Patents by Inventor Hua Pan

Hua Pan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10971606
    Abstract: A method for manufacturing a semiconductor device includes forming a shallow trench isolation (STI) structure surrounding a pair of semiconductor fins; forming a dummy gate layer over the STI structure and the semiconductor fins; etching a first portion of the dummy gate layer to form a trench through the dummy gate layer until the STI structure is exposed, in which the trench extends between the semiconductor fins along a lengthwise direction of the semiconductor fins; forming an insulating structure in the trench through the dummy gate layer; after forming the insulating structure extending through the dummy gate layer, patterning the dummy gate layer to form a pair of dummy gate structures each of which is across a respective one of the semiconductor fins; and replacing the dummy gate structures with a pair of metal gate structures.
    Type: Grant
    Filed: July 8, 2019
    Date of Patent: April 6, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ming-Heng Tsai, Chun-Sheng Liang, Kuo-Hua Pan
  • Publication number: 20210098312
    Abstract: A method for forming a semiconductor structure is provided. The method for forming the semiconductor structure includes forming a first fin structure with a first composition and a second fin structure with a second composition, oxidizing the first fin structure to form a first oxide layer and oxidizing the second fin structure to form a second oxide layer, removing the second oxide layer formed on the second fin structure, oxidizing the second fin structure to form a third oxide layer over the second fin structure, and forming a first metal gate electrode layer over the first oxide layer and a second metal gate electrode layer over the third oxide layer.
    Type: Application
    Filed: September 27, 2019
    Publication date: April 1, 2021
    Inventors: Hsin-Che CHIANG, Yu-San CHIEN, Ta-Chun LIN, Chun-Sheng LIANG, Kuo-Hua PAN
  • Publication number: 20210082686
    Abstract: A method includes providing a semiconductor substrate; epitaxially growing a blocking layer from a top surface of the semiconductor substrate, wherein the blocking layer has a lattice constant different from the semiconductor substrate; epitaxially growing a semiconductor layer above the blocking layer; patterning the semiconductor layer to form a semiconductor fin, wherein the blocking layer is under the semiconductor fin; forming a source/drain (S/D) feature in contact with the semiconductor fin; and forming a gate structure engaging the semiconductor fin.
    Type: Application
    Filed: September 17, 2019
    Publication date: March 18, 2021
    Inventors: Hsin-Che Chiang, Wei-Chih Kao, Chun-Sheng Liang, Kuo-Hua Pan
  • Patent number: 10947281
    Abstract: The invention provides compositions and kits including at least one nucleic acid or polypeptide molecule encoding for a mutant ChR2 protein. Methods of the invention include administering a composition comprising a mutant ChR2 to a subject to preserve, improve, or restore phototransduction. Preferably, the compositions and methods of the invention are provided to a subject having impaired vision, thereby restoring vision to normal levels.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: March 16, 2021
    Assignee: Wayne State University
    Inventor: Zhuo-hua Pan
  • Publication number: 20210069119
    Abstract: A targeting nanoparticle composition and method of treatment for diseases associated with major basement membrane components of blood vessels accessible from blood stream is presented. The composition includes pegylated perfluorocarbon nanoparticles having a targeting ligand attached that targets the basement membrane components, specifically collagen IV. The targeted nanoparticles may contain at least one pharmaceutically active agent capable of treating a glomerular disease such as lupus nephritis.
    Type: Application
    Filed: November 17, 2020
    Publication date: March 11, 2021
    Inventors: Ruisheng Liu, Samuel A. Wickline, Jin Wei, Hua Pan, Jie Zhang
  • Publication number: 20210074841
    Abstract: A method includes depositing a semiconductor stack within a first region and a second region on a substrate, the semiconductor stack having alternating layers of a first type of semiconductor material and a second type of semiconductor material. The method further includes removing a portion of the semiconductor stack from the second region to form a trench and with an epitaxial growth process, filling the trench with the second type of semiconductor material.
    Type: Application
    Filed: September 10, 2019
    Publication date: March 11, 2021
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Publication number: 20210066476
    Abstract: An embodiment method includes: forming a semiconductor liner layer on exposed surfaces of a fin structure that extends above a dielectric isolation structure disposed over a substrate; forming a first capping layer to laterally surround a bottom portion of the semiconductor liner layer; forming a second capping layer over an upper portion of the semiconductor liner layer; and annealing the fin structure having the semiconductor liner layer, the first capping layer, and the second capping layer thereon, the annealing driving a dopant from the semiconductor liner layer into the fin structure, wherein a dopant concentration profile in a bottom portion of the fin structure is different from a dopant concentration profile in an upper portion of the fin structure.
