Patents by Inventor Chih-Yu Chang

Chih-Yu Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11469324
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first negative capacitance material over a substrate and patterning the first negative capacitance material to form a fin structure over the substrate. The method also includes forming a source feature and a drain feature in and protruding from a source region and a drain region of the fin structure. The method also includes forming a gate dielectric structure between the source feature and the drain feature to cover a channel region of the fin structure and forming a gate electrode layer over the gate dielectric structure.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: October 11, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Feng Young, Chih-Yu Chang, Sai-Hooi Yeong, Chi-On Chui, Chih-Hao Wang
  • Publication number: 20220285393
    Abstract: A memory cell includes patterning a first trench extending through a first conductive line, depositing a memory film along sidewalls and a bottom surface of the first trench, depositing a channel layer over the memory film, the channel layer extending along the sidewalls and the bottom surface of the first trench, depositing a first dielectric layer over and contacting the channel layer to fill the first trench, patterning a first opening, wherein patterning the first opening comprises etching the first dielectric layer, depositing a gate dielectric layer in the first opening, and depositing a gate electrode over the gate dielectric layer and in the first opening, the gate electrode being surrounded by the gate dielectric layer.
    Type: Application
    Filed: March 5, 2021
    Publication date: September 8, 2022
    Inventors: Bo-Feng Young, Meng-Han Lin, Chih-Yu Chang, Sai-Hooi Yeong, Yu-Ming Lin
  • Publication number: 20220285521
    Abstract: A negative capacitance semiconductor device includes a substrate. A dielectric layer is disposed over a portion of the substrate. A ferroelectric structure disposed over the dielectric layer. Within the ferroelectric structure: a material composition of the ferroelectric structure varies as a function of a height within the ferroelectric structure. A gate electrode is disposed over the ferroelectric structure.
    Type: Application
    Filed: May 27, 2022
    Publication date: September 8, 2022
    Inventors: Chi-Hsing Hsu, Sai-Hooi Yeong, Chih-Yu Chang, Ching-Wei Tsai, Kuan-Lun Cheng
  • Publication number: 20220278117
    Abstract: The present disclosure provides a method for manufacturing a semiconductor structure. The method includes: receiving a substrate; forming a transistor surrounded by a dielectric layer over the substrate, wherein the dielectric layer includes a through hole, and the transistor is formed in the through hole; forming a gate contact in the through hole to electrically connect the transistor; forming a ferroelectric layer over the gate contact in the through hole; forming an insulating layer conformal to and over the dielectric layer and the ferroelectric layer; removing a portion of the insulating layer to form a spacer in the through hole and over the ferroelectric layer; and forming a top electrode over the ferroelectric layer and between the spacer.
    Type: Application
    Filed: May 20, 2022
    Publication date: September 1, 2022
    Inventors: CHIH-YU CHANG, SAI-HOOI YEONG, YU-MING LIN, CHIH-HAO WANG
  • Publication number: 20220270872
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a stack over a substrate. The stack has multiple sacrificial layers and multiple oxide semiconductor layers laid out alternately. The method also includes partially removing the sacrificial layers to expose inner portions of the oxide semiconductor layers. The inner portions of the oxide semiconductor layers form multiple oxide semiconductor nanostructures. The method further includes changing an atomic concentration of oxygen of the oxide semiconductor nanostructures. In addition, the method includes forming a gate stack wrapped around one or more of the oxide semiconductor nanostructures after the changing of the atomic concentration of oxygen of the oxide semiconductor nanostructures.
    Type: Application
    Filed: May 12, 2022
    Publication date: August 25, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yu CHANG, Sai-Hooi YEONG, Yu-Ming LIN
  • Publication number: 20220246766
    Abstract: The present disclosure relates a ferroelectric field-effect transistor (FeFET) device. In some embodiments, the FeFET device includes a ferroelectric layer having a first side and a second side opposite to the first side and a gate electrode disposed along the first side of the ferroelectric layer. The FeFET device further includes an OS channel layer disposed along the second side of the ferroelectric layer opposite to the first side and a pair of source/drain regions disposed on opposite sides of the OS channel layer. The FeFET device further includes a 2D contacting layer disposed along the OS channel layer. The OS channel layer has a first doping type, and the 2D contacting layer has a second doping type different than the first doping type.
    Type: Application
    Filed: May 10, 2021
    Publication date: August 4, 2022
    Inventors: Mauricio Manfrini, Chih-Yu Chang, Sai-Hooi Yeong
  • Publication number: 20220223741
    Abstract: The present disclosure relates a ferroelectric field-effect transistor (FeFET) device. The FeFET device includes a ferroelectric structure having a first side and a second side. A gate structure is disposed along the first side of the ferroelectric structure, and an oxide semiconductor is disposed along the second side of the ferroelectric structure. The oxide semiconductor has a first semiconductor type. A source region and a drain region are disposed on the oxide semiconductor. The gate structure is laterally between the source region and the drain region. A polarization enhancement structure is arranged on the oxide semiconductor between the source region and the drain region. The polarization enhancement structure includes a semiconductor material or an oxide semiconductor material having a second semiconductor type that is different than the first semiconductor type.
    Type: Application
    Filed: March 31, 2021
    Publication date: July 14, 2022
    Inventors: Chih-Yu Chang, Mauricio Manfrini, Hung Wei Li, Yu-Ming Lin
  • Publication number: 20220223712
    Abstract: The present disclosure provides a semiconductor device and a method for forming a semiconductor device. The semiconductor device includes a substrate, and a first gate dielectric stack over the substrate, wherein the first gate dielectric stack includes a first ferroelectric layer, and a first dielectric layer coupled to the first ferroelectric layer, wherein the first ferroelectric layer includes a first portion made of a ferroelectric material in orthorhombic phase, a second portion made of the ferroelectric material in monoclinic phase, and a third portion made of the ferroelectric material in tetragonal phase, wherein a total volume of the second portion is greater than a total volume of the first portion and the total volume of the first portion is greater than a total volume of the third portion.
    Type: Application
    Filed: March 30, 2022
    Publication date: July 14, 2022
    Inventors: CHUN-YEN PENG, TE-YANG LAI, BO-FENG YOUNG, CHIH-YU CHANG, SAI-HOOI YEONG, CHI ON CHUI
  • Publication number: 20220208990
    Abstract: Circuit devices and methods of forming the same are provided. In one embodiment, a method includes receiving a workpiece that includes a substrate and a fin extending from the substrate, forming a first ferroelectric layer on the fin, forming a dummy gate structure over a channel region of the fin, forming a gate spacer over sidewalls of the dummy gate structure, forming an inter-level dielectric layer over the workpiece, removing the dummy gate structure to expose the first ferroelectric layer over the channel region of the fin, and forming a gate electrode over the exposed first ferroelectric layer over the channel region of the fin.
    Type: Application
    Filed: March 21, 2022
    Publication date: June 30, 2022
    Inventors: Bo-Feng Young, Chih-Yu Chang, Sai-Hooi Yeong, Chi On Chui, Chih-Hao Wang
  • Patent number: 11370884
    Abstract: A composite textile product includes a polyamide textile layer and a polyamide film. The polyamide film is bonded to the polyamide textile layer. A thickness of the polyamide textile layer is between 0.1 mm and 0.3 mm. The polyamide film has an average pore size ranging from 10 ?m to 150 ?m. A thickness of the polyamide film is between 0.01 mm and 0.1 mm. Wherein the polyamide film comprises a copolymer material, and the copolymer material includes a polyamide section and a polyether section.
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: June 28, 2022
    Assignee: YIE-CHENG TEXTILE TECHNOLOGY CO., LTD.
    Inventor: Chih-Yu Chang
  • Publication number: 20220181495
    Abstract: The present disclosure provides a semiconductor device and a method for fabricating a semiconductor device. The semiconductor device includes a substrate, a metal gate layer over the substrate, a channel between a source region and a drain region in the substrate, and a ferroelectric layer, at least a portion of the ferroelectric layer is between the metal gate layer and the substrate, wherein the ferroelectric layer includes hafnium oxide-based material, the hafnium oxide-based material includes a first portion of hafnium oxide with orthorhombic phase, a second portion of hafnium oxide with monoclinic phase, and a third portion of the hafnium oxide with tetragonal phase, wherein a first volume of the first portion is greater than a second volume of the second portion, and the second volume of the second portion is greater than a third volume the third portion.
    Type: Application
    Filed: February 21, 2022
    Publication date: June 9, 2022
    Inventors: CHUN-YEN PENG, CHIH-YU CHANG, BO-FENG YOUNG, TE-YANG LAI, SAI-HOOI YEONG, CHI ON CHUI
  • Patent number: 11349008
    Abstract: A negative capacitance semiconductor device includes a substrate. A dielectric layer is disposed over a portion of the substrate. A ferroelectric structure is disposed over the dielectric layer. Within the ferroelectric structure: a material composition of the ferroelectric structure varies as a function of a height within the ferroelectric structure. A gate electrode is disposed over the ferroelectric structure.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: May 31, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Hsing Hsu, Sai-Hooi Yeong, Chih-Yu Chang, Ching-Wei Tsai, Kuan-Lun Cheng
  • Patent number: 11342343
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a source/drain structure, a metal gate structure, a ferroelectric layer, a spacer and a metal layer. The source/drain structure is disposed over the substrate. The metal gate structure is disposed over the substrate and between the source/drain structure. The ferroelectric layer is disposed over the metal gate structure and the source/drain structure. The spacer is disposed over the ferroelectric layer. The metal layer is disposed over the ferroelectric layer and surrounded by the spacer. A method for manufacturing a semiconductor structure is also provided.
    Type: Grant
    Filed: January 9, 2020
    Date of Patent: May 24, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chih-Yu Chang, Sai-Hooi Yeong, Yu-Ming Lin, Chih-Hao Wang
  • Patent number: 11335552
    Abstract: A semiconductor device structure and a method for forming a semiconductor device structure are provided. The semiconductor device structure includes an oxide semiconductor nanostructure suspended over a substrate. The semiconductor device structure also includes a source/drain structure adjacent to the oxide semiconductor nanostructure. The source/drain structure contains oxygen, and the oxide semiconductor nanostructure has a greater atomic concentration of oxygen than that of the source/drain structure. The semiconductor device structure further includes a gate stack wrapping around the oxide semiconductor nanostructure.
    Type: Grant
    Filed: April 17, 2020
    Date of Patent: May 17, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Yu Chang, Sai-Hooi Yeong, Yu-Ming Lin
  • Patent number: 11309398
    Abstract: The present disclosure provides a semiconductor device, including a substrate, a fin over the substrate, a multilayer gate dielectric stack over the fin, wherein the multilayer gate dielectric stack includes a first ferroelectric layer, and a first dielectric layer coupled to the first ferroelectric layer, and a gate over the multilayer gate dielectric stack.
    Type: Grant
    Filed: April 1, 2020
    Date of Patent: April 19, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chun-Yen Peng, Te-Yang Lai, Bo-Feng Young, Chih-Yu Chang, Sai-Hooi Yeong, Chi On Chui
  • Patent number: 11282945
    Abstract: Circuit devices and methods of forming the same are provided. In one embodiment, a method includes receiving a workpiece that includes a substrate and a fin extending from the substrate, forming a first ferroelectric layer on the fin, forming a dummy gate structure over a channel region of the fin, forming a gate spacer over sidewalls of the dummy gate structure, forming an inter-level dielectric layer over the workpiece, removing the dummy gate structure to expose the first ferroelectric layer over the channel region of the fin, and forming a gate electrode over the exposed first ferroelectric layer over the channel region of the fin.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: March 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bo-Feng Young, Chih-Yu Chang, Sai-Hooi Yeong, Chi On Chui, Chih-Hao Wang
  • Publication number: 20220059671
    Abstract: Negative capacitance field-effect transistor (NCFET) and ferroelectric field-effect transistor (FE-FET) devices and methods of forming are provided. The gate dielectric stack includes a ferroelectric gate dielectric layer. An amorphous high-k dielectric layer and a dopant-source layer are deposited sequentially followed by a post-deposition anneal (PDA). The PDA converts the amorphous high-k layer to a polycrystalline high-k film with crystalline grains stabilized by the dopants in a crystal phase in which the high-k dielectric is a ferroelectric high-k dielectric. After the PDA, the remnant dopant-source layer may be removed. A gate electrode is formed over remnant dopant-source layer (if present) and the polycrystalline high-k film.
    Type: Application
    Filed: November 8, 2021
    Publication date: February 24, 2022
    Inventors: Te-Yang Lai, Chun-Yen Peng, Chih-Yu Chang, Bo-Feng Young, Sai-Hooi Yeong, Chi On Chui
  • Patent number: 11257950
    Abstract: The present disclosure provides a semiconductor device, including a substrate, a metal gate layer over the substrate, a channel between a source region and a drain region in the substrate, and a ferroelectric layer between the metal gate layer and the substrate, wherein the ferroelectric layer is configured to cause a strain in the channel when applied with an electrical field.
    Type: Grant
    Filed: February 24, 2020
    Date of Patent: February 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chun-Yen Peng, Chih-Yu Chang, Bo-Feng Young, Te-Yang Lai, Sai-Hooi Yeong, Chi On Chui
  • Publication number: 20220052075
    Abstract: A 3D memory array in which epitaxial source/drain regions which are horizontally merged and vertically unmerged are used as source lines and bit lines and methods of forming the same are disclosed. In an embodiment, a memory array includes a first channel region over a semiconductor substrate; a first epitaxial region electrically coupled to the first channel region; a second epitaxial region directly over the first epitaxial region in a direction perpendicular to a major surface of the semiconductor substrate; a dielectric material between the first epitaxial region and the second epitaxial region, the second epitaxial region being isolated from the first epitaxial region by the dielectric material; a gate dielectric surrounding the first channel region; and a gate electrode surrounding the gate dielectric.
    Type: Application
    Filed: December 30, 2020
    Publication date: February 17, 2022
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Chih-Yu Chang, Chi On Chui, Yu-Ming Lin
  • Publication number: 20220013532
    Abstract: Three-dimensional memories are provided. A three-dimensional memory includes a plurality of memory cells, a plurality of word lines, a plurality of bit lines and a plurality of source lines. The memory cells are divided into a plurality of groups, and the groups of memory cells are formed in respective levels stacked along a first direction. The word lines extend along a second direction, and the second direction is perpendicular to the first direction. Each of the bit lines includes a plurality of sub-bit lines formed in the respective levels. Each of the source lines includes a plurality of sub-source lines formed in respective levels. In each of the levels, the memory cells of the corresponding group are arranged in a plurality of columns, and the sub-bit lines and the sub-source lines are alternately arranged between two adjacent columns.
    Type: Application
    Filed: July 9, 2020
    Publication date: January 13, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Bo-Feng YOUNG, Sai-Hooi YEONG, Chih-Yu CHANG, Han-Jong CHIA, Chenchen Jacob WANG, Yu-Ming LIN