Patents by Inventor Hsiang-Lan Lung

Hsiang-Lan Lung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11362276
    Abstract: A phase-change material having specific SiOx doping into special Ge-rich GexSbyTez material is described. Integrated circuits using this phase-change material as memory elements in a memory array can pass the solder bonding criteria mentioned above, while exhibiting good set speeds and demonstrating good 10 year data retention characteristics. A memory cell described herein comprises a first electrode and a second electrode; and a memory element in electrical series between the first and second electrode. The memory element comprises a GexSbyTez phase change material with a silicon oxide additive, including a combination of elements having Ge in a range of 28 to 36 at %, Sb in a range of 10 to 20 at %, Te in a range of 25 to 40 at %, Si in a range of 5 to 10 at %, and O in a range of 12 to 23 at %.
    Type: Grant
    Filed: March 27, 2020
    Date of Patent: June 14, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Huai-Yu Cheng, Hsiang-Lan Lung
  • Patent number: 11355552
    Abstract: A memory material and a memory device applying the same are provided. The memory material is a chalcogenide doped with carbon atom. The chalcogenide contains arsenic (As) atom, selenium (Se) atom, germanium (Ge) atom and silicon (Si) atom.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: June 7, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Huai-Yu Cheng, I-Ting Kuo, Hsiang-Lan Lung
  • Patent number: 11315826
    Abstract: A three-dimensional memory device includes a substrate, a plurality of horizontal conductive layers, a plurality of vertical memory structures and a vertical conductive post. The conductive layers are located above the substrate, and immediately-adjacent two of the conductive layers are spaced by a first air gap. The memory structures pass through the conductive layers and are connected to the substrate. The conductive post is located between immediately-adjacent two of the memory structures and passes through the conductive layers and is connected to the substrate. The conductive post is spaced from immediately-adjacent edges of the conductive layers by a second air gap.
    Type: Grant
    Filed: February 5, 2020
    Date of Patent: April 26, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Patent number: 11315945
    Abstract: A memory device includes a stack structure, a memory element, a channel element, and a semiconductor layer. The stack structure includes a source layer, an insulating layer and gate electrode layers. The insulating layer is on the source layer. The gate electrode layers are on the insulating layer. The memory element is on electrode sidewall surfaces of the gate electrode layers. Memory cells are defined in the memory element between the channel element and the gate electrode layers. The semiconductor layer is electrically connected between the source layer and the channel element. The semiconductor layer and the source layer have an interface therebetween. The interface is at a location on an inside of an insulating sidewall surface of the insulating layer with a lateral offset relative to the insulating sidewall surface.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: April 26, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Publication number: 20220123209
    Abstract: A switching device having a first electrode, a second electrode, and a switching layer between the first and second electrodes, formed using a chalcogenide composition doped with an element that suppresses oxidation, which results in improved manufacturability and yield. For selector material based on AsSeGeSi or other chalcogenide materials that include selenium or arsenic, or other chalcogenide materials that include selenium or arsenic and silicon, the element added to suppress oxidation can be sulfur.
    Type: Application
    Filed: October 16, 2020
    Publication date: April 21, 2022
    Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Huai-Yu CHENG, I-Ting KUO, Hsiang-Lan LUNG, Cheng-Wei CHENG, Matthew J. BRIGHTSKY
  • Patent number: 11289540
    Abstract: An ovonic threshold switch includes a first electrode, a second electrode, and an In-doped chalcogenide-based selector layer disposed between the first electrode and the second electrode, in which the In-doped chalcogenide-based selector layer has an In compound content of about 2 at. % to about 10 at. %. A memory cell including the In-doped chalcogenide-based selector layer is also provided.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: March 29, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Huai-Yu Cheng, I-Ting Kuo, Hsiang-Lan Lung
  • Patent number: 11271155
    Abstract: An ovonic threshold switch comprises a thin film composed essentially of Si, Ge, Se, As, and an amount of a chalcogen that is effective to passivate oxidation of the composition in the presence of water vapor, wherein the chalcogen is selected from the list consisting of: Te and S. In one or more embodiments, the chalcogen is S. In one or more embodiments, the chalcogen is Te. In one or more embodiments, the effective amount of the chalcogen is greater than 1% by atomic percent. In one or more embodiments, the effective amount of the chalcogen is less than 10% by atomic percent. In one or more embodiments, the composition of matter comprises 10% Si, 15% Ge, 40% Se, 30% As, and 5% chalcogen by atomic percent.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: March 8, 2022
    Assignees: International Business Machines Corporation, MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Cheng-Wei Cheng, Huai-Yu Cheng, I-Ting Kuo, Hsiang-Lan Lung
  • Publication number: 20220069211
    Abstract: A pillar-shaped structure and a line-shaped structure are described that include a supporting top conductive layer, an active material layer, such as a memory material or switching material, and a bottom conductive layer. The active material layer is more narrow than the supporting top conductive layer. A supporting side insulating layer is formed connecting the top and bottom conductive layers to provide structure stability. A void, or air gap, is formed between the active material layer and the supporting side insulating layer, which can provide improved thermal isolation between adjacent pillar-shaped or line-shaped structures.
