Patents by Inventor Hua Pan

Hua Pan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11133224
    Abstract: A method for forming a semiconductor structure is provided. The method for forming the semiconductor structure includes forming a first fin structure with a first composition and a second fin structure with a second composition, oxidizing the first fin structure to form a first oxide layer and oxidizing the second fin structure to form a second oxide layer, removing the second oxide layer formed on the second fin structure, oxidizing the second fin structure to form a third oxide layer over the second fin structure, and forming a first metal gate electrode layer over the first oxide layer and a second metal gate electrode layer over the third oxide layer.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: September 28, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Che Chiang, Yu-San Chien, Ta-Chun Lin, Chun-Sheng Liang, Kuo-Hua Pan
  • Publication number: 20210280711
    Abstract: An embodiment method includes forming a semiconductor liner layer on a first fin structure and on a second fin structure and forming a first capping layer on the semiconductor liner layer disposed on the first fin structure. The method further includes forming a second capping layer on the semiconductor liner layer disposed on the first fin structure, where a composition of the first capping layer is different from a composition of the second capping layer. The method additionally includes performing a thermal process on the first capping layer, the second capping layer, and the semiconductor liner layer to form a first channel region in the first fin structure and a second channel region in the second fin structure. A concentration profile of a material of the first channel region is different from a concentration profile of a material of the second channel region.
    Type: Application
    Filed: May 24, 2021
    Publication date: September 9, 2021
    Inventors: Yu-San Chien, Hsin-Che Chiang, Chun-Sheng Liang, Kuo-Hua Pan
  • Publication number: 20210272852
    Abstract: A structure includes a fin on a substrate; first and second gate stacks over the fin and including first and second gate dielectric layers and first and second gate electrodes respectively; and a dielectric gate over the fin and between the first and second gate stacks. The dielectric gate includes a dielectric material layer on a third gate dielectric layer. In a cross-sectional view cut along a direction parallel to a lengthwise direction of the fin and offset from the fin, the first gate dielectric layer forms a first U shape, the third gate dielectric layer forms a second U shape, a portion of the first gate electrode is disposed within the first U shape, a portion of the dielectric material layer is disposed within the second U shape, and a portion of an interlayer dielectric layer is disposed laterally between the first and the second U shapes.
    Type: Application
    Filed: May 3, 2021
    Publication date: September 2, 2021
    Inventors: Ta-Chun Lin, Buo-Chin Hsu, Kuo-Hua Pan, Jhon Jhy Liaw, Chih-Yung Lin
  • Patent number: 11101385
    Abstract: A method for forming a FinFET device structure is provided. The method for forming a FinFET device structure includes forming a fin structure over a substrate and forming a gate structure across the fin structure. The method for forming a FinFET device structure also includes forming a first spacer over a sidewall of the gate structure and forming a second spacer over the first spacer. The method for forming a FinFET device structure further includes etching the second spacer to form a gap and forming a mask layer over the gate structure and the first spacer after the gap is formed. In addition, the mask layer extends into the gap in such a way that the mask layer and the fin structure are separated by an air gap in the gap.
    Type: Grant
    Filed: September 19, 2018
    Date of Patent: August 24, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wen-Li Chiu, Hsin-Che Chiang, Chun-Sheng Liang, Kuo-Hua Pan
  • Patent number: 11101359
    Abstract: A method of manufacturing a device includes forming a plurality of stacks of alternating layers on a substrate, constructing a plurality of nanosheets from the plurality of stacks of alternating layers, and forming a plurality of gate dielectrics over the plurality of nanosheets, respectively. The method allows for the modulation of nanosheet width, thickness, spacing, and stack number and can be employed on single substrates. This design flexibility provides for design optimization over a wide tuning range of circuit performance and power usage.
    Type: Grant
    Filed: May 10, 2019
    Date of Patent: August 24, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shien-Yang Wu, Ta-Chun Lin, Kuo-Hua Pan
  • Patent number: 11099095
    Abstract: The present invention relates to a sensor, particularly a flexible pressure sensor and a fabrication method thereof. The invention provides a flexible pressure sensor which comprises a sensor body and electrodes. The sensor body comprises a first insulation layer of PET film, a first conductivity layer, an isolation layer, a second conductive layer and a second insulation layer of PET film from top to bottom, respectively. The electrodes are made from the first conductive layer and the second conductive layer connected with external circuit through any electrical wire. The isolation layer is a semi-conductive foamed polymer with adjustable conductivity/resistance. Both of the first insulation layer of PET film and the second insulation layer of PET film have the thickness of 4.5-120 ?m with the surface resistance value of 1013-14. In the process method of the invention, the isolation layer is a foamed polymer with adjustable conductivity.
    Type: Grant
    Filed: May 9, 2019
    Date of Patent: August 24, 2021
    Assignee: Zhejiang Ouren New Materials Co., Ltd.
