Patents by Inventor Chien-hung Chen

Chien-hung Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230230935
    Abstract: A semiconductor package includes a substrate, a semiconductor die, a ring structure and a lid. The semiconductor die is disposed on the substrate. The ring structure is disposed on the substrate and surrounds the semiconductor die, where a first side of the semiconductor die is distant from an inner sidewall of the ring structure by a first gap, and a second side of the semiconductor die is distant from the inner sidewall of the ring structure by a second gap. The first side is opposite to the second side, and the first gap is less than the second gap. The lid is disposed on the ring structure and has a recess formed therein, and the recess overlaps with the first gap in a stacking direction of the ring structure and the lid.
    Type: Application
    Filed: March 21, 2023
    Publication date: July 20, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kai-Ming Ching, Shu-Shen Yeh, Chien-Hung Chen, Hui-Chang Yu, Yu-Min Cheng
  • Patent number: 11703541
    Abstract: A semiconductor inspecting method for ensuring a scrubbing length on a pad includes following steps. First off, a first position of a probe needle from above is defined. In addition, a wafer comprising at least a pad is placed on a wafer chuck of a semiconductor inspecting system. Thereafter, a relative vertical movement between the probe needle and the pad is made by adopting a driving system of the semiconductor inspecting system to generate a scrubbing length on the pad. Next, whether the scrubbing length is equal to or larger than a preset value or not is recognized by adopting the vision system and the relative vertical movement is stopped by adopting the driving system.
    Type: Grant
    Filed: November 12, 2021
    Date of Patent: July 18, 2023
    Inventors: Volker Hansel, Sebastian Giessmann, Frank Fehrmann, Chien-Hung Chen
  • Patent number: 11693050
    Abstract: The semiconductor inspecting method includes following steps. First, a first position of a probe needle from above is defined by adopting a vision system of a semiconductor inspecting system. Then, a first relative vertical movement between the probe needle and the pad is made by adopting a driving system of the semiconductor inspecting system. Thereafter, a minimum change in position of the probe needle corresponding to the first position is recognized by adopting the vision system of the semiconductor inspecting system. Next, the first relative vertical movement is stopped by adopting the driving system of the semiconductor inspecting system.
    Type: Grant
    Filed: November 12, 2021
    Date of Patent: July 4, 2023
    Inventors: Volker Hansel, Sebastian Giessmann, Frank Fehrmann, Chien-Hung Chen
  • Publication number: 20230207648
    Abstract: The present invention provides a layout pattern of static random access memory, comprising a PU1 (first pull-up transistor), a PU2 (second pull-up transistor), a PD1A (first pull-down transistor), a PD1B (second pull-down transistor), a PD2A (third pull-down transistor), a PD2B (fourth pull-down transistor), a PG1A (first access transistor), a PG1B (second access transistor), a PG2A (third access transistor) and a PG2B (fourth access transistor) located on the substrate. The PD1A and the PD1B are connected in parallel with each other, the PD2A and the PD2B are connected in parallel with each other, wherein the gate structures include a first J-shaped gate structure, and the first J-shaped gate structure is an integrally formed structure.
    Type: Application
    Filed: January 25, 2022
    Publication date: June 29, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Hsien Huang, Yu-Tse Kuo, Shu-Ru Wang, Chien-Hung Chen, Li-Ping Huang, Chun-Yen Tseng
  • Publication number: 20230186006
    Abstract: A method includes receiving a physical circuit design file that includes physical circuit partitions that are each mapped to a respective chip. The physical circuit partitions are connected to one another by a respective timing path having an original delay. The method further includes determining a slack budget of the respective timing path, and determining a delay upper bound value based on a shortest timing path delay and the slack budget. Further, the method includes updating the delay upper bound of the respective timing path based on the slack budget, assigning an interconnection delay upper bound to a physical interconnection between at least two chips based on the updated slack budget of the respective timing path, determining a multiplexing data ratio (XDR) based on at least the interconnection delay upper bound of the physical interconnection, and performing routing between the at least two chips based on the XDR.
    Type: Application
    Filed: December 13, 2022
    Publication date: June 15, 2023
    Inventors: Yu-Hsuan SU, Li-En HSU, Chuan-Chia HUANG, Chien-Hung CHEN, Chia-Chi HUANG, Selma Bergaoui BEN JRAD
  • Patent number: 11676916
    Abstract: A package structure and a formation method of a package structure are provided. The package structure includes a circuit substrate and a die package bonded to the circuit substrate through bonding structures. The package structure also includes a warpage-control element attached to the circuit substrate. The warpage-control element has a protruding portion extending into the circuit substrate. The warpage-control element has height larger than that of the die package.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: June 13, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Sheng Lin, Chien-Hung Chen, Po-Chen Lai, Po-Yao Lin, Shin-Puu Jeng
  • Publication number: 20230178418
    Abstract: The present disclosure provides a method of making a semiconductor device. The method includes forming a semiconductor stack on a substrate, wherein the semiconductor stack includes first semiconductor layers of a first semiconductor material and second semiconductor layers of a second semiconductor material alternatively stacked on the substrate; patterning the semiconductor stack and the substrate to form a trench and an active region being adjacent the trench; epitaxially growing a liner of the first semiconductor material on sidewalls of the trench and sidewalls of the active region; forming an isolation feature in the trench; performing a rapid thermal nitridation process, thereby converting the liner into a silicon nitride layer; and forming a cladding layer of the second semiconductor material over the silicon nitride layer.