    Type: Application
    Filed: September 3, 2020
    Publication date: March 3, 2022
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Hsiang-Lan LUNG, Chiao-Wen YEH
  • Publication number: 20220045128
    Abstract: A memory material and a memory device applying the same are provided. The memory material is a chalcogenide doped with carbon atom. The chalcogenide contains arsenic (As) atom, selenium (Se) atom, germanium (Ge) atom and silicon (Si) atom.
    Type: Application
    Filed: August 6, 2020
    Publication date: February 10, 2022
    Inventors: Huai-Yu CHENG, I-Ting KUO, Hsiang-Lan LUNG
  • Patent number: 11211395
    Abstract: A device comprises a column of cells disposed in multiple levels of word lines including a pillar comprising a first vertical conductive line, a second vertical conductive line, and a vertical semiconductor body disposed between and in contact with the first and second vertical conductive lines. A pillar select line is adjacent to and separated by a gate dielectric from the vertical semiconductor body to form a pillar select switch, the pillar select line disposed beneath the first and second vertical conductive lines. A bottom select line is disposed beneath the first and second vertical conductive lines and insulated from the pillar select line and the first and second vertical conductive lines. The bottom select line is in current-flow contact with the vertical semiconductor body of the pillar.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: December 28, 2021
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventor: Hsiang-Lan Lung
  • Publication number: 20210391303
    Abstract: A semiconductor device includes a package substrate and at least one stacked structure. The package substrate has an upper surface. The stacked structure is disposed on the upper surface of the package substrate, and the stacking direction of the stacked structure is perpendicular to the upper surface. The stacked structure includes at least one non-volatile memory die, at least one dynamic random access memory die, and at least one memory control die.
    Type: Application
    Filed: June 12, 2020
    Publication date: December 16, 2021
    Inventor: Hsiang-Lan Lung
  • Publication number: 20210375360
    Abstract: A multi-level cell (MLC) one-selector-one-resistor (1S1R) three-dimensional (3D) cross-point memory system includes at least one MLC 1S1R structure including a stacked arrangement of a phase change memory (PCM) cell and a threshold switch selector. An electrically conductive bit line is in electrical communication with the OTS selector, and an electrically conductive word line is in electrical communication with the PCM cell. A controller is in electrical communication with the bit line and the word line. The controller is configured to select at least one voltage pulse from a group of different voltage pulses comprising a read pulse, a partial set pulse, a set pulse, a partial reset pulse, and a reset pulse, and configured to deliver the selected at least one voltage pulse to the at least one MLC 1S1R structure.
    Type: Application
    Filed: August 17, 2021
    Publication date: December 2, 2021
    Inventors: Nanbo Gong, Wei-Chih Chien, Matthew Joseph BrightSky, Christopher P. Miller, Hsiang-Lan Lung
  • Patent number: 11158787
    Abstract: A voltage sensitive switching device has a first electrode, a second electrode, and a switching layer between the first and second electrodes, comprising a composition of carbon C, arsenic As, selenium Se and germanium Ge thermally stable to temperatures over 400° C. The switching device is used in 3D crosspoint memory.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: October 26, 2021
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Huai-Yu Cheng, I-Ting Kuo, Hsiang-Lan Lung
  • Patent number: 11139025
    Abstract: A multi-level cell (MLC) one-selector-one-resistor (1S1R) three-dimensional (3D) cross-point memory system includes at least one MLC 1S1R structure including a stacked arrangement of a phase change memory (PCM) cell and a threshold switch selector. An electrically conductive bit line is in electrical communication with the OTS selector, and an electrically conductive word line is in electrical communication with the PCM cell. A controller is in electrical communication with the bit line and the word line. The controller is configured to select at least one voltage pulse from a group of different voltage pulses comprising a read pulse, a partial set pulse, a set pulse, a partial reset pulse, and a reset pulse, and configured to deliver the selected at least one voltage pulse to the at least one MLC 1S1R structure.
