Patents by Inventor Chun-Hsiung Lin

Chun-Hsiung Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210126106
    Abstract: The present disclosure describes an inner spacer structure for a semiconductor device and a method for forming the same. The method for forming the inner spacer structure in the semiconductor device can include forming a vertical structure over a substrate, forming a gate structure over a portion of the vertical structure, exposing sidewalls of the portion of the vertical structure, forming multiple spacers over the sidewalls of the portion of the vertical structure, and forming a void in each of the multiple spacers.
    Type: Application
    Filed: October 24, 2019
    Publication date: April 29, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chen-Han WANG, Ding-Kang Shih, Chun-Hsiung Lin, Teng-Chun Tsai, Zhi-Chang Lin, Akira Mineji, Yao-Sheng Huang
  • Publication number: 20210104441
    Abstract: Provided are FinFET devices and methods of forming the same. A FinFET device includes a substrate, a first gate strip and a second gate strip. The substrate has at least one first fin in a first region, at least one second fin in a second region and an isolation layer covering lower portions of the first and second fins. The first fin includes a first material layer and a second material layer over the first material layer, and the interface between the first material layer and the second material layer is uneven. The first gate strip is disposed across the first fin. The second gate strip is disposed across the second fin.
    Type: Application
    Filed: November 23, 2020
    Publication date: April 8, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Jui-Chien Huang, Kuo-Cheng Ching, Chun-Hsiung Lin, Pei-Hsun Wang
  • Patent number: 10964795
    Abstract: A method includes forming a gate stack over a semiconductor region, and forming a first gate spacer on a sidewall of the gate stack. The first gate spacer includes an inner sidewall spacer, and a dummy spacer portion on an outer side of the inner sidewall spacer. The method further includes removing the dummy spacer portion to form a trench, and forming a dielectric layer to seal a portion of the trench as an air gap. The air gap and the inner sidewall spacer in combination form a second gate spacer. A source/drain region is formed to have a portion on an outer side of the second gate spacer.
    Type: Grant
    Filed: September 10, 2019
    Date of Patent: March 30, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Lun Chen, Chao-Hsien Huang, Li-Te Lin, Chun-Hsiung Lin
  • Publication number: 20210082966
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a first gate stack over a substrate. The substrate has a base and a first fin structure over the base, and the first gate stack wraps around a first upper portion of the first fin structure. The method includes partially removing the first fin structure, which is not covered by the first gate stack. The method includes forming a first mask layer over a first sidewall of the first fin structure. The method includes forming a first stressor over a second sidewall of the first fin structure while the first mask layer covers the first sidewall. The first sidewall is opposite to the second sidewall. The method includes removing the first mask layer. The method includes forming a dielectric layer over the base and the first stressor. The dielectric layer covers the first sidewall.
    Type: Application
    Filed: September 16, 2019
    Publication date: March 18, 2021
    Inventors: Zhi-Chang LIN, Chun-Hsiung LIN, Chih-Hao WANG
  • Publication number: 20210083090
    Abstract: Methods for manufacturing a semiconductor structure is provided. The method for manufacturing the semiconductor structure includes forming nanowire structures over a substrate and forming a gate structure across nanowire structures. The method for manufacturing the semiconductor structure also includes forming a source/drain structure adjacent to the gate structure and forming a Si layer over the source/drain structure. The method for manufacturing the semiconductor structure also includes forming a SiGe layer over the Si layer and oxidizing the SiGe layer to form an oxide layer. The method for manufacturing the semiconductor structure also includes forming a contact through the Si layer over the source/drain structure.
    Type: Application
    Filed: September 16, 2019
    Publication date: March 18, 2021
    Inventors: Chen-Han WANG, Pei-Hsun WANG, Chun-Hsiung LIN, Chih-Hao WANG
  • Publication number: 20210074548
    Abstract: A semiconductor structure includes a semiconductor fin disposed over a substrate, an epitaxial source/drain (S/D) feature disposed over the semiconductor fin, a silicide layer disposed over the epitaxial S/D feature, the silicide layer is disposed on sidewalls of the epitaxial S/D feature, a dielectric layer disposed over sidewalls of the silicide layer, and an S/D contact disposed over the epitaxial S/D feature in an interlayer dielectric (ILD) layer.
