Patents by Inventor Fu Chen

Fu Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240030327
    Abstract: A semiconductor device includes a first to a third nitride-based semiconductor layers, a source electrode, a drain electrode and a gate electrode. The second nitride-based semiconductor layer is disposed on the first nitride-based semiconductor layer and has a bandgap less than a bandgap of the first nitride-based semiconductor layer, so as to form a heterojunction therebetween with a two-dimensional hole gas (2DHG) region. A third nitride-based semiconductor layer is embedded in the second nitride-based semiconductor layer and spaced apart from the first nitride-based semiconductor layer. The third nitride-based semiconductor layer is doped to have a first conductivity type different than that of the second nitride-based semiconductor layer.
    Type: Application
    Filed: August 13, 2021
    Publication date: January 25, 2024
    Inventors: Fu CHEN, Ronghui HAO, King Yuen WONG
  • Publication number: 20240021693
    Abstract: A semiconductor device a method of forming the same are provided. The method includes forming a fin extending from a substrate and forming a gate dielectric layer along a top surface and sidewalls of the fin. A first thickness of the gate dielectric layer along the top surface of the fin is greater than a second thickness of the gate dielectric layer along the sidewalls of the fin.
    Type: Application
    Filed: August 8, 2023
    Publication date: January 18, 2024
    Inventors: Kuei-Lun Lin, Yen-Fu Chen, Po-Ting Lin, Chia-Yuan Chang, Xiong-Fei Yu, Chi On Chui
  • Publication number: 20240014305
    Abstract: A nitride-based semiconductor device including a first and a second nitride-based semiconductor layers, a source electrode and a drain electrode, and a gate structure. The gate structure includes at least one conductive layer and two or more doped nitride-based semiconductor layers. The at least one conductive layer includes metal, and is in contact with the second nitride-based semiconductor layer to form a metal-semiconductor junction therebetween. The two or more doped nitride-based semiconductor layers are in contact with the second nitride-based semiconductor layer and abut against the conductive layer, so as to form contact interfaces abutting against the metal-semiconductor junction with the second nitride-based semiconductor.
    Type: Application
    Filed: October 22, 2021
    Publication date: January 11, 2024
    Inventors: Qingyuan HE, Ronghui HAO, Fu CHEN, Jinhan ZHANG, King Yuen WONG
  • Patent number: 11862622
    Abstract: An integrated circuit layout includes a first standard cell and a second standard cell. The first standard cell includes first gate lines arranged along a first direction and extending along a second direction. The second standard cell abuts to one side of the first standard cell along the second direction and includes second gate lines arranged along the first direction and extending along the second direction. A first gate line width of the first gate lines and a second gate line width of the second gate lines are different. A first cell width of the first standard cell and a second cell width of the second standard cell are integral multiples of a default gate line pitch of the first gate lines and the second gate lines. At least some of the second gate lines and at least some of the first gate lines are aligned along the second direction.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: January 2, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Kun-Yuan Wu, Wei-Jen Wang, Chien-Fu Chen, Chen-Hsien Hsu, Chien-Hung Chen, Chun-Hsien Lin
  • Publication number: 20230418007
    Abstract: A bidirectional optical module includes a TOSA, a ROSA and an optical filter. The TOSA includes a light emitting unit and a thin film LiNbOx modulator, and the thin film LiNbOx modulator is optically coupled with the light emitting unit. The ROSA is connected with the TOSA. The optical filter is provided for a fiber port which the TOSA shares with the ROSA.
    Type: Application
    Filed: October 27, 2022
    Publication date: December 28, 2023
    Inventors: Jian-Hong LUO, Fu CHEN, Dong-Biao JIANG, Hao ZHOU
  • Patent number: 11851323
    Abstract: Various embodiments of the present disclosure are directed towards a semiconductor device. The semiconductor device includes an interconnect structure disposed over a semiconductor substrate. A dielectric structure is disposed over the interconnect structure. A first cavity and a second cavity are disposed in the dielectric structure. A microelectromechanical system (MEMS) substrate is disposed over the dielectric structure, where the MEMS substrate comprises a first movable membrane overlying the first cavity and a second movable membrane overlying the second cavity. A first functional structure overlies the first movable membrane, where the first functional structure comprises a first material having a first chemical composition.
