Abstract: The present invention relates to a plated steel sheet for hot stamping comprising a steel sheet and a Zn—Ni plating layer formed on at least one surface of the steel sheet, wherein the Zn—Ni plating layer has an Ni concentration of 8 mass % or more, a plating deposition amount of 10 g/m2 or more and 90 g/m2 or less per surface, and an average grain size of 50 nm or less.

Abstract: A steel welded member having a high LME resistance of a spot weld, i.e., a steel welded member comprised of a plurality of Zn-based plated steel materials, each comprised of a steel material and a Zn-based plating layer on its surface, joined by at least one spot weld, in which at least one of the Zn-based plated steel materials has a 780 MPa or more tensile strength, that steel material has a chemical composition containing, by mass %, C: 0.05 to 0.40%, Si: 0.2 to 3.0%, Mn: 0.1 to 5.0%, sol. Al: 0.4 to 1.50%, etc. and having a balance of Fe and impurities, and, in a region of 10 to 300 ?m from an end of a pressure weld of the spot weld, a difference of a Zn penetration depth of Zn from a Zn-based plating layer penetrating a steel material minus a depth of an internal oxidation layer formed at the steel material is within 0.1 to 10.0 ?m in range.

Abstract: A ceramic heater including a heater electrode embedded in a plate made of ceramic, wherein, of the heater electrode, a specific area surrounding portion surrounding a specific temperature area in which temperature of the plate becomes low has a smaller thickness than a normal portion of the heater electrode.

Abstract: A plated steel sheet comprises a plated layer on a surface of a steel sheet, in which in the plated layer, the total amount ?A of Sn, Bi, and In is less than 0.75%, the total amount ?B of Ca, Y, La, and Ce is 0.03 to 0.60%, the total amount ?C of Cr, Ti, Ni, Co, V, Nb, Cu, and Mn is 0 to 1.00%, Sn?Si, and 20.0?Mg/Si are satisfied, and in an X-ray diffraction pattern of a surface of the plated layer, an X-ray diffraction peak of Al2.15Zn1.85Ca, an X-ray diffraction peak of CaZn2, and an X-ray diffraction peak of ??-MgZn2 satisfy a predetermined relationship.

Abstract: The hot-dip plated steel material includes a steel material and a hot-dip plated layer disposed on a surface of the steel material, the hot-dip plated layer has a certain chemical composition, and the hot-dip plated layer has a diffraction intensity obtained from a result of X-ray diffraction measurement, the diffraction intensity satisfying a certain relationship.

Abstract: A ceramic heater with a shaft includes: a ceramic plate in which a resistance heating element is embedded; a hollow ceramic shaft having an upper end bonded to a surface on an opposite side of a wafer placement surface of the ceramic plate; and a shaft heater embedded in a side wall near an upper end of the ceramic shaft.

Abstract: High strength plated steel sheet excellent in LME resistance, that is, plated steel sheet comprising steel sheet and a plating layer containing Zn on the same, in which the steel sheet has a tensile strength of 780 MPa or more, the steel sheet has a chemical composition containing, by mass %, C: 0.05 to 0.40%, Si: 0.2 to 3.0%, Mn: 0.1 to 5.0%, sol. Al: 0.4 to 1.50%, etc. and having a balance of Fe and impurities, and, in any vertical cross section of the steel sheet, ferrite phases with a circle equivalent diameter of 1 ?m or less are contained in a region from a surface layer down to a depth of 2 ?m in a number density of 2 to 30/?m2 and the ferrite phases include internal oxides with a circle equivalent diameter of 2 to 100 nm in a number density of 3/?m2 or more.

Abstract: A wafer placement table is a ceramic sintered body with a surface provided with multiple projections that support a wafer. Of the surface of the ceramic sintered body, the area provided with no projection is a mirror surface which has a surface roughness Ra of 0.1 ?m or less. The projections are formed of an aerosol deposition film or a thermal spray film made of the same material as for the ceramic sintered body.