    Type: Application
    Filed: July 10, 2020
    Publication date: March 4, 2021
    Inventors: Wei-Chih Kao, Hsin-Che Chiang, Yu-San Chien, Chun-Sheng Liang, Kuo-Hua Pan
  • Publication number: 20210066119
    Abstract: Semiconductor structures and methods are provided. A semiconductor structure according to an embodiment includes a first cell disposed over a first well doped with a first-type dopant, a second cell disposed over the first well, and a tap cell disposed over a second well doped with a second-type dopant different from the first-type dopant. The tap cell is sandwiched between the first cell and the second cell. The first cell includes a first plurality of transistors and the second cell includes a second plurality of transistors.
    Type: Application
    Filed: November 26, 2019
    Publication date: March 4, 2021
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Publication number: 20210057544
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary semiconductor device comprises a nanostructure disposed over a substrate, wherein the nanostructure includes a plurality of semiconductor layers separated vertically from each other and a dummy pattern layer including dielectric material disposed over and separated vertically from a top semiconductor layer of the plurality of semiconductor layers. The exemplary semiconductor device also comprises a gate structure disposed over a channel region, wherein the gate structure wraps around each of the plurality of semiconductor layers and the dummy pattern layer of the nanostructure.
    Type: Application
    Filed: August 21, 2019
    Publication date: February 25, 2021
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
  • Patent number: 10930752
    Abstract: A method includes forming a transistor, which includes forming a dummy gate stack over a semiconductor region, and forming an Inter-Layer Dielectric (ILD). The dummy gate stack is in the ILD, and the ILD covers a source/drain region in the semiconductor region. The method further includes removing the dummy gate stack to form a trench in the first ILD, forming a low-k gate spacer in the trench, forming a replacement gate dielectric extending into the trench, forming a metal layer to fill the trench, and performing a planarization to remove excess portions of the replacement gate dielectric and the metal layer to form a gate dielectric and a metal gate, respectively. A source region and a drain region are then formed on opposite sides of the metal gate.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: February 23, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuo-Hua Pan, Je-Wei Hsu, Hua Feng Chen, Jyun-Ming Lin, Chen-Huang Peng, Min-Yann Hsieh, Java Wu
  • Publication number: 20200411363
    Abstract: A method for forming a semiconductor device structure is provided. The method includes forming first and second well regions with different conductivity types in a semiconductor substrate. A well interface is formed between the first and second well regions. The method also includes patterning the semiconductor substrate to form a first fin structure in the first well region, a second fin structure in the second well region, and a first trench between the first and second fin structures. The first trench exposes the well interface in the semiconductor substrate. The method further includes forming insulating spacers on opposite sidewalls of the first trench and etching the semiconductor substrate below the first trench using the insulating spacers as an etch mask, to form a second trench below the first trench. In addition, the method includes filling the first and second trenches with an insulating material.
    Type: Application
    Filed: September 11, 2020
    Publication date: December 31, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ta-Chun LIN, Tien-Shao CHUANG, Kuang-Cheng TAI, Chun-Hung CHEN, Chih-Hung HSIEH, Kuo-Hua PAN, Jhon-Jhy LIAW
  • Patent number: 10879110
    Abstract: The present disclosure provides an integrated circuit (IC) structure. The IC structure includes first and second fins formed on a semiconductor substrate and laterally separated from each other by an isolation feature, the isolation feature formed of a dielectric material that physically contacts the semiconductor substrate; and a contact feature between the first and second fins and extending into the isolation feature thereby defining an air gap vertically between the isolation feature and the contact feature, the dielectric material of the isolation feature extending from the semiconductor substrate to the contact feature.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: December 29, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wen-Che Tsai, Min-Yann Hsieh, Hua Feng Chen, Kuo-Hua Pan
  • Patent number: 10872980
    Abstract: A semiconductor device includes a substrate, an inter-layer dielectric layer, a contact plug, and a contact hole liner. The substrate has a source/drain region. The inter-layer dielectric layer is over the substrate and has a contact hole therein. The contact plug is electrically connected to the source/drain region through the contact hole of the inter-layer dielectric layer. The contact hole liner extends between the contact plug and a sidewall of a first portion of the contact hole. The contact hole liner terminates prior to reaching a second portion of the contact hole. The first portion is between the second portion and the source/drain region.