    Type: Application
    Filed: June 7, 2022
    Publication date: June 8, 2023
    Inventors: Shu-Wen SHEN, Jiun-Ming KUO, Yuan-Ching PENG, Ji-Xuan YANG, Jheng-Wei LIN, Chien-Hung CHEN
  • Patent number: 11668902
    Abstract: A lens assembly includes a first lens, a second lens, a third lens, and a fourth lens. The first lens is with positive refractive power and includes a concave surface facing an object side and a convex surface facing an image side. The second lens is with negative refractive power and includes a concave surface facing the object side. The third lens is with positive refractive power. The fourth lens is with refractive power and includes a concave surface facing the image side. The first lens, the second lens, the third lens, and the fourth lens are arranged in order from the object side to the image side along an optical axis. The lens assembly satisfies: TTL/f>1.2; wherein TTL is a total length of optical system of the lens assembly and f is an effective focal length of the lens assembly.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: June 6, 2023
    Assignees: SINTAI OPTICAL (SHENZHEN) CO., LTD., ASIA OPTICAL CO., INC.
    Inventors: Guo-Yang Wu, Bo-Yan Chen, Hsi-Ling Chang, Chun-Yang Yao, Chien-Hung Chen
  • Patent number: 11637072
    Abstract: A semiconductor package includes a substrate, a semiconductor die, a ring structure and a lid. The semiconductor die is disposed on the substrate. The ring structure is disposed on the substrate and surrounds the semiconductor die, where a first side of the semiconductor die is distant from an inner sidewall of the ring structure by a first gap, and a second side of the semiconductor die is distant from the inner sidewall of the ring structure by a second gap. The first side is opposite to the second side, and the first gap is less than the second gap. The lid is disposed on the ring structure and has a recess formed therein, and the recess overlaps with the first gap in a stacking direction of the ring structure and the lid.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: April 25, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kai-Ming Ching, Shu-Shen Yeh, Chien-Hung Chen, Hui-Chang Yu, Yu-Min Cheng
  • Publication number: 20230108477
    Abstract: A lens assembly includes a first, second, third, and fourth in order from an object side to an image side along an optical axis. The first lens is a meniscus lens with positive refractive power and includes a convex surface facing the object side and a concave surface facing the image side. The second lens is with negative refractive power. The third lens is with positive refractive power. The fourth lens is a meniscus lens with refractive power. The lens assembly satisfies at least one of following conditions: ?0.1?R11/R42?0.53; 2?TTL/SD4?7; 0.1?SD1/f?0.6.
    Type: Application
    Filed: August 3, 2022
    Publication date: April 6, 2023
    Inventors: Hsi-Ling CHANG, Guo-Yang WU, Chien-Hung CHEN, Ming-Huang TSENG
  • Publication number: 20230103483
    Abstract: In an embodiment, a method of forming a semiconductor device includes forming a fin protruding above a substrate; forming a gate structure over the fin; forming a recess in the fin and adjacent to the gate structure; performing a wet etch process to clean the recess; treating the recess with a plasma process; and performing a dry etch process to clean the recess after the plasma process and the wet etch process.
    Type: Application
    Filed: December 12, 2022
    Publication date: April 6, 2023
    Inventors: Che-Yu Lin, Chien-Wei Lee, Chien-Hung Chen, Wen-Chu Hsiao, Yee-Chia Yeo
  • Publication number: 20230099326
    Abstract: A method for forming an integrated circuit layout including at least two standard cells having different cell heights is disclosed. The standard cells respectively have a well boundary to divide a PMOS region and an NMOS region. The standard cells are abutted side by side along their side edges in a way that the well boundaries of the cells are aligned along the row direction. The power rail and the ground rail of one of the standard cells are extended in width or length to connect to the power rail and the ground rail of the other one of the standard cells.
    Type: Application
    Filed: July 21, 2022
    Publication date: March 30, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chien-Hung Chen, Ruei-Yau Chen, Wei-Jen Wang, Kun-Yuan Wu, Chien-Fu Chen, Chen-Hsien Hsu
  • Publication number: 20230097189
    Abstract: A method for forming an integrated circuit layout including at least two standard cells having different cell heights is disclosed. The standard cells respectively have a well boundary to divide a PMOS region and an NMOS region. The standard cells are abutted side by side along their side edges in a way that the well boundaries of the cells are aligned along the row direction. The power rail and the ground rail of one of the standard cells are shifted to align and connect to the power rail and the ground rail of the other one of the standard cells.