Abstract: A plated steel sheet for automobile structural members has a steel sheet, a plating layer formed on at least a part of a surface of the steel sheet, and an oxide layer formed on at least a part of a surface of the plating layer, the plating layer has a predetermined chemical composition, and when measurement by XPS is performed at a position 5.0 nm below a surface of the oxide layer in a thickness direction, IMg/IMgOx, which is the ratio of a maximum detected intensity of Mg to a maximum detected intensity of an oxide or hydroxide of Mg, is 0.00 or greater and 1.20 or less.

Abstract: There is provided a technique that includes: at least one process chamber in which at least one substrate is processed; a mounting stage configured to be capable of mounting the at least one substrate on the mounting stage; a transport chamber including a conveyor configured to be capable of holding the mounting stage at least two places in a vertical direction and transporting the mounting stage; and a controller configured to be capable of performing a transport control of the conveyor in the transport chamber.

Abstract: A steel sheet comprising, by mass %, C: 0.05 to 0.40%, Si: 0.2 to 3.0%, and Mn: 0.1 to 5.0%, wherein a surface layer of the steel sheet contains granular oxides, an average grain size of the granular oxides is 300 nm or less, a number density of granular oxides is 4.0/?m2 or more, the steel sheet comprises an Si—Mn depleted layer having a thickness of 3.0 ?m or more from the surface of the steel sheet, and Si and Mn contents of the Si—Mn depleted layer not containing oxides at the ½ position of the thickness are respectively less than 10% of the Si and Mn contents at the sheet thickness center part of the steel sheet, and a plated steel sheet using the same are provided.

Abstract: A wafer placement table includes a ceramic base having a wafer placement surface on its top surface and incorporating an electrode, a cooling base in which a refrigerant flow channel is formed, and a metal bonding layer that bonds the ceramic base with the cooling base. The cooling base includes a ceiling base made of a metal matrix composite material or a low thermal expansion metal material and defining a ceiling of the refrigerant flow channel, a grooved base of which a main component is made of the same ceramic material as a main component of the ceramic base and on a top surface of which a flow channel groove defining a bottom and a side wall of the refrigerant flow channel is provided, and a metal ceiling bonding layer that bonds a bottom surface of the ceiling base with the top surface of the grooved base.

Abstract: A steel welded member comprising a plurality of Zn-based plated steel materials, each having a Zn-based plating layer on a surface of a steel material, joined together through at least one spot weld, wherein the steel material contains, by mass %, C: 0.05 to 0.40%, Si: 0.2 to 3.0%, and Mn: 0.1 to 5.0%, the steel welded member includes, by area ratio, 20 to 80% of a ? phase (Fe3 Zn1 0) and at least one oxide with a long axis of 0.5 ?m or more in a region up to 0.5 mm from an end part of a pressure weld of the spot weld.

Abstract: The present invention relates to a plated steel sheet for hot stamping comprising a steel sheet and a Zn—Ni plating layer formed on at least one surface of the steel sheet, wherein the Zn—Ni plating layer has an Ni concentration of 8 mass % or more, a plating deposition amount of 10 g/m2 or more and 90 g/m2 or less per surface, and an average grain size of 50 nm or more, and a difference between a diffraction peak of the Zn—Ni plating layer after heat treating the plated steel sheet for hot stamping at 200° C. for 1 hour, and a diffraction peak of the Zn—Ni plating layer before heat treating it, is 0.3° or less.

Abstract: A steel sheet comprising, by mass %, C: 0.05 to 0.40%, Si: 0.2 to 3.0%, and Mn: 0.1 to 5.0%, wherein a surface layer of the steel sheet contains grain boundary oxides, a Ratio A of a length of the grain boundary oxides projected on a surface of the steel sheet to a length of the surface of the steel sheet is 50% or more and 100% or less, a number density of granular oxides is less than 4.0/?m2, the steel sheet comprises an Si—Mn depleted layer having a thickness of 3.0 ?m or more from the surface of the steel sheet, and Si and Mn contents of the Si—Mn depleted layer at the ½ position of the thickness and not containing oxides are respectively less than 10% of the Si and Mn contents at a sheet thickness center part of the steel sheet, and a plated steel sheet using the same are provided.

