Patents by Inventor Chien-Min Sung

Chien-Min Sung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210308827
    Abstract: A CMP pad conditioner comprises a plurality of abrasive segments. Each abrasive segment includes a segment blank and an abrasive layer attached to the segment blank, the abrasive layer including a superhard abrasive material. A pad conditioner substrate is also provided. Each of the plurality of abrasive segments is permanently affixed to the pad conditioner substrate in an orientation that enables removal of material from a CMP pad by the abrasive layer as the pad conditioner and the CMP pad are moved relative to one another.
    Type: Application
    Filed: June 30, 2015
    Publication date: October 7, 2021
    Inventor: Chien-Min Sung
  • Publication number: 20200156946
    Abstract: Graphene layers made of primarily sp2 bonded atoms and associated methods are disclosed. In one aspect, for example, a method of forming a graphite film can include heating a solid substrate under vacuum to a solubilizing temperature that is less than a melting point of the solid substrate, solubilizing carbon atoms from a graphite source into the heated solid substrate, and cooling the heated solid substrate at a rate sufficient to form a graphite film from the solubilized carbon atoms on at least one surface of the solid substrate. The graphite film is formed to be substantially free of lattice defects.
    Type: Application
    Filed: September 17, 2019
    Publication date: May 21, 2020
    Inventors: Chien-Min Sung, Shao Chung Hu, I-Chiao Lin, Chien-Pei Yu
  • Publication number: 20190091832
    Abstract: CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a composite conditioner can include a base plate and a plurality of polishing units secured to a surface of the base plate by an adhesive layer, where each polishing unit includes a plurality of polishing tips secured in a binding layer. Additionally, a height difference between a first highest polishing tip and a second highest polishing tip is less than or equal to about 10 ?m, a height difference between the first highest polishing tip and a tenth highest polishing tip is less than or equal to about 20 ?m, and a height difference between the first highest polishing tip and a 100th highest polishing tip is less than or equal to about 40 ?m. Furthermore, the first highest polishing tip protrudes from the binding layer to a height of greater than or equal to about 50 ?m.
    Type: Application
    Filed: March 20, 2018
    Publication date: March 28, 2019
    Inventor: Chien-Min Sung
  • Publication number: 20180222009
    Abstract: CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a method can include pressing a CMP pad dresser against a CMP pad, where the dresser includes a monolayer of a plurality of superabrasive particles protruding from a matrix layer. The difference in protrusion distance between the highest protruding tip and the second highest protruding tip of the monolayer of superabrasive particles is less than or equal to about 10 microns and the difference in protrusion distance between the highest 10 protruding tips of the monolayer of superabrasive particles are within about 20 microns or less. The method can further include rotating the dresser against the CMP pad such that asperities are cut into the CMP pad having a maximum cutting depth of about 60 microns.
    Type: Application
    Filed: November 13, 2017
    Publication date: August 9, 2018
    Inventor: Chien-Min Sung
  • Publication number: 20180178346
    Abstract: CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a CMP pad dresser can include a support substrate and a plurality of superabrasive particles secured to the support substrate with each superabrasive particle extending away from the support substrate to a protrusion distance, where a highest protruding tip of each of the plurality of superabrasive particles align along a designated profile with a tip variation of from about 5 microns to about 100 microns.
    Type: Application
    Filed: August 7, 2017
    Publication date: June 28, 2018
    Inventor: Chien-Min Sung
  • Publication number: 20180105426
    Abstract: Graphene layers made of primarily sp2 bonded atoms and associated methods are disclosed. In one aspect, for example, a method of forming a graphite film can include heating a solid substrate under vacuum to a solubilizing temperature that is less than a melting point of the solid substrate, solubilizing carbon atoms from a graphite source into the heated solid substrate, and cooling the heated solid substrate at a rate sufficient to form a graphite film from the solubilized carbon atoms on at least one surface of the solid substrate. The graphite film is formed to be substantially free of lattice defects.
    Type: Application
    Filed: May 22, 2017
    Publication date: April 19, 2018
    Inventor: Chien-Min Sung
  • Patent number: 9902040
    Abstract: Superabrasive tools and their methods of manufacture are disclosed. In one aspect, a method of improving retention of superabrasive particles held in a solidified organic material layer of an abrading tool, a portion of each of said superabrasive particles protruding out of the solidified organic material layer is provided. The method may include securing a plurality of superabrasive particles in the solidified organic material layer in an arrangement that minimizes mechanical stress impinging on the protruding portion of any individual superabrasive particle when used to abrade a work piece. As an example, the arrangement of the plurality of superabrasive particles may be configured to uniformly distribute frictional forces across substantially each superabrasive particle.
    Type: Grant
    Filed: March 11, 2013
    Date of Patent: February 27, 2018
    Inventor: Chien-Min Sung
  • Publication number: 20180044185
    Abstract: Graphene layers made of primarily sp2 bonded atoms and associated methods are disclosed. In one aspect, for example, a method of forming a graphite film can include heating a solid substrate under vacuum to a solubilizing temperature that is less than a melting point of the solid substrate, solubilizing carbon atoms from a graphite source into the heated solid substrate, and cooling the heated solid substrate at a rate sufficient to form a graphite film from the solubilized carbon atoms on at least one surface of the solid substrate. The graphite film is formed to be substantially free of lattice defects.
    Type: Application
    Filed: February 27, 2017
    Publication date: February 15, 2018
    Inventors: Chien-Min Sung, Shao Chung Hu, I-Chiao Lin, Chien-Pei Yu
  • Patent number: 9868100
    Abstract: Superabrasive tools and methods for the making thereof are disclosed and described. In one aspect, superabrasive particles are chemically bonded to a matrix support material according to a predetermined pattern by a braze alloy. The brazing alloy may be provided as a powder, thin sheet, or sheet of amorphous alloy. A template having a plurality of apertures arranged in a predetermined pattern may be used to place the superabrasive particles on a given substrate or matrix support material.
    Type: Grant
    Filed: June 3, 2011
    Date of Patent: January 16, 2018
    Inventor: Chien-Min Sung
  • Publication number: 20170232577
    Abstract: CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a composite conditioner can include a base plate and a plurality of polishing units secured to a surface of the base plate by an adhesive layer, where each polishing unit includes a plurality of polishing tips secured in a binding layer. Additionally, a height difference between a first highest polishing tip and a second highest polishing tip is less than or equal to about 10 ?m, a height difference between the first highest polishing tip and a tenth highest polishing tip is less than or equal to about 20 ?m, and a height difference between the first highest polishing tip and a 100th highest polishing tip is less than or equal to about 40 ?m. Furthermore, the first highest polishing tip protrudes from the binding layer to a height of greater than or equal to about 50 ?m.
    Type: Application
    Filed: November 28, 2016
    Publication date: August 17, 2017
    Inventor: Chien-Min Sung
  • Publication number: 20170232576
    Abstract: A CMP pad conditioner comprises a plurality of abrasive segments. Each abrasive segment includes a segment blank and an abrasive layer attached to the segment blank, the abrasive layer including a superhard abrasive material. A pad conditioner substrate is also provided. Each of the plurality of abrasive segments is permanently affixed to the pad conditioner substrate in an orientation that enables removal of material from a CMP pad by the abrasive layer as the pad conditioner and the CMP pad are moved relative to one another.
    Type: Application
    Filed: November 25, 2016
    Publication date: August 17, 2017
    Inventor: Chien-Min Sung
  • Patent number: 9724802
    Abstract: CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a CMP pad dresser can include a support substrate and a plurality of superabrasive particles secured to the support substrate with each superabrasive particle extending away from the support substrate to a protrusion distance, where a highest protruding tip of each of the plurality of superabrasive particles align along a designated profile with a tip variation of from about 5 microns to about 100 microns.
    Type: Grant
    Filed: October 3, 2014
    Date of Patent: August 8, 2017
    Inventor: Chien-Min Sung
  • Publication number: 20170022065
    Abstract: Graphene layers made of primarily sp2 bonded atoms and associated methods are disclosed. In one aspect, for example, a method of forming a graphite film can include heating a solid substrate under vacuum to a solubilizing temperature that is less than a melting point of the solid substrate, solubilizing carbon atoms from a graphite source into the heated solid substrate, and cooling the heated solid substrate at a rate sufficient to form a graphite film from the solubilized carbon atoms on at least one surface of the solid substrate. The graphite film is formed to be substantially free of lattice defects.
    Type: Application
    Filed: February 24, 2016
    Publication date: January 26, 2017
    Inventor: Chien-Min Sung
  • Patent number: 9475169
    Abstract: Methods and systems for evaluating and/or increasing CMP pad dresser performance are provided. In one aspect, for example, a method of identifying overly-aggressive superabrasive particles in a CMP pad dresser can include positioning a CMP pad dresser having a plurality of superabrasive particles on an indicator substrate such that at least a portion of the plurality of superabrasive particles of the CMP pad dresser contact the indicator substrate, and moving the CMP pad dresser across the indicator substrate in a first direction such that the portion of the plurality of superabrasive particles create a first marking pattern on the substrate, wherein the first marking pattern identifies a plurality of working superabrasive particles from among the plurality of superabrasive particles.
    Type: Grant
    Filed: March 24, 2014
    Date of Patent: October 25, 2016
    Inventor: Chien-Min Sung
  • Patent number: 9463552
    Abstract: A superabrasive tools having uniformly leveled superabrasive particles and associated methods are provided. In one aspect, for example, a superabrasive can include a metal matrix configured for bonding superabrasive particles and a plurality of superabrasive particles held in the metal matrix at specific positions according to a predetermined pattern, wherein tips of each of the plurality of the superabrasive particles protrude from the metal matrix to a uniform height.
    Type: Grant
    Filed: May 23, 2011
    Date of Patent: October 11, 2016
    Inventor: Chien-Min Sung
  • Publication number: 20160279758
    Abstract: Superabrasive tools and their methods of manufacture are disclosed. In one aspect, a method of improving retention of superabrasive particles held in a solidified organic material layer of an abrading tool, a portion of each of said superabrasive particles protruding out of the solidified organic material layer is provided. The method may include securing a plurality of superabrasive particles in the solidified organic material layer in an arrangement that minimizes mechanical stress impinging on the protruding portion of any individual superabrasive particle when used to abrade a work piece. As an example, the arrangement of the plurality of superabrasive particles may be configured to uniformly distribute frictional forces across substantially each superabrasive particle.
    Type: Application
    Filed: March 11, 2013
    Publication date: September 29, 2016
    Inventor: Chien-Min Sung
  • Publication number: 20160263723
    Abstract: CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a method can include pressing a CMP pad dresser against a CMP pad, where the dresser includes a monolayer of a plurality of superabrasive particles protruding from a matrix layer. The difference in protrusion distance between the highest protruding tip and the second highest protruding tip of the monolayer of superabrasive particles is less than or equal to about 10 microns and the difference in protrusion distance between the highest 10 protruding tips of the monolayer of superabrasive particles are within about 20 microns or less. The method can further include rotating the dresser against the CMP pad such that asperities are cut into the CMP pad having a maximum cutting depth of about 60 microns.
    Type: Application
    Filed: September 22, 2015
    Publication date: September 15, 2016
    Inventor: Chien-Min Sung
  • Patent number: 9409280
    Abstract: Superabrasive tools and methods for the making thereof are disclosed and described. In one aspect, superabrasive particles are chemically bonded to a matrix support material according to a predetermined pattern by a braze alloy. The brazing alloy may be provided as a powder, thin sheet, or sheet of amorphous alloy. A template having a plurality of apertures arranged in a predetermined pattern may be used to place the superabrasive particles on a given substrate or matrix support material.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: August 9, 2016
    Inventor: Chien-Min Sung
  • Patent number: 9370856
    Abstract: Superabrasive tools and methods for the making thereof are disclosed and described. In one aspect, superabrasive particles are chemically bonded to a matrix support material according to a predetermined pattern by a braze alloy. The brazing alloy may be provided as a powder, thin sheet, or sheet of amorphous alloy. A template having a plurality of apertures arranged in a predetermined pattern may be used to place the superabrasive particles on a given substrate or matrix support material.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: June 21, 2016
    Inventor: Chien-Min Sung
  • Patent number: 9238207
    Abstract: Superabrasive tools and methods for the making thereof are disclosed and described. In one aspect, superabrasive particles are chemically bonded to a matrix support material according to a predetermined pattern by a braze alloy. The brazing alloy may be provided as a powder, thin sheet, or sheet of amorphous alloy. A template having a plurality of apertures arranged in a predetermined pattern may be used to place the superabrasive particles on a given substrate or matrix support material.
    Type: Grant
    Filed: February 28, 2012
    Date of Patent: January 19, 2016
    Inventor: Chien-Min Sung