Patents by Inventor Fu Chen

Fu Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230399226
    Abstract: The present disclosure relates to an integrated chip including a semiconductor device substrate and a plurality of semiconductor devices arranged along the semiconductor device substrate. A micro-electromechanical system (MEMS) layer overlies the semiconductor device substrate. The MEMS layer includes a first moveable mass and a second moveable mass. A capping layer overlies the MEMS layer. The capping layer has a first lower surface directly over the first moveable mass and a second lower surface directly over the second moveable mass. An outgas layer is on the first lower surface and directly between the first pair of sidewalls. A lower surface of the outgas layer delimits a first cavity in which the first moveable mass is arranged. The second lower surface of the capping layer delimits a second cavity in which the second moveable mass is arranged.
    Type: Application
    Filed: June 8, 2022
    Publication date: December 14, 2023
    Inventors: Fan Hu, Wen-Chuan Tai, Li-Chun Peng, Hsiang-Fu Chen, Ching-Kai Shen, Hung-Wei Liang, Jung-Kuo Tu
  • Patent number: 11842920
    Abstract: The present disclosure provides a semiconductor structure, including a transistor. The transistor includes a semiconductive substrate, a gate structure, a pair of highly doped regions and a dielectric element. The semiconductive substrate has a top surface. The gate structure is over the top surface. The pair of highly doped regions is separated by the gate structure. The dielectric element is embedded in the semiconductive substrate. The dielectric element is laterally and vertically misaligned with the pair of highly doped regions.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: December 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chun Hao Liao, Chu Fu Chen, Chun-Wei Hsu, Chia-Cheng Pao
  • Publication number: 20230392885
    Abstract: A heat exchange system having desired anti-scaling performance and an anti-scaling method thereof are disclosed. The heat exchange system at least comprises a load control unit, a temperature and pressure detection unit and an anti-scaling treatment unit. The heat exchange system conditions bonding ways of water quality in a HVAC chiller unit, an air compressor, a heat exchanger, a cooling unit, or a boiler under a variety of scaling conditions in both field operation and water quality, by integrating the interaction of those units together with the anti-scaling method for simulating water quality that has a water quality limit same as that in field operation. The heat exchange system further integrates with a testing of anti-scaling performance to make water quality no longer charged and lose the reaction power so as to prevent scaling formation, enhance the anti-scaling performance, and ensure operating efficiency and performance.
    Type: Application
    Filed: August 22, 2023
    Publication date: December 7, 2023
    Inventor: Chu-Fu CHEN
  • Patent number: 11837484
    Abstract: A method includes positioning an end effector at a height lower than a height of a wafer. The end effector is moved to a position under the wafer. A wafer backside property of the wafer is detected by using a sensor on the end effector. The wafer backside property is analyzed to obtain an analysis result.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: December 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wei-Hua Houng, Che-Fu Chen
  • Patent number: 11834332
    Abstract: A semiconductor device and method of manufacturing the device that includes a growth die and a dummy die. The method includes patterning, on an integrated circuit wafer, at one least growth die, and patterning at least one dummy die that is positioned on at least a portion of a circumference of the integrated circuit wafer. The patterned growth and dummy dies are etched on the wafer. A bond wave is initiated at a starting point on the integrated circuit wafer. The starting point is positioned on an edge of the integrated circuit wafer opposite the portion on which the at least one dummy die is patterned. Upon application of pressure at the starting point, a uniform bond wave propagates across the wafers, bonding the two wafers together.
    Type: Grant
    Filed: February 14, 2022
    Date of Patent: December 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Kang-Yi Lien, Kuan-Chi Tsai, Yi-Chieh Huang, Hsiang-Fu Chen, Chia-Ming Hung, I-Hsuan Chiu
  • Patent number: 11834325
    Abstract: Various embodiments of the present disclosure are directed towards a microelectromechanical system (MEMS) device. The MEMS device includes a first dielectric structure disposed over a first semiconductor substrate, where the first dielectric structure at least partially defines a cavity. A second semiconductor substrate is disposed over the first dielectric structure and includes a movable mass, where opposite sidewalls of the movable mass are disposed between opposite sidewall of the cavity. A first piezoelectric anti-stiction structure is disposed between the movable mass and the first dielectric structure, wherein the first piezoelectric anti-stiction structure includes a first piezoelectric structure and a first electrode disposed between the first piezoelectric structure and the first dielectric structure.
    Type: Grant
    Filed: June 15, 2022
    Date of Patent: December 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fan Hu, Chun-Ren Cheng, Hsiang-Fu Chen, Wen-Chuan Tai
  • Publication number: 20230382723
    Abstract: A semiconductor device and method of manufacturing the device that includes a growth die and a dummy die. The method includes patterning, on an integrated circuit wafer, at one least growth die, and patterning at least one dummy die that is positioned on at least a portion of a circumference of the integrated circuit wafer. The patterned growth and dummy dies are etched on the wafer. A bond wave is initiated at a starting point on the integrated circuit wafer. The starting point is positioned on an edge of the integrated circuit wafer opposite the portion on which the at least one dummy die is patterned. Upon application of pressure at the starting point, a uniform bond wave propagates across the wafers, bonding the two wafers together.