    Inventors: Daji Tu, Houjun Xia, Hua Pan, Xiaoming Yang
  • Publication number: 20210225839
    Abstract: A semiconductor device includes a substrate; an I/O device over the substrate; and a core device over the substrate. The I/O device includes a first gate structure having an interfacial layer; a first high-k dielectric stack over the interfacial layer; and a conductive layer over and in physical contact with the first high-k dielectric stack. The core device includes a second gate structure having the interfacial layer; a second high-k dielectric stack over the interfacial layer; and the conductive layer over and in physical contact with the second high-k dielectric stack. The first high-k dielectric stack includes the second high-k dielectric stack and a third dielectric layer.
    Type: Application
    Filed: January 16, 2020
    Publication date: July 22, 2021
    Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw, Shien-Yang Wu
  • Publication number: 20210202497
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a first device formed over a substrate, and the first device includes a first fin structure. The semiconductor device structure also includes a second device formed over or below the first device, and the second device includes a plurality of second nanostructures stacked in a vertical direction.
    Type: Application
    Filed: April 2, 2020
    Publication date: July 1, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ta-Chun LIN, Kuo-Hua PAN
  • Publication number: 20210202713
    Abstract: A method includes forming a transistor, which includes forming a dummy gate stack over a semiconductor region, and forming an Inter-Layer Dielectric (ILD). The dummy gate stack is in the ILD, and the ILD covers a source/drain region in the semiconductor region. The method further includes removing the dummy gate stack to form a trench in the first ILD, forming a low-k gate spacer in the trench, forming a replacement gate dielectric extending into the trench, forming a metal layer to fill the trench, and performing a planarization to remove excess portions of the replacement gate dielectric and the metal layer to form a gate dielectric and a metal gate, respectively. A source region and a drain region are then formed on opposite sides of the metal gate.
    Type: Application
    Filed: February 22, 2021
    Publication date: July 1, 2021
    Inventors: Kuo-Hua Pan, Je-Wei Hsu, Hua Feng Chen, Jyun-Ming Lin, Chen-Huang Peng, Min-Yann Hsieh, Java Wu
  • Patent number: 11041004
    Abstract: The invention provides compositions and kits including at least one nucleic acid or polypeptide molecule encoding for a mutant CoChop protein. Methods of the invention include administering a composition comprising a mutant CoChop to a subject to preserve, improve, or restore phototransduction. Preferably, the compositions and methods of the invention are provided to a subject having impaired vision, thereby restoring vision to normal levels.
    Type: Grant
    Filed: August 29, 2017
    Date of Patent: June 22, 2021
    Assignee: Wayne State University
    Inventor: Zhuo-Hua Pan
  • Patent number: 11038059
    Abstract: A semiconductor device and method of forming the same are disclosed. The semiconductor device includes a fin structure, a gate electrode, a source-drain region, a plug and a hard mask structure. The gate electrode crosses over the fin structure. The source-drain region in the fin structure is aside the gate electrode. The plug is disposed over and electrically connected to the gate electrode. The hard mask structure surrounds the plug and is disposed over the gate electrode, wherein the hard mask structure includes a first hard mask layer and a second hard mask layer, the second hard mask layer covers a sidewall and a top surface of the first hard mask layer, and a material of the first hard mask layer is different from a material of the second hard mask layer.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: June 15, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Sheng Liang, Kuo-Hua Pan, Hsin-Che Chiang, Ming-Heng Tsai
  • Patent number: 11037831
    Abstract: A semiconductor structure includes a fin active region extruded from a semiconductor substrate; and a gate stack disposed on the fin active region. The gate stack includes a gate dielectric layer and a gate electrode disposed on the gate dielectric layer. The gate dielectric layer includes a first dielectric material. The semiconductor structure further includes a dielectric gate of a second dielectric material disposed on the fin active region. The gate dielectric layer extends from a sidewall of the gate electrode to a sidewall of the dielectric gate. The second dielectric material is different from the first dielectric material in composition.
    Type: Grant
    Filed: January 8, 2020
    Date of Patent: June 15, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ta-Chun Lin, Buo-Chin Hsu, Kuo-Hua Pan, Jhon Jhy Liaw, Chih-Yung Lin
  • Patent number: 11014195
    Abstract: Provided is a steel welding component having a steel welding blank with an aluminum or aluminum alloy coating. The welding blank is composed of a steel substrate and coatings comprising an intermetallic compound alloy layer contacting the substrate, and a metal alloy layer on the intermetallic compound alloy layer. On at least one of the coating surfaces of the welding blank, the coating within an area to be welded has been totally removed, and an end face of the coating on the side of the coating within the area to be welded removed has an angle of ? being 0-80° with a plane vertical to a surface of the substrate which is parallel to the welding seam. Also provided are welding methods for the steel welding component. The steel welding blank provided ensures the tensile strength, elongation, and corrosion resistance of a hot-stamped welded joint.
    Type: Grant
    Filed: October 17, 2017
    Date of Patent: May 25, 2021
    Assignee: Baoshan Iron & Steel Co., Ltd.
