Abstract: A plated steel sheet having excellent post-coating corrosion resistance includes: a steel; and a plating layer that is provided on a surface of the steel, in which the plating layer includes, by mass %, Al: 5.00% to 35.00%, Mg: 2.50% to 13.00%, Fe: 5.00% to 35.00%, Si: 0% to 2.00%, Ca: 0% to 2.00%, and a remainder consisting of Zn and impurities, and in a cross section of the plating layer, the area fraction of a Fe2Al5 phase is 5.0% to 60.0%, the area fraction of an eutectic structure of Zn and MgZn2 is 10.0% to 80.0%, the area fraction of a massive MgZn2 phase is 5.0% to 40.0%, and the area fraction of a remainder is 10.0% or less.

Abstract: A ceramic heater including a heater electrode embedded in a plate made of ceramic, wherein, of the heater electrode, a specific area surrounding portion surrounding a specific temperature area in which temperature of the plate becomes low has a smaller thickness than a normal portion of the heater electrode.

Abstract: A wafer placement table is a ceramic sintered body with a surface provided with multiple projections that support a wafer. Of the surface of the ceramic sintered body, the area provided with no projection is a mirror surface which has a surface roughness Ra of 0.1 ?m or less. The projections are formed of an aerosol deposition film or a thermal spray film made of the same material as for the ceramic sintered body.

Abstract: A ceramic heater with a shaft includes: a ceramic plate in which a resistance heating element is embedded; a hollow ceramic shaft having an upper end bonded to a surface on an opposite side of a wafer placement surface of the ceramic plate; and a shaft heater embedded in a side wall near an upper end of the ceramic shaft.

Abstract: A ceramic heater with a shaft includes: a ceramic plate in which resistance heating element is embedded; a hollow ceramic shaft bonded to the surface on an opposite side of a wafer placement surface of the ceramic plate; a conductive film provided in an axial direction to extend on the internal circumferential surface of the ceramic shaft; a recessed section provided to reach a terminal of the resistance heating element from the surface on the opposite side of the wafer placement surface of the ceramic plate, the recessed section having a bottom surface to which a lower surface of the terminal is exposed and a lateral surface to which a surface of the conductive film is exposed; and a connection member which is filled in the recessed section, and electrically connects the lower surface of the terminal and the surface of the conductive film.

Abstract: An electrostatic chuck heater includes an electrostatic chuck including an electrostatic electrode embedded in a ceramic sintered body, a cooling member cooling the electrostatic chuck, and a heater layer disposed between the electrostatic chuck and the cooling member and including a plurality of metal layers embedded therein in multiple stages, the metal layers including resistance heating element layers. The heater layer includes a ceramic insulating layer with a thickness of 2 ?m or more and 50 ?m or less between the metal layers.

Abstract: A ceramic heater with a shaft includes: a ceramic plate in which resistance heating elements are embedded; a hollow ceramic shaft bonded to a surface on an opposite side of a wafer placement surface of the ceramic plate; multiple vertical grooves provided in an internal circumferential surface of the ceramic shaft in an axial direction; conductive films provided in the multiple vertical grooves, respectively; and connection members that each electrically connect a terminal of the resistance heating elements to a corresponding one of the conductive films.

Abstract: A ceramic heater with a shaft includes a ceramic plate in which an RF electrode and a resistance heating element are embedded; a hollow ceramic shaft provided on a surface on an opposite side of a wafer placement surface of the ceramic plate; an RF power supply rod which is housed in an inner space of the ceramic shaft, and a heating element power supply rod which is housed in the inner space of the ceramic shaft, wherein an outer circumferential surface of a portion of at least one of the RF power supply rod and the heating element power supply rod is covered with an insulating thin film which is an aerosol deposition film or a thermal spray film, the portion being located in the inner space of the ceramic shaft.

Abstract: An electrostatic chuck includes a ceramic base, a ceramic dielectric layer, an electrostatic electrode, and a ceramic insulating layer. The ceramic dielectric layer is positioned on the ceramic base and is thinner than the ceramic base. The electrostatic electrode is embedded between the ceramic dielectric layer and the ceramic base. The ceramic insulating layer is positioned on the ceramic dielectric layer and is thinner than the ceramic dielectric layer. The ceramic insulating layer has a higher volume resistivity and withstand voltage than the ceramic dielectric layer, and the ceramic dielectric layer has a higher dielectric constant than the ceramic insulating layer.

Abstract: A wafer placement table includes: an electrostatic chuck that is a ceramic sintered body in which an electrode for electrostatic adsorption is embedded; a cooling member which is bonded to a surface on an opposite side of a wafer placement surface of the electrostatic chuck, and cools the electrostatic chuck; a hole for power supply terminal, the hole penetrating the cooling member in a thickness direction; and a power supply terminal which is bonded to the electrode for electrostatic adsorption from the surface on the opposite side of the wafer placement surface of the electrostatic chuck, and is inserted in the hole for power supply terminal. The outer peripheral surface of a portion of the power supply terminal is covered with an insulating thin film that is formed by coating of an insulating material, the portion being inserted in the hole for power supply terminal.