    Type: Application
    Filed: November 23, 2020
    Publication date: March 11, 2021
    Inventors: Chun-Hsiung Lin, Shih-Cheng Chen, Chih-Hao Wang, Jung-Hung Chang, Jui-Chien Huang
  • Patent number: 10944009
    Abstract: The present disclosure provides a semiconductor device that includes a semiconductor fin disposed over a substrate; an isolation structure at least partially surrounding the fin; an epitaxial source/drain (S/D) feature disposed over the semiconductor fin, wherein an extended portion of the epitaxial S/D feature extends over the isolation structure; and a silicide layer disposed on the epitaxial S/D feature, the silicide layer continuously surrounding the extended portion of the epitaxial S/D feature over the isolation structure.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: March 9, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Hsun Wang, Chih-Chao Chou, Shih-Cheng Chen, Jung-Hung Chang, Jui-Chien Huang, Chun-Hsiung Lin, Chih-Hao Wang
  • Publication number: 20210066473
    Abstract: A semiconductor device is provided. The semiconductor device includes a plurality of channel layers stacked over a semiconductor substrate and spaced apart from one another, a source/drain structure adjoining the plurality of channel layers, a gate structure wrapping around the plurality of channel layers, and a first inner spacer between the gate structure and the source/drain structure and between the plurality of channel layers. The first inner spacer is made of an oxide of a semiconductor material.
    Type: Application
    Filed: October 27, 2020
    Publication date: March 4, 2021
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Hsiung LIN, Pei-Hsun WANG, Chih-Hao WANG, Kuo-Cheng CHING, Jui-Chien HUANG
  • Publication number: 20210050429
    Abstract: A semiconductor device is provided. The semiconductor device includes a fin protruding from a semiconductor substrate and a gate structure over the fin. The semiconductor device also includes a source region and a drain region in the fin and at opposite sides of the gate structure. The semiconductor device further includes a gate spacer on a sidewall of the gate structure. The gate spacer includes an air-gap spacer and a sealing spacer above the air-gap spacer, an upper portion of the gate structure is laterally overlapping with the sealing spacer, and the bottom portion of the gate structure is laterally overlapping with the air gap spacer.
    Type: Application
    Filed: October 19, 2020
    Publication date: February 18, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Hsiung LIN, Pei-Hsun WANG, Chih-Chao CHOU, Chia-Hao CHANG, Chih-Hao WANG
  • Patent number: 10923598
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary method comprises forming a fin over a substrate, wherein the fin comprises a first semiconductor layer and a second semiconductor layer including different semiconductor materials, and the fin comprises a channel region and a source/drain region; forming a dummy gate structure over the channel region of the fin and over the substrate; etching a portion of the fin in the source/drain region to form a trench therein, wherein a bottom surface of the trench is below a bottom surface of the second semiconductor layer; selectively removing an edge portion of the second semiconductor layer in the channel region such that the second semiconductor layer is recessed; forming a sacrificial structure around the recessed second semiconductor layer and over the bottom surface of the trench; and epitaxially growing a source/drain feature in the source/drain region of the fin.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: February 16, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Hsun Wang, Chun-Hsiung Lin, Chih-Hao Wang
  • Publication number: 20210020524
    Abstract: A method includes forming an epitaxy semiconductor layer over a semiconductor substrate, and etching the epitaxy semiconductor layer and the semiconductor substrate to form a semiconductor strip, which includes an upper portion acting as a mandrel, and a lower portion under the mandrel. The upper portion is a remaining portion of the epitaxy semiconductor layer, and the lower portion is a remaining portion of the semiconductor substrate. The method further includes growing a first semiconductor fin starting from a first sidewall of the mandrel, growing a second semiconductor fin starting from a second sidewall of the mandrel. The first sidewall and the second sidewall are opposite sidewalls of the mandrel. A first transistor is formed based on the first semiconductor fin. A second transistor is formed based on the second semiconductor fin.