    Type: Application
    Filed: July 19, 2022
    Publication date: March 30, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chien-Hung Chen, Ruei-Yau Chen, Wei-Jen Wang, Kun-Yuan Wu, Chien-Fu Chen, Chen-Hsien Hsu
  • Publication number: 20230090612
    Abstract: A method for fabricating a static random access memory (SRAM) includes the steps of: forming a gate structure on a substrate; forming an epitaxial layer adjacent to the gate structure; forming a first interlayer dielectric (ILD) layer around the gate structure; transforming the gate structure into a metal gate; forming a contact hole exposing the epitaxial layer, forming a barrier layer in the contact hole, forming a metal layer on the barrier layer, and then planarizing the metal layer and the barrier layer to form a contact plug. Preferably, a bottom portion of the barrier layer includes a titanium rich portion and a top portion of the barrier layer includes a nitrogen rich portion.
    Type: Application
    Filed: November 21, 2022
    Publication date: March 23, 2023
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Ching-Wen Hung, Chun-Hsien Lin, Chien-Hung Chen
  • Publication number: 20230061968
    Abstract: An semiconductor package includes a redistribution structure, a first semiconductor device, a second semiconductor device, an underfill layer and an encapsulant. The first semiconductor device is disposed on and electrically connected with the redistribution structure, wherein the first semiconductor device has a first bottom surface, a first top surface and a first side surface connecting with the first bottom surface and the first top surface, the first side surface comprises a first sub-surface and a second sub-surface connected with each other, the first sub-surface is connected with the first bottom surface, and a first obtuse angle is between the first sub-surface and the second sub-surface.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Sheng Lin, Chin-Hua Wang, Shu-Shen Yeh, Chien-Hung Chen, Po-Yao Lin, Shin-Puu Jeng
  • Publication number: 20230062783
    Abstract: A package structure and a formation method of a package structure are provided. The package structure includes a circuit substrate and a die package bonded to the circuit substrate through bonding structures. The package structure also includes a warpage-control element attached to the circuit substrate. The warpage-control element has a protruding portion extending into the circuit substrate. The warpage-control element has height larger than that of the die package.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Sheng LIN, Chien-Hung CHEN, Po-Chen LAI, Po-Yao LIN, Shin-Puu JENG
  • Publication number: 20230059538
    Abstract: The present application relates to the technical field of semiconductors, and in particular, to a wafer scheduling method and a wafer scheduling apparatus for an etching equipment. The wafer scheduling method includes: obtaining a wafer processing request, where the wafer processing request includes at least process information of wafers and an equipment processing parameter of the etching equipment; responding to the wafer processing request, and determining a wafer scheduling parameter corresponding to the process information and the equipment processing parameter, based on the process information, the equipment processing parameter, and a preset wafer scheduling policy, where the wafer scheduling parameter is used to determine a transfer time for transferring the wafers to the etching equipment for processing; and performing wafer scheduling processing on the wafers by using the wafer scheduling parameter. In this way, the wafer processing productivity of the etching equipment can be improved.
    Type: Application
    Filed: July 13, 2021
    Publication date: February 23, 2023
    Inventors: Jianping WANG, Chien-Hung CHEN, Jinjin CAO
  • Patent number: 11569084
    Abstract: A method for removing nodule defects is disclosed. The nodule defects may be formed on a non-selected portion of a semiconductor structure during formation of a semiconductor region on a selected portion of the semiconductor structure. A plasma having a higher selectivity to etch the nodule defects relative to the semiconductor region may be used to selectively remove the nodule defects on the non-selected portion.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: January 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Che-Yu Lin, Chih-Chiang Chang, Chien-Hung Chen, Ming-Hua Yu, Tsung-Hsi Yang, Ting-Yi Huang, Chii-Horng Li, Yee-Chia Yeo
  • Publication number: 20230018343
    Abstract: A package assembly includes a package substrate, a package lid located on the package substrate and including a plate portion, an outer foot extending from the plate portion, and an inner foot having a height greater than or equal to a height of the outer foot, extending from the plate portion and including a first inner foot corner portion located inside a first corner of the outer foot, and an adhesive that adheres the outer foot to the package substrate and adheres the inner foot to the package substrate.
    Type: Application
    Filed: May 19, 2022
    Publication date: January 19, 2023
    Inventors: Yu-Sheng LIN, Shu-Shen Yeh, Chin-Hua Wang, Po-Yao Lin, Shin-Puu Jeng, Chien Hung Chen, Chia-Kuei Hsu
  • Patent number: 11538813
    Abstract: A method for fabricating a static random access memory (SRAM) includes the steps of: forming a gate structure on a substrate; forming an epitaxial layer adjacent to the gate structure; forming a first interlayer dielectric (ILD) layer around the gate structure; transforming the gate structure into a metal gate; forming a contact hole exposing the epitaxial layer, forming a barrier layer in the contact hole, forming a metal layer on the barrier layer, and then planarizing the metal layer and the barrier layer to form a contact plug. Preferably, a bottom portion of the barrier layer includes a titanium rich portion and a top portion of the barrier layer includes a nitrogen rich portion.
    Type: Grant
    Filed: July 8, 2020
    Date of Patent: December 27, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Ching-Wen Hung, Chun-Hsien Lin, Chien-Hung Chen