Abstract: A method for producing a member for a semiconductor manufacturing apparatus includes (a) a step of providing an electrostatic chuck, a supporting substrate, and a metal bonding material, the electrostatic chuck being made of a ceramic and having a form of a flat plate, the supporting substrate including a composite material having a difference in linear thermal expansion coefficient at 40 to 570° C. from the ceramic of 0.2×10?6/K or less in absolute value, and (b) a step of interposing the metal bonding material between a concave face of the supporting substrate and a face of the electrostatic chuck opposite to a wafer mounting face, and thermocompression bonding the supporting substrate and the electrostatic chuck at a predetermined temperature to deform the electrostatic chuck to the shape of the concave face.

Abstract: An electrostatic chuck includes a ceramic plate through holes which penetrate the plate, and a pair of positive and negative electrodes. The plate has division areas virtually divided, which are equal in number to the number of the through holes. The positive electrode and the negative electrode have pairs of positive and negative helical electrode portions, and for each of the division areas, one of the pairs is provided in parallel so as to cover the entirety of the division area from each of a positive electrode start point and a negative electrode start point which are close to one of the through holes. The positive electrode is such that the positive helical electrode portions are connected via outer circumferential portions of the plate, and the negative electrode is such that the negative helical electrode portions are connected via a central portion of the plate.

Abstract: Provided is a negative electrode for a lithium ion secondary battery capable of obtaining a lithium ion secondary battery having a high capacity and excellent charge-and-discharge cycle characteristics. A negative electrode for a lithium ion secondary battery (1) includes: a current collector (3) composed of a metal porous body having a three-dimensional network structure (2); and a negative electrode active material (4) held on the current collector (3). An overcoat layer (5) covering an outer surface of the current collector (3) is included, and the overcoat layer (5) includes hard carbon.

Abstract: A ceramic heater includes a ceramic plate, a planar electrode, and a resistive heating element. A first via, a second via, a coupler, and a reinforcement portion are embedded in the ceramic plate. The first via is conductive and extends from the resistive heating element toward a via through-hole. The second via is conductive and extends from the via through-hole in a direction opposite a direction toward the resistive heating element. The coupler is conductive and electrically couples the first via and the second via with each other. The reinforcement portion is disposed inside the via through-hole 16 between the coupler and an inner circumferential surface around the via through-hole and is composed of a material that is the same as the material of the ceramic plate.

Abstract: An electrostatic chuck heater according to the present invention includes an alumina substrate having a wafer placement surface on its upper surface; an electrostatic electrode, a resistance heating element provided for each zone, and a multilayer jumper wire for supplying power to the resistance heating element, which are buried in the alumina substrate in this order from the wafer placement surface side; a heating element coupling via for vertically coupling the resistance heating element to the jumper wire; and a power supply via extending outward for supplying power to the jumper wire. At least the heating element coupling via and the power supply via contain ruthenium metal.

Abstract: The ceramic heater of the present invention includes: an alumina substrate having a wafer placement surface; resistance heating elements disposed in respective zones; multistage jumpers that supply electric power to the resistance heating elements, the resistance heating elements and the jumpers being embedded in the alumina substrate in this order from a wafer placement surface side; heating element connecting vias that vertically connect the resistance heating elements to the jumpers; and power supply vias exposed to the outside in order to supply electric power to the jumpers. The specific resistance of the heating element connecting vias is smaller than that of the resistance heating elements, and the absolute value of the difference between CTE of the heating element connecting vias and CTE of the alumina substrate is smaller than the absolute value of the difference between CTE of the resistance heating elements and CTE of the alumina substrate.

Abstract: Provided is a lithium ion secondary battery electrode allowing excellent charge-and-discharge cycle characteristics to be obtained when used in a lithium ion secondary battery. The lithium ion secondary battery electrode includes a current collector composed of a metal porous body having a three-dimensional network structure in which columnar skeletons are three-dimensionally connected, a first active material held on one side of the current collector, and a second active material held on the other side of the current collector.

Abstract: To provide an electrode for lithium ion secondary batteries, and a lithium ion secondary battery made using this electrode for lithium ion secondary batteries, which can suppress an increase in electron resistance of a current collector area, and improve heat dissipation, in an electrode for lithium ion secondary batteries establishing a foam metal body as the collector. In the electrode for lithium ion secondary batteries made using a foam porous body consisting of metal as a current collector, the electrode shape is rectangular, and a current collector region is made to span at least two adjacent sides.

Abstract: To provide an electrode for lithium ion secondary batteries, and a lithium ion secondary battery made using this electrode for lithium ion secondary batteries, which can sufficiently secure electron conductivity between a foam metal body and an electrode active material in an electrode for lithium ion secondary batteries which establish a foam metal body as the collector, reduce the resistance of a lithium ion secondary batter, and improve the durability. A carbon layer consisting of carbon material is disposed on a surface of a foam porous body consisting of metal, and used as a collector. More specifically, an electrode for lithium ion secondary batteries includes a collector, and an electrode mixture filled into the collector, in which the collector is made to have a carbon layer consisting of carbon material on a surface of a foam porous body consisting of metal.

Abstract: In a lithium ion secondary battery (1), a positive electrode (2) and a negative electrode (3) are alternately adjacent to each other via separators (4) and (5). The positive electrode (2) includes a positive electrode current collector composed of a metal porous body, a first positive electrode active material (21) held on one side of the positive electrode current collector, and a second positive electrode active material (22) held on the other side. The negative electrode (3) includes a negative electrode current collector composed of a metal porous body, a first negative electrode active material (31) held on one side of the negative electrode current collector, and a second negative electrode active material (32) held on the other side. The first positive electrode active material (21) faces the first negative electrode active material (31), and the positive electrode active material (22) faces the second negative electrode active material (32).