Patents by Inventor Christopher Holland

Christopher Holland has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200058750
    Abstract: In a method of forming a Group III-V semiconductor layer on a Si substrate, a first source gas containing a Group V element is supplied to a surface of the Si substrate while heating the substrate at a first temperature, thereby terminating the Si surface with the Group V element. Then, a second source gas containing a Group III element is supplied to the surface while heating the substrate at a second temperature, thereby forming a nucleation layer directly on the surface of the Si substrate. After the nucleation layer is formed, the supply of the second source gas is stopped and the substrate is annealed at a third temperature while the first source gas being supplied, thereby forming a seed layer. After the annealing, the second source gas is supplied while heating the substrate at a fourth temperature, thereby forming a body III-V layer semiconductor on the seed layer.
    Type: Application
    Filed: October 22, 2019
    Publication date: February 20, 2020
    Inventors: Mark VAN DAL, Matthias PASSLACK, Martin Christopher HOLLAND
  • Patent number: 10522623
    Abstract: Provided herein are semiconductor structures that include germanium and have a germanium nitride layer on the surface, as well as methods of forming the same. The described structures include nanowires and fins. Methods of the disclosure include metal-organic chemical vapor deposition with a germanium precursor. The described methods also include using a N2H4 vapor.
    Type: Grant
    Filed: August 15, 2018
    Date of Patent: December 31, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Martin Christopher Holland, Georgios Vellianitis
  • Patent number: 10475897
    Abstract: In a method of forming a Group III-V semiconductor layer on a Si substrate, a first source gas containing a Group V element is supplied to a surface of the Si substrate while heating the substrate at a first temperature, thereby terminating the Si surface with the Group V element. Then, a second source gas containing a Group III element is supplied to the surface while heating the substrate at a second temperature, thereby forming a nucleation layer directly on the surface of the Si substrate. After the nucleation layer is formed, the supply of the second source gas is stopped and the substrate is annealed at a third temperature while the first source gas being supplied, thereby foaming a seed layer. After the annealing, the second source gas is supplied while heating the substrate at a fourth temperature, thereby forming a body III-V layer semiconductor on the seed layer.
    Type: Grant
    Filed: December 7, 2017
    Date of Patent: November 12, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Mark Van Dal, Matthias Passlack, Martin Christopher Holland
  • Publication number: 20190334027
    Abstract: In a method of manufacturing a semiconductor device, an opening is formed in an interlayer dielectric layer such that a source/drain region is exposed in the opening. A first semiconductor layer is formed to fully cover the exposed source/drain region within the opening. A heating process is performed to make an upper surface of the first semiconductor layer substantially flat. A conductive contact layer is formed over the first semiconductor layer.
    Type: Application
    Filed: March 29, 2019
    Publication date: October 31, 2019
    Inventors: Blandine DURIEZ, Mark van DAL, Martin Christopher HOLLAND, Gerben DOORNBOS
  • Publication number: 20190326394
    Abstract: Provided herein are tapered nanowires that comprise germanium and gallium, as well as methods of forming the same. The described nanowires may also include one or more sections of a second semiconductor material. Methods of the disclosure may include vapor-liquid-solid epitaxy with a gallium catalyst. The described methods may also include depositing a gallium seed on a surface of a substrate by charging an area of the substrate using an electron beam, and directing a gallium ion beam across the surface of the substrate.
    Type: Application
    Filed: April 20, 2018
    Publication date: October 24, 2019
    Inventors: Martin Christopher Holland, Blandine Duriez
  • Publication number: 20190312107
    Abstract: A method includes forming a plurality of first semiconductor layers and second semiconductor layers in an alternate manner over a substrate; etching the first semiconductor layers and second semiconductor layers to form a fin structure, in which the fin structure comprises a plurality of first nanowires and second nanowires alternately arranged, the first nanowires have respective remaining portions of the first semiconductor layers, and the second nanowires have respective remaining portions of second semiconductor layers; forming a dummy gate over the fin structure; forming a plurality of gate spacers on opposite sidewalls of the dummy gate, respectively; replacing the dummy gate with a metal gate; removing first portions of the second nanowires exposed by the metal gate and metal gate and the gate spacers suspended; and forming an epitaxy layer wrapping around the first portions of the first nanowires, in which opposite sidewalls of the epitaxy layer have zig-zag contour.
    Type: Application
    Filed: June 24, 2019
    Publication date: October 10, 2019
    Inventors: Martin Christopher HOLLAND, Mark VAN DAL, Georgios VELLIANITIS, Blandine DURIEZ, Gerben DOORNBOS
  • Publication number: 20190245037
    Abstract: A gate-all-around field effect transistor (GAA FET) includes an InAs nano-wire as a channel layer, a gate dielectric layer wrapping the InAs nano-wire, and a gate electrode metal layer formed on the gate dielectric layer. The InAs nano-wire has first to fourth major surfaces three convex-rounded corner surfaces and one concave-rounded corner surface.
    Type: Application
    Filed: April 12, 2019
    Publication date: August 8, 2019
    Inventors: Mark VAN DAL, Gerben DOORNBOS, Matthias PASSLACK, Martin Christopher HOLLAND
  • Patent number: 10374924
    Abstract: A technology is described for detecting a failure of a primary virtualized device and failing over to a secondary virtualized network device. An example method may include generating a statistical model using historical data for network traffic that has been handled by a primary virtualized device. The statistical model may contain a functional state baseline representing a functional state of the primary virtualized device handling network traffic during a time frame. Having generated the statistical model, the functional state of the primary virtualized device may be monitored by calculating a network traffic metric for current network traffic handled by the primary virtualized device and comparing the network traffic metric for current network traffic handled by the primary virtualized device with a data point in the statistical model corresponding to the network traffic metric and the time frame for the network traffic metric.
    Type: Grant
    Filed: December 5, 2014
    Date of Patent: August 6, 2019
    Assignee: Amazon Technologies, Inc.
    Inventors: Ryan Christopher Holland, Thomas Charles Stickle
  • Patent number: 10362053
    Abstract: A computer security threat sharing technology is described. A computer security threat is recognized at an organization. A partner network graph is queried for security nodes connected to a first security node representing the organization. The first security node is connected to at least a second security node representing a trusted security partner of the organization. The second security node is associated with identification information. The computer security threat recognized by the organization is communicated to the trusted security partner using the identification information associated with the second security node.
    Type: Grant
    Filed: April 26, 2016
    Date of Patent: July 23, 2019
    Assignee: Amazon Technologies, Inc.
    Inventors: Thomas Charles Stickle, Carl Jay Moses, Ryan Christopher Holland
  • Patent number: 10332965
    Abstract: A semiconductor device includes a plurality of fins. Each of the fins has a multi-layer stack comprising a first nanowire and a second nanowire. A first portion of the first nanowire and second nanowire are doped to form source and drain regions. An epitaxial layer wraps around the first portion of first nanowire and second nanowire over the source and drain region. A gate is disposed over a second portion of the first nanowire and second nanowire. The epitaxial layer is interposed in between the first nanowire and the second nanowire over the source and drain region. The epitaxial layer has a zig-zag contour.
    Type: Grant
    Filed: May 8, 2017
    Date of Patent: June 25, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Martin Christopher Holland, Mark Van Dal, Georgios Vellianitis, Blandine Duriez, Gerben Doornbos
  • Publication number: 20190165134
    Abstract: A method of manufacturing a semiconductor structure comprises etching a semiconductor substrate having a top surface extending along a (001) crystal plane, such that a majority of a top surface of the etched semiconductor substrate extends along {111} crystal planes; forming a first epitaxial layer in contact with the top surface of the etched semiconductor substrate; and forming a second epitaxial layer on the first epitaxial layer.
    Type: Application
    Filed: June 16, 2018
    Publication date: May 30, 2019
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Carlos H. DIAZ, Mark VAN DAL, Martin Christopher HOLLAND
  • Publication number: 20190148495
    Abstract: A field effect transistor includes a channel made of germanium and a source/drain portion. The source/drain portion includes a germanium layer, an interfacial epitaxial layer over the germanium layer, a semiconductor layer over the interfacial epitaxial layer, and a conducting layer over the semiconductor layer. The interfacial epitaxial layer contains germanium and an element from the semiconductor layer and has a thickness in a range from about 1 nm to about 3 nm.
    Type: Application
    Filed: February 28, 2018
    Publication date: May 16, 2019
    Inventors: Martin Christopher Holland, Blandine Duriez
  • Patent number: 10276719
    Abstract: In a method of manufacturing a semiconductor device, an opening is formed in an interlayer dielectric layer such that a source/drain region is exposed in the opening. A first semiconductor layer is formed to fully cover the exposed source/drain region within the opening. A heating process is performed to make an upper surface of the first semiconductor layer substantially flat. A conductive contact layer is formed over the first semiconductor layer.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: April 30, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Blandine Duriez, Gerben Doornbos, Mark Van Dal, Martin Christopher Holland
  • Patent number: 10269971
    Abstract: Semiconductor devices and fin field effect transistors (FinFETs) are disclosed. In some embodiments, a representative semiconductor device includes a group III material over a substrate, the group III material comprising a thickness of about 2 monolayers or less, and a group III-V material over the group III material.
    Type: Grant
    Filed: December 18, 2017
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventor: Martin Christopher Holland
  • Patent number: 10269899
    Abstract: An apparatus comprises a first semiconductor fin, a second semiconductor fin and a third semiconductor fin over a substrate, wherein the first semiconductor fin and the second semiconductor fin are separated by a first isolation region and the second semiconductor fin and the third semiconductor fin are separated by a second isolation region, and wherein a width of the first isolation region is greater than a width of the second isolation region.
    Type: Grant
    Filed: July 28, 2016
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Blandine Duriez, Martin Christopher Holland
  • Patent number: 10263073
    Abstract: A gate-all-around field effect transistor (GAA FET) includes an InAs nano-wire as a channel layer, a gate dielectric layer wrapping the InAs nano-wire, and a gate electrode metal layer formed on the gate dielectric layer. The InAs nano-wire has first to fourth major surfaces three convex-rounded corner surfaces and one concave-rounded corner surface.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: April 16, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Mark Van Dal, Gerben Doornbos, Matthias Passlack, Martin Christopher Holland
  • Patent number: 10257227
    Abstract: A computer security threat sharing technology is described. An example method may include receiving security threat information transmitted over a computing network via a multi-streaming data service. The security threat information may relate to a recognized computer security threat detected by a first network component. The security threat information may then be correlated with additional security threat information received via the multi-streaming data service that may be detected by a second network component that may be interconnected to the first network component by way of the multi-streaming data service. A computer security threat associated with correlated security threat information may then be identified, and the computer security threat may be communicated to a plurality of network components via the multi-streaming data service.
    Type: Grant
    Filed: August 14, 2014
    Date of Patent: April 9, 2019
    Assignee: Amazon Technologies, Inc.
    Inventors: Thomas Charles Stickle, Carl Jay Moses, Ryan Christopher Holland
  • Publication number: 20190074355
    Abstract: According to one example, a method includes epitaxially growing first portions of a plurality of elongated semiconductor structures on a semiconductor substrate, the elongated semiconductor structures running perpendicular to the substrate. The method further includes forming a gate layer on the substrate, the gate layer contacting the elongated semiconductor structures. The method further includes performing a planarization process on the gate layer and the elongated semiconductor structures, and epitaxially growing second portions of the plurality of elongated semiconductor structures, the second portions comprising a different material than the first portions.
    Type: Application
    Filed: November 2, 2018
    Publication date: March 7, 2019
    Inventors: Richard Kenneth Oxland, Blandine Duriez, Mark Van Dal, Martin Christopher Holland
  • Patent number: 10164024
    Abstract: Various heterostructures and methods of forming heterostructures are disclosed. A method includes removing portions of a substrate to form a temporary fin protruding above the substrate, forming a dielectric material over the substrate and over the temporary fin, removing the temporary fin to form a trench in the dielectric material, the trench exposing a portion of a first crystalline material of the substrate, forming a template material at least partially in the trench, the template material being a second crystalline material that is lattice mismatched to the first crystalline material, forming a barrier material over the template material, the barrier material being a third crystalline material, forming a device material over the barrier material, the device material being a fourth crystalline material, forming a gate stack over the device material, and forming a first source/drain region and a second source/drain region in the device material.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: December 25, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Martin Christopher Holland, Georgios Vellianitis, Richard Kenneth Oxland, Krishna Kumar Bhuwalka, Gerben Doornbos
  • Publication number: 20180323259
    Abstract: A semiconductor device includes a plurality of fins. Each of the fins has a multi-layer stack comprising a first nanowire and a second nanowire. A first portion of the first nanowire and second nanowire are doped to form source and drain regions. An epitaxial layer wraps around the first portion of first nanowire and second nanowire over the source and drain region. A gate is disposed over a second portion of the first nanowire and second nanowire. The epitaxial layer is interposed in between the first nanowire and the second nanowire over the source and drain region. The epitaxial layer has a zig-zag contour.
    Type: Application
    Filed: May 8, 2017
    Publication date: November 8, 2018
    Inventors: Martin Christopher HOLLAND, Mark VAN DAL, Georgios VELLIANITIS, Blandine DURIEZ, Gerben DOORNBOS