Filed: December 11, 2013
    Publication date: April 3, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao CHANG, Jeff J. XU, Chien-Hsun WANG, Chih Chieh YEH, Chih-Hsiang CHANG