    Inventors: Hua Pan, Yongchao Su, Ming Lei, Lei Shi, Haomin Jiang
  • Patent number: 11018257
    Abstract: An embodiment method includes forming a semiconductor liner layer on a first fin structure and on a second fin structure and forming a first capping layer on the semiconductor liner layer disposed on the first fin structure. The method further includes forming a second capping layer on the semiconductor liner layer disposed on the first fin structure, where a composition of the first capping layer is different from a composition of the second capping layer. The method additionally includes performing a thermal process on the first capping layer, the second capping layer, and the semiconductor liner layer to form a first channel region in the first fin structure and a second channel region in the second fin structure. A concentration profile of a material of the first channel region is different from a concentration profile of a material of the second channel region.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: May 25, 2021
    Inventors: Yu-San Chien, Hsin-Che Chiang, Chun-Sheng Liang, Kuo-Hua Pan
  • Publication number: 20210143277
    Abstract: A method comprises forming a source/drain region on a substrate; forming a dielectric layer over the source/drain region; forming a contact hole in the dielectric layer; forming a contact hole liner in the contact hole; removing a first portion of the contact hole liner to expose a sidewall of the contact hole; etching the exposed sidewall of the contact hole to laterally expand the contact hole; and forming a contact plug in the laterally expanded contact hole.
    Type: Application
    Filed: December 17, 2020
    Publication date: May 13, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wen-Che TSAI, Min-Yann HSIEH, Hua-Feng CHEN, Kuo-Hua PAN
  • Patent number: 10998237
    Abstract: A semiconductor structure includes a fin active region extruded from a semiconductor substrate; and a gate stack disposed on the fin active region. The gate stack includes a gate dielectric layer and a gate electrode disposed on the gate dielectric layer. The gate dielectric layer includes a first dielectric material. The semiconductor structure further includes a dielectric gate of a second dielectric material disposed on the fin active region. The gate dielectric layer extends from a sidewall of the gate electrode to a sidewall of the dielectric gate. The second dielectric material is different from the first dielectric material in composition.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: May 4, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ta-Chun Lin, Buo-Chin Hsu, Kuo-Hua Pan, Jhon Jhy Liaw, Chih-Yung Lin
  • Patent number: 10987315
    Abstract: The present disclosure is directed to antithrombotic nanoparticles and methods of treating necrotizing enterocolitis.
    Type: Grant
    Filed: October 4, 2019
    Date of Patent: April 27, 2021
    Assignee: University of South Florida
    Inventors: Akhil Maheshwari, Samuel Wickline, Kopperuncholan Namachivayam, Hua Pan
  • Publication number: 20210119033
    Abstract: An embodiment method includes forming a semiconductor liner layer on a first fin structure and on a second fin structure and forming a first capping layer on the semiconductor liner layer disposed on the first fin structure. The method further includes forming a second capping layer on the semiconductor liner layer disposed on the first fin structure, where a composition of the first capping layer is different from a composition of the second capping layer. The method additionally includes performing a thermal process on the first capping layer, the second capping layer, and the semiconductor liner layer to form a first channel region in the first fin structure and a second channel region in the second fin structure. A concentration profile of a material of the first channel region is different from a concentration profile of a material of the second channel region.
    Type: Application
    Filed: October 18, 2019
    Publication date: April 22, 2021
    Inventors: Yu-San Chien, Hsin-Che Chiang, Chun-Sheng Liang, Kuo-Hua Pan
  • Publication number: 20210118723
    Abstract: The present disclosure provides an integrated circuit (IC) structure. The IC structure includes first and second fins formed on a semiconductor substrate and laterally separated from each other by an isolation feature, the isolation feature formed of a dielectric material that physically contacts the semiconductor substrate; and a contact feature between the first and second fins and extending into the isolation feature thereby defining an air gap vertically between the isolation feature and the contact feature, the dielectric material of the isolation feature extending from the semiconductor substrate to the contact feature.
    Type: Application
    Filed: December 29, 2020
    Publication date: April 22, 2021
    Inventors: Wen-Che Tsai, Min-Yann Hsieh, Hua Feng Chen, Kuo-Hua Pan
  • Publication number: 20210100875
    Abstract: Nucleic acid vectors encoding light-gated cation-selective membrane channels, in particular channelrhodopsin-2 (Chop2), converted inner retinal neurons to photosensitive cells in photoreceptor-degenerated retina in an animal model. Such treatment restored visual perception and various aspects of vision. A method of restoring light sensitivity to a retina of a subject suffering from vision loss due to photoreceptor degeneration, as in retinitis pigmentosa or macular degeneration, is provided. The method comprises delivering to the subject by intravitreal or subretinal injection, the above nucleic acid vector which comprises an open reading frame encoding a rhodopsin, to which is operatively linked a promoter and transcriptional regulatory sequences, so that the nucleic acid is expressed in inner retinal neurons.
    Type: Application
    Filed: December 2, 2019
    Publication date: April 8, 2021
    Inventors: Zhuo-Hua PAN, Alexander M. Dizhoor