    Type: Application
    Filed: August 9, 2023
    Publication date: November 30, 2023
    Inventors: Kang-Yi Lien, I-Hsuan Chiu, Yi-Chieh Huang, Chia-Ming Hung, Kuan-Chi Tsai, Hsiang-Fu Chen
  • Publication number: 20230386948
    Abstract: A semiconductor device and method of forming such a device includes a MEMS component including one or more MEMS pixels and having a MEMS membrane substrate and a MEMS sidewall. The semiconductor device includes an analog circuit component bonded to the MEMS component, and which includes at least one analog CMOS component within an analog circuit insulative layer, and an analog circuit component substrate. The semiconductor device includes an HPC component bonded to the analog circuit component substrate. The HPC component includes at least one HPC metal component disposed within an HPC insulative layer, at least one bond pad, at least one bond pad via connecting the at least one bond pad and the at least one HPC metal component, and an HPC substrate. Additionally, the semiconductor device includes a DTC component bonded to the HPC substrate, and which includes a DTC die disposed in a DTC substrate.
    Type: Application
    Filed: May 25, 2022
    Publication date: November 30, 2023
    Inventors: You-Ru Lin, Sheng Kai Yeh, Jen-Yuan Chang, Chi-Yuan Shih, Chia-Ming Hung, Hsiang-Fu Chen, Shih-Fen Huang
  • Publication number: 20230389331
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a semiconductor substrate, and a memory cell on the semiconductor substrate, where the memory cell includes a bottom contact, a memory material on the bottom contact, a top contact on the memory material, a first electrical isolation structure laterally surrounding the top contact, and a second electrical isolation structure laterally surrounding the memory material and the bottom contact.
    Type: Application
    Filed: May 26, 2022
    Publication date: November 30, 2023
    Inventors: Tzu-Yu Chen, Sheng-Hung Shih, Fu-Chen Chang, Kuo-Chi Tu
  • Publication number: 20230382724
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including an interconnect structure overlying a semiconductor substrate. An upper dielectric structure overlies the interconnect structure. A microelectromechanical system (MEMS) substrate overlies the upper dielectric structure. A cavity is defined between the MEMS substrate and the upper dielectric structure. The MEMS substrate comprises a movable membrane over the cavity. A cavity electrode is disposed in the upper dielectric structure and underlies the cavity. A plurality of stopper structures is disposed in the cavity between the movable membrane and the cavity electrode. A dielectric protection layer is disposed along a top surface of the cavity electrode. The dielectric protection layer has a greater dielectric constant than the upper dielectric structure.
    Type: Application
    Filed: May 26, 2022
    Publication date: November 30, 2023
    Inventors: Wen-Chuan Tai, Hsiang-Fu Chen, Chia-Ming Hung, I-Hsuan Chiu, Fan Hu
  • Publication number: 20230373780
    Abstract: Various embodiments of the present disclosure are directed towards a microelectromechanical system (MEMS) device. The MEMS device includes a first dielectric structure disposed over a first semiconductor substrate, where the first dielectric structure at least partially defines a cavity. A second semiconductor substrate is disposed over the first dielectric structure and includes a movable mass, where opposite sidewalls of the movable mass are disposed between opposite sidewall of the cavity.
    Type: Application
    Filed: August 7, 2023
    Publication date: November 23, 2023
    Inventors: Fan Hu, Chun-Ren Cheng, Hsiang-Fu Chen, Wen-Chuan Tai
  • Publication number: 20230372960
    Abstract: A semiconductor process system includes a semiconductor process chamber having an interior volume. A pump extracts gases from the semiconductor process chamber via an outlet channel communicably coupled to the semiconductor process chamber. The system includes a plurality of fluid nozzles configured to prevent the backflow of particles from the outlet channel to interior volume by generating a fluid barrier within the outlet channel responsive to the pump ceasing to function.
    Type: Application
    Filed: July 31, 2023
    Publication date: November 23, 2023
    Inventors: Kai-Chin WEI, Che-fu CHEN
  • Publication number: 20230371263
    Abstract: In some embodiments, the present disclosure relates to a method of forming an integrated chip including forming a ferroelectric layer over a bottom electrode layer, forming a top electrode layer over the ferroelectric layer, performing a first removal process to remove peripheral portions of the bottom electrode layer, the ferroelectric layer, and the top electrode layer, and performing a second removal process using a second etch that is selective to the bottom electrode layer and the top electrode layer to remove portions of the bottom electrode layer and the top electrode layer, so that after the second removal process the ferroelectric layer has a surface that protrudes past a surface of the bottom electrode layer and the top electrode layer.