    Type: Grant
    Filed: April 25, 2017
    Date of Patent: December 22, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wen-Che Tsai, Min-Yann Hsieh, Hua-Feng Chen, Kuo-Hua Pan
  • Patent number: 10867806
    Abstract: A method of forming a gate structure of a semiconductor device including depositing a high-k dielectric layer over a substrate is provided. A dummy metal layer is formed over the high-k dielectric layer. The dummy metal layer includes fluorine. A high temperature process is performed to drive the fluorine from the dummy metal layer into the high-k dielectric layer thereby forming a passivated high-k dielectric layer. Thereafter, the dummy metal layer is removed. At least one work function layer over the passivated high-k dielectric layer is formed. A fill metal layer is formed over the at least one work function layer.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Che Chiang, Ju-Yuan Tzeng, Chun-Sheng Liang, Shu-Hui Wang, Kuo-Hua Pan
  • Patent number: 10854506
    Abstract: A semiconductor device includes a substrate, a gate stack over the substrate, an insulating structure over the gate stack, a conductive via in the insulating structure, and an contact etch stop layer (CESL) over the insulating structure. The insulating structure has an air slit therein. The conductive via is electrically connected to the gate stack. A portion of the CESL is exposed in the air slit.
    Type: Grant
    Filed: December 18, 2018
    Date of Patent: December 1, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Sheng Liang, Wei-Chih Kao, Hsin-Che Chiang, Kuo-Hua Pan
  • Publication number: 20200368332
    Abstract: The invention provides methods for enhancing the delivery of viral vectors to the eye of a subject by administering a proteasome inhibitor or and a viral vector ending a gene of interest to the eye.
    Type: Application
    Filed: January 31, 2020
    Publication date: November 26, 2020
    Inventors: Zhuo-Hua PAN, Shengjie CUI, Gary ABRAMS
  • Publication number: 20200353036
    Abstract: The present disclosure relates to nanoparticles and methods for polynucleotide transfection.
    Type: Application
    Filed: May 8, 2020
    Publication date: November 12, 2020
    Inventors: Samuel A. Wickline, Hua Pan, Christine Thien-Nga Pham, Huimin Yan
  • Publication number: 20200343363
    Abstract: A semiconductor structure includes a first active region over a substrate and extending along a first direction, a gate structure over the first active region and extending along a second direction substantially perpendicular to the first direction, a gate-cut feature abutting an end of the gate structure, and a channel isolation feature extending along the second direction and between the first active region and a second active region. The gate structure includes a metal electrode in direct contact with the gate-cut feature. The channel isolation feature includes a liner on sidewalls extending along the second direction and a dielectric fill layer between the sidewalls. The gate-cut feature abuts an end of the channel isolation feature and the dielectric fill layer is in direct contact with the gate-cut feature.
    Type: Application
    Filed: April 29, 2019
    Publication date: October 29, 2020
    Inventors: Ta-Chun Lin, Jhon Jhy Liaw, Kuo-Hua Pan
  • Publication number: 20200343365
    Abstract: A semiconductor structure includes a first active region over a substrate and extending along a first direction, a gate structure over the first active region and extending along a second direction substantially perpendicular to the first direction, a gate-cut feature abutting an end of the gate structure, and a channel isolation feature extending along the second direction and between the first active region and a second active region. The gate structure includes a metal electrode in direct contact with the gate-cut feature. The channel isolation feature includes a liner on sidewalls extending along the second direction and a dielectric fill layer between the sidewalls. The gate-cut feature abuts an end of the channel isolation feature and the dielectric fill layer is in direct contact with the gate-cut feature.
    Type: Application
    Filed: November 12, 2019
    Publication date: October 29, 2020
    Inventors: Ta-Chun Lin, Jhon Jhy Liaw, Kuo-Hua Pan
  • Publication number: 20200335337
    Abstract: A semiconductor device includes a gate electrode, spacers and a hard mask structure. The spacers are disposed on opposite sidewalls of the gate electrode. The hard mask structure includes a first hard mask layer and a second hard mask layer. A lower portion of the first hard mask layer is disposed between the spacers and on the gate electrode, and a top portion of the first hard mask layer is surrounded by the second hard mask layer.
    Type: Application
    Filed: June 30, 2020
    Publication date: October 22, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsin-Che Chiang, Chun-Sheng Liang, Kuo-Hua Pan