    Type: Grant
    Filed: June 22, 2020
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsiang-Fu Chen, Chia-Ming Hung, I-Hsuan Chiu
  • Patent number: 11856788
    Abstract: A method for fabricating a semiconductor device is provided. The method includes depositing a bottom electrode layer over a substrate; depositing a ferroelectric layer over the bottom electrode layer; depositing a first top electrode layer over the ferroelectric layer, wherein the first top electrode layer comprises a first metal; depositing a second top electrode layer over the first top electrode layer, wherein the second top electrode layer comprises a second metal, and a standard reduction potential of the first metal is greater than a standard reduction potential of the second metal; and removing portions of the second top electrode layer, the first top electrode layer, the ferroelectric layer, and the bottom electrode layer to form a memory stack, the memory stack comprising remaining portions of the second top electrode layer, the first top electrode layer, the ferroelectric layer, and the bottom electrode layer.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tzu-Yu Chen, Sheng-Hung Shih, Fu-Chen Chang, Kuo-Chi Tu, Wen-Ting Chu, Alexander Kalnitsky
  • Publication number: 20230406695
    Abstract: Various embodiments of the present disclosure are directed towards a semiconductor device. The semiconductor device includes an interconnect structure disposed over a semiconductor substrate. A dielectric structure is disposed over the interconnect structure. A first cavity and a second cavity are disposed in the dielectric structure. A microelectromechanical system (MEMS) substrate is disposed over the dielectric structure, where the MEMS substrate comprises a first movable membrane overlying the first cavity and a second movable membrane overlying the second cavity. A first functional structure overlies the first movable membrane, where the first functional structure comprises a first material having a first chemical composition.
    Type: Application
    Filed: August 4, 2023
    Publication date: December 21, 2023
    Inventors: Hsiang-Fu Chen, Chia-Ming Hung, I-Hsuan Chiu
  • Patent number: 11849588
    Abstract: A method of forming a semiconductor device includes forming an inter-metal dielectric layer over a substrate; forming a first conductive line embedded in the inter-metal dielectric layer; forming a dielectric structure over the inter-metal dielectric layer and the first conductive line; etching the dielectric structure until the first conductive line is exposed; forming a bottom electrode layer on the exposed first conductive line such that the bottom electrode layer has an U-shaped when viewed in a cross section; forming a ferroelectric layer over the bottom electrode layer; forming a top electrode layer over the ferroelectric layer.
    Type: Grant
    Filed: April 4, 2022
    Date of Patent: December 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Fu-Chen Chang, Kuo-Chi Tu, Tzu-Yu Chen, Sheng-Hung Shih
  • Publication number: 20230399226
    Abstract: The present disclosure relates to an integrated chip including a semiconductor device substrate and a plurality of semiconductor devices arranged along the semiconductor device substrate. A micro-electromechanical system (MEMS) layer overlies the semiconductor device substrate. The MEMS layer includes a first moveable mass and a second moveable mass. A capping layer overlies the MEMS layer. The capping layer has a first lower surface directly over the first moveable mass and a second lower surface directly over the second moveable mass. An outgas layer is on the first lower surface and directly between the first pair of sidewalls. A lower surface of the outgas layer delimits a first cavity in which the first moveable mass is arranged. The second lower surface of the capping layer delimits a second cavity in which the second moveable mass is arranged.
    Type: Application
    Filed: June 8, 2022
    Publication date: December 14, 2023
    Inventors: Fan Hu, Wen-Chuan Tai, Li-Chun Peng, Hsiang-Fu Chen, Ching-Kai Shen, Hung-Wei Liang, Jung-Kuo Tu
  • Publication number: 20230400538
    Abstract: A composition is provided. The composition includes a magnetic resonance (MR) probe and a glassification agent. The glassification agent includes lactic acid.
    Type: Application
    Filed: June 10, 2022
    Publication date: December 14, 2023
    Inventors: Daniel M. Ruscitto, Rui Chen, Albert Po Fu Chen, Gregory D. Goddard, Chunxin Zhang
  • Patent number: 11842920
    Abstract: The present disclosure provides a semiconductor structure, including a transistor. The transistor includes a semiconductive substrate, a gate structure, a pair of highly doped regions and a dielectric element. The semiconductive substrate has a top surface. The gate structure is over the top surface. The pair of highly doped regions is separated by the gate structure. The dielectric element is embedded in the semiconductive substrate. The dielectric element is laterally and vertically misaligned with the pair of highly doped regions.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: December 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chun Hao Liao, Chu Fu Chen, Chun-Wei Hsu, Chia-Cheng Pao
  • Publication number: 20230392885
    Abstract: A heat exchange system having desired anti-scaling performance and an anti-scaling method thereof are disclosed. The heat exchange system at least comprises a load control unit, a temperature and pressure detection unit and an anti-scaling treatment unit. The heat exchange system conditions bonding ways of water quality in a HVAC chiller unit, an air compressor, a heat exchanger, a cooling unit, or a boiler under a variety of scaling conditions in both field operation and water quality, by integrating the interaction of those units together with the anti-scaling method for simulating water quality that has a water quality limit same as that in field operation. The heat exchange system further integrates with a testing of anti-scaling performance to make water quality no longer charged and lose the reaction power so as to prevent scaling formation, enhance the anti-scaling performance, and ensure operating efficiency and performance.