    Type: Application
    Filed: July 24, 2023
    Publication date: November 16, 2023
    Inventors: Chih-Hsiang Chang, Kuo-Chi Tu, Sheng-Hung Shih, Wen-Ting Chu, Tzu-Yu Chen, Fu-Chen Chang
  • Publication number: 20230367937
    Abstract: A device model parameter generation system, comprises a user module, for obtaining parameter set configurations and measurement data of devices; a parameter extraction module, for performing parameter extractions on the parameter set configurations and the measurement data, to generate a parameter set; a simulation module, for performing simulations according to the parameter set configurations and the measurement data, to generate a simulation results; an analysis module, for determining whether the devices conform to a trend according to the parameter set, to generate a first determination result, and for determining whether the devices conform to a smoothness according to the first determination result and the parameter set, to generate a second determination result; and a device model parameter generation module, for generating a device model parameters according to the second determination result and the parameter set.
    Type: Application
    Filed: July 7, 2022
    Publication date: November 16, 2023
    Applicant: GoEdge.ai
    Inventors: Chao-Quan You, Chien-Chih Chen, Yu-Ming Chang, Tien-Fu Chen, Hao-Pin Wu
  • Publication number: 20230360977
    Abstract: A method includes: transferring a wafer from a factory interface through a load lock chamber to a buffer chamber; transferring the wafer from the buffer chamber to a process chamber; etching the wafer in the process chamber, to remove a material of the wafer; and after the wafer is etched, performing reflectance measurements to the wafer in the factory interface, the load lock chamber, the buffer chamber, or combination thereof, to identify if the material of the wafer is removed entirely according to a reflectance of the wafer.
    Type: Application
    Filed: July 20, 2023
    Publication date: November 9, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yan-Hong LIU, Daniel M.Y. YANG, Che-Fu CHEN
  • Publication number: 20230355591
    Abstract: An oral pharmaceutical formulation containing an effective amount of NRC-AN-019 including its pharmaceutically acceptable salts and polymorphs thereof, by dispersing in a polymer system in a final state of subdivision to enhance oral bioavailability. It also compositions for the treatment of Chronic Myeloid Leukemia and other tumors such as head and neck cancer, prostate cancer and the like.
    Type: Application
    Filed: January 8, 2021
    Publication date: November 9, 2023
    Inventors: Chi-Jen HONG, Yen-Fu CHEN, Cheng-Ho CHUNG
  • Publication number: 20230359319
    Abstract: An electronic whiteboard system includes a data processing equipment receiving a plurality of first editing information provided by at least a portion of a plurality of client-end equipment, sorting and grouping the plurality of first editing information to select and sort from the plurality of first editing information as a plurality of pre-processing information, calculating a plurality of priority scores of the plurality of pre-processing information, sorting the plurality of pre-processing information according to the plurality of priority scores, verifying whether the plurality of pre-processing information sorted according to the priority scores are permitted to select at least one of the plurality of pre-processing information verified as permitted to generate second editing information, and executing the second editing information, so that the plurality of client-end equipment display editing results of a cloud electronic whiteboard corresponding to the second editing information.
    Type: Application
    Filed: April 27, 2023
    Publication date: November 9, 2023
    Applicant: Optoma Corporation
    Inventors: Wen-Tai Wang, Ron-Fu Chen, Cheng-Kang Ho
  • Patent number: 11806317
    Abstract: A composition comprising a grape seed extract and a black tea extract. The composition can increase testosterone secretion more effectively than a single component, and can be used for preparing pharmaceutical compositions, foods, health foods, dietary supplements or drinks used for promoting testosterone secretion.
    Type: Grant
    Filed: April 3, 2018
    Date of Patent: November 7, 2023
    Assignee: TCI CO., LTD.
    Inventors: Yung-Hsiang Lin, I-Hui Chen, Kai-Wen Kan, Fu Chen Liu, Ciao-Ting Chen
  • Publication number: 20230352540
    Abstract: A nitride-based semiconductor device includes a first and a second nitride-based semiconductor layers, a source electrode, a gate electrode, and a drain structure. The drain structure includes a first doped nitride-based semiconductor layer, an ohmic contact electrode, and a conductive layer. The first doped nitride-based semiconductor layer is in contact with the second nitride-based semiconductor layer to form a first contact interface. The ohmic contact electrode is in contact with the second nitride-based semiconductor layer to form a second contact interface. The conductive layer includes metal and in contact with the second nitride-based semiconductor layer to form a metal-semiconductor junction therebetween. The conductive layer is connected to the first doped nitride-based semiconductor layer and the ohmic contact electrode, and the ohmic contact interface is farther away from the gate electrode than the first contact interface and the second contact interface.
    Type: Application
    Filed: November 9, 2021
    Publication date: November 2, 2023
    Inventors: Qingyuan HE, Ronghui HAO, Fu CHEN, Jinhan ZHANG, King Yuen WONG
  • Patent number: D1007263
    Type: Grant
    Filed: February 24, 2022
    Date of Patent: December 12, 2023
    Inventor: Yi-Fu Chen