Abstract: The ceramic heater of the present invention includes: an alumina substrate having a wafer placement surface; resistance heating elements disposed in respective zones; multistage jumpers that supply electric power to the resistance heating elements, the resistance heating elements and the jumpers being embedded in the alumina substrate in this order from a wafer placement surface side; heating element connecting vias that vertically connect the resistance heating elements to the jumpers; and power supply vias exposed to the outside in order to supply electric power to the jumpers. The specific resistance of the heating element connecting vias is smaller than that of the resistance heating elements, and the absolute value of the difference between CTE of the heating element connecting vias and CTE of the alumina substrate is smaller than the absolute value of the difference between CTE of the resistance heating elements and CTE of the alumina substrate.

Abstract: A plated steel sheet includes: a steel sheet; and a plating layer that is formed on at least a part of a surface of the steel sheet, in which a chemical composition of the plating layer includes, b mass %, Al: 6.00% to 35.00 %, Mg: 3.00% to 15.00%, La+Ce: 0.0001% to 0.5000% in total, and Zn, and in a surface of the plating layer, the area ratio of a lamellar structure in which an (Al—Zn) phase and a MgZn2 phase are arranged in layers is 10% to 95%, the lamellar spacing of the lamellar structure is 2.5 ?m or less, and the area ratio of an (Al—Zn) dendrite is 10% or less.

Abstract: High strength plated steel sheet having high hydrogen embrittlement resistance, that is, alloyed hot dip galvannealed steel sheet including steel sheet containing C: 0.05 to 0.40%, Si: 0.2 to 3.0%, Mn: 0.1 to 5.0%, and sol. Al: 0.4 to 1.50% and a alloyed hot dip galvannealed layer deposited on at least one surface of the steel sheet to 10 to 100 g/m2 and containing Fe: 5.0 to 15.0% and Al: 0.01 to 1.0%, having an internal oxidation layer including grain boundary oxides in a surface layer of the steel sheet, when examining a cross-section of a surface layer of the steel sheet, a Ratio A of the length of the grain boundary oxides projected an interface of the steel sheet and the alloyed hot dip galvannealed layer to the length of interface is 50% or more and 100% or less, and a surface depleted layer with a steel composition not including the grain boundary oxides which satisfies, by mass %, Si?0.6% and Al?0.05% is included at a depth of ½ of the average depth of the internal oxidation layer.

Abstract: A hot stamped steel includes a base material, a plated layer that is formed on a surface of the base material, and an oxide film that is formed on a surface of the plated layer; chemical composition of the plated layer contains 20.00 to 45.00 mass % of Al, 10.00 to 45.00 mass % of Fe, 4.50 to 15.00 mass % of Mg, 0.10 to 3.00 mass % of Si, 0.05 to 3.00 mass % of Ca, 0 to 0.50 mass % of Sb, 0 to 0.50 mass % of Pb, 0 to 1.00 mass % of Cu, 0 to 1.00 mass % of Sn, 0 to 1.00 mass % of Ti, 0 to 0.50 mass % of Sr, 0 to 1.00 mass % of Cr, 0 to 1.00 mass % of Ni, and 0 to 1.00 mass % of Mn with a remainder of Zn and impurities; and chemical composition of the oxide film contains 20.0 to 55.0 at % of Mg, 0.5 to 15.0 at % of Ca, 0 to 15.0 at % of Zn, and 0 at % or more and less than 10.0 at % of Al with a remainder of O and a total of 5.0 at % or less of impurities, and the adhesion amount of the oxide film per one surface is in a range of 0.01 to 10 g/m2.

Abstract: High strength steel sheet and plated steel sheet having high plateability, LME resistance, and hydrogen embrittlement resistance, that is, steel sheet containing C: 0.05 to 0.40%, Si: 0.2 to 3.0%, Mn: 0.1 to 5.0%, and sol. Al: 0.4 to 1.50%, having an internal oxidation layer including fine granular oxides in a surface layer of the steel sheet, a number density of fine granular oxides in the internal oxidation layer being 4.0/?m2 or more, and including a surface depleted layer with a steel composition not including oxides which satisfies, by mass %, Si?0.6% and Al?0.05% at a depth of ½ of the average depth of the internal oxidation layer calculated from the cross-sectional SEM image of the steel sheet, and a plated steel sheet using the same.