    Type: Grant
    Filed: January 22, 2020
    Date of Patent: October 5, 2021
    Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, MACRONIX INTERNATIONAL CO., LTD
    Inventors: Nanbo Gong, Wei-Chih Chien, Matthew Joseph BrightSky, Christopher P. Miller, Hsiang-Lan Lung
  • Publication number: 20210305507
    Abstract: A phase-change material having specific SiOx doping into special Ge-rich GexSbyTez material is described. Integrated circuits using this phase-change material as memory elements in a memory array can pass the solder bonding criteria mentioned above, while exhibiting good set speeds and demonstrating good 10 year data retention characteristics. A memory cell described herein comprises a first electrode and a second electrode; and a memory element in electrical series between the first and second electrode. The memory element comprises a GexSbyTez phase change material with a silicon oxide additive, including a combination of elements having Ge in a range of 28 to 36 at %, Sb in a range of 10 to 20 at %, Te in a range of 25 to 40 at %, Si in a range of 5 to 10 at %, and O in a range of 12 to 23 at %.
    Type: Application
    Filed: March 27, 2020
    Publication date: September 30, 2021
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Huai-Yu CHENG, Hsiang-Lan LUNG
  • Publication number: 20210288251
    Abstract: An ovonic threshold switch comprises a thin film composed essentially of Si, Ge, Se, As, and an amount of a chalcogen that is effective to passivate oxidation of the composition in the presence of water vapor, wherein the chalcogen is selected from the list consisting of: Te and S. In one or more embodiments, the chalcogen is S. In one or more embodiments, the chalcogen is Te. In one or more embodiments, the effective amount of the chalcogen is greater than 1% by atomic percent. In one or more embodiments, the effective amount of the chalcogen is less than 10% by atomic percent. In one or more embodiments, the composition of matter comprises 10% Si, 15% Ge, 40% Se, 30% As, and 5% chalcogen by atomic percent.
    Type: Application
    Filed: March 10, 2020
    Publication date: September 16, 2021
    Inventors: Cheng-Wei Cheng, Huai-Yu Cheng, I-Ting Kuo, Hsiang-Lan Lung
  • Publication number: 20210249600
    Abstract: A memory element comprises a carbon deposit, such as a carbon buffer layer, on a body of phase change memory material, disposed between first and second electrodes. A carbon deposit is found to improve endurance of phase change memory cells by five orders of magnitude or more. Examples include “mushroom” style memory elements, as well as other types including 3D arrays of cross-point elements.
    Type: Application
    Filed: February 11, 2020
    Publication date: August 12, 2021
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Wei-Chih CHIEN, Hsiang-Lan LUNG
  • Publication number: 20210242072
    Abstract: A three-dimensional memory device includes a substrate, a plurality of horizontal conductive layers, a plurality of vertical memory structures and a vertical conductive post. The conductive layers are located above the substrate, and immediately-adjacent two of the conductive layers are spaced by a first air gap. The memory structures pass through the conductive layers and are connected to the substrate. The conductive post is located between immediately-adjacent two of the memory structures and passes through the conductive layers and is connected to the substrate. The conductive post is spaced from immediately-adjacent edges of the conductive layers by a second air gap.
    Type: Application
    Filed: February 5, 2020
    Publication date: August 5, 2021
    Inventors: Erh-Kun LAI, Hsiang-Lan LUNG
  • Publication number: 20210225441
    Abstract: A multi-level cell (MLC) one-selector-one-resistor (1S1R) three-dimensional (3D) cross-point memory system includes at least one MLC 1S1R structure including a stacked arrangement of a phase change memory (PCM) cell and a threshold switch selector. An electrically conductive bit line is in electrical communication with the OTS selector, and an electrically conductive word line is in electrical communication with the PCM cell. A controller is in electrical communication with the bit line and the word line. The controller is configured to select at least one voltage pulse from a group of different voltage pulses comprising a read pulse, a partial set pulse, a set pulse, a partial reset pulse, and a reset pulse, and configured to deliver the selected at least one voltage pulse to the at least one MLC 1S1R structure.
    Type: Application
    Filed: January 22, 2020
    Publication date: July 22, 2021
    Inventors: Nanbo Gong, Wei-Chih Chien, Matthew Joseph BrightSky, Christopher P. Miller, Hsiang-Lan Lung
  • Patent number: 11069704
    Abstract: A memory device comprises a plurality of stacks of bit lines alternating with insulating strips over an insulating layer on a substrate, and a plurality of vertical gate structures disposed between the stacks. Vertical channel structures and memory elements are disposed between outside surfaces of the vertical gate structures and sidewalls of insulating strips in the stacks of bit lines. The vertical channel structures provide channels between adjacent bit lines in the stacks. A plurality of word line transistors is disposed over and connected to respective vertical gate structures. A plurality of word lines is disposed over and connected to the word line transistors. The memory device comprises circuitry connected to the bit lines to apply bit line and source line voltages to the bit lines.
    Type: Grant
    Filed: April 9, 2019
    Date of Patent: July 20, 2021
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung