Abstract: An organometallic precursor for extreme ultraviolet (EUV) lithography is provided. An organometallic precursor includes an aromatic di-dentate ligand, a transition metal coordinated to the aromatic di-dentate ligand, and an extreme ultraviolet (EUV) cleavable ligand coordinated to the transition metal. The aromatic di-dentate ligand includes a plurality of pyrazine molecules.

Abstract: A method of manufacturing semiconductor device includes forming a multilayer photoresist structure including a metal-containing photoresist over a substrate. The multilayer photoresist structure includes two or more metal-containing photoresist layers having different physical parameters. The metal-containing photoresist is a reaction product of a first precursor and a second precursor, and each layer of the multilayer photoresist structure is formed using different photoresist layer formation parameters. The different photoresist layer formation parameters are one or more selected from the group consisting of the first precursor, an amount of the first precursor, the second precursor, an amount of the second precursor, a length of time each photoresist layer formation operation, and heating conditions of the photoresist layers.

Abstract: An anti-fuse structure, a method for fabricating the anti-fuse structure, and a semiconductor device are disclosed. The anti-fuse structure includes a semiconductor substrate, a fuse oxide layer, a gate material layer, a first electrode and a second electrode. An active area is defined on the semiconductor substrate by an isolation structure. The active area includes a wide portion and a narrow portion connected to each other. The fuse oxide layer is located on the semiconductor substrate, covers the narrow portion and extends to cover a first part of the wide portion. The gate material layer is formed on the fuse oxide layer. The first electrode is formed on and electrically connected to the gate material layer, while the second electrode is formed on and electrically connected to a second part of the wide portion not covered by the fuse oxide layer.

Abstract: A method of forming a pattern in a photoresist layer includes forming a photoresist layer over a substrate, and reducing moisture or oxygen absorption characteristics of the photoresist layer. The photoresist layer is selectively exposed to actinic radiation to form a latent pattern, and the latent pattern is developed by applying a developer to the selectively exposed photoresist layer to form a pattern.

Abstract: A method of manufacturing semiconductor device includes forming a multilayer photoresist structure including a metal-containing photoresist over a substrate. The multilayer photoresist structure includes two or more metal-containing photoresist layers having different physical parameters. The metal-containing photoresist is a reaction product of a first precursor and a second precursor, and each layer of the multilayer photoresist structure is formed using different photoresist layer formation parameters. The different photoresist layer formation parameters are one or more selected from the group consisting of the first precursor, an amount of the first precursor, the second precursor, an amount of the second precursor, a length of time each photoresist layer formation operation, and heating conditions of the photoresist layers.

Abstract: In a method for forming a semiconductor device, a substrate is provided; a word line is formed in the substrate by taking a first face of the substrate as an upper surface; a connecting layer electrically connected to one end of the word line is formed in part of the substrate and on the substrate; a first conducting layer is formed on the connecting layer; and a conducting plug is formed in the substrate by taking a second face of the substrate as an upper surface. The conducting plug is electrically connected to another end of the word line and electrically connected to the first conducting layer via the word line. The first face and the second face are two faces of the substrate opposite to each other in a thickness direction of the substrate.

Abstract: An organometallic precursor for extreme ultraviolet (EUV) lithography is provided. An organometallic precursor includes an aromatic di-dentate ligand, a transition metal coordinated to the aromatic di-dentate ligand, and an extreme ultraviolet (EUV) cleavable ligand coordinated to the transition metal. The aromatic di-dentate ligand includes a plurality of pyrazine molecules.

Abstract: A method of forming a pattern in a photoresist layer includes forming a photoresist layer over a substrate, and reducing moisture or oxygen absorption characteristics of the photoresist layer. The photoresist layer is selectively exposed to actinic radiation to form a latent pattern, and the latent pattern is developed by applying a developer to the selectively exposed photoresist layer to form a pattern.

Abstract: Photoresists and methods of forming and using the same are disclosed. In an embodiment, a method includes spin-on coating a first hard mask layer over a target layer; depositing a photoresist layer over the first hard mask layer using chemical vapor deposition or atomic layer deposition, the photoresist layer being deposited using one or more organometallic precursors; heating the photoresist layer to cause cross-linking between the one or more organometallic precursors; exposing the photoresist layer to patterned energy; heating the photoresist layer to cause de-crosslinking in the photoresist layer forming a de-crosslinked portion of the photoresist layer; and removing the de-crosslinked portion of the photoresist layer.

Abstract: The present disclosure provides a method of forming a semiconductor structure and a semiconductor structure. The method of forming the semiconductor structure includes: providing an initial structure, where the initial structure includes a substrate and a dielectric layer; forming a conductive trench, where a distance between a bottom surface of the conductive trench and a second side surface of the substrate is a first spacing; forming a conductive hole, where the conductive hole extends to the second side surface of the substrate from a top surface of the dielectric layer; forming a conductive pillar, where the conductive pillar fills the conductive hole; forming an inductor structure, where the inductor structure fills the conductive trench, and projection of the inductor structure on the substrate is provided as a spiral structure that uses projection of the conductive pillar on the substrate as an inductor center and that surrounds the inductor center.