    Type: Application
    Filed: July 18, 2019
    Publication date: January 21, 2021
    Inventors: Pei-Hsun Wang, Shih-Cheng Chen, Chun-Hsiung Lin, Chih-Hao Wang
  • Publication number: 20200388692
    Abstract: In a method for manufacturing a semiconductor device, a gate structure is formed over a channel layer and an isolation insulating layer. A first sidewall spacer layer is formed on a side surface of the gate structure. A sacrificial layer is formed so that an upper portion of the gate structure with the first sidewall spacer layer is exposed from the sacrificial layer and a bottom portion of the gate structure with the first sidewall spacer layer is embedded in the first sacrificial layer. A space is formed between the bottom portion of the gate structure and the sacrificial layer by removing at least part of the first sidewall spacer layer. After the first sidewall spacer layer is removed, an air gap is formed between the bottom portion of the gate structure and the sacrificial layer by forming a second sidewall spacer layer over the gate structure.
    Type: Application
    Filed: August 24, 2020
    Publication date: December 10, 2020
    Inventors: Chun-Hsiung LIN, Chia-Hao CHANG, Chih-Hao WANG, Wai-Yi LIEN, Chih-Chao CHOU, Pei-Yu WANG
  • Patent number: 10861953
    Abstract: A method includes forming a gate stack over a semiconductor region, and forming a first gate spacer on a sidewall of the gate stack. The first gate spacer includes an inner sidewall spacer, and a dummy spacer portion on an outer side of the inner sidewall spacer. The method further includes removing the dummy spacer portion to form a trench, and forming a dielectric layer to seal a portion of the trench as an air gap. The air gap and the inner sidewall spacer in combination form a second gate spacer. A source/drain region is formed to have a portion on an outer side of the second gate spacer.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: December 8, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Lun Chen, Chao-Hsien Huang, Li-Te Lin, Chun-Hsiung Lin
  • Publication number: 20200381257
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a base portion and a fin portion over the base portion. The semiconductor device structure includes an epitaxial structure over the fin portion. The semiconductor device structure includes a dielectric fin over the base portion. A top surface of the dielectric fin is close to the epitaxial structure. The semiconductor device structure includes a silicide layer wrapping around the epitaxial structure and partially between the dielectric fin and the epitaxial structure. The silicide layer covers a lower surface of the epitaxial structure, and the lower surface is lower than the top surface of the dielectric fin.
    Type: Application
    Filed: August 17, 2020
    Publication date: December 3, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Hsiung LIN, Jung-Hung CHANG, Shih-Cheng CHEN, Kuo-Cheng CHIANG, Chih-Hao WANG
  • Publication number: 20200373405
    Abstract: A semiconductor device includes a substrate, an isolation structure, a first gate structure, a first gate spacer, and an epitaxy structure. The substrate has a semiconductor fin. The isolation structure is over the substrate and laterally surrounds the semiconductor fin. The first gate structure is over the substrate and crosses the semiconductor fin. The first gate spacer extends along a sidewall of the first gate structure, in which the first gate spacer has a stepped sidewall distal to the first gate structure. The epitaxy structure is over the semiconductor fin, in which the epitaxy structure is in contact with the stepped sidewall of the first gate spacer.