    Type: Application
    Filed: August 22, 2023
    Publication date: December 7, 2023
    Inventor: Chu-Fu CHEN
  • Patent number: 11834325
    Abstract: Various embodiments of the present disclosure are directed towards a microelectromechanical system (MEMS) device. The MEMS device includes a first dielectric structure disposed over a first semiconductor substrate, where the first dielectric structure at least partially defines a cavity. A second semiconductor substrate is disposed over the first dielectric structure and includes a movable mass, where opposite sidewalls of the movable mass are disposed between opposite sidewall of the cavity. A first piezoelectric anti-stiction structure is disposed between the movable mass and the first dielectric structure, wherein the first piezoelectric anti-stiction structure includes a first piezoelectric structure and a first electrode disposed between the first piezoelectric structure and the first dielectric structure.
    Type: Grant
    Filed: June 15, 2022
    Date of Patent: December 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fan Hu, Chun-Ren Cheng, Hsiang-Fu Chen, Wen-Chuan Tai
  • Patent number: 11837484
    Abstract: A method includes positioning an end effector at a height lower than a height of a wafer. The end effector is moved to a position under the wafer. A wafer backside property of the wafer is detected by using a sensor on the end effector. The wafer backside property is analyzed to obtain an analysis result.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: December 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wei-Hua Houng, Che-Fu Chen
  • Patent number: 11834332
    Abstract: A semiconductor device and method of manufacturing the device that includes a growth die and a dummy die. The method includes patterning, on an integrated circuit wafer, at one least growth die, and patterning at least one dummy die that is positioned on at least a portion of a circumference of the integrated circuit wafer. The patterned growth and dummy dies are etched on the wafer. A bond wave is initiated at a starting point on the integrated circuit wafer. The starting point is positioned on an edge of the integrated circuit wafer opposite the portion on which the at least one dummy die is patterned. Upon application of pressure at the starting point, a uniform bond wave propagates across the wafers, bonding the two wafers together.
    Type: Grant
    Filed: February 14, 2022
    Date of Patent: December 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kang-Yi Lien, Kuan-Chi Tsai, Yi-Chieh Huang, Hsiang-Fu Chen, Chia-Ming Hung, I-Hsuan Chiu
  • Publication number: 20230382724
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including an interconnect structure overlying a semiconductor substrate. An upper dielectric structure overlies the interconnect structure. A microelectromechanical system (MEMS) substrate overlies the upper dielectric structure. A cavity is defined between the MEMS substrate and the upper dielectric structure. The MEMS substrate comprises a movable membrane over the cavity. A cavity electrode is disposed in the upper dielectric structure and underlies the cavity. A plurality of stopper structures is disposed in the cavity between the movable membrane and the cavity electrode. A dielectric protection layer is disposed along a top surface of the cavity electrode. The dielectric protection layer has a greater dielectric constant than the upper dielectric structure.
    Type: Application
    Filed: May 26, 2022
    Publication date: November 30, 2023
    Inventors: Wen-Chuan Tai, Hsiang-Fu Chen, Chia-Ming Hung, I-Hsuan Chiu, Fan Hu
  • Publication number: 20230382723
    Abstract: A semiconductor device and method of manufacturing the device that includes a growth die and a dummy die. The method includes patterning, on an integrated circuit wafer, at one least growth die, and patterning at least one dummy die that is positioned on at least a portion of a circumference of the integrated circuit wafer. The patterned growth and dummy dies are etched on the wafer. A bond wave is initiated at a starting point on the integrated circuit wafer. The starting point is positioned on an edge of the integrated circuit wafer opposite the portion on which the at least one dummy die is patterned. Upon application of pressure at the starting point, a uniform bond wave propagates across the wafers, bonding the two wafers together.
    Type: Application
    Filed: August 9, 2023
    Publication date: November 30, 2023
    Inventors: Kang-Yi Lien, I-Hsuan Chiu, Yi-Chieh Huang, Chia-Ming Hung, Kuan-Chi Tsai, Hsiang-Fu Chen
  • Patent number: D1007263
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: December 12, 2023
    Inventor: Yi-Fu Chen
  • Patent number: D1008983
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: December 26, 2023
    Assignee: TIMOTION TECHNOLOGY CO., LTD.
    Inventor: Yi-Fu Chen