Abstract: A fuse structure includes a gate structure, a first electrode, a second electrode and an isolation structure. The gate structure is at least partially formed on an active area of a substrate. The first electrode is formed on the active area of the substrate and spaced apart from the gate structure. The second electrode is formed at least on a side of the gate structure. The isolation structure is formed between the active area and the second electrode.

Abstract: A semiconductor structure includes a substrate, comprising a first doped region; a first dielectric layer, located on the substrate; multiple deep trench capacitors, extending from the first dielectric layer to an inside of the substrate, in which each of the deep trench capacitors penetrates through the first doped region and comprises a serrated inner wall; multiple second doped regions, located in the substrate, in which each of the second doped regions surrounds a bottom of each deep trench capacitor and extends into the first doped region along an outer wall of the deep trench capacitor; and a first metal layer, located on the first dielectric layer and connected with the multiple deep trench capacitors.

Abstract: The present disclosure provides a method of manufacturing a semiconductor structure, and a semiconductor structure. The method of manufacturing a semiconductor structure includes: providing a base, where a channel is formed in the base; forming a gate conductive layer, where the gate conductive layer covers a part of the channel; and forming a semiconductor doped layer, where the semiconductor doped layer fills the channel and covers the gate conductive layer, and a doping concentration of the semiconductor doped layer at a side close to a top surface of the gate conductive layer is different from a doping concentration of the semiconductor doped layer at a side away from the top surface of the gate conductive layer.

Abstract: A static random access memory cell and a method for forming the same are provided. The method for forming a memory cell includes: providing a base; in which the base at least includes a substrate and an active area formed in the substrate; forming trenches extending in a first direction and arranged in a second direction in the active area; forming second gate structures extending in the first direction in the trenches; trimming the second gate structures in the second direction to form first gate structures; in which in a memory including static random access memory cells, every two rows of the first gate structures and the first gate structures separated by two rows have same opening positions; forming recessed channel array transistors based on the first gate structures; forming a static random access memory cell with six transistors based on the recessed channel array transistors.

Abstract: A semiconductor structure includes: a substrate; a conductive via, a first conductive type transistor, and a second conductive type transistor located in substrate; a first metal layer located on substrate; and a second metal layer located on first metal layer. The first conductive type transistor is disposed on two sides of conductive via in first direction, and second conductive type transistor is disposed on two other sides of conductive via in a second direction perpendicular to first direction. The first metal layer includes at least one first metal line extending in first direction and electrically connected to a gate of first conductive type transistor. The second metal layer includes at least one second metal line extending in second direction and electrically connected to a gate of second conductive type transistor. The first metal line and second metal line intersect with each other to form a grid structure covering conductive via.

Abstract: A semiconductor structure includes: a substrate; a gate structure on the substrate; and an interconnect structure including a first interconnect sub-structure and a second interconnect sub-structure, where the second interconnect sub-structure protrudes from the first interconnect sub-structure. The first interconnect sub-structure is connected with the substrate, and the second interconnect sub-structure is connected with a top of the gate structure.

Abstract: A method of manufacturing a semiconductor device includes forming a photoresist layer over a substrate. A first precursor and a second precursor are combined. The first precursor is an organometallic having a formula: MaRbXc, where M is one or more of Sn, Bi, Sb, In, and Te, R is one or more of a C7-C11 aralkyl group, a C3-C10 cycloalkyl group, a C2-C10 alkoxy group, and a C2-C10 alkylamino group, X is one or more of a halogen, a sulfonate group, and an alkylamino group, and 1?a?2, b?1, c?1, and b+c?4, and the second precursor is one or more of water, an amine, a borane, and a phosphine. The photoresist layer is selectively exposed to actinic radiation to form a latent pattern. The latent pattern is developed by applying a developer to the selectively exposed photoresist layer.

Abstract: A semiconductor structure includes: a substrate, a conductive pattern layer, a support layer and a re-distribution layer. The conductive pattern layer is arranged on the substrate. The support layer covers the conductive pattern layer and is provided with a via hole. The re-distribution layer is arranged on the support, and the re-distribution layer includes a test pad at least located in the via hole. The test pad includes a plurality of test contact portions and a plurality of recesses that are arranged alternately and connected mutually, and the recess is in corresponding contact with a portion of the conductive pattern layer in the via hole.

Abstract: A semiconductor structure includes the following: a semiconductor substrate; a first metal layer, located on a surface of the semiconductor substrate; a second metal layer, located above a surface of the first metal layer; an insulating layer, located between the first metal layer and the second metal layer, and configured to isolate the first metal layer and the second metal layer; a test via, penetrating through the insulating layer and connecting the first metal layer with the second metal layer through a conductive material in the test via; and at least a pair of dummy vias, penetrating through the insulating layer and connected to any one of the first metal layer and the second metal layer.

Abstract: A semiconductor structure includes: a semiconductor substrate; a first metal layer located on a surface of the semiconductor substrate; a second metal layer located above a surface of the first metal layer; an insulating layer located between the first metal layer and the second metal layer and configured to isolate the first metal layer from the second metal layer; and at least four vias located in the insulating layer and a conductive material for connecting the first metal layer and the second metal layer is filled in the at least four vias.