    Type: Application
    Filed: August 8, 2020
    Publication date: November 26, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Lun CHEN, Bau-Ming WANG, Chun-Hsiung LIN
  • Patent number: 10847373
    Abstract: A method includes forming a first dielectric layer over a semiconductor fin protruding from a substrate, forming a second dielectric layer over the first dielectric layer, then removing a portion of the semiconductor fin to form a first recess defined by portions of the first dielectric layer, followed by removing that portions of the first dielectric layer that define the first recess. Thereafter, the method proceeds to forming an epitaxial source/drain (S/D) feature in the first recess, removing the second dielectric layer to form a second recess that is disposed between the epitaxial S/D feature and remaining portions of the first dielectric layer, and subsequently forming a silicide layer over the epitaxial S/D feature, such that the silicide layer wraps around the epitaxial S/D feature.
    Type: Grant
    Filed: June 18, 2019
    Date of Patent: November 24, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Hsiung Lin, Shih-Cheng Chen, Chih-Hao Wang, Jung-Hung Chang, Jui-Chien Huang
  • Patent number: 10847426
    Abstract: Provided are FinFET devices and methods of forming the same. A FinFET device includes a substrate, a first gate strip and a second gate strip. The substrate has at least one first fin in a first region, at least one second fin in a second region and an isolation layer covering lower portions of the first and second fins. The first fin includes a first material layer and a second material layer over the first material layer, and the interface between the first material layer and the second material layer is uneven. The first gate strip is disposed across the first fin. The second gate strip is disposed across the second fin.
    Type: Grant
    Filed: October 28, 2018
    Date of Patent: November 24, 2020
    Assignee: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Chih-Hao Wang, Jui-Chien Huang, Kuo-Cheng Ching, Chun-Hsiung Lin, Pei-Hsun Wang
  • Publication number: 20200365712
    Abstract: Various transistors, such as horizontal gate-all-around transistors, and methods of fabricating such are disclosed herein. An exemplary transistor includes a first nanowire and a second nanowire that include a first semiconductor material, a gate that wraps a channel region of the first nanowire and the second nanowire, and source/drain feature that wraps source/drain regions of the first nanowire and the second nanowire. The source/drain feature includes a second semiconductor material that is configured differently than the first semiconductor material. In some implementations, the transistor further includes a fin-like semiconductor layer disposed over a substrate. The first nanowire and the second nanowire are disposed over the fin-like semiconductor layer, such that the first nanowire, the second nanowire, and the fin-like semiconductor layer extend substantially parallel to one another along the same length-wise direction.
    Type: Application
    Filed: August 3, 2020
    Publication date: November 19, 2020
    Inventors: Chun-Hsiung Lin, Chung-Cheng Wu, Carlos H. Diaz, Chih-Hao Wang, Wen-Hsing Hsieh, Yi-Ming Sheu
  • Patent number: 10825919
    Abstract: A method of fabricating semiconductor devices is provided. The method includes forming a fin structure on a substrate, in which the fin structure includes a fin stack of alternating first and second semiconductor layers and forming recesses in the fin stack at source and drain regions. The method also includes etching the second semiconductor layers to form recessed second semiconductor layers, and forming third semiconductor layers on sidewalls of the recessed second semiconductor layers. The method further includes epitaxially growing source and drain structures in the recesses, removing the recessed second semiconductor layers to form spaces between the first semiconductor layers, and oxidizing the third semiconductor layers to form inner spacers. In addition, the method includes forming a gate structure to fill the spaces and to surround the first semiconductor layers.
    Type: Grant
    Filed: February 21, 2019
    Date of Patent: November 3, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chun-Hsiung Lin, Pei-Hsun Wang, Chih-Hao Wang, Kuo-Cheng Ching, Jui-Chien Huang
  • Publication number: 20200343140
    Abstract: Semiconductor structures and methods for forming the same are provided. The method includes forming a fin protruding from a substrate and forming an isolation structure surrounding the fin. The method also includes epitaxially growing channel fins on sidewalls of the fin over the isolation structure and etching the fin to form a space between the channel fins. The method further includes forming a gate structure to fill the space between the channel fins.
    Type: Application
    Filed: July 9, 2020
    Publication date: October 29, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Hsun WANG, Chun-Hsiung LIN, Chih-Hao WANG, Chih